DK4229381T3 - Fremgangsmåde til drift af en gruppe af tryksensorer - Google Patents
Fremgangsmåde til drift af en gruppe af tryksensorerInfo
- Publication number
- DK4229381T3 DK4229381T3 DK20792396.2T DK20792396T DK4229381T3 DK 4229381 T3 DK4229381 T3 DK 4229381T3 DK 20792396 T DK20792396 T DK 20792396T DK 4229381 T3 DK4229381 T3 DK 4229381T3
- Authority
- DK
- Denmark
- Prior art keywords
- operating
- group
- pressure sensors
- sensors
- pressure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/02—Testing or calibrating of apparatus for measuring fluid pressure of indicators
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2020/078937 WO2022078594A1 (de) | 2020-10-14 | 2020-10-14 | Verfahren zum betrieb einer gruppe von drucksensoren |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK4229381T3 true DK4229381T3 (da) | 2025-07-21 |
Family
ID=72885575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK20792396.2T DK4229381T3 (da) | 2020-10-14 | 2020-10-14 | Fremgangsmåde til drift af en gruppe af tryksensorer |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US12480831B2 (da) |
| EP (1) | EP4229381B1 (da) |
| JP (1) | JP7599012B2 (da) |
| KR (1) | KR20230086714A (da) |
| CN (1) | CN116368360B (da) |
| DK (1) | DK4229381T3 (da) |
| TW (1) | TWI910246B (da) |
| WO (1) | WO2022078594A1 (da) |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE94642T1 (de) | 1989-01-23 | 1993-10-15 | Balzers Hochvakuum | Gasdruck-messgeraet. |
| US5542286A (en) * | 1995-01-23 | 1996-08-06 | Hewlett-Packard Company | Method and apparatus for correcting flow and pressure sensor drift in a gas chromatograph |
| DE19860500B4 (de) | 1998-12-28 | 2005-12-15 | Plöchinger, Heinz, Dipl.-Ing. | Vorrichtung und Verfahren zur Druckmessung |
| JP3336384B2 (ja) | 2000-05-25 | 2002-10-21 | 独立行政法人産業技術総合研究所 | 2種類混合気体の濃度測定方法及び濃度測定装置 |
| DE10238961A1 (de) | 2002-08-24 | 2004-03-04 | Pfeiffer Vacuum Gmbh | Verfahren zum Betrieb eines Totaldrucktransmitters |
| JP2012026995A (ja) * | 2010-07-28 | 2012-02-09 | Ulvac Japan Ltd | トランスデューサ型真空計及びトランスデューサ型真空計を用いた単結晶引き上げ装置 |
| US20130086972A1 (en) * | 2011-10-10 | 2013-04-11 | Mocon, Inc. | Calibration technique for calibrating a zirconium oxide oxygen sensor and calibrated sensor |
| US9605992B2 (en) * | 2014-03-14 | 2017-03-28 | Hitachi Metals, Ltd. | On-tool mass flow controller diagnostic systems and methods |
| US10663337B2 (en) * | 2016-12-30 | 2020-05-26 | Ichor Systems, Inc. | Apparatus for controlling flow and method of calibrating same |
| CN106645587B (zh) * | 2017-01-16 | 2024-03-12 | 清华大学 | 一种气体传感器评测与校准系统 |
| US10914717B2 (en) * | 2018-05-09 | 2021-02-09 | Mks Instruments, Inc. | Method and apparatus for partial pressure detection |
| DE102018007884A1 (de) * | 2018-10-05 | 2020-04-09 | Heinz Plöchinger | Sensor zur komparativen Druckmessung |
-
2020
- 2020-10-14 CN CN202080106250.7A patent/CN116368360B/zh active Active
- 2020-10-14 DK DK20792396.2T patent/DK4229381T3/da active
- 2020-10-14 KR KR1020237015462A patent/KR20230086714A/ko active Pending
- 2020-10-14 JP JP2023522894A patent/JP7599012B2/ja active Active
- 2020-10-14 WO PCT/EP2020/078937 patent/WO2022078594A1/de not_active Ceased
- 2020-10-14 EP EP20792396.2A patent/EP4229381B1/de active Active
- 2020-10-14 US US18/030,430 patent/US12480831B2/en active Active
-
2021
- 2021-10-12 TW TW110137729A patent/TWI910246B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| CN116368360A (zh) | 2023-06-30 |
| JP2023547360A (ja) | 2023-11-10 |
| KR20230086714A (ko) | 2023-06-15 |
| TW202232070A (zh) | 2022-08-16 |
| EP4229381A1 (de) | 2023-08-23 |
| EP4229381B1 (de) | 2025-05-07 |
| US20230375428A1 (en) | 2023-11-23 |
| JP7599012B2 (ja) | 2024-12-12 |
| US12480831B2 (en) | 2025-11-25 |
| WO2022078594A1 (de) | 2022-04-21 |
| TWI910246B (zh) | 2026-01-01 |
| CN116368360B (zh) | 2025-09-26 |
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