DK4229380T3 - Driftsmetode for en gruppe af tryksensorer - Google Patents

Driftsmetode for en gruppe af tryksensorer

Info

Publication number
DK4229380T3
DK4229380T3 DK20803754.9T DK20803754T DK4229380T3 DK 4229380 T3 DK4229380 T3 DK 4229380T3 DK 20803754 T DK20803754 T DK 20803754T DK 4229380 T3 DK4229380 T3 DK 4229380T3
Authority
DK
Denmark
Prior art keywords
group
pressure sensors
operating method
operating
sensors
Prior art date
Application number
DK20803754.9T
Other languages
English (en)
Inventor
Christian Berg
Rolf Enderes
Martin Wüest
Bernhard Andreaus
Original Assignee
Inficon ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon ag filed Critical Inficon ag
Application granted granted Critical
Publication of DK4229380T3 publication Critical patent/DK4229380T3/da

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L15/00Devices or apparatus for measuring two or more fluid pressure values simultaneously
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges
    • G01L21/10Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges
    • G01L21/30Vacuum gauges by making use of ionisation effects
    • G01L21/32Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges
    • G01L21/30Vacuum gauges by making use of ionisation effects
    • G01L21/34Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G01L27/005Apparatus for calibrating pressure sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076Transmitting or indicating the displacement of flexible diaphragms using photoelectric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
DK20803754.9T 2020-10-14 2020-10-14 Driftsmetode for en gruppe af tryksensorer DK4229380T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2020/078924 WO2022078593A1 (de) 2020-10-14 2020-10-14 Betriebsverfahren fuer gruppe von drucksensoren

Publications (1)

Publication Number Publication Date
DK4229380T3 true DK4229380T3 (da) 2026-02-09

Family

ID=73198258

Family Applications (1)

Application Number Title Priority Date Filing Date
DK20803754.9T DK4229380T3 (da) 2020-10-14 2020-10-14 Driftsmetode for en gruppe af tryksensorer

Country Status (8)

Country Link
US (1) US12553786B2 (da)
EP (1) EP4229380B1 (da)
JP (1) JP7674474B2 (da)
KR (1) KR20230086761A (da)
CN (1) CN116569013A (da)
DK (1) DK4229380T3 (da)
TW (1) TW202232069A (da)
WO (1) WO2022078593A1 (da)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118794594A (zh) * 2024-06-18 2024-10-18 深圳国荟数智科技有限公司 一种基于卡尔曼滤波的压力检测装置及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE94642T1 (de) * 1989-01-23 1993-10-15 Balzers Hochvakuum Gasdruck-messgeraet.
US6619131B2 (en) * 1998-07-16 2003-09-16 Unaxis Balzers Ag Combination pressure sensor with capacitive and thermal elements
DE19860500B4 (de) * 1998-12-28 2005-12-15 Plöchinger, Heinz, Dipl.-Ing. Vorrichtung und Verfahren zur Druckmessung
DE102005029114B4 (de) 2005-06-23 2007-12-06 Plöchinger, Heinz, Dipl.-Ing. Verfahren zur Druckmessung für Kombinations-Druck-Sensoren im Vakuum-Bereich mit mindestens zwei Sensoren und Verfahren zur automatischen Findung eines Justierwertes für die "Offset-Justierung" bei Kombinations-Druck-Sensoren
JP6981885B2 (ja) 2018-01-23 2021-12-17 アズビル株式会社 静電容量型圧力センサの異常検知方法および装置
DE102018007884A1 (de) 2018-10-05 2020-04-09 Heinz Plöchinger Sensor zur komparativen Druckmessung

Also Published As

Publication number Publication date
CN116569013A (zh) 2023-08-08
EP4229380A1 (de) 2023-08-23
WO2022078593A1 (de) 2022-04-21
JP7674474B2 (ja) 2025-05-09
JP2023548676A (ja) 2023-11-20
EP4229380B1 (de) 2025-12-17
KR20230086761A (ko) 2023-06-15
TW202232069A (zh) 2022-08-16
US12553786B2 (en) 2026-02-17
US20230366766A1 (en) 2023-11-16

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