EP0146685A2 - Pompe getter à sorption ayant un accumulateur de chaleur pour installations à vide élevé et à décharge au gaz - Google Patents

Pompe getter à sorption ayant un accumulateur de chaleur pour installations à vide élevé et à décharge au gaz Download PDF

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Publication number
EP0146685A2
EP0146685A2 EP84109515A EP84109515A EP0146685A2 EP 0146685 A2 EP0146685 A2 EP 0146685A2 EP 84109515 A EP84109515 A EP 84109515A EP 84109515 A EP84109515 A EP 84109515A EP 0146685 A2 EP0146685 A2 EP 0146685A2
Authority
EP
European Patent Office
Prior art keywords
getter
sorption pump
heating element
gas
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84109515A
Other languages
German (de)
English (en)
Other versions
EP0146685A3 (fr
Inventor
Heinz Ing. grad. Mägdefessel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of EP0146685A2 publication Critical patent/EP0146685A2/fr
Publication of EP0146685A3 publication Critical patent/EP0146685A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering

Definitions

  • the invention has for its object to increase the specific performance of getter pumps with a simultaneous reduction in the required heating output and to stabilize them over the long term with the aid of heat storage.
  • the pumping speed of a getter body increases with its surface, i.e. also with its porosity, but the capacity with its mass. Both factors together determine the temporal stability over the amount of gas sorbed. Furthermore, this stability is influenced by the working temperature depending on the type of gas. Highly porous bodies lose mechanical strength with increasing mass. The gases with a suitable mesh size proposed in the invention nevertheless allow the use of extremely high porosity with a large mass.
  • the heat storage is achieved by the ceramic mass integrated in the construction.
  • the possibilities are extremely versatile and can be optimized in a practical way.
  • the slow cooling of the getter body has an advantageous effect in that the temperature-related selective optimal pumping areas pass very slowly and thus all important gas type-related sorption maxima are recorded.
  • the outer heating coil 5 is embedded in an insulating compound 6.
  • both getter bodies 1, which are provided with different getter materials as required, are heated with a heating element 5.
  • the pump can be installed on any vacuum flange with suitable heater connections (current feedthroughs) 7. It can also be used as an immersion or appendix pump.
  • FIG. 5 is provided with the reference numeral 10 getter sorption example 8 with plug contacts with purely schematically shows in horizontal construction, the reference numeral 7 are in turn the H - eizeran Why designated.
  • FIG. 6 shows the use of the getter sorption pump provided with the reference number 10 as a throughflow pump directly in the gas stream. It can be installed in a flange tube 9 (standard part) and installed as a closed and replaceable pump unit in vacuum or gas discharge systems (for example for noble gas cleaning).

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP84109515A 1983-09-09 1984-08-09 Pompe getter à sorption ayant un accumulateur de chaleur pour installations à vide élevé et à décharge au gaz Withdrawn EP0146685A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3332647 1983-09-09
DE19833332647 DE3332647A1 (de) 1983-09-09 1983-09-09 Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen

Publications (2)

Publication Number Publication Date
EP0146685A2 true EP0146685A2 (fr) 1985-07-03
EP0146685A3 EP0146685A3 (fr) 1986-10-01

Family

ID=6208693

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84109515A Withdrawn EP0146685A3 (fr) 1983-09-09 1984-08-09 Pompe getter à sorption ayant un accumulateur de chaleur pour installations à vide élevé et à décharge au gaz

Country Status (2)

Country Link
EP (1) EP0146685A3 (fr)
DE (1) DE3332647A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003010790A1 (fr) * 2001-06-26 2003-02-06 Saes Getters S.P.A. Dispositif getter evaporable pour tubes cathodiques

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5426300A (en) * 1993-09-17 1995-06-20 Leybold Inficon, Inc. Portable GCMS system using getter pump
US5401298A (en) * 1993-09-17 1995-03-28 Leybold Inficon, Inc. Sorption pump
CN112169528B (zh) * 2020-09-24 2022-07-12 有研工程技术研究院有限公司 一种内加热式吸气剂片及其制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL163054C (nl) * 1968-08-10 1980-07-15 Getters Spa Niet-verdampende getterinrichting.
DE1947413A1 (de) * 1968-10-28 1970-04-30 Getters Spa Getterpumpe zur Erzeugung und Aufrechterhaltung eines Vakuums in geschlossenen Gefaessen
DE2034633C3 (de) * 1969-07-24 1979-10-25 S.A.E.S. Getters S.P.A., Mailand (Italien) Kartusche für eine Getterpumpe
US4297082A (en) * 1979-11-21 1981-10-27 Hughes Aircraft Company Vacuum gettering arrangement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003010790A1 (fr) * 2001-06-26 2003-02-06 Saes Getters S.P.A. Dispositif getter evaporable pour tubes cathodiques
US6873102B2 (en) 2001-06-26 2005-03-29 Saes Getters S.P.A. Evaporable getter device with metallic nets

Also Published As

Publication number Publication date
EP0146685A3 (fr) 1986-10-01
DE3332647A1 (de) 1985-03-28

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Inventor name: MAEGDEFESSEL, HEINZ, ING. GRAD.