DK488785A - Metalorganiske hybridforbindelser, deres fremstilling og anvendelse til metalorganisk kemisk dampafsaetning - Google Patents

Metalorganiske hybridforbindelser, deres fremstilling og anvendelse til metalorganisk kemisk dampafsaetning Download PDF

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Publication number
DK488785A
DK488785A DK488785A DK488785A DK488785A DK 488785 A DK488785 A DK 488785A DK 488785 A DK488785 A DK 488785A DK 488785 A DK488785 A DK 488785A DK 488785 A DK488785 A DK 488785A
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Denmark
Prior art keywords
metal organic
organic chemical
compounds
hydride
vapour deposition
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DK488785A
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English (en)
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DK488785D0 (da
Inventor
Benjamin C Hui
Jorg Lorberth
Andreas A Melas
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Thiokol Morton Inc
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Publication of DK488785D0 publication Critical patent/DK488785D0/da
Publication of DK488785A publication Critical patent/DK488785A/da

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    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F5/00Compounds containing elements of Groups 3 or 13 of the Periodic Table
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C391/00Compounds containing selenium
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C395/00Compounds containing tellurium
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F3/00Compounds containing elements of Groups 2 or 12 of the Periodic Table
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F3/00Compounds containing elements of Groups 2 or 12 of the Periodic Table
    • C07F3/02Magnesium compounds
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F3/00Compounds containing elements of Groups 2 or 12 of the Periodic Table
    • C07F3/06Zinc compounds
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F3/00Compounds containing elements of Groups 2 or 12 of the Periodic Table
    • C07F3/08Cadmium compounds
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F3/00Compounds containing elements of Groups 2 or 12 of the Periodic Table
    • C07F3/10Mercury compounds
    • C07F3/12Aromatic substances containing mercury
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F5/00Compounds containing elements of Groups 3 or 13 of the Periodic Table
    • C07F5/02Boron compounds
    • C07F5/027Organoboranes and organoborohydrides
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F5/00Compounds containing elements of Groups 3 or 13 of the Periodic Table
    • C07F5/06Aluminium compounds
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/02Phosphorus compounds
    • C07F9/28Phosphorus compounds with one or more P—C bonds
    • C07F9/50Organo-phosphines
    • C07F9/505Preparation; Separation; Purification; Stabilisation
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/66Arsenic compounds
    • C07F9/70Organo-arsenic compounds
    • C07F9/72Aliphatic compounds
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/90Antimony compounds
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/94Bismuth compounds
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/301AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/305Sulfides, selenides, or tellurides
    • C23C16/306AII BVI compounds, where A is Zn, Cd or Hg and B is S, Se or Te

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
DK488785A 1984-10-25 1985-10-24 Metalorganiske hybridforbindelser, deres fremstilling og anvendelse til metalorganisk kemisk dampafsaetning DK488785A (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/664,645 US4720560A (en) 1984-10-25 1984-10-25 Hybrid organometallic compounds, particularly for metal organic chemical vapor deposition

Publications (2)

Publication Number Publication Date
DK488785D0 DK488785D0 (da) 1985-10-24
DK488785A true DK488785A (da) 1986-04-26

Family

ID=24666848

Family Applications (1)

Application Number Title Priority Date Filing Date
DK488785A DK488785A (da) 1984-10-25 1985-10-24 Metalorganiske hybridforbindelser, deres fremstilling og anvendelse til metalorganisk kemisk dampafsaetning

Country Status (10)

Country Link
US (1) US4720560A (da)
EP (1) EP0181706B1 (da)
JP (1) JPS61104079A (da)
KR (1) KR900001008B1 (da)
AT (1) ATE48002T1 (da)
BR (1) BR8505338A (da)
CA (1) CA1251804A (da)
DE (1) DE3574257D1 (da)
DK (1) DK488785A (da)
IL (1) IL76716A0 (da)

