DK4229381T3 - Fremgangsmåde til drift af en gruppe af tryksensorer - Google Patents

Fremgangsmåde til drift af en gruppe af tryksensorer

Info

Publication number
DK4229381T3
DK4229381T3 DK20792396.2T DK20792396T DK4229381T3 DK 4229381 T3 DK4229381 T3 DK 4229381T3 DK 20792396 T DK20792396 T DK 20792396T DK 4229381 T3 DK4229381 T3 DK 4229381T3
Authority
DK
Denmark
Prior art keywords
operating
group
pressure sensors
sensors
pressure
Prior art date
Application number
DK20792396.2T
Other languages
English (en)
Inventor
Bernhard Andreaus
Rolf Enderes
Christian Berg
Martin Wüest
Original Assignee
Inficon ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon ag filed Critical Inficon ag
Application granted granted Critical
Publication of DK4229381T3 publication Critical patent/DK4229381T3/da

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L15/00Devices or apparatus for measuring two or more fluid pressure values simultaneously
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges
    • G01L21/10Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges
    • G01L21/30Vacuum gauges by making use of ionisation effects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/02Testing or calibrating of apparatus for measuring fluid pressure of indicators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DK20792396.2T 2020-10-14 2020-10-14 Fremgangsmåde til drift af en gruppe af tryksensorer DK4229381T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2020/078937 WO2022078594A1 (de) 2020-10-14 2020-10-14 Verfahren zum betrieb einer gruppe von drucksensoren

Publications (1)

Publication Number Publication Date
DK4229381T3 true DK4229381T3 (da) 2025-07-21

Family

ID=72885575

Family Applications (1)

Application Number Title Priority Date Filing Date
DK20792396.2T DK4229381T3 (da) 2020-10-14 2020-10-14 Fremgangsmåde til drift af en gruppe af tryksensorer

Country Status (8)

Country Link
US (1) US12480831B2 (da)
EP (1) EP4229381B1 (da)
JP (1) JP7599012B2 (da)
KR (1) KR20230086714A (da)
CN (1) CN116368360B (da)
DK (1) DK4229381T3 (da)
TW (1) TWI910246B (da)
WO (1) WO2022078594A1 (da)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE94642T1 (de) 1989-01-23 1993-10-15 Balzers Hochvakuum Gasdruck-messgeraet.
US5542286A (en) * 1995-01-23 1996-08-06 Hewlett-Packard Company Method and apparatus for correcting flow and pressure sensor drift in a gas chromatograph
DE19860500B4 (de) 1998-12-28 2005-12-15 Plöchinger, Heinz, Dipl.-Ing. Vorrichtung und Verfahren zur Druckmessung
JP3336384B2 (ja) 2000-05-25 2002-10-21 独立行政法人産業技術総合研究所 2種類混合気体の濃度測定方法及び濃度測定装置
DE10238961A1 (de) 2002-08-24 2004-03-04 Pfeiffer Vacuum Gmbh Verfahren zum Betrieb eines Totaldrucktransmitters
JP2012026995A (ja) * 2010-07-28 2012-02-09 Ulvac Japan Ltd トランスデューサ型真空計及びトランスデューサ型真空計を用いた単結晶引き上げ装置
US20130086972A1 (en) * 2011-10-10 2013-04-11 Mocon, Inc. Calibration technique for calibrating a zirconium oxide oxygen sensor and calibrated sensor
US9605992B2 (en) * 2014-03-14 2017-03-28 Hitachi Metals, Ltd. On-tool mass flow controller diagnostic systems and methods
US10663337B2 (en) * 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
CN106645587B (zh) * 2017-01-16 2024-03-12 清华大学 一种气体传感器评测与校准系统
US10914717B2 (en) * 2018-05-09 2021-02-09 Mks Instruments, Inc. Method and apparatus for partial pressure detection
DE102018007884A1 (de) * 2018-10-05 2020-04-09 Heinz Plöchinger Sensor zur komparativen Druckmessung

Also Published As

Publication number Publication date
CN116368360A (zh) 2023-06-30
JP2023547360A (ja) 2023-11-10
KR20230086714A (ko) 2023-06-15
TW202232070A (zh) 2022-08-16
EP4229381A1 (de) 2023-08-23
EP4229381B1 (de) 2025-05-07
US20230375428A1 (en) 2023-11-23
JP7599012B2 (ja) 2024-12-12
US12480831B2 (en) 2025-11-25
WO2022078594A1 (de) 2022-04-21
TWI910246B (zh) 2026-01-01
CN116368360B (zh) 2025-09-26

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