DK2800960T3 - Ioniseringsmåler til højtryksdrift - Google Patents

Ioniseringsmåler til højtryksdrift Download PDF

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Publication number
DK2800960T3
DK2800960T3 DK13746239.6T DK13746239T DK2800960T3 DK 2800960 T3 DK2800960 T3 DK 2800960T3 DK 13746239 T DK13746239 T DK 13746239T DK 2800960 T3 DK2800960 T3 DK 2800960T3
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DK
Denmark
Prior art keywords
electron source
ionization
collector electrode
collector
electrons
Prior art date
Application number
DK13746239.6T
Other languages
English (en)
Inventor
Gerardo A Brucker
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Application granted granted Critical
Publication of DK2800960T3 publication Critical patent/DK2800960T3/da

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/52—Screens for shielding; Guides for influencing the discharge; Masks interposed in the electron stream
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Claims (14)

1. loniseringsmåler til måling aftryk omfattende: en anodestruktur omfattende et gitter (111, 120), der definerer et ioniseringsvolumen, i hvilket elektroner påvirker gasmolekyler og atomer; en varm katodeelektronkilde (105), som udsender elektroner; og en kollektorelektrode (110) til at samle ioner, der er dannet ved kollisioner mellem elektronerne og gasmolekylerne og atomerne, for at tilvejebringe en gastrykudgang, hvor kollektorelektroden strækker sig langs med en kollektorakse gennem ioniseringsvoluminet; kendetegnet ved, at elektronkilden er placeret ved en ende af ioniseringsvoluminet, gennem hvilket kollektoraksen strækker sig.
2. loniseringsmåler ifølge krav 1, hvor gitteret er et cylindrisk gitter.
3. loniseringsmåler ifølge krav 1 eller 2, indrettet til at arbejde inden for et trykområde på mellem ca. 10’1 Torr og 10-4 Torr.
4. loniseringsmåler ifølge krav 1,2 eller 3, hvor den varme katodeelektronkilde er et opvarmet katodefilament.
5. loniseringsmåler ifølge krav 4, hvor det opvarmede katodefilament er dannet i en løkke.
6. loniseringsmåler ifølge krav 1,2 eller 3, hvor den varme katodeelektronkilde er en termionisk pladekatodeemitter.
7. loniseringsmåler ifølge et af de foregående krav, yderligere omfattende en kappe (117), der omgiver anodestrukturen, elektronkilden og kollektorelektroden.
8. Fremgangsmåde til måling aftryk med en ioniseringsmåler omfattende: at udsende elektroner fra en varm katodeelektronkilde (105), hvor elektronerne kolliderer med gasmolekyler og atomer inden i en anodestruktur omfattende et gitter (111, 120), som definerer et ioniseringsvolumen; og at samle ioner, der er dannet ved kollisioner mellem elektronerne og gasmolekylerne og atomerne, på en kollektorelektrode (110) for at tilvejebringe en gastrykudgang, hvor kollektorelektroden strækker sig langs med en kollektor-akse gennem ioniseringsvoluminet; kendetegnet ved at placere elektronkilden ved en ende af ioniseringsvoluminet, gennem hvilket kollektoraksen strækker sig.
9. Fremgangsmåde ifølge krav 8, hvor gitteret er et cylindrisk maskegitter.
10. Fremgangsmåde ifølge krav 8 eller 9, hvor trykket ligger inden for et område af mellem ca. 10’1 Torrog ca. 10_4Torr.
11. Fremgangsmåde ifølge krav 8, 9 eller 10, hvor den varme katodeelektron-kilde er et opvarmet katodefilament.
12. Fremgangsmåde ifølge krav 11, hvor det opvarmede katodefilament er dannet i en løkke.
13. Fremgangsmåde ifølge krav 8, 9 eller 10, hvor den varme katodeelektron-kilde er en termionisk pladekatodeemitter.
14. Fremgangsmåde ifølge et af kravene 8, 9, 10, 11, 12 og 13, yderligere omfattende at omgive elektronkilden, anodestrukturen, elektronkilden og kollektorelektroden med en kappe (117).
DK13746239.6T 2012-02-08 2013-02-07 Ioniseringsmåler til højtryksdrift DK2800960T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261596470P 2012-02-08 2012-02-08
PCT/US2013/025198 WO2013119851A1 (en) 2012-02-08 2013-02-07 Ionization gauge for high pressure operation

Publications (1)

Publication Number Publication Date
DK2800960T3 true DK2800960T3 (da) 2019-01-28

Family

ID=48948021

Family Applications (1)

Application Number Title Priority Date Filing Date
DK13746239.6T DK2800960T3 (da) 2012-02-08 2013-02-07 Ioniseringsmåler til højtryksdrift

Country Status (8)

Country Link
US (2) US9593996B2 (da)
EP (1) EP2800960B1 (da)
JP (1) JP6059257B2 (da)
KR (1) KR102082168B1 (da)
CN (1) CN104303033B (da)
DK (1) DK2800960T3 (da)
SG (1) SG11201404745PA (da)
WO (1) WO2013119851A1 (da)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
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EP2800960B1 (en) 2012-02-08 2018-10-31 MKS Instruments, Inc. Ionization gauge for high pressure operation
US9588004B2 (en) 2014-11-07 2017-03-07 Mks Instruments, Inc. Long lifetime cold cathode ionization vacuum gauge design
TWI739300B (zh) 2015-01-15 2021-09-11 美商Ｍｋｓ儀器公司 離子化計及其製造方法
JP6227836B2 (ja) * 2015-03-23 2017-11-08 株式会社アルバック 三極管型電離真空計
TW202405424A (zh) * 2022-04-19 2024-02-01 美商英福康公司 使用光電離進行過程污染物檢測的分壓力計元件及相關方法

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Also Published As

Publication number Publication date
CN104303033A (zh) 2015-01-21
EP2800960A4 (en) 2015-07-08
CN104303033B (zh) 2016-08-24
US9593996B2 (en) 2017-03-14
US9952113B2 (en) 2018-04-24
JP2015507203A (ja) 2015-03-05
US20170146420A1 (en) 2017-05-25
JP6059257B2 (ja) 2017-01-11
KR102082168B1 (ko) 2020-02-27
KR20140127859A (ko) 2014-11-04
WO2013119851A1 (en) 2013-08-15
SG11201404745PA (en) 2014-09-26
US20150300904A1 (en) 2015-10-22
EP2800960B1 (en) 2018-10-31
EP2800960A1 (en) 2014-11-12

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