EP0065806A2 - Résistance dépendant de la tension et procédé pour sa fabrication - Google Patents

Résistance dépendant de la tension et procédé pour sa fabrication Download PDF

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Publication number
EP0065806A2
EP0065806A2 EP82200615A EP82200615A EP0065806A2 EP 0065806 A2 EP0065806 A2 EP 0065806A2 EP 82200615 A EP82200615 A EP 82200615A EP 82200615 A EP82200615 A EP 82200615A EP 0065806 A2 EP0065806 A2 EP 0065806A2
Authority
EP
European Patent Office
Prior art keywords
metal oxide
sintered body
metal
voltage
dependent resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP82200615A
Other languages
German (de)
English (en)
Other versions
EP0065806A3 (en
EP0065806B1 (fr
Inventor
Detlev Dr. Hennings
Axel Dr. Schnell
Herbert Schreinemacher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Koninklijke Philips NV
Original Assignee
Philips Patentverwaltung GmbH
Philips Gloeilampenfabrieken NV
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Patentverwaltung GmbH, Philips Gloeilampenfabrieken NV, Koninklijke Philips Electronics NV filed Critical Philips Patentverwaltung GmbH
Publication of EP0065806A2 publication Critical patent/EP0065806A2/fr
Publication of EP0065806A3 publication Critical patent/EP0065806A3/de
Application granted granted Critical
Publication of EP0065806B1 publication Critical patent/EP0065806B1/fr
Expired legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/10Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material voltage responsive, i.e. varistors
    • H01C7/105Varistor cores
    • H01C7/108Metal oxide
    • H01C7/115Titanium dioxide- or titanate type

