DK3455676T3 - Apparat til at præge diskrete substrater med et diskret fleksibelt stempel - Google Patents
Apparat til at præge diskrete substrater med et diskret fleksibelt stempel Download PDFInfo
- Publication number
- DK3455676T3 DK3455676T3 DK17735599T DK17735599T DK3455676T3 DK 3455676 T3 DK3455676 T3 DK 3455676T3 DK 17735599 T DK17735599 T DK 17735599T DK 17735599 T DK17735599 T DK 17735599T DK 3455676 T3 DK3455676 T3 DK 3455676T3
- Authority
- DK
- Denmark
- Prior art keywords
- flexible stamp
- discrete substrates
- printing discrete
- discreet flexible
- discreet
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F19/00—Apparatus or machines for carrying out printing operations combined with other operations
- B41F19/02—Apparatus or machines for carrying out printing operations combined with other operations with embossing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41K—STAMPS; STAMPING OR NUMBERING APPARATUS OR DEVICES
- B41K3/00—Apparatus for stamping articles having integral means for supporting the articles to be stamped
- B41K3/44—Means for handling copy matter
- B41K3/50—Means for handling copy matter for conveying during stamping operation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2012—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Labeling Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP16179451 | 2016-07-14 | ||
| PCT/EP2017/067406 WO2018011208A1 (en) | 2016-07-14 | 2017-07-11 | Apparatus for imprinting discrete substrates with a flexible stamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK3455676T3 true DK3455676T3 (da) | 2019-12-09 |
Family
ID=56740809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK17735599T DK3455676T3 (da) | 2016-07-14 | 2017-07-11 | Apparat til at præge diskrete substrater med et diskret fleksibelt stempel |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US10875337B2 (da) |
| EP (1) | EP3455676B1 (da) |
| JP (1) | JP6980002B2 (da) |
| KR (1) | KR102328775B1 (da) |
| CN (3) | CN116736631A (da) |
| DK (1) | DK3455676T3 (da) |
| ES (1) | ES2760602T3 (da) |
| HU (1) | HUE046952T2 (da) |
| TW (1) | TWI723198B (da) |
| WO (1) | WO2018011208A1 (da) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11204550B2 (en) * | 2018-01-26 | 2021-12-21 | Morphotonics Holding B.V. | Process and equipment for texturing discrete substrates |
| EP3777954A4 (en) * | 2018-03-30 | 2021-05-26 | FUJIFILM Corporation | FORM FOR MANUFACTURING A TRANSDERMAL ABSORPTION SHEET AND DEVICE AND METHOD FOR MANUFACTURING A TRANSDERMAL ABSORPTION SHEET WITH A NEEDLE-LIKE PROJECTION |
| EP3633453B1 (de) * | 2018-10-03 | 2023-12-27 | ZKW Group GmbH | Verfahren zur herstellung von (sub-)mikrostrukturen auf gewölbten flächen eines optischen bauteils |
| WO2021094375A1 (en) | 2019-11-12 | 2021-05-20 | Morphotonics Holding B.V. | Apparatus for a roll-to-plate imprinting process comprising a plate carrier with cavity |
| WO2021098953A1 (de) * | 2019-11-19 | 2021-05-27 | Ev Group E. Thallner Gmbh | Vorrichtung und verfahren zum prägen von mikro- und/oder nanostrukturen |
| JP2023502359A (ja) * | 2019-11-26 | 2023-01-24 | モーフォトニクス ホールディング ベスローテン フェノーツハップ | 不平衡なローラを有するインプリント、テクスチャ加工またはエンボス加工システム |
