EP0173787A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP0173787A2
EP0173787A2 EP85100240A EP85100240A EP0173787A2 EP 0173787 A2 EP0173787 A2 EP 0173787A2 EP 85100240 A EP85100240 A EP 85100240A EP 85100240 A EP85100240 A EP 85100240A EP 0173787 A2 EP0173787 A2 EP 0173787A2
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
barrier
liquid
lock
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP85100240A
Other languages
German (de)
English (en)
Other versions
EP0173787B1 (fr
EP0173787A3 (en
Inventor
Lutz Arndt
Paul Dr. Bachmann
Hanns-Peter Dr. Berges
Wolfgang Leier
Dieter Vorberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19843425177 external-priority patent/DE3425177A1/de
Priority claimed from DE19843435921 external-priority patent/DE3435921A1/de
Application filed by Leybold AG, Leybold Heraeus GmbH filed Critical Leybold AG
Publication of EP0173787A2 publication Critical patent/EP0173787A2/fr
Publication of EP0173787A3 publication Critical patent/EP0173787A3/de
Application granted granted Critical
Publication of EP0173787B1 publication Critical patent/EP0173787B1/fr
Expired legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/16—Filtration; Moisture separation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4456—With liquid valves or liquid trap seals
    • Y10T137/4463—Liquid seal in liquid flow line; flow liquid forms seal
    • Y10T137/4576—U-seals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4456—With liquid valves or liquid trap seals
    • Y10T137/4463—Liquid seal in liquid flow line; flow liquid forms seal
    • Y10T137/4576—U-seals
    • Y10T137/4606—Even diameter legs
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4456—With liquid valves or liquid trap seals
    • Y10T137/4643—Liquid valves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump

Definitions

  • Vacuum pumps are often used to pump or extract reactive gases that react in particular with moisture and / or oxygen. Such reactions can be fixed. Substances are formed that accumulate in the exhaust area of the vacuum pump, initially rejuvenate and finally clog them. Furthermore, these solid substances can shorten the life of the vacuum pump considerably due to their mechanical effect. However, the reactions described can also lead to liquid or gaseous substances which have a corrosive effect on the materials of the vacuum pump or - if it is a liquid-sealed vacuum pump - impair the properties of the sealing liquid. So z. B. Form titanium chloride with moisture corrosive hydrochloric acid and solid titanium oxide. Another example of the formation of a solid residue is the reaction of SiH 4 with oxygen to Si0 2 . In the presence of SiH 2 Cl 2 , reactions occur with water that produce hydrochloric acid and solid silicon oxide.
  • the object of the present invention is to equip a vacuum pump in such a way that the disadvantages described can no longer occur.
  • this object is achieved in that the outlet of the vacuum pump is followed by a barrier designed in the manner of a siphon and preventing the entry of water vapor or oxygen.
  • a vacuum pump equipped with such a lock is completely protected against moisture or oxygen.
  • Adverse reactions that lead to solid deposits or corrosive substances can therefore no longer take place in the area of the vacuum pump reactive gases or vapors flow from the outlet of the vacuum pump to the lock according to the invention and penetrate the liquid present therein, which prevents the ingress of moisture or oxygen into the vacuum pump.
  • the reaction zone between the reactive gases or vapors and the moisture or oxygen has thus been moved from the area of the vacuum pump into a simple external component, which, for. B. may consist of corrosion-resistant components.
  • Substances which form solids during reactions with moisture or oxygen and which would block the outlet of the vacuum pump without the lock according to the invention are deposited in the housing of the lock according to the invention.
  • the capacity of the lock according to the invention is at least 20 times greater until it becomes blocked. Regular maintenance of these external accessories can easily prevent constipation.
  • a major advantage of the lock according to the invention is that the vacuum pump is also protected from moisture or oxygen when the pump is operating or at a low suction pressure and thus a low gas flow. Without the lock according to the invention, a back diffusion of moisture or oxygen into the pump takes place in these states, which is particularly considerable if the vacuum pump is followed by a device filled with water or aqueous solutions, with which the reactive gases or vapors to protect the Environment.
  • the immersion tube which projects into the sealing liquid with its free opening, is a reliable lock for the vacuum pump.
  • the exhaust gas stream passes through the barrier liquid in the form of bubbles.
  • the sealing liquid With higher gas throughput, however, there is a risk that the sealing liquid will be foamed and / or drops of the sealing liquid will be entrained by the gas flow. In order to prevent these processes, the lock could be made large enough.