Definitions

  • the invention relates to a voltage-dependent resistor with a ceramic sintered body based on a polycrystalline alkaline earth metal titanate doped with a small amount of a metal oxide to produce an N-type conductivity, with electrodes arranged on opposite surfaces, and a method for producing such a resistor.
  • a voltage-dependent resistor is known from German patent application P 30 19 969.0, which is based on N-doped strontium titanate, to which a small proportion of a lead germanate phase was added before sintering, which leads to the formation of insulating grain boundary layers in the polycrystalline structure of the sintered body.
  • This known resistor can only be used to a limited extent because of its relatively high field strength - a current density of, for example, about 3 mA / cm 2 only occurs in fields of about 6 K V / cm; for example, it is not suitable for modern semiconductor circuits that operate at low voltages.
  • the invention has for its object to provide a voltage-dependent resistor according to the preamble of the claim and a method for its production such that a voltage-dependent resistor with a low field strength is obtained.
  • a method for producing a voltage-dependent resistor with a ceramic sintered body based on a polycrystalline, alkaline earth metal titanate doped with a small amount of a metal oxide to produce an N-type conductivity is characterized in that the sintered body is first produced in a reducing atmosphere, and then this sintered body covered on its surface with a suspension containing at least one metal oxide which has a relatively low melting point in relation to the sintered body or at least one suspension containing metal oxide compound which has a relatively low melting point in relation to the sintered body and then in an oxidizing atmosphere, preferably in air, at a temperature above is the melting point of the suspension component (s) is annealed.
  • the insulating layers are formed from at least one metal oxide or at least one metal oxide compound which (has) a lower melting point than the PerowsKit phase, (which) wets the polyCrystalline PerowsKit phase well at their grain edge regions and which (the) field strengths occurring during operation of the component shows reversible breakthrough signs. Due to the simultaneous presence of these parameters, good varistor properties are obtained due to influences at the grain boundaries.
  • the alkaline earth metal titanate is reacted by reacting S r C 0 3 with Ti0 2 in a molar ratio of 1: 1.001 to 1: 1.02 with the addition of the doping metals in the form of their oxides in an amount of 0.05 to a maximum 60 mol% of the component to be substituted formed after grinding and presintering for 15 h at 1150 ° C in air.
  • this is, according to a further advantageous embodiment of the invention, 4 hours at a temperature of 1460 ° C. in a reducing atmosphere consisting of mixed gas saturated with water vapor from 90 vol. % N 2 and 10 vol.% H 2 sintered.
  • La doped metal oxide La203, Nb 2 0 5 or W0 3 and metal oxide Bi 2 0 3 to be diffused in or metal oxide compound to be diffused in lead germanate Pb 5 Ge 3 0 11 are used.
  • La 3+ , Nb 5+ and W 6+ ions have proven to be particularly suitable for N doping.
  • dopants for example other rare earth metal ions such as Sm 3+ or else Y 3+ ; instead of Nb 5+ , Ta 5+ , As 5+ or Sb 5+ and instead of W 6+ , Mo 6+ and U 6+ can be used.
  • a suspension with at least one metal oxide with a relatively low melting point in relation to the sintering body or at least one metal oxide compound with a relatively low melting point with respect to the sintered body is applied to the sintered bodies 11 , applied in an organic binder and baked under oxidizing conditions at temperatures around or above 900 ° C., the applied, molten metal oxide or the metal oxide compound diffuses preferably along the grain boundaries in the semiconducting KeramiK and creates highly insulating grain boundary layers there.
  • Fig. 1 the current-voltage characteristic of a varistor of the composition Sr (Ti 0.996 W 0.004 ) is 0 3 . 0.01TiO 2 and a diffused phase of Pb 5 Ge 3 0 11 shown.
  • the varistor found is therefore characterized in comparison to the known varistor by a factor of> 10 lower field strength. This makes the varistor in use particularly suitable for modern semiconductor circuits that operate at low voltages. A comparable behavior can also be found in Nb- and La-doped SrTi0 3 varistors according to the invention.
  • the voltage across a varistor of composition is Sr (Ti 0.996 W 0.004 ) O 3 . 0.01TiO 2 with a diffused phase of Bi 2 0 3 at 1 mA and 30 mA depending on the temperature.
  • a liquid sintering phase with the SrTi0 3 is formed at a sintering above 1400 ° C - it can be assumed that this is the EuteKtiKum SrTiO 3 -TiO 2 occurring at ⁇ 1440 ° C, which is also due to the addition of dopants Can occur at lower temperatures.
  • a liquid sintering phase of this type promotes coarse grain growth, which, as already stated, is desirable.
  • the raw materials are weighed in an amount corresponding to the desired composition and 2 hours in one Ball mill, e.g. made of agate, wet mixed. This is followed by presintering at 1150 ° C for 15 h.
  • the presintered powders are wet-ground again (1 h in a ball mill, for example made of agate).
  • the ground material is then dried and the powders obtained in this way are then granulated using a suitable binder, for example a 10% aqueous polyvinyl alcohol solution.
  • the granules are pressed into shaped bodies suitable for ceramic resistances, e.g. into disks with a diameter of ⁇ 6 mm and a thickness of ⁇ 0.50 mm to a green density (bulk density) of approx.
  • the atmosphere can consist, for example, of mixed gas saturated with water vapor of 90 vol.% N 2 and 10 vol.% H 2 . Since the oxygen partial pressure of the mixed gas is determined by the ratio of the two partial pressures p H2 / P H2 0 ', the mixed gas was saturated with H 2 0 at ⁇ 25 ° C in order to create an always comparable reduction atmosphere.
  • sintering it is remarkable that coarse-grained structures preferably occur at sintering temperatures above 1440 ° C.
  • the reducing sintering should take place in a tightly closing furnace, for example a tube furnace is suitable. Excess reducing gas should flow out via a bubble counter in order to create a constant sintering atmosphere. Sintered bodies produced in this way are semiconducting and no longer show open porosity.
  • the insulating grain edge layers are made by diffusing in at least one molten metal oxide or at least one metal oxide compound, for example Bi 2 0 3 or lead germanate Pb 5 Ge 3 O 11 , is produced in air.
  • the metal oxide or the metal oxide compound is first suspended in a binder based on polyvinyl acetate and applied to the already sintered KeramiK.
  • the suspended metal oxide or the suspended metal oxide compound is then baked into the sintered body by a tempering process at a temperature at which they are in the molten state.
  • the minimum annealing temperature was a temperature slightly above the melting point of the metal oxide used or the used metal oxide compound determined.
  • the amounts of the metal oxides or metal oxide compounds diffused into the sintered body were determined in parallel experiments by weighing the sintered bodies before applying the suspension, after burning out the binder in air at 600 ° C. and after tempering.
  • Table 2 shows that changes in the annealing time and the tempering temperature have no systematic influence on the values for the threshold voltage and the current index.
  • Different operating voltages of the finished component can, however, be set by different thickness of the components.
  • the sintered bodies treated with a diffusion phase made of Bi 2 0 3 show the normal VDR dependency superimposed on a negative resistance range, i.e. the voltage across the component decreases with increasing current, which can be advantageous in certain applications, since this is practically a value for the Current index ß ⁇ 0 corresponds (reference is made to Fig. 2).
  • An overvoltage is thereby not only limited to a certain value, but additional energy is absorbed in the component as the current decreases as the current increases.
  • This property of the sintered bodies treated with Bi 2 0 3 is only partially caused by the heating and the associated decrease in resistance of the components. This is shown in FIG. 3, in which the voltage across the component was plotted at 1 mA and 30 mA as a function of the temperature. The 30 mA values were measured by short current pulses, so that self-heating by the measuring current is negligible.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Thermistors And Varistors (AREA)
EP82200615A 1981-05-29 1982-05-19 Résistance dépendant de la tension et procédé pour sa fabrication Expired EP0065806B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3121289 1981-05-29
DE19813121289 DE3121289A1 (de) 1981-05-29 1981-05-29 Spannungsabhaengiger widerstand und verfahren zu seiner herstellung

Publications (3)

