DK0973012T3 - Transducer - Google Patents

Transducer

Info

Publication number
DK0973012T3
DK0973012T3 DK99305319T DK99305319T DK0973012T3 DK 0973012 T3 DK0973012 T3 DK 0973012T3 DK 99305319 T DK99305319 T DK 99305319T DK 99305319 T DK99305319 T DK 99305319T DK 0973012 T3 DK0973012 T3 DK 0973012T3
Authority
DK
Denmark
Prior art keywords
transducer
Prior art date
Application number
DK99305319T
Other languages
English (en)
Inventor
Masaharu Ikeda
Masayoshi Esashi
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DK0973012T3 publication Critical patent/DK0973012T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Surgical Instruments (AREA)
DK99305319T 1998-07-14 1999-07-05 Transducer DK0973012T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21343298A JP4124867B2 (ja) 1998-07-14 1998-07-14 変換装置

Publications (1)

Publication Number Publication Date
DK0973012T3 true DK0973012T3 (da) 2004-03-15

Family

ID=16639140

Family Applications (1)

Application Number Title Priority Date Filing Date
DK99305319T DK0973012T3 (da) 1998-07-14 1999-07-05 Transducer

Country Status (7)

Country Link
US (1) US6145384A (da)
EP (1) EP0973012B1 (da)
JP (1) JP4124867B2 (da)
CN (1) CN1141564C (da)
DE (1) DE69912887T2 (da)
DK (1) DK0973012T3 (da)
NO (1) NO320487B1 (da)

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TWI221196B (en) * 2001-09-06 2004-09-21 Tokyo Electron Ltd Impedance measuring circuit, its method, and electrostatic capacitance measuring circuit
DE60227266D1 (de) * 2001-09-06 2008-08-07 Tokyo Electron Ltd Vorrichtung und verfahren zur messung der sensorkapazität
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US8581610B2 (en) * 2004-04-21 2013-11-12 Charles A Miller Method of designing an application specific probe card test system
CN101592499B (zh) * 2004-05-10 2011-11-09 株式会社藤仓 静电电容传感器
JP4463653B2 (ja) * 2004-05-10 2010-05-19 株式会社フジクラ ハイブリッドセンサ
US7489141B1 (en) 2004-08-18 2009-02-10 Environmental Metrology Corporation Surface micro sensor and method
US7560788B2 (en) * 2004-09-20 2009-07-14 General Electric Company Microelectromechanical system pressure sensor and method for making and using
US7332902B1 (en) * 2004-11-02 2008-02-19 Environmental Metrology Corporation Micro sensor for electrochemically monitoring residue in micro channels
US7317317B1 (en) * 2004-11-02 2008-01-08 Environmental Metrology Corporation Shielded micro sensor and method for electrochemically monitoring residue in micro features
US7932726B1 (en) 2005-08-16 2011-04-26 Environmental Metrology Corporation Method of design optimization and monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS)
US7448277B2 (en) * 2006-08-31 2008-11-11 Evigia Systems, Inc. Capacitive pressure sensor and method therefor
JP4646340B2 (ja) * 2008-09-03 2011-03-09 昌徳 水島 入力装置
US8072056B2 (en) 2009-06-10 2011-12-06 Medtronic, Inc. Apparatus for restricting moisture ingress
US8172760B2 (en) 2009-06-18 2012-05-08 Medtronic, Inc. Medical device encapsulated within bonded dies
JP4585615B1 (ja) * 2010-02-03 2010-11-24 株式会社オーギャ 入力装置
US8666505B2 (en) 2010-10-26 2014-03-04 Medtronic, Inc. Wafer-scale package including power source
US8424388B2 (en) 2011-01-28 2013-04-23 Medtronic, Inc. Implantable capacitive pressure sensor apparatus and methods regarding same
GB2491111B (en) * 2011-05-19 2015-08-19 Oxford Instr Nanotechnology Tools Ltd Charge-sensitive amplifier
US20120308066A1 (en) * 2011-06-03 2012-12-06 Hung-Jen Chen Combined micro-electro-mechanical systems microphone and method for manufacturing the same
JP6111434B2 (ja) * 2012-03-09 2017-04-12 パナソニックＩｐマネジメント株式会社 慣性力センサ
CN104748769B (zh) * 2013-12-25 2017-08-04 北京纳米能源与系统研究所 一种基于静电感应的传感器以及传感方法
JP6452140B2 (ja) * 2014-02-19 2019-01-16 本田技研工業株式会社 距離センサ及び計測方法
JP6555869B2 (ja) * 2014-10-17 2019-08-07 キヤノン株式会社 静電容量型トランスデューサ
US9826308B2 (en) 2015-02-12 2017-11-21 Apple Inc. Capacitive displacement sensing circuit with a guard voltage source
KR101739791B1 (ko) * 2015-05-11 2017-05-26 주식회사 하이딥 압력 센싱 장치, 압력 검출기 및 이들을 포함하는 장치
CN105547553B (zh) * 2015-12-15 2018-06-05 北京理工大学 基于压电驻极体的无源高灵敏冲击力传感器及其测试方法
US9933867B2 (en) 2015-12-30 2018-04-03 Synaptics Incorporated Active pen capacitive displacement gauge
TWI677669B (zh) * 2016-09-20 2019-11-21 友達光電股份有限公司 壓力感測陣列與壓力感測方法
JP6527193B2 (ja) * 2017-04-07 2019-06-05 株式会社鷺宮製作所 圧力センサ
KR102711562B1 (ko) * 2019-11-07 2024-09-27 알프스 알파인 가부시키가이샤 정전 용량 검출 장치 및 정전 용량 검출 방법
CN110794273A (zh) * 2019-11-19 2020-02-14 哈尔滨理工大学 含有高压驱动保护电极的电位时域谱测试系统
EP4009006B1 (en) * 2020-12-01 2024-09-04 NXP USA, Inc. Sensor package with interference reduction and method of operation
US11540048B2 (en) * 2021-04-16 2022-12-27 Knowles Electronics, Llc Reduced noise MEMS device with force feedback
CN118056117A (zh) * 2021-10-05 2024-05-17 株式会社村田制作所 压力传感器构造和压力传感器装置

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Also Published As

Publication number Publication date
NO993448L (no) 2000-01-17
NO320487B1 (no) 2005-12-12
CN1243244A (zh) 2000-02-02
DE69912887T2 (de) 2004-11-04
NO993448D0 (no) 1999-07-13
DE69912887D1 (de) 2003-12-24
US6145384A (en) 2000-11-14
JP2000028462A (ja) 2000-01-28
CN1141564C (zh) 2004-03-10
JP4124867B2 (ja) 2008-07-23
EP0973012B1 (en) 2003-11-19
EP0973012A1 (en) 2000-01-19

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