DK0455574T3 - Ætseopløsning med næsten neutral pH-værdi til molybden eller wolfram samt fremgangsmåde til dens anvendelse - Google Patents

Ætseopløsning med næsten neutral pH-værdi til molybden eller wolfram samt fremgangsmåde til dens anvendelse

Info

Publication number
DK0455574T3
DK0455574T3 DK91480057.8T DK91480057T DK0455574T3 DK 0455574 T3 DK0455574 T3 DK 0455574T3 DK 91480057 T DK91480057 T DK 91480057T DK 0455574 T3 DK0455574 T3 DK 0455574T3
Authority
DK
Denmark
Prior art keywords
molybdenum
tungsten
value
etching solution
near neutral
Prior art date
Application number
DK91480057.8T
Other languages
English (en)
Inventor
Lawrence Daniel David
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of DK0455574T3 publication Critical patent/DK0455574T3/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
  • Preventing Corrosion Or Incrustation Of Metals (AREA)
DK91480057.8T 1990-04-30 1991-03-29 Ætseopløsning med næsten neutral pH-værdi til molybden eller wolfram samt fremgangsmåde til dens anvendelse DK0455574T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/516,845 US4995942A (en) 1990-04-30 1990-04-30 Effective near neutral pH etching solution for molybdenum or tungsten

Publications (1)

Publication Number Publication Date
DK0455574T3 true DK0455574T3 (da) 1995-10-16

Family

ID=24057324

Family Applications (1)

Application Number Title Priority Date Filing Date
DK91480057.8T DK0455574T3 (da) 1990-04-30 1991-03-29 Ætseopløsning med næsten neutral pH-værdi til molybden eller wolfram samt fremgangsmåde til dens anvendelse

Country Status (8)

Country Link
US (1) US4995942A (da)
EP (1) EP0455574B1 (da)
JP (1) JP2628940B2 (da)
BR (1) BR9101651A (da)
CA (1) CA2039029C (da)
DE (1) DE69110348T2 (da)
DK (1) DK0455574T3 (da)
ES (1) ES2073717T3 (da)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02228629A (ja) * 1989-02-28 1990-09-11 Sharp Corp 液晶表示装置
US5463679A (en) * 1993-04-27 1995-10-31 Tamura Electrics Works, Ltd. Public telephone system
US5518131A (en) * 1994-07-07 1996-05-21 International Business Machines Corporation Etching molydbenum with ferric sulfate and ferric ammonium sulfate
DE19535307C2 (de) * 1995-09-22 1997-10-23 Siemens Ag Ätzlösung zur Erzeugung sehr feiner Strukturen in Molybdän-Oberflächen und Verfahren unter deren Einsatz
FR2795745B1 (fr) * 1999-06-30 2001-08-03 Saint Gobain Vitrage Procede de depot d'une couche a base de tungstene et/ou de molybdene sur un substrat verrier, ceramique ou vitroceramique, et substrat ainsi revetu
KR100364831B1 (ko) * 2000-03-20 2002-12-16 엘지.필립스 엘시디 주식회사 몰리브덴 금속막용 에칭 용액
US7158348B2 (en) * 2002-05-01 2007-01-02 Hitachi Global Storage Technologies Netherlands B.V. Integrated lead suspension for use in a disk drive using a tri-metal laminate and method for fabrication
WO2006061741A2 (en) 2004-12-06 2006-06-15 Koninklijke Philips Electronics N.V. Etchant solutions and additives therefor
US7837929B2 (en) * 2005-10-20 2010-11-23 H.C. Starck Inc. Methods of making molybdenum titanium sputtering plates and targets
US8449818B2 (en) * 2010-06-30 2013-05-28 H. C. Starck, Inc. Molybdenum containing targets
US8449817B2 (en) 2010-06-30 2013-05-28 H.C. Stark, Inc. Molybdenum-containing targets comprising three metal elements
KR20160021299A (ko) 2011-05-10 2016-02-24 에이치. 씨. 스타아크 아이앤씨 멀티-블록 스퍼터링 타겟 및 이에 관한 제조방법 및 물품
US9334565B2 (en) 2012-05-09 2016-05-10 H.C. Starck Inc. Multi-block sputtering target with interface portions and associated methods and articles
US11035044B2 (en) 2017-01-23 2021-06-15 Versum Materials Us, Llc Etching solution for tungsten and GST films
CN111346490B (zh) * 2020-03-18 2022-02-08 山东大学深圳研究院 基于多酸的绿色脱硫体系及脱硫-电化学再生协同的循环脱硫副产氢气方法、系统及应用
CN112284866A (zh) * 2020-10-20 2021-01-29 中国兵器工业第五二研究所烟台分所有限责任公司 一种钼粉烧结材料晶粒度的腐蚀检测方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3098043A (en) * 1961-08-17 1963-07-16 Burroughs Corp Etchant for molybdenum
US3772104A (en) * 1972-03-30 1973-11-13 Bell Telephone Labor Inc Fabrication of thin film devices
JPS5180631A (ja) * 1975-01-10 1976-07-14 Tokyo Shibaura Electric Co Etsuchinguzai
JPS5415176A (en) * 1977-07-06 1979-02-03 Fujitsu Ltd Method of etching tungsten thin film layer
JPS5450441A (en) * 1977-09-30 1979-04-20 Fujitsu Ltd Etching method for molybdenum thin film
US4747907A (en) * 1986-10-29 1988-05-31 International Business Machines Corporation Metal etching process with etch rate enhancement

Also Published As

Publication number Publication date
US4995942A (en) 1991-02-26
DE69110348D1 (de) 1995-07-20
BR9101651A (pt) 1991-12-10
DE69110348T2 (de) 1996-01-25
EP0455574B1 (en) 1995-06-14
JP2628940B2 (ja) 1997-07-09
CA2039029A1 (en) 1991-10-31
JPH05311469A (ja) 1993-11-22
EP0455574A1 (en) 1991-11-06
ES2073717T3 (es) 1995-08-16
CA2039029C (en) 1994-07-19

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