Publication Number Publication Date
EP0065806A2 true EP0065806A2 (fr) 1982-12-01
EP0065806A3 EP0065806A3 (en) 1983-05-04
EP0065806B1 EP0065806B1 (fr) 1985-11-21

Family

ID=6133437

Family Applications (1)

Application Number Title Priority Date Filing Date
EP82200615A Expired EP0065806B1 (fr) 1981-05-29 1982-05-19 Résistance dépendant de la tension et procédé pour sa fabrication

Country Status (4)

Country Link
US (2) US4581159A (fr)
EP (1) EP0065806B1 (fr)
JP (1) JPS57199202A (fr)
DE (2) DE3121289A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4612140A (en) * 1983-04-08 1986-09-16 Murata Manufacturing Co., Ltd. Non-linear electrical resistor having varistor characteristics
WO2008107353A1 (fr) * 2007-03-02 2008-09-12 Epcos Ag Matériau piézoélectrique, actionneur multicouches et procédé de fabrication d'un composant piézoélectrique

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3523681A1 (de) * 1985-07-03 1987-01-08 Philips Patentverwaltung Verfahren zur herstellung keramischer sinterkoerper
JPH0670884B2 (ja) * 1986-12-27 1994-09-07 株式会社住友金属セラミックス マイクロ波用誘電体磁器組成物
US5225126A (en) * 1991-10-03 1993-07-06 Alfred University Piezoresistive sensor
DE10026258B4 (de) * 2000-05-26 2004-03-25 Epcos Ag Keramisches Material, keramisches Bauelement mit dem keramischen Material und Verwendung des keramischen Bauelements
DE102009058795A1 (de) * 2009-12-18 2011-06-22 Epcos Ag, 81669 Piezoelektrisches Keramikmaterial, Verfahren zur Herstellung des piezoelektrischen Keramikmaterials, piezoelektrisches Vielschichtbauelement und Verfahren zur Herstellung des piezoelektrischen Vielschichtbauelements
CN111542900B (zh) 2017-12-01 2022-04-15 京瓷Avx元器件公司 低纵横比压敏电阻

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1303160C2 (de) * 1963-12-13 1974-06-12 Philips Nv Verfahren zur herstellung eines durch fremdionen halbleitend gemachten elektrischen sperrschichtkondensators
US3561106A (en) * 1968-07-03 1971-02-09 Univ Iowa State Res Found Inc Barrier layer circuit element and method of forming
US3933668A (en) * 1973-07-16 1976-01-20 Sony Corporation Intergranular insulation type polycrystalline ceramic semiconductive composition
GB1556638A (en) * 1977-02-09 1979-11-28 Matsushita Electric Industrial Co Ltd Method for manufacturing a ceramic electronic component
US4237084A (en) * 1979-03-26 1980-12-02 University Of Illinois Foundation Method of producing internal boundary layer ceramic compositions
JPS56169316A (en) * 1980-05-30 1981-12-26 Matsushita Electric Industrial Co Ltd Composition functional element and method of producing same
JPS5735303A (en) * 1980-07-30 1982-02-25 Taiyo Yuden Kk Voltage vs current characteristic nonlinear semiconductor porcelain composition and method of producing same
US4347167A (en) * 1980-10-01 1982-08-31 University Of Illinois Foundation Fine-grain semiconducting ceramic compositions
US4419310A (en) * 1981-05-06 1983-12-06 Sprague Electric Company SrTiO3 barrier layer capacitor
JPS58103116A (ja) * 1981-12-16 1983-06-20 太陽誘電株式会社 コンデンサ用半導体磁器
JPS5891602A (ja) * 1981-11-26 1983-05-31 太陽誘電株式会社 電圧非直線磁器組成物
US4436650A (en) * 1982-07-14 1984-03-13 Gte Laboratories Incorporated Low voltage ceramic varistor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4612140A (en) * 1983-04-08 1986-09-16 Murata Manufacturing Co., Ltd. Non-linear electrical resistor having varistor characteristics
WO2008107353A1 (fr) * 2007-03-02 2008-09-12 Epcos Ag Matériau piézoélectrique, actionneur multicouches et procédé de fabrication d'un composant piézoélectrique
CN101627484B (zh) * 2007-03-02 2011-03-30 埃普科斯股份有限公司 压电材料、多层致动器以及用于制备压电构件的方法
US7999448B2 (en) 2007-03-02 2011-08-16 Epcos Ag Piezoelectric material, multilayer actuator and method for manufacturing a piezoelectric component

Also Published As

Publication number Publication date
JPH0236041B2 (fr) 1990-08-15
DE3267542D1 (en) 1986-01-02
US4581159A (en) 1986-04-08
EP0065806A3 (en) 1983-05-04
JPS57199202A (en) 1982-12-07
EP0065806B1 (fr) 1985-11-21
US4692289A (en) 1987-09-08
DE3121289A1 (de) 1982-12-23

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