EP0120106B1 - Energieanalysator für geladene Teilchen - Google Patents

Energieanalysator für geladene Teilchen Download PDF

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Publication number
EP0120106B1
EP0120106B1 EP19830102947 EP83102947A EP0120106B1 EP 0120106 B1 EP0120106 B1 EP 0120106B1 EP 19830102947 EP19830102947 EP 19830102947 EP 83102947 A EP83102947 A EP 83102947A EP 0120106 B1 EP0120106 B1 EP 0120106B1
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EP
European Patent Office
Prior art keywords
grid
sample
energy
mirror
charged particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP19830102947
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English (en)
French (fr)
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EP0120106A1 (de
Inventor
Hiroshi Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
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Shimadzu Corp
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Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to EP19830102947 priority Critical patent/EP0120106B1/de
Priority to DE8383102947T priority patent/DE3377038D1/de
Publication of EP0120106A1 publication Critical patent/EP0120106A1/de
Application granted granted Critical
Publication of EP0120106B1 publication Critical patent/EP0120106B1/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Definitions

  • the present invention relates to a charged particle energy analyzer such as for electron spectroscopy and ion spectroscopy, and, more particularly, to an energy analyzer of the type in which a low energy reflection filter and a high energy transmission filter are combined to measure the energy of charged particles generated from a sample.
  • Fig. 1 shows one of the conventional combinations of a low energy reflection filter and a high energy transmission filter provided in a conventional energy analyzer of the type comprising a spherical mirror and a spherical retarding grid as disclosed in U.S. Patent No. 3,749,926.
  • the geometry of Fig. 1 contains a low energy pass reflection filter and a high energy pass transmission filter.
  • the low energy pass reflection filter selectively reflects charged particles having energy lower than a predetermined value.
  • the high energy transmission filter selectively transmits electrons having energy higher than a predetermined value.
  • the low energy pass filter comprises a spherical mirror M having a curvature center O, and a spherical grid G 1 , which are arranged to be concentric.
  • the high energy transmission filter comprises the spherical grids G 2 and G 3 having the curvature center 0.
  • the mirror M has a potential V 1 .
  • the grid G 3 has another potential V 2 .
  • the grids G 1 and G 2 are at the same potential V a and appropriate voltage are applied between the grid G 1 , and the spherical mirror M, and the grids G 2 and G 3 .
  • can be collected by a detector disposed behind the grid G 3 .
  • a detector disposed behind the grid G 3 .
  • the energy analyzer since the low energy reflection filter and the high energy transmission filter must be disposed on opposite sides of the curvature center 0, the energy analyzer must be large as such. Furthermore, a sample cannot be placed close to the point S, because there is not space to set an exciting source such as an X-ray source, an electron gun, near the sample, so it needs a complicated lens system to focus the charged particles from the excited surface of the sample to the point S.
  • an exciting source such as an X-ray source, an electron gun
  • the lens system reduces the transmission of the charged particles according to the particle energy.
  • the charged particle analyzer according to the invention is a lensless device which provides a high luminosity and is adapted for electron spectroscopy for chemical analysis (ESCA), XPS, AES, and SIMS.
  • ESCA chemical analysis
  • XPS XPS
  • AES XPS
  • SIMS SIMS
  • the charged particle energy analyzer of Fig. 2 comprises an analyzer body 1, an inlet sleeve 2, an outlet sleeve 3 a first grid G 1 , a second grid G 2 , a third grid G 3 , a fourth grid G 4 , a fifth grid G 5 , and a sixth grid G s , a mirror 4 having a central axis, electrostatic shields 5, exhaustion ports 6, and an electron multiplier 7.
  • the above-constructed analyzer is shielded by a magnetic shield 20.
  • An X-ray gun 8 with an X-ray filter 9 is provided adjacent the analyzer.
  • a sample 10 is disposed under the inlet sleeve 2, being adjacent the X-ray gun 8.
  • the analyzer, the X-ray gun 8, and the sample 10 are disposed within a vacuum chamber 11.
  • the X-ray gun 8 is provided for irradiating the sample 10 with a beam of characteristic X-rays, so that the charged particles, in this case, are emitted from the sample 10.
  • the X-ray gun 8 may be replaced by an electron gun or an ion gun.
  • the charged particles disperse toward the inlet sleeve 2.
  • the outlet sleeve 3 receives the photoelectrons to be selected in accordance with the principle of the present inventions by the grids.
  • the mirror 4 has two focuses close to the center of the sample 10 and the center of the electron multiplier 7, which are symmetrical with respect to the central axis of the mirror4.
  • the analyzer body 1 covers the analyzer, wholly.
  • the third grid G 3 is disposed in front of the mirror 4, so that the grid G 3 is parallel with the mirror 4.
  • the third grid G 3 and the mirror 4 form a low energy reflection filter.
  • the first grid G 1 is provided for preventing performance decrease resulting from static sample charging.
  • the second grid G 2 is provided for making a retarding field.
  • the first grid G 1 and the second grid G 2 are arranged at the inlet sleeve 2. These grids G 1 and G 2 are concentric with the center of the sample 10.
  • the fourth grid G 4 , the fifth grid G 5 and the sixth grid G 6 are disposed at the outlet sleeve 3.
  • the photo-electrons having high energy can pass through the fifth grid G 5 .
  • the sixth grid G 6 is provided to accelerate the photoelectrons.
  • the fourth grid G 4 , the fifth grid G 6 and the sixth grid G 6 are concentric with the center of the electron multiplier 7.
  • the ring 12 is provided for supporting the third grid G 3 .
