EP0152601A1 - Bain alcalin aqueux pour le dépôt chimique du cuivre ou du nickel - Google Patents

Bain alcalin aqueux pour le dépôt chimique du cuivre ou du nickel Download PDF

Info

Publication number
EP0152601A1
EP0152601A1 EP84115513A EP84115513A EP0152601A1 EP 0152601 A1 EP0152601 A1 EP 0152601A1 EP 84115513 A EP84115513 A EP 84115513A EP 84115513 A EP84115513 A EP 84115513A EP 0152601 A1 EP0152601 A1 EP 0152601A1
Authority
EP
European Patent Office
Prior art keywords
aqueous alkaline
compounds
alkaline bath
bath according
bath
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP84115513A
Other languages
German (de)
English (en)
Other versions
EP0152601B1 (fr
Inventor
Josif Dr. Culjkovic
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bayer Pharma AG
Original Assignee
Schering AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schering AG filed Critical Schering AG
Publication of EP0152601A1 publication Critical patent/EP0152601A1/fr
Application granted granted Critical
Publication of EP0152601B1 publication Critical patent/EP0152601B1/fr
Expired legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/32Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
    • C23C18/34Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/38Coating with copper
    • C23C18/40Coating with copper using reducing agents

Definitions

  • the invention relates to an aqueous alkaline bath for the chemical deposition of copper, nickel, cobalt or their alloys according to the preamble of claim 1 and a method for the adhesive chemical deposition of these metals and alloys according to the preamble of claim 11.
  • Baths of the type described in the introduction are generally known. They usually contain considerable amounts of complexing agents to prevent the precipitation of metal hydroxides. This inevitably leads to an unsatisfactory quality of the coatings deposited from these baths, which, depending on the bath type, contain considerable amounts of impurities such as carbon, nitrogen, hydrogen and others. can contain, which have a decisive influence on the crystal structure and thus on technologically important properties, such as specific electrical conductivity, internal tension, adhesive strength and ductility. For example, this has a particularly disruptive effect in the production of printed circuit boards in which undesired bubbles, lifts and cracks can form, and the more so the thicker the deposited metal layer.
  • the concentrates or rinsing water produced during the operation of the known baths are moreover usually obtained in the form of solutions which can only be disposed of with great technical effort since their direct return to the working process is not readily possible.
  • the object of the present invention is to provide a bath and a method which permit a highly adhesive chemical deposition of copper, nickel, cobalt and their alloys with the greatest purity and at the same time technically problem-free recovery of the metals used.
  • metal coatings of the highest purity can be deposited from the bath according to the invention, which is not possible with the known chemical baths.
  • the sum of impurities in carbon, hydrogen and nitrogen in copper coatings deposited according to the invention is 0.03%, while in conventional coatings, impurities are in the order of 0.07 to 0.37%.
  • the quality of the metal coatings deposited according to the invention therefore corresponds to that which is otherwise only achieved with electrolytic metal deposition. Purity and the properties of the coatings deposited according to the invention, such as average residual stress, average lattice distortion and the crystallite size, are therefore equal to the electroplated coatings.
  • the bath according to the invention therefore enables in particular the production of printed circuit boards with adhesive layers which are extremely ductile and easy to solder and which are characterized by the lowest internal stresses, which means a breakthrough in technology.
  • the complexing agents to be scrapped according to the invention also have the particular advantage of being readily biodegradable and thus, in contrast to the known complexing agents, to be particularly environmentally friendly.
  • the glycerol to be used according to the invention has not been shown to have any damaging effect on organisms, so that, taking further account of its classification as a highly biodegradable substance, it exhibits favorable ecological properties.
  • metals copper, nickel and cobalt their sulfates, nitrates, chlorides, bromides, rhodanides, oxides, hydroxides, carbonates, basic carbonates, acetates and others can be used, specifically in metal concentrations of 10 -4 to 2 mol / liter, preferably of 10 - 2 to 1 mole / liter.
  • These metal compounds form complex compounds with the complexing agents according to the invention in the bath solution, which develop the desired effect.
  • these complex compounds can also be prepared per se in a manner known per se and can only be added to the bath solution before they are used.
  • the complex compound Schiff's potassium cupri biuret according to the invention can be prepared by adding 1 mol of copper acetate to an aqueous solution of 1 mol of biuret and 4 mol of potassium hydroxide by precipitation with a 2% alcoholic potassium hydroxide solution.
  • the molar ratio of metal to complexing agent is at least -1: 0.8, preferably from 1: 1 to 1: 6.
  • the labeled polyols which also have the general formula, are suitable as complexing agents according to the invention with R in the meaning of hydrogen or C 1 -C 6 alkyl and n the numbers 2 to 8 can be described.
  • Biuret-type compounds are understood to mean those which have at least two in the molecule Contain groups that are connected in an open chain and directly to one another or by a C or N atom.
  • the stability of the metal complexes formed from these complexing agents is extremely high, but can, if desired, be influenced immediately if the pH changes by acidification, which leads to the complete precipitation of the metal hydroxide, which can then be returned to the working process.
  • the pH of the bath according to the invention should be greater than 10, preferably from 12 to 14, and is kept at the desired value by adding customary pH-regulating substances or mixtures of substances.
  • Particularly suitable reducing agents are formaldehyde, sodium borohydride, dimethylaminoborane, diethylaminoborane, sodium hypophosphite, hydrazine, glyceraldehyde, dihydroxyacetone and other customary reducing agents.
  • the bath is operated at temperatures from 5 ° C to the boiling point, preferably from 20 ° to 80 ° C.
  • the bath can additionally contain stabilizers known per se based on polyamines, N-containing compounds, reaction products of N-containing compounds with epihalohydrins, sulfur or selenium compounds with the oxidation state minus one or minus two, mercury compounds or lead compounds, to ensure a sufficient lifespan of the bath.
  • the basic composition of the bath according to the invention is as follows:
  • the bath according to the invention is suitable for the full and partial metallization of conductors and non-conductors after corresponding customary pretreatment, such as degreasing, pickling, cleaning, conditioning, activating and reducing.
  • customary pretreatment such as degreasing, pickling, cleaning, conditioning, activating and reducing.
  • a preferred field of application is the production of printed circuits.
  • the conductors that had been plated through in this bath were, according to the transmitted light method, flawless.
  • the deposition rate was approx. 2 fm / h, so that a treatment time of 15-20 minutes is completely sufficient.
  • This bath deposits ductile copper coatings at a speed of approx. 5 ⁇ m / h, which are particularly suitable for semi or additive technology.
  • Copper-phosphorus alloys with 0.3 to 0.5% phosphorus were deposited from this bath.
  • the deposition rate was 1.2 ⁇ m / h.
  • Adhesive layers of Cu 2 O on Al 2 0 3 ceramic could be deposited from this bath. After an annealing process at 400 to 600 ° C, within 10 minutes the layers were strengthened to 30 ⁇ m / in an acidic galvanic copper bath. Tempering and spinel formation resulted in an increase in adhesive strength of up to 2 N / mm in a peel test. With conventional techniques, without spinel formation, an adhesive strength of only 0.7 N / mm is achieved.
  • Ductile nickel coatings with a boron content of approximately 0.2 to 0.4% could be deposited from this bath.

