DK0596535T3 - Method of measuring in high-resolution manner positions along linear and curved paths - Google Patents

Method of measuring in high-resolution manner positions along linear and curved paths

Info

Publication number
DK0596535T3
DK0596535T3 DK93118089.7T DK93118089T DK0596535T3 DK 0596535 T3 DK0596535 T3 DK 0596535T3 DK 93118089 T DK93118089 T DK 93118089T DK 0596535 T3 DK0596535 T3 DK 0596535T3
Authority
DK
Denmark
Prior art keywords
measuring
positions along
along linear
curved paths
resolution manner
Prior art date
Application number
DK93118089.7T
Other languages
Danish (da)
Inventor
Fritz Dettmann
Uwe Loreit
Original Assignee
Hund Helmut Gmbh
Lust Antriebstechnik Gmbh
Maerzhaeuser Wtzlar Gmbh
Leica Mikroskopie & Syst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hund Helmut Gmbh, Lust Antriebstechnik Gmbh, Maerzhaeuser Wtzlar Gmbh, Leica Mikroskopie & Syst filed Critical Hund Helmut Gmbh
Application granted granted Critical
Publication of DK0596535T3 publication Critical patent/DK0596535T3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24476—Signal processing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

The invention relates to a method for position measurement with a periodic scale and a sensor which can be moved in the longitudinal direction opposite thereto. The method serves to precisely determine distances and positions in a straight line or on bent, for example circular, lines. Such measurements are increasingly required in the machine-building industry, in precision engineering or in semiconductor component technology. <IMAGE>
DK93118089.7T 1992-11-06 1993-11-08 Method of measuring in high-resolution manner positions along linear and curved paths DK0596535T3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4237540A DE4237540C2 (en) 1992-11-06 1992-11-06 Process for high-resolution measurement of linear and rotary positions

Publications (1)

Publication Number Publication Date
DK0596535T3 true DK0596535T3 (en) 1997-05-12

Family

ID=6472294

Family Applications (1)

Application Number Title Priority Date Filing Date
DK93118089.7T DK0596535T3 (en) 1992-11-06 1993-11-08 Method of measuring in high-resolution manner positions along linear and curved paths

Country Status (5)

Country Link
EP (1) EP0596535B1 (en)
AT (1) ATE151867T1 (en)
DE (2) DE4237540C2 (en)
DK (1) DK0596535T3 (en)
ES (1) ES2099883T3 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19648335C2 (en) * 1996-11-22 2000-05-25 Daimler Chrysler Ag Arrangement for position measurement
DE10011289A1 (en) * 2000-03-08 2001-09-20 Sven Harzbecker Intensive cleaning tool for removal of dirt from pores, is moved across skin, and has openings alternately dispensing cleaning agent and air then extracting it from pores together with dirt
EP1164358B1 (en) 2000-06-16 2005-08-24 AMO Automatisierung Messtechnik Optik GmbH Inductive length measuring system
DE10041089A1 (en) * 2000-08-22 2002-03-07 Bosch Gmbh Robert Procedure for correcting an angle measurement
DE10158942B4 (en) * 2000-12-08 2006-05-04 Micro-Epsilon Messtechnik Gmbh & Co Kg Device and method for detecting the position of a measuring object
EP1366849B1 (en) 2002-05-27 2005-07-27 Schneeberger Holding AG Linear motion guide
CN101192412B (en) * 2006-12-01 2010-10-13 上海平信机电制造有限公司 Coarse-pitch laser spliced magnetic recording carrier and its magnetic recording method
JP6072234B2 (en) 2013-04-23 2017-02-01 三菱電機株式会社 Magnetic position detecting device and magnetic position detecting method
DE102017121524B4 (en) * 2017-09-15 2019-12-24 Bogen Electronic Gmbh measuring arrangement

