DK2092296T3 - Målehoved og fremgangsmåde til optiske spektroskopiske målinger - Google Patents

Målehoved og fremgangsmåde til optiske spektroskopiske målinger Download PDF

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Publication number
DK2092296T3
DK2092296T3 DK07869277.9T DK07869277T DK2092296T3 DK 2092296 T3 DK2092296 T3 DK 2092296T3 DK 07869277 T DK07869277 T DK 07869277T DK 2092296 T3 DK2092296 T3 DK 2092296T3
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DK
Denmark
Prior art keywords
sample
illumination
illumination source
optic
internal reference
Prior art date
Application number
DK07869277.9T
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English (en)
Inventor
Brian Curtiss
Alexander F H Goetz
Leonid G Feldman
Thomas Ciupak
Robert J Faus
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Asd Inc
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Publication of DK2092296T3 publication Critical patent/DK2092296T3/da

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G01N21/278—Constitution of standards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0232—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/08—Beam switching arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/8411—Application to online plant, process monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0636—Reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/064—Stray light conditioning

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)

Claims (11)

1. Målehoved (100) til optiske spektroskopiske målinger, hvilket målehoved omfatter: en belysningskilde (310), der er konfigureret til at belyse en prøve; en samleoptik (220), der er konfigureret til at betragte prøven; en intern reference (120), hvor den interne reference er placeret mellem belysningskilden og prøven, tættere på belysningskilden end samleoptikken; og et bevægeligt kalibreringsspejl (240), der afhængigt af dets position definerer en måleposition eller en kalibreringsposition for målehovedet; hvorved, i målepositionen, kalibreringsspejlet placeres, således at samleoptikken betragter prøven, der er belyst af belysningskilden, og, i kalibreringspositionen, kalibreringsspejlet er placeret, således at samleoptikken betragter, via kalibreringsspejlet, den interne reference, der er belyst af belysningskilden, og kalibreringsspejlet blokerer samleoptikken mod betragtning af prøven, der er belyst af belysningskilden.
2. Målehoved (100) ifølge krav 1, hvor kalibreringsspejlet (240) er konfigureret, således at kalibreringsspejlet kan bevæges til en position, der vil gøre det muligt for den interne reference (120) at blive betragtet af samleoptikken (220).
3. Målehoved (100) ifølge krav 1, hvor samleoptikken er placeret mellem belysningskilden og prøven og endvidere omfatter: en reflekterende belysningsanordning (110), der delvist omgiver belysningskilden (310), hvor den reflekterende belysningsanordning er konfigureret til at reflektere lys (320) mod prøven.
4. Målehoved (100) ifølge krav 1, hvor samleoptikken (220) er konfigureret til at betragte prøven koaksialt med belysningskilden (310).
5. Målehoved (100) ifølge krav 1, hvor den interne reference (120) er konfigureret således, at en belysningsintensitet på den interne reference er tæt på en belysningsintensitet på prøven.
6. Målehoved (100) ifølge krav 1, hvilket målehoved endvidere omfatter: en diffuserstrålingsskærm (230), der er konfigureret til at reducere spildlys opfattet af samleoptikken (220).
7. Målehoved (100) ifølge krav 1, hvilket målehoved endvidere omfatter: en UV-beskyttelsesskærm, der kan placeres over den interne reference (120) for således at reducere UV-strålingen på den interne reference.
8. Fremgangsmåde til optiske spektroskopiske målinger ved anvendelse af et målehoved, hvilken fremgangsmåde omfatter: belysning af en prøve ved anvendelse af en belysningskilde (310), hvor belysningskilden er placeret inde i målehovedet (100); betragtning af prøven ved anvendelse af en samleoptik (220), hvor samleoptikken er placeret inde i målehovedet; bevægelse af et bevægeligt kalibreringsspejl (240), der er placeret i målehovedet, fra en måleposition til en kalibreringsposition, hvori, via kalibreringsspejlet, samleoptikken (22) betragter en intern reference (120), der er belyst af belysningskilden, og kalibreringsspejlet blokerer samleoptikken mod betragtning af prøven, der er belyst af belysningskilden (310), hvor den interne reference er placeret inde i målehovedet og er placeret mellem belysningskilden og prøven, tættere på belysningskilden end samleoptikken; og betragtning af den interne reference ved anvendelse af samleoptikken.
9. Fremgangsmåde ifølge krav 8, hvilken fremgangsmåde endvidere omfatter: generering aflys ved anvendelse af belysningskilden (310) og reflektering af mindst en del af det genererede lys ved anvendelse af en reflekterende belysningsanordning (110), der er konfigureret til at reflektere lys mod prøven.
10. Fremgangsmåde ifølge krav 8, hvor betragtning af prøven ved anvendelse af en samleoptik (220) omfatter betragtning af prøven ved anvendelse af samleoptikken, hvor samleoptikkens betragtning er koaksialt justeret efter belysningskilden (310).
11. Målehoved (100) ifølge krav 1, hvilket målehoved endvidere omfatter: en reflekterende belysningsanordning (110), der delvist omgiver belysningskilden (310), hvor den reflekterende belysningsanordning er konfigureret til at reflektere lys mod prøven.
DK07869277.9T 2006-12-14 2007-12-14 Målehoved og fremgangsmåde til optiske spektroskopiske målinger DK2092296T3 (da)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US87005306P 2006-12-14 2006-12-14
US11/956,245 US8164747B2 (en) 2006-12-14 2007-12-13 Apparatus, system and method for optical spectroscopic measurements
PCT/US2007/087570 WO2008076878A2 (en) 2006-12-14 2007-12-14 Apparatus, system and method for optical spectroscopic measurements