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Chemically Coating (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
EP84115513A 1984-02-04 1984-12-15 Bain alcalin aqueux pour le dépôt chimique du cuivre ou du nickel Expired EP0152601B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19843404270 DE3404270A1 (de) 1984-02-04 1984-02-04 Waessriges alkalisches bad zur chemischen abscheidung von kupfer, nickel, kobalt und deren legierungen
DE3404270 1984-02-04

Publications (2)

Publication Number Publication Date
EP0152601A1 true EP0152601A1 (fr) 1985-08-28
EP0152601B1 EP0152601B1 (fr) 1988-12-07

Family

ID=6227013

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84115513A Expired EP0152601B1 (fr) 1984-02-04 1984-12-15 Bain alcalin aqueux pour le dépôt chimique du cuivre ou du nickel

Country Status (6)

Country Link
US (1) US4720404A (fr)
EP (1) EP0152601B1 (fr)
JP (1) JPS60204885A (fr)
AT (1) AT384829B (fr)
CA (1) CA1254353A (fr)
DE (2) DE3404270A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0346265A1 (fr) * 1988-06-09 1989-12-13 United Technologies Corporation Compositions à base de thiourée éthylénique pour la production de revêtements anti-usures, déposés sans courant électrique, à base de nickel et bore
WO1995027812A1 (fr) * 1994-04-08 1995-10-19 Plastform Gmbh Procede de revetement de surfaces metalliques avec du cuivre ou des alliages de cuivre
EP3190209A1 (fr) 2016-01-06 2017-07-12 ATOTECH Deutschland GmbH Composés 1-acylguanidine et utilisation de ces composés dans un dépôt autocatalytique de nickel et de revêtements d'alliage de nickel

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6054173A (en) * 1997-08-22 2000-04-25 Micron Technology, Inc. Copper electroless deposition on a titanium-containing surface
US5976614A (en) * 1998-10-13 1999-11-02 Midwest Research Institute Preparation of cuxinygazsen precursor films and powders by electroless deposition
US6797312B2 (en) * 2003-01-21 2004-09-28 Mattson Technology, Inc. Electroless plating solution and process
US20060141281A1 (en) * 2004-12-24 2006-06-29 Tdk Corporation R-T-B system permanent magnet and plating film
KR101681116B1 (ko) * 2016-05-26 2016-12-09 (주)오알켐 인쇄 회로 기판의 스루홀을 무전해 동 도금하는 방법 및 그 방법에 사용되는 촉매 용액을 제조하는 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2935425A (en) * 1954-12-29 1960-05-03 Gen Am Transport Chemical nickel plating processes and baths therefor
US3095309A (en) * 1960-05-03 1963-06-25 Day Company Electroless copper plating
US3268353A (en) * 1960-11-18 1966-08-23 Electrada Corp Electroless deposition and method of producing such electroless deposition

