ITTO20030627A1 - Vacuometro a ionizzazione. - Google Patents

Vacuometro a ionizzazione.

Info

Publication number
ITTO20030627A1
ITTO20030627A1 IT000627A ITTO20030627A ITTO20030627A1 IT TO20030627 A1 ITTO20030627 A1 IT TO20030627A1 IT 000627 A IT000627 A IT 000627A IT TO20030627 A ITTO20030627 A IT TO20030627A IT TO20030627 A1 ITTO20030627 A1 IT TO20030627A1
Authority
IT
Italy
Prior art keywords
vacuometer
ionization
Prior art date
Application number
IT000627A
Other languages
English (en)
Inventor
Raffaele Correale
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Priority to IT000627A priority Critical patent/ITTO20030627A1/it
Priority to EP04014545A priority patent/EP1519401B1/en
Priority to DE602004021326T priority patent/DE602004021326D1/de
Priority to JP2004226004A priority patent/JP2005062176A/ja
Priority to US10/910,104 priority patent/US7049823B2/en
Publication of ITTO20030627A1 publication Critical patent/ITTO20030627A1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H01J2201/30434—Nanotubes

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
IT000627A 2003-08-08 2003-08-08 Vacuometro a ionizzazione. ITTO20030627A1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IT000627A ITTO20030627A1 (it) 2003-08-08 2003-08-08 Vacuometro a ionizzazione.
EP04014545A EP1519401B1 (en) 2003-08-08 2004-06-22 Ionisation vacuum gauge
DE602004021326T DE602004021326D1 (de) 2003-08-08 2004-06-22 Ionisations-Vakuummeter
JP2004226004A JP2005062176A (ja) 2003-08-08 2004-08-02 電離真空計
US10/910,104 US7049823B2 (en) 2003-08-08 2004-08-03 Ionization vacuum gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000627A ITTO20030627A1 (it) 2003-08-08 2003-08-08 Vacuometro a ionizzazione.

Publications (1)

Publication Number Publication Date
ITTO20030627A1 true ITTO20030627A1 (it) 2005-02-09

Family

ID=34113445

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000627A ITTO20030627A1 (it) 2003-08-08 2003-08-08 Vacuometro a ionizzazione.

Country Status (5)

Country Link
US (1) US7049823B2 (it)
EP (1) EP1519401B1 (it)
JP (1) JP2005062176A (it)
DE (1) DE602004021326D1 (it)
IT (1) ITTO20030627A1 (it)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100426440C (zh) * 2004-04-21 2008-10-15 清华大学 冷阴极电子枪和采用该冷阴极电子枪的真空规管
JP2007186353A (ja) * 2006-01-11 2007-07-26 Mie Univ カーボンナノチューブ表面付着物の処理方法
DE112007002399B4 (de) * 2006-12-06 2014-02-06 Inficon Gmbh Elektronenquelle für Vakuumdruckmessgerät
CN101266180A (zh) 2007-03-16 2008-09-17 清华大学 电离规
TWI398627B (zh) * 2007-03-26 2013-06-11 鴻海精密工業股份有限公司 電離規
US7768267B2 (en) * 2007-07-11 2010-08-03 Brooks Automation, Inc. Ionization gauge with a cold electron source
JP4568321B2 (ja) * 2007-11-27 2010-10-27 有限会社真空実験室 冷陰極電離真空計
CN101952703A (zh) * 2007-12-19 2011-01-19 布鲁克机械公司 具有电子倍增器冷发射源的离子计
CN101576423B (zh) * 2008-05-07 2010-12-29 清华大学 电离规
JP5669411B2 (ja) * 2009-04-09 2015-02-12 キヤノンアネルバ株式会社 冷陰極電離真空計及びそれを備えた真空処理装置並びに放電開始補助電極
CN102087949B (zh) * 2010-12-31 2012-11-21 清华大学 真空规管
DE102011055089B4 (de) * 2011-11-07 2014-10-09 Gsi Helmholtzzentrum Für Schwerionenforschung Gmbh Messvorrichtung
SG11201404745PA (en) * 2012-02-08 2014-09-26 Mks Instr Inc Ionization gauge for high pressure operation
CN109900421B (zh) * 2019-03-13 2021-01-05 中国人民解放军国防科技大学 电离规和用于对高速中性气团的瞬态压强进行测量的系统
DE102020120259B4 (de) 2020-07-31 2024-07-18 Infineon Technologies Ag Gas- oder Druck-Sensormodul mit einem miniaturisierten Aufbau nach dem Prinzip des Franck-Hertz-Experiments
CN115839795B (zh) * 2022-12-25 2024-02-20 兰州空间技术物理研究所 一种基于点状碳纳米管阴极的电离真空计
CN118549033B (zh) * 2024-07-26 2024-09-24 兰州空间技术物理研究所 一种基于碳纳米管电子源的圆柱型电离真空计

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US57953A (en) * 1866-09-11 Improvement in steam-engine governors
US11890A (en) * 1854-11-07 Glass-furnace
US2605431A (en) * 1950-03-30 1952-07-29 Westinghouse Electric Corp Ionization vacuum gauge
JP2662585B2 (ja) * 1989-10-18 1997-10-15 科学技術庁無機材質研究所長 極高真空用真空計
JP2654841B2 (ja) * 1990-04-12 1997-09-17 アネルバ株式会社 真空計
FR2679653B1 (fr) * 1991-07-23 1993-09-24 Commissariat Energie Atomique Vacumetre a ionisation.
DE4137527A1 (de) * 1991-11-14 1993-05-19 Siemens Ag Ionisationsdruckmesser
JP2676004B2 (ja) 1993-09-28 1997-11-12 神戸大学長 電離真空計
FR2714966B1 (fr) * 1994-01-11 1996-02-16 Commissariat Energie Atomique Jauge à ionisation munie d'une cathode à micropointes.
FR2736465B1 (fr) * 1995-07-03 1997-08-08 Commissariat Energie Atomique Dispositif d'amorcage et/ou de maintien d'une decharge et jauge a vide a cathode froide comportant un tel dispositif
JPH0968473A (ja) * 1995-08-31 1997-03-11 Ulvac Japan Ltd 熱陰極型真空計
US5872422A (en) * 1995-12-20 1999-02-16 Advanced Technology Materials, Inc. Carbon fiber-based field emission devices
JPH10267780A (ja) 1997-03-27 1998-10-09 Shinko Electric Ind Co Ltd 真空測定用素子及び真空測定用素子の製造方法
GB9906788D0 (en) * 1999-03-24 1999-05-19 Boc Group Plc Vacuum gauge
JP2000315474A (ja) * 1999-04-30 2000-11-14 Shimadzu Corp 質量分析計
JP4493139B2 (ja) * 2000-02-02 2010-06-30 キヤノンアネルバ株式会社 電離真空計
DE10014842A1 (de) * 2000-03-24 2001-09-27 Heidelberger Druckmasch Ag Vorrichtung zum Lagern, Transportieren und Zuführen von flächigem Bedruckstoff für eine diesen verarbeitende Maschine
US6566884B2 (en) 2001-09-13 2003-05-20 Duniway Stockroom Corporation Ionization vacuum pressure gauge
US6943356B2 (en) * 2002-01-09 2005-09-13 Biomed Solutions, Llc Tip for nanoscanning electron microscope

Also Published As

Publication number Publication date
JP2005062176A (ja) 2005-03-10
US20050028602A1 (en) 2005-02-10
EP1519401A1 (en) 2005-03-30
US7049823B2 (en) 2006-05-23
DE602004021326D1 (de) 2009-07-16
EP1519401B1 (en) 2009-06-03

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