| US11485051B2 (en) * | 2020-07-23 | 2022-11-01 | Himax Technologies Limited | Clamping apparatus of soft film and mounting fixture thereof |
| EP4189483A1 (en) * | 2020-07-31 | 2023-06-07 | Morphotonics Holding B.V. | Apparatus and process for replicating a texture |
| JP7628172B2 (ja) | 2020-08-07 | 2025-02-07 | マジック リープ, インコーポレイテッド | インプリントのための多目的整合の管理 |
| CN113031393A (zh) * | 2021-03-25 | 2021-06-25 | 青岛天仁微纳科技有限责任公司 | 一种适用于不规则模具的纳米压印设备及其压印方法 |
| CN113953168A (zh) * | 2021-10-20 | 2022-01-21 | 常州华威新材料有限公司 | 一种适用于制备深纹理薄膜的表面微交联工艺 |
| CN118251631A (zh) * | 2021-11-15 | 2024-06-25 | 莫福托尼克斯控股有限公司 | 多纹理化印模 |
| CN118251630A (zh) * | 2021-11-15 | 2024-06-25 | 莫福托尼克斯控股有限公司 | 压印方法 |
| CN115308993B (zh) * | 2022-08-30 | 2024-05-17 | 浙江至格科技有限公司 | 一种纳米压印装置和方法 |
| JP7656356B1 (ja) | 2023-09-29 | 2025-04-03 | Aiメカテック株式会社 | 微細構造転写装置及び微細構造転写方法 |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4128369A (en) | 1975-12-10 | 1978-12-05 | Hazelett Strip-Casting Corporation | Continuous apparatus for forming products from thermoplastic polymeric material having three-dimensional patterns and surface textures |
| US4370936A (en) * | 1979-10-18 | 1983-02-01 | Midwestco, Inc. | Fabric tube forming methods and apparatus |
| JP3006199B2 (ja) * | 1991-09-03 | 2000-02-07 | 株式会社日立製作所 | 光ディスクの製造方法 |
| JPH05200757A (ja) * | 1992-01-30 | 1993-08-10 | Canon Inc | フレキシブルスタンパー、ロール状スタンパー、および光情報記録媒体用基板の製造方法 |
| US5772905A (en) | 1995-11-15 | 1998-06-30 | Regents Of The University Of Minnesota | Nanoimprint lithography |
| JP2000085011A (ja) * | 1998-07-16 | 2000-03-28 | Somar Corp | フィルム張付装置 |
| US6334960B1 (en) | 1999-03-11 | 2002-01-01 | Board Of Regents, The University Of Texas System | Step and flash imprint lithography |
| DE19929266A1 (de) * | 1999-06-25 | 2000-12-28 | Eastman Kodak Co | Tintenstrahldrucker für die Herstellung von Fotoabzügen |
| JP4523748B2 (ja) | 1999-09-07 | 2010-08-11 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | 感光性要素の熱処理方法および装置 |
| EP1362682A1 (en) | 2002-05-13 | 2003-11-19 | ZBD Displays Ltd, | Method and apparatus for liquid crystal alignment |
| WO2003099463A2 (en) | 2002-05-27 | 2003-12-04 | Koninklijke Philips Electronics N.V. | Method and device for transferring a pattern from a stamp to a substrate |
| US8349241B2 (en) | 2002-10-04 | 2013-01-08 | Molecular Imprints, Inc. | Method to arrange features on a substrate to replicate features having minimal dimensional variability |
| US7070406B2 (en) * | 2003-04-29 | 2006-07-04 | Hewlett-Packard Development Company, L.P. | Apparatus for embossing a flexible substrate with a pattern carried by an optically transparent compliant media |
| FR2893610B1 (fr) | 2005-11-23 | 2008-07-18 | Saint Gobain | Procede de structuration de surface d'un produit verrier, produit verrier a surface structuree et utilisations |
| US8027086B2 (en) | 2007-04-10 | 2011-09-27 | The Regents Of The University Of Michigan | Roll to roll nanoimprint lithography |
| JP5353020B2 (ja) * | 2007-07-26 | 2013-11-27 | 株式会社リコー | 画像形成装置 |
| EP2348359B1 (en) * | 2008-02-27 | 2013-04-24 | Sharp Kabushiki Kaisha | Roller nanoimprint apparatus |