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US2430581A (en) * 1944-11-29 1947-11-11 Rca Corp Metallizing nonmetallic bodies
US2938805A (en) * 1958-03-31 1960-05-31 Gen Electric Process of stabilizing autocatalytic copper plating solutions
US3383224A (en) * 1965-11-09 1968-05-14 Shipley Co Electroless copper deposition
US3472660A (en) * 1965-11-14 1969-10-14 Toshihiko Satake Separation and polishing of rice grains
DE1298827B (de) * 1966-03-19 1969-07-03 Siemens Ag Vernickelungsloesung zum stromlosen Vernickeln von Siliciumscheiben
US3992211A (en) * 1968-07-15 1976-11-16 Trans-Metals Corporation Electroless plating composition
US3615735A (en) * 1968-08-13 1971-10-26 Shipley Co Electroless copper plating
GB1332307A (en) * 1970-01-17 1973-10-03 Marconi Co Ltd Electroless plating solutions
JPS5149576B2 (fr) * 1971-08-10 1976-12-27
JPS4928571A (fr) * 1972-07-11 1974-03-14
JPS4962330A (fr) * 1972-10-19 1974-06-17
US4287253A (en) * 1975-04-08 1981-09-01 Photocircuits Division Of Kollmorgen Corp. Catalytic filler for electroless metallization of hole walls
SU740860A1 (ru) * 1978-02-06 1980-06-15 Предприятие П/Я В-8657 Раствор дл химического осаждени сплава никель-бор
US4268536A (en) * 1978-12-07 1981-05-19 Western Electric Company, Inc. Method for depositing a metal on a surface
DE2919726A1 (de) * 1979-05-16 1980-11-27 Bernd Tolkmit Verfahren zum aufbringen metallischer ueberzuege auf metallische werkstuecke durch mechanisch-chemisches behandeln der werkstuecke
DE2854159C2 (de) * 1978-12-15 1982-04-22 Bernd 4000 Düsseldorf Tolkmit Verfahren zum Aufbringen metallischer Überzüge auf metallische Werkstücke durch mechanisch-chemisches Behandeln der Werkstücke
JPS5643109A (en) * 1979-09-07 1981-04-21 Hitachi Ltd Book stocking and delivering apparatus
DE3121015C2 (de) * 1981-05-27 1986-12-04 Friedr. Blasberg GmbH und Co KG, 5650 Solingen Verfahren zur Aktivierung von gebeizten Oberflächen und Lösung zur Durchführung desselben
CA1184359A (fr) * 1981-10-23 1985-03-26 Donald A. Arcilesi Repression des impuretes metalliques en cuivrage non electrolytique

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2935425A (en) * 1954-12-29 1960-05-03 Gen Am Transport Chemical nickel plating processes and baths therefor
US3095309A (en) * 1960-05-03 1963-06-25 Day Company Electroless copper plating
US3268353A (en) * 1960-11-18 1966-08-23 Electrada Corp Electroless deposition and method of producing such electroless deposition

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0346265A1 (fr) * 1988-06-09 1989-12-13 United Technologies Corporation Compositions à base de thiourée éthylénique pour la production de revêtements anti-usures, déposés sans courant électrique, à base de nickel et bore
WO1995027812A1 (fr) * 1994-04-08 1995-10-19 Plastform Gmbh Procede de revetement de surfaces metalliques avec du cuivre ou des alliages de cuivre
EP3190209A1 (fr) 2016-01-06 2017-07-12 ATOTECH Deutschland GmbH Composés 1-acylguanidine et utilisation de ces composés dans un dépôt autocatalytique de nickel et de revêtements d'alliage de nickel
WO2017118582A1 (fr) * 2016-01-06 2017-07-13 Atotech Deutschland Gmbh Composés d'1-acylguanidine et leur utilisation dans le dépôt autocatalytique de revêtements en nickel et alliages de nickel

Also Published As

Publication number Publication date
US4720404A (en) 1988-01-19
CA1254353A (fr) 1989-05-23
JPS60204885A (ja) 1985-10-16
ATA27385A (de) 1987-06-15
DE3475535D1 (en) 1989-01-12
EP0152601B1 (fr) 1988-12-07
AT384829B (de) 1988-01-11
DE3404270A1 (de) 1985-08-08

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