DK3455676T3 - Apparat til at præge diskrete substrater med et diskret fleksibelt stempel - Google Patents

Apparat til at præge diskrete substrater med et diskret fleksibelt stempel Download PDF

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Publication number
DK3455676T3
DK3455676T3 DK17735599T DK17735599T DK3455676T3 DK 3455676 T3 DK3455676 T3 DK 3455676T3 DK 17735599 T DK17735599 T DK 17735599T DK 17735599 T DK17735599 T DK 17735599T DK 3455676 T3 DK3455676 T3 DK 3455676T3
Authority
DK
Denmark
Prior art keywords
flexible stamp
discrete substrates
printing discrete
discreet flexible
discreet
Prior art date
Application number
DK17735599T
Other languages
English (en)
Inventor
Meulen Jan Matthijs Ter
Bram Johannes Titulaer
Ludovicus Vugts
Jules Kierkels
Erven Adrianus Johannes Van
Original Assignee
Morphotonics Holding Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Morphotonics Holding Bv filed Critical Morphotonics Holding Bv
Application granted granted Critical
Publication of DK3455676T3 publication Critical patent/DK3455676T3/da

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F19/00Apparatus or machines for carrying out printing operations combined with other operations
    • B41F19/02Apparatus or machines for carrying out printing operations combined with other operations with embossing
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41KSTAMPS; STAMPING OR NUMBERING APPARATUS OR DEVICES
    • B41K3/00Apparatus for stamping articles having integral means for supporting the articles to be stamped
    • B41K3/44Means for handling copy matter
    • B41K3/50Means for handling copy matter for conveying during stamping operation
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2002Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2012Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691Handling of masks or workpieces
    • G03F7/70733Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Labeling Devices (AREA)
DK17735599T 2016-07-14 2017-07-11 Apparat til at præge diskrete substrater med et diskret fleksibelt stempel DK3455676T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP16179451 2016-07-14
PCT/EP2017/067406 WO2018011208A1 (en) 2016-07-14 2017-07-11 Apparatus for imprinting discrete substrates with a flexible stamp

Publications (1)

Publication Number Publication Date
DK3455676T3 true DK3455676T3 (da) 2019-12-09

Family

ID=56740809

Family Applications (1)

Application Number Title Priority Date Filing Date
DK17735599T DK3455676T3 (da) 2016-07-14 2017-07-11 Apparat til at præge diskrete substrater med et diskret fleksibelt stempel

Country Status (10)

Country Link
US (1) US10875337B2 (da)
EP (1) EP3455676B1 (da)
JP (1) JP6980002B2 (da)
KR (1) KR102328775B1 (da)
CN (3) CN116736631A (da)
DK (1) DK3455676T3 (da)
ES (1) ES2760602T3 (da)
HU (1) HUE046952T2 (da)
TW (1) TWI723198B (da)
WO (1) WO2018011208A1 (da)

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US11204550B2 (en) * 2018-01-26 2021-12-21 Morphotonics Holding B.V. Process and equipment for texturing discrete substrates
EP3777954A4 (en) * 2018-03-30 2021-05-26 FUJIFILM Corporation FORM FOR MANUFACTURING A TRANSDERMAL ABSORPTION SHEET AND DEVICE AND METHOD FOR MANUFACTURING A TRANSDERMAL ABSORPTION SHEET WITH A NEEDLE-LIKE PROJECTION
EP3633453B1 (de) * 2018-10-03 2023-12-27 ZKW Group GmbH Verfahren zur herstellung von (sub-)mikrostrukturen auf gewölbten flächen eines optischen bauteils
WO2021094375A1 (en) 2019-11-12 2021-05-20 Morphotonics Holding B.V. Apparatus for a roll-to-plate imprinting process comprising a plate carrier with cavity
WO2021098953A1 (de) * 2019-11-19 2021-05-27 Ev Group E. Thallner Gmbh Vorrichtung und verfahren zum prägen von mikro- und/oder nanostrukturen
JP2023502359A (ja) * 2019-11-26 2023-01-24 モーフォトニクス ホールディング ベスローテン フェノーツハップ 不平衡なローラを有するインプリント、テクスチャ加工またはエンボス加工システム
US11485051B2 (en) * 2020-07-23 2022-11-01 Himax Technologies Limited Clamping apparatus of soft film and mounting fixture thereof
EP4189483A1 (en) * 2020-07-31 2023-06-07 Morphotonics Holding B.V. Apparatus and process for replicating a texture
JP7628172B2 (ja) 2020-08-07 2025-02-07 マジック リープ, インコーポレイテッド インプリントのための多目的整合の管理
CN113031393A (zh) * 2021-03-25 2021-06-25 青岛天仁微纳科技有限责任公司 一种适用于不规则模具的纳米压印设备及其压印方法
CN113953168A (zh) * 2021-10-20 2022-01-21 常州华威新材料有限公司 一种适用于制备深纹理薄膜的表面微交联工艺
CN118251631A (zh) * 2021-11-15 2024-06-25 莫福托尼克斯控股有限公司 多纹理化印模
CN118251630A (zh) * 2021-11-15 2024-06-25 莫福托尼克斯控股有限公司 压印方法
CN115308993B (zh) * 2022-08-30 2024-05-17 浙江至格科技有限公司 一种纳米压印装置和方法
JP7656356B1 (ja) 2023-09-29 2025-04-03 Aiメカテック株式会社 微細構造転写装置及び微細構造転写方法

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Also Published As

Publication number Publication date
JP2019522368A (ja) 2019-08-08
US10875337B2 (en) 2020-12-29
KR102328775B1 (ko) 2021-11-22
CN109478014B (zh) 2023-04-04
HUE046952T2 (hu) 2020-04-28
CN116643450A (zh) 2023-08-25
EP3455676B1 (en) 2019-09-11
TW201808665A (zh) 2018-03-16
WO2018011208A1 (en) 2018-01-18
EP3455676A1 (en) 2019-03-20
JP6980002B2 (ja) 2021-12-15
US20190329575A1 (en) 2019-10-31
CN109478014A (zh) 2019-03-15
TWI723198B (zh) 2021-04-01
CN116736631A (zh) 2023-09-12
KR20190028428A (ko) 2019-03-18
ES2760602T3 (es) 2020-05-14

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