Publications (1)

Publication Number Publication Date
DK2092296T3 true DK2092296T3 (da) 2016-04-18

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US (1) US8164747B2 (da)
EP (1) EP2092296B1 (da)
AU (1) AU2007333920A1 (da)
CA (1) CA2667650C (da)
DK (1) DK2092296T3 (da)
WO (1) WO2008076878A2 (da)

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Publication number Priority date Publication date Assignee Title
US8164747B2 (en) 2006-12-14 2012-04-24 ASD, Inc Apparatus, system and method for optical spectroscopic measurements
US8306780B2 (en) * 2009-01-26 2012-11-06 Exelis Inc. Data quality and ancillary data checking for Raman sensor
DE102018103509B3 (de) 2017-10-11 2018-12-13 Carl Zeiss Spectroscopy Gmbh Mobiles Inhaltsstoffanalysesystem sowie Verfahren zur probenrichtigen Messung und Nutzerführung mit diesem
DE102019104066A1 (de) * 2019-02-19 2020-08-20 Carl Zeiss Spectroscopy Gmbh Spektrometersystem und Verfahren zu dessen Prüfung

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US5842995A (en) * 1996-06-28 1998-12-01 Board Of Regents, The Univerisity Of Texas System Spectroscopic probe for in vivo measurement of raman signals
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DE102004048102A1 (de) * 2004-04-30 2006-04-20 Carl Zeiss Jena Gmbh Spektrometrischer Messkopf und Verfahren zu dessen Rekalibrierung
US7349079B2 (en) * 2004-05-14 2008-03-25 Kla-Tencor Technologies Corp. Methods for measurement or analysis of a nitrogen concentration of a specimen
DE102004048103B4 (de) * 2004-09-30 2017-01-12 Carl Zeiss Spectroscopy Gmbh Spektrometrischer Messkopf für Erntemaschinen und andere landwirtschaftlich genutzte Maschinen
EP1694049B1 (de) * 2005-02-16 2009-07-01 X-Rite Europe GmbH Farbmessgerät und zugehöriger Messkopf
JP4908838B2 (ja) * 2005-12-13 2012-04-04 富士通株式会社 多波長分光装置
US8164747B2 (en) 2006-12-14 2012-04-24 ASD, Inc Apparatus, system and method for optical spectroscopic measurements

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Publication number Publication date
US8164747B2 (en) 2012-04-24
CA2667650C (en) 2016-06-21
WO2008076878A2 (en) 2008-06-26
CA2667650A1 (en) 2008-06-26
EP2092296A2 (en) 2009-08-26
EP2092296A4 (en) 2011-08-24
AU2007333920A1 (en) 2008-06-26
US20080144012A1 (en) 2008-06-19
EP2092296B1 (en) 2016-03-30
WO2008076878A3 (en) 2008-08-21

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