DK4229380T3 - Driftsmetode for en gruppe af tryksensorer - Google Patents
Driftsmetode for en gruppe af tryksensorerInfo
- Publication number
- DK4229380T3 DK4229380T3 DK20803754.9T DK20803754T DK4229380T3 DK 4229380 T3 DK4229380 T3 DK 4229380T3 DK 20803754 T DK20803754 T DK 20803754T DK 4229380 T3 DK4229380 T3 DK 4229380T3
- Authority
- DK
- Denmark
- Prior art keywords
- group
- pressure sensors
- operating method
- operating
- sensors
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
- G01L27/005—Apparatus for calibrating pressure sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2020/078924 WO2022078593A1 (de) | 2020-10-14 | 2020-10-14 | Betriebsverfahren fuer gruppe von drucksensoren |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK4229380T3 true DK4229380T3 (da) | 2026-02-09 |
Family
ID=73198258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK20803754.9T DK4229380T3 (da) | 2020-10-14 | 2020-10-14 | Driftsmetode for en gruppe af tryksensorer |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US12553786B2 (da) |
| EP (1) | EP4229380B1 (da) |
| JP (1) | JP7674474B2 (da) |
| KR (1) | KR20230086761A (da) |
| CN (1) | CN116569013A (da) |
| DK (1) | DK4229380T3 (da) |
| TW (1) | TW202232069A (da) |
| WO (1) | WO2022078593A1 (da) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118794594A (zh) * | 2024-06-18 | 2024-10-18 | 深圳国荟数智科技有限公司 | 一种基于卡尔曼滤波的压力检测装置及方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE94642T1 (de) * | 1989-01-23 | 1993-10-15 | Balzers Hochvakuum | Gasdruck-messgeraet. |
| US6619131B2 (en) * | 1998-07-16 | 2003-09-16 | Unaxis Balzers Ag | Combination pressure sensor with capacitive and thermal elements |
| DE19860500B4 (de) * | 1998-12-28 | 2005-12-15 | Plöchinger, Heinz, Dipl.-Ing. | Vorrichtung und Verfahren zur Druckmessung |
| DE102005029114B4 (de) | 2005-06-23 | 2007-12-06 | Plöchinger, Heinz, Dipl.-Ing. | Verfahren zur Druckmessung für Kombinations-Druck-Sensoren im Vakuum-Bereich mit mindestens zwei Sensoren und Verfahren zur automatischen Findung eines Justierwertes für die "Offset-Justierung" bei Kombinations-Druck-Sensoren |
| JP6981885B2 (ja) | 2018-01-23 | 2021-12-17 | アズビル株式会社 | 静電容量型圧力センサの異常検知方法および装置 |
| DE102018007884A1 (de) | 2018-10-05 | 2020-04-09 | Heinz Plöchinger | Sensor zur komparativen Druckmessung |
-
2020
- 2020-10-14 EP EP20803754.9A patent/EP4229380B1/de active Active
- 2020-10-14 DK DK20803754.9T patent/DK4229380T3/da active
- 2020-10-14 US US18/030,438 patent/US12553786B2/en active Active
- 2020-10-14 WO PCT/EP2020/078924 patent/WO2022078593A1/de not_active Ceased
- 2020-10-14 CN CN202080107930.0A patent/CN116569013A/zh active Pending
- 2020-10-14 KR KR1020237016160A patent/KR20230086761A/ko active Pending
- 2020-10-14 JP JP2023522891A patent/JP7674474B2/ja active Active
-
2021
- 2021-09-07 TW TW110133202A patent/TW202232069A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN116569013A (zh) | 2023-08-08 |
| EP4229380A1 (de) | 2023-08-23 |
| WO2022078593A1 (de) | 2022-04-21 |
| JP7674474B2 (ja) | 2025-05-09 |
| JP2023548676A (ja) | 2023-11-20 |
| EP4229380B1 (de) | 2025-12-17 |
| KR20230086761A (ko) | 2023-06-15 |
| TW202232069A (zh) | 2022-08-16 |
| US12553786B2 (en) | 2026-02-17 |
| US20230366766A1 (en) | 2023-11-16 |
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