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT339062B (en) * 1975-11-11 1977-09-26 Rieder Heinz METHOD OF LENGTH MEASUREMENT
DE3325353A1 (en) 1983-07-14 1985-01-24 Honeywell Gmbh POSITION SENSOR
EP0151002B1 (en) * 1984-01-25 1991-08-28 Matsushita Electric Industrial Co., Ltd. Magnetic detector
DE3611469A1 (en) * 1986-04-05 1987-10-08 Bosch Gmbh Robert DEVICE AND METHOD FOR CONTACTLESS POSITION MEASUREMENT
DE3612145A1 (en) * 1986-04-10 1987-10-15 Ralf Hinkel Method for edge detection
DD250369A1 (en) * 1986-06-27 1987-10-08 Werkzeugmasch Forschzent DEVICE FOR POSITION MEASUREMENT
JPH02264818A (en) * 1989-04-05 1990-10-29 Seiko Epson Corp magnetic encoder
DE4017954C1 (en) * 1990-06-05 1991-08-29 Pav Praezisions-Apparatebau Ag, Vaduz, Li
DE4017898A1 (en) * 1990-06-02 1991-12-05 Hengstler Gmbh Optical scanner for rotary or linear pulse generator - has shutter mask with separate channels with mutual phase shift
DE4203073C2 (en) * 1992-02-04 1994-12-15 Heidenhain Gmbh Dr Johannes Position measuring device

Also Published As

Publication number Publication date
ES2099883T3 (en) 1997-06-01
ATE151867T1 (en) 1997-05-15
DE4237540A1 (en) 1994-05-11
EP0596535A2 (en) 1994-05-11
EP0596535A3 (en) 1994-09-07
DE59306176D1 (en) 1997-05-22
DE4237540C2 (en) 1996-02-29
EP0596535B1 (en) 1997-04-16

Similar Documents

Publication Publication Date Title
ATE192845T1 (en) SYSTEM FOR MEASURING THE ABSOLUTE POSITION OF THE MOVABLE, CYCLIC DIVISION MARK CARRIER OF AN INCREMENTAL POSITIONER
ATE128544T1 (en) POSITION ENCODER FOR LINEAR OR ANGLE MEASURING APPARATUS.
JPS5813843B2 (en) Protective cover measuring device
DK0596535T3 (en) Method of measuring in high-resolution manner positions along linear and curved paths
DK0592345T3 (en) Machine for cutting / separating flat items of ceramics and the like
ATE440266T1 (en) POSITION MEASURING DEVICE
US5616917A (en) Device for measuring an angle between pivotally-connected members
US3345747A (en) Mechanical coordinating device
ATE448466T1 (en) DEVICE FOR DETERMINING POSITION AND DETERMINING GUIDANCE ERRORS
EP0155348A3 (en) Method for signal transmission and device for carrying out the method, in particular in a length or angle measurement device
Richter Laser Scan Devices for industrial application.
ATE137011T1 (en) LINKING RULE
ATE158075T1 (en) METHOD AND APPARATUS, INCLUDING TWO MAGNETIC SENSORS AND A LASER MEASURING DEVICE, FOR MEASURING THE THICKNESS OF A FILM
ATE369993T1 (en) RECORDING DEVICE
ATE119277T1 (en) METHOD FOR MEASURING LENGTH.
JPH04502968A (en) Devices that measure movement and position
DE59102437D1 (en) METHOD OF MEASURING LENGTH.
DE59102188D1 (en) METHOD OF MEASURING LENGTH.
EP0309094A1 (en) Precision slides and position encoders therefor
KR930006058Y1 (en) Chamfer measuring device
SU1320056A1 (en) Arrangement for marking allowance on the part to be joined
JP4822832B2 (en) Measuring apparatus and measuring method
JPH02291911A (en) Position measuring apparatus for vehicle body
JPH0727546A (en) Straightness measuring device
FI60612B (en) APPARATUS FOER UTTAGNING AV KURSER I SJOEKORT E D