EP0144524A2 - Pompe getter pour installations à vide élevé et à décharge au gaz - Google Patents

Pompe getter pour installations à vide élevé et à décharge au gaz Download PDF

Info

Publication number: EP0144524A2
Authority: EP; European Patent Office
Prior art keywords: getter; pump; heating elements; gas discharge; getter pump
Prior art date: 1983-09-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP84109514A

Other languages

German (de)

English (en)

Other versions

EP0144524A3 (fr

Inventor

Hinrich Dr. Rer. Nat. Dipl.-Phys. Heynisch

Erwin Dr. rer. nat. Hübner

Heinz Ing. grad. Mägdefessel

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Siemens AG

Siemens Corp

Original Assignee

Siemens AG

Siemens Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1983-09-09

Filing date

1984-08-09

Publication date

1985-06-19

1984-08-09 Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG

1985-06-19 Publication of EP0144524A2 publication Critical patent/EP0144524A2/fr

1986-10-08 Publication of EP0144524A3 publication Critical patent/EP0144524A3/fr

Status Withdrawn legal-status Critical Current

Links

Images

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Definitions

the invention relates to a getter pump for high vacuum and gas discharge systems with getter bodies made of non-evaporating getter material and associated heating elements arranged in a pump vessel.
the working temperature either had to be varied or the individual getters had to be kept at different temperatures with at least two heating circuits.
the invention has for its object to increase the specific performance of getter pumps and in particular to enable the production of a high vacuum in the pressure range from 10 -3 mbar and better by non-evaporating getters.
a getter pump according to the invention has the advantage that very high redundancy is achieved by arranging many getters in the pump vessel.
the individual getters are designed in such a way that they can be reactivated practically as often as required, even after the pump has been vented.
the getter pump works either after activation (700 to 1200 ° C) at ambient temperature, i.e. H. with the heating circuit switched off, or it works at an optimal temperature (conditioning temperature of approx. 100 to 700 ° C).
the getter pumps shown in FIGS. 1 to 3 essentially consist of several getter bodies 1 provided with heating elements 2, which are arranged in a pump vessel 3 provided with a pump flange 4.
the pump vessel 3 is preferably made of V2A steel.
the heating elements are connected in parallel.
a plurality of heating elements 2 are connected in series in groups and the groups in turn are connected in parallel.
Fig. 4 shows an embodiment in which the pump vessel 3 is not shown.
the optimal effectiveness e.g. of the zircon getter 1 is achieved when the temperature-dependent selectivity of the material is used.
the embodiment according to FIG. 2 allows the optimal operating conditions to be set separately for each getter group.

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

EP84109514A 1983-09-09 1984-08-09 Pompe getter pour installations à vide élevé et à décharge au gaz Withdrawn EP0144524A3 (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE3332608		1983-09-09
DE19833332608 DE3332608A1 (de)	1983-09-09	1983-09-09	Getter-pumpe fuer hochvakuum- und gasentladungsanlagen

Publications (2)

Publication Number	Publication Date
EP0144524A2 true EP0144524A2 (fr)	1985-06-19
EP0144524A3 EP0144524A3 (fr)	1986-10-08

Family

ID=6208668

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP84109514A Withdrawn EP0144524A3 (fr)	1983-09-09	1984-08-09	Pompe getter pour installations à vide élevé et à décharge au gaz

Country Status (2)

Country	Link
EP (1)	EP0144524A3 (fr)
DE (1)	DE3332608A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0297061A3 (en) *	1987-06-24	1989-10-18	Saes Getters S.P.A.	Vacuum insulated electrical conductor employing a getter device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
IT1295340B1 (it) *	1997-10-15	1999-05-12	Getters Spa	Pompa getter ad elevata velocita' di assorbimento di gas

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2988265A (en) *	1958-03-21	1961-06-13	Nat Res Corp	Vacuum device
IT963874B (it) *	1972-08-10	1974-01-21	Getters Spa	Dispositivo getter perfezionato contenente materiale non evapora bile
US4137012A (en) *	1976-11-03	1979-01-30	S.A.E.S. Getters S.P.A.	Modular getter pumps

1983
- 1983-09-09 DE DE19833332608 patent/DE3332608A1/de not_active Withdrawn
1984
- 1984-08-09 EP EP84109514A patent/EP0144524A3/fr not_active Withdrawn

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0297061A3 (en) *	1987-06-24	1989-10-18	Saes Getters S.P.A.	Vacuum insulated electrical conductor employing a getter device

Also Published As

Publication number	Publication date
EP0144524A3 (fr)	1986-10-08
DE3332608A1 (de)	1985-03-28

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Legal Events

Date	Code	Title	Description
1985-04-20	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
1985-06-19	AK	Designated contracting states	Designated state(s): CH DE FR IT LI
1986-08-19	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
1986-10-08	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): CH DE FR IT LI
1987-05-27	17P	Request for examination filed	Effective date: 19870326
1987-10-21	17Q	First examination report despatched	Effective date: 19870902
1988-06-21	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN
1988-08-10	18W	Application withdrawn	Withdrawal date: 19880613
2007-08-08	RIN1	Information on inventor provided before grant (corrected)	Inventor name: HEYNISCH, HINRICH, DR. RER. NAT. DIPL.-PHYS. Inventor name: MAEGDEFESSEL, HEINZ, ING. GRAD. Inventor name: HUEBNER, ERWIN, DR. RER. NAT.