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DE3514410A1 (de) * 1985-04-20 1986-10-23 Schering AG, Berlin und Bergkamen, 1000 Berlin Neue alkalimetallaluminiumdialkyldihydride und deren loesungen in aromatischen kohlenwasserstoffen
JPH0627327B2 (ja) * 1987-06-30 1994-04-13 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン Ib族金属の付着方法
EP0305144A3 (en) * 1987-08-24 1989-03-08 Canon Kabushiki Kaisha Method of forming crystalline compound semiconductor film
DE3742525C2 (de) * 1987-12-11 1998-02-19 Hertz Inst Heinrich Verfahren zur Herstellung von Metallalkylverbindungen und deren Verwendung
US4915988A (en) * 1988-06-22 1990-04-10 Georgia Tech Research Corporation Chemical vapor deposition of group IIA metals and precursors therefor
US4992305A (en) * 1988-06-22 1991-02-12 Georgia Tech Research Corporation Chemical vapor deposition of transistion metals
US4942252A (en) * 1988-08-16 1990-07-17 Cvd Incorporated Synthesis of phosphorus and arsenic, halides and hydrides
NL8802458A (nl) * 1988-10-07 1990-05-01 Philips Nv Werkwijze voor de vervaardiging van een epitaxiale indiumfosfide-laag op een substraatoppervlak.
US5147688A (en) * 1990-04-24 1992-09-15 Cvd, Inc. MOCVD of indium oxide and indium/tin oxide films on substrates
DE4104076C2 (de) * 1991-02-11 1994-03-31 Bruker Analytische Messtechnik Vorrichtung zur kernresonanzspektrometrischen Messung von chemischen und/oder physikalischen Reaktionsabläufen
US5300185A (en) * 1991-03-29 1994-04-05 Kabushiki Kaisha Toshiba Method of manufacturing III-V group compound semiconductor
DE4214224A1 (de) * 1992-04-30 1993-11-04 Merck Patent Gmbh Verwendung von elementorganischen verbindungen zur abscheidung des elementes auf substraten
US5380895A (en) * 1993-02-10 1995-01-10 Bandgap Technology Corporation Method for the synthesis of metal alkyls and metal aryls
US5502227A (en) * 1993-07-27 1996-03-26 Cvd, Incorporated Liquid indium source
JPH07153700A (ja) * 1993-11-26 1995-06-16 Sony Corp 有機金属気相成長法及び発光素子作製方法
US6211106B1 (en) * 1998-06-18 2001-04-03 Industrial Technology Research Institute Groups IIA and IIIA based catalyst composition for preparing high-syndiotacticity polystyrene
DE60301152T8 (de) * 2002-01-17 2006-04-27 Shipley Co., L.L.C., Marlborough Organoindiumverbindungen zur Verwendung in der chemischen Dampfphasenabscheidung
DE102005037076B3 (de) * 2005-08-03 2007-01-25 Otto-Von-Guericke-Universität Magdeburg Verfahren zur Herstellung von gemischt substituierte Organobismuthverbindungen und deren Verwendung
US20070141374A1 (en) * 2005-12-19 2007-06-21 General Electric Company Environmentally resistant disk
WO2014078263A1 (en) * 2012-11-14 2014-05-22 Dow Global Technologies Llc Methods of producing trimethylgallium
KR20210046854A (ko) * 2013-08-22 2021-04-28 우미코레 아게 운트 코 카게 알킬인듐 화합물의 제조 방법 및 이의 용도
EP3173507A1 (de) * 2015-11-25 2017-05-31 Umicore AG & Co. KG Verfahren zur metallorganischen gasphasenabscheidung unter verwendung von lösungen von indiumalkylverbindungen in kohlenwasserstoffen
KR102922966B1 (ko) 2020-12-04 2026-02-03 가부시키가이샤 고준도가가쿠 겐큐쇼 인듐 및 1종 이상의 다른 금속을 함유하는 막을 제조하기 위한 증착용 원료 및 인듐 및 1종 이상의 다른 금속을 함유하는 막의 제조 방법

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US2266776A (en) * 1938-09-24 1941-12-23 Atlantic Refining Co Diesel fuel
US2818416A (en) * 1952-12-10 1957-12-31 Ethyl Corp Cyclomatic compounds
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Also Published As

Publication number Publication date
EP0181706B1 (en) 1989-11-15
EP0181706A1 (en) 1986-05-21
DE3574257D1 (en) 1989-12-21
BR8505338A (pt) 1986-08-05
JPS61104079A (ja) 1986-05-22
KR900001008B1 (ko) 1990-02-24
CA1251804A (en) 1989-03-28
ATE48002T1 (de) 1989-12-15
JPH0357188B2 (da) 1991-08-30
IL76716A0 (en) 1986-02-28
DK488785D0 (da) 1985-10-24
US4720560A (en) 1988-01-19
KR860003266A (ko) 1986-05-21

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