  • the mirror 4 made of aluminium has a reflection surface having a central axis. On the surface of the mirror 4, carbon 14 is coated to give a surface having a better conductivity and to reduce emission of secondary electrons.
  • the exhaustion ports 6 are provided, through which air can be evacuated from the analyzer body 1.
  • the electrostatic shield 5 is provided to prevent the field effect through the ports from the outer part.
  • the electron multiplier 7 is provided for detecting the photoelectrons and measuring their energy.
  • the respective parts have the following voltage. where preferably
  • the sample 10 and the first grid G 1 are both grounded together with the inlet sleeve 2 at the interval between the sample 10 and the first grid G 1 .
  • the second grid G 2 is provided for reflecting the photoelectrons having the energy lowerthan eV A .
  • the photoelectrons having the energy higher than eV A can pass through the second grid G 2 .
  • the second grid G 2 , the third grid G 3 and the fourth grid G 4 are all biased with the same voltage together with the analyzer body 1 surrounding these grids G 2 , G 3 and G 4 . Therefore, around the space surrounded by these grids G 2 , G 3 and G 4 , and the analyzer body 1, the same voltage is applied.
  • the voltage V A is to scan the energy.
  • the photoelectrons passing through the second grid G 2 go towards the third grid G 3 after straight passing through the above stated space.
  • The. mirror 4 having a central axis is provided for selectively reflecting the photoelectrons. Since the absolute value of the voltage at the mirror 4 is more than that of the voltage at the third grid G 3 , namely, volt, the photoelectrons having the energy smaller than are reflected by the mirror 4 and the photo- electrons having the energy larger than collide with the mirror 4 to thereby consume the energy.
  • the analyser pass energy Eo is referred to pass energy of the photoelectrons in the analyzer.
  • the photoelectrons reflected by the mirror 4 are directed straight toward the center of the outlet sleeve 3.
  • the photoelectrons reflected by the mirror 4 can pass through the fourth grids G 4 having the voltage of -V A .
  • the fourth and fifth grid G 4 and G 5 are provided for selectively transmitting the photoelectrons as another high energy transmission filter. Therefore, the photoelectrons having an energy smaller than are reflected by the fifth grid G 5 and the photo- electrons having an energy larger than pass the fifth grid G s .
  • the voltage Vp applied between the fifth grid G 5 and the sixth grid G 6 is provided for accelerating the photoelectrons.
  • the photoelectrons are converged at the electron multiplier 7, the electrons having an energy larger than as selected by the fifth grid G 5 and smaller than as selected by the mirror 4.
  • the electron multiplier detects the electrons having the band energy e ⁇ AE.
  • Fig. 3 shows a graph representing the voltages applied to the grids and the mirror 4 and the filter characteristic according to the present invention.
  • the photo- electrons having an energy in a half width of the e ⁇ AE can be selected which are detected by the electron multiplier 7.
  • the energy analysis is carried out by changing the value of V A to be applied to the second, third, and fourth grids G 2 , G 3 and G 4 while the voltages of the second, third and fourth grids G 2 , G 3 and G 4 are made identical, and the voltage differences between the grids G 2 , G 3 , G 4 and the mirror 4, the third grid G 3 , the fifth grid G 5 are constant.
  • the electron image of the sample 10 is formed on the electron multiplier 7.
  • the photoelectrons passed through the fifth grid G 5 are so slow, as to be zero electron volt.
  • the sixth grid G 6 is provided for accelerating the photoelectron passing through the fifth grid G 5 .
  • the sixth grid G 6 is needed between the fifth grid G 5 and the electron multiplier 7 for obtaining the good image, because the orbits of the electrons having very low energy are easily disturbed by the undesired outer electrostatic and magnetic fields.
  • the detector to obtain the information of the image is a position sensitive one such as a channel plate or a fluore- cent screen followed by a video camera.
  • the mirror 4 may be spherical when the distance between the sample 10 and the multiplier 7 is small enough as compared with the distance between the mirror surface and the sample 10, and the distance between the mirror surface and the multiplier 7.
  • Such a spherical mirror is disposed at a central point between the optical distance between the sample 10 and the multiplier 7.
  • Fig. 4 shows an enlarged view of a filter means such as the third grid G 3 and the mirror 4. It is now described that strictly speaking, the principal ray in the analyser in Fig. 2 is reflected by the mirror 4 as shown in Fig. 4. Before the photoelectrons pass through the third grid G 3 , they run straight. After the photoelectrons pass through the third grid G 3 , they run showing a parabola trace to thereby be reflected by the mirror 4 and be emitted out of the third grid G 3 .
  • a virtual reflection surface is a spheroid surface separated at the distance d from the mirror 4. Therefore, the focuses of the center of the mirror 4 and the detector 7 are not the focus of the mirror 4, but one of a spheroid surface 4'.
  • a mirror having a central axis which has two complex focuses.
  • the sample and the electron multiplier are disposed. Therefore, the photo- electrons irradiated from the sample are introduced directly into the analyzer.
  • the sample, the X-ray gun, and the electron multiplier are disposed outside the analyzer, so that the photoelectrons in the analyser are not prevented from raying. The photoelectrons emitted from the sample with wide solid angles are not lost.
  • the system of the present invention provides high sensitivity concerning the photo- electrons as compared with the system of Fig. 1. Since the energy analyzing elements are gathered at the side of the curve surface of the reflected mirror, the size of the system of Fig. 2 can be half that of the system of Fig. 1.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Claims (5)