| KR20100011776A (ko) * | 2008-07-25 | 2010-02-03 | 삼성전기주식회사 | 임프린트 장치 제조방법 |
| US8432548B2 (en) | 2008-11-04 | 2013-04-30 | Molecular Imprints, Inc. | Alignment for edge field nano-imprinting |
| US9977154B2 (en) | 2010-04-01 | 2018-05-22 | 3M Innovative Properties Company | Precision control of web material having micro-replicated lens array |
| CN201819874U (zh) * | 2010-10-08 | 2011-05-04 | 珠海天威飞马打印耗材有限公司 | 油墨带表面干湿度量化装置 |
| TW201228807A (en) * | 2011-01-13 | 2012-07-16 | Moser Baer India Ltd | Method of imprinting a texture on a rigid substrate using flexible stamp |
| JP5323882B2 (ja) * | 2011-04-08 | 2013-10-23 | 株式会社日立産機システム | パターン転写装置及びパターン転写方法 |
| JP5695608B2 (ja) * | 2011-11-11 | 2015-04-08 | Jx日鉱日石エネルギー株式会社 | ゾルゲル法を用いた凹凸基板の製造方法、それに用いるゾル溶液、及びそれを用いた有機el素子の製造方法並びにそれから得られた有機el素子 |
| US9616614B2 (en) | 2012-02-22 | 2017-04-11 | Canon Nanotechnologies, Inc. | Large area imprint lithography |
| CN112848683B (zh) * | 2012-03-05 | 2023-11-14 | 兰达公司 | 数字打印系统的控制设备和方法 |
| JP2013184414A (ja) * | 2012-03-09 | 2013-09-19 | Hitachi Industrial Equipment Systems Co Ltd | パターン転写装置及びパターン転写方法 |
| US10081174B2 (en) * | 2012-12-31 | 2018-09-25 | 3M Innovative Properties Company | Re-inking roller for microcontact printing in a roll-to-roll process |
| JP6064667B2 (ja) * | 2013-02-21 | 2017-01-25 | 東レ株式会社 | 両面構造フィルムの製造方法および製造装置 |
| KR20140109624A (ko) * | 2013-03-06 | 2014-09-16 | 삼성전자주식회사 | 대면적 임프린트 장치 및 방법 |
| KR101408741B1 (ko) * | 2013-04-30 | 2014-06-18 | (주)새한나노텍 | 임프린트 장치 |
| CN103235483B (zh) | 2013-05-07 | 2016-01-20 | 青岛博纳光电装备有限公司 | 大面积纳米图形化的装置和方法 |
| WO2016012174A1 (en) | 2014-07-24 | 2016-01-28 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
-
2017
- 2017-07-11 CN CN202310254861.1A patent/CN116736631A/zh active Pending
- 2017-07-11 EP EP17735599.7A patent/EP3455676B1/en active Active
- 2017-07-11 DK DK17735599T patent/DK3455676T3/da active
- 2017-07-11 JP JP2019500582A patent/JP6980002B2/ja active Active
- 2017-07-11 HU HUE17735599A patent/HUE046952T2/hu unknown
- 2017-07-11 CN CN201780043042.5A patent/CN109478014B/zh active Active
- 2017-07-11 US US16/315,746 patent/US10875337B2/en active Active
- 2017-07-11 ES ES17735599T patent/ES2760602T3/es active Active
- 2017-07-11 WO PCT/EP2017/067406 patent/WO2018011208A1/en not_active Ceased
- 2017-07-11 KR KR1020197000647A patent/KR102328775B1/ko active Active
- 2017-07-11 CN CN202310254974.1A patent/CN116643450A/zh active Pending
- 2017-07-13 TW TW106123489A patent/TWI723198B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2019522368A (ja) | 2019-08-08 |
| US10875337B2 (en) | 2020-12-29 |
| KR102328775B1 (ko) | 2021-11-22 |
| CN109478014B (zh) | 2023-04-04 |
| HUE046952T2 (hu) | 2020-04-28 |
| CN116643450A (zh) | 2023-08-25 |
| EP3455676B1 (en) | 2019-09-11 |
| TW201808665A (zh) | 2018-03-16 |
| WO2018011208A1 (en) | 2018-01-18 |
| EP3455676A1 (en) | 2019-03-20 |
| JP6980002B2 (ja) | 2021-12-15 |
| US20190329575A1 (en) | 2019-10-31 |
| CN109478014A (zh) | 2019-03-15 |
| TWI723198B (zh) | 2021-04-01 |
| CN116736631A (zh) | 2023-09-12 |
| KR20190028428A (ko) | 2019-03-18 |
| ES2760602T3 (es) | 2020-05-14 |
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