1. Energieanalysator für geladene Teilchen, mit Mitteln (8) zur Erzeugung von Strahlung oder geladenen Teilchen, die auf die Oberfläche einer Probe (10) auftreffen, so daß geladene Teilchen von der Probe emittiert werden, einem Niederenergie-Reflexionsfilter mit einem eine Mittelachse aufweisenden Reflektor (4) und einem in Bezug auf die Probe (10) vor dem Reflektor angeordneten Gitter (G3), zur selektiven Reflexion der von der Probe emittierten geladenen Teilchen, die eine Energie unterhalb eines ersten Wertes aufweisen, Detektormitteln (7) zum Nachweis der reflektierten geladenen Teilchen und einem Hochenergie-Transmissionsfilter (G5), der selektiv die geladenen Teilchen, deren Energie höher ist als ein zweiter Wert, zu dem Detektor (7) durchläßt, dadurch gekennzeichnet, daß die Probe (10) und der Detektor (7) an konjugierten Punkten in Bezug auf den Reflektor und symmetrisch zu dessen Mittelachse angeordnet sind.
2. Energieanalysator nach Anspruch 1, dadurch gekennzeichnet, daß der Reflektor (4) ein sphärischer Spiegel ist.
3. Energieanalysator nach Anspruch 1, gekennzeichnet durch ein zwischen dem Hochenergie-Transmissionsfilter (G3) und dem Detektor (7) angeordnetes zusätzliches Gitter (G6) zur Beschleunigung der geladenen Teilchen.
4. Energieanalysator nach Anspruch 1, dadurch gekennzeichnet, daß der Detektor (7) ein positionsempfindlicher Detektor zur Erfassung von Informationen über das Bild der Probe ist.
5. Energieanalysator nach Anspruch 1, dadurch gekennzeichnet, daß der Hochenergie-Transmissionsfilter eine erste Filtereinrichtung (G2) und eine zweite Filtereinrichtung (G5) umfaßt und daß die erste Filtereinrichtung (G2) zwischen der Probe (10) und dem Reflektor (4) angeordnet ist, während die zweite Filtereinrichtung (Gs) zwischen dem Reflektor (4) und dem Detektor (7) angeordnet ist.
EP19830102947 1983-03-24 1983-03-24 Energieanalysator für geladene Teilchen Expired EP0120106B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP19830102947 EP0120106B1 (de) 1983-03-24 1983-03-24 Energieanalysator für geladene Teilchen
DE8383102947T DE3377038D1 (en) 1983-03-24 1983-03-24 Charged particle energy analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19830102947 EP0120106B1 (de) 1983-03-24 1983-03-24 Energieanalysator für geladene Teilchen

Publications (2)

Publication Number Publication Date
EP0120106A1 EP0120106A1 (de) 1984-10-03
EP0120106B1 true EP0120106B1 (de) 1988-06-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP19830102947 Expired EP0120106B1 (de) 1983-03-24 1983-03-24 Energieanalysator für geladene Teilchen

Country Status (2)

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EP (1) EP0120106B1 (de)
DE (1) DE3377038D1 (de)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3935454A (en) * 1974-06-28 1976-01-27 E. I. Du Pont De Nemours & Company Electron collection in electron spectrometers

Also Published As

Publication number Publication date
EP0120106A1 (de) 1984-10-03
DE3377038D1 (en) 1988-07-14

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