  • a particularly advantageous solution is that the Tuach pipe is bent or kinked in the region of its end immersed in the barrier liquid in such a way that its end opening lies above the barrier liquid level and that its wall section below the barrier liquid level has openings.
  • the barrier liquid enters the pipe through the openings or bores, which are preferably arranged in the upper region of the pipe wall, and brings about the desired sealing.
  • the plug of liquid in the pipe is expelled so that the pipe no longer contains any barrier liquid.
  • the presence of the liquid plug is not necessary, since the high gas velocity in the tube reliably prevents harmful vapors from escaping.
  • the straight pipe section lying below the level of the barrier liquid is expediently designed to drop slightly in relation to the direction of the gas flow and in relation to the horizontal.
  • the liquid level located inside the immersion tube only ever releases the number of openings which is necessary for the escape of the gases flowing through the immersion tube. This prevents undesirable movements of the liquid and the associated adverse turbulence.
  • Fig. 1 shows schematically a vacuum pump 1 with inlet 2 and outlet 3.
  • the lock 4 is connected, the inlet with 5 and the outlet with 6 are designated.
  • the barrier liquid 7 is located in the barrier 4.
  • the dip tube 8 connected to the inlet 5 projects into the barrier liquid 7.
  • the entering gas passes through the barrier liquid 7 and leaves the barrier 4 through the outlet 6.
  • the barrier liquid 7 ensures that moisture or oxygen cannot pass from the outlet 6 to the inlet 5 of the barrier 4.
  • Suitable barrier liquids are mineral oils, technical white oils, perfluorinated polyethers, silicone oils or generally liquids that are not miscible with water, not water-soluble or water-absorbing or not hygroscopic.
  • the vacuum pump 1 can be a dry-running or a liquid-sealed vacuum pump. A wide variety of oils, ethers or esters can be used as sealing fluids.
  • a device is connected to the lock 4 with which reactive gases or vapors can be intercepted in order to protect the environment.
  • the exhaust gases of the vacuum pump 1 are passed through a liquid 11 with suitable properties.
  • suitable liquids are water or aqueous solutions of substances that bind the gases to be trapped.
  • FIG. 2 shows details of an exemplary embodiment of the barrier 4. It comprises an upper and a lower housing section 12 and 13 respectively. The inlet 5 and the outlet 6 are attached to the upper housing section 12.
  • Exhaust 5 is connected to the interior of the dip tube 8, which is releasably attached to the upper housing section.
  • the barrier liquid 7 into which the dip tube 8 protrudes.
  • the eye 15 is provided for checking the barrier liquid level 14. With 16 a locking liquid drain screw is designated.
  • the annular space formed by the lower housing section 4 and the immersion tube 8 is connected to the outlet 6.
  • Figures 3 to 5 show an embodiment in which the dip tube 8 is bent or angled such that its free opening 17 is above the level of the barrier liquid 7.
  • the openings or bores 18 are provided, which are preferably arranged in the upper region of the immersing pipe section.
  • the part of the tube 8 below the barrier liquid level preferably has a straight section 19, the upper side of which is equipped with the openings 18.
  • the section 19 is designed to be slightly sloping. This ensures that only a portion of the openings 18 corresponding to the strength of the gas flow is released.
  • Figures 3 to 5 show different operating states.
  • Fig. 3 shows the state when the pump is stopped.
  • the tube 8 is filled with liquid and represents a safe shut-off of the tube 8 and thus the vacuum pump.
  • Fig. 4 shows the state with low gas throughput. The gas passes through a portion of the openings 18 corresponding to the strength of the gas flow. The pump is also protected against backflow.
  • FIG. 5 shows the state with a high gas throughput.
  • the tube 8 is free of sealing liquid. Foaming of the barrier liquid or entrainment of liquid drops is avoided.
  • the pressure prevailing in section 19 as a result of the high gas throughput prevents barrier liquid from entering through the openings 18. If necessary, the pressure can be influenced with the aid of a throttle arranged in the region of the opening 17, which at high gas throughputs reduces the pressure in the dip tube 8 has an increasing effect. Even in this operating state, the pump is protected against backflows, since the high gas velocity in the tube 8 reliably prevents the backflow of harmful vapors. If the gas throughput is reduced again, liquid automatically enters the pipe 8 through the openings 18 in accordance with the reduced speed and thereby ensures the blocking function with a low or zero throughput.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP19850100240 1984-02-09 1985-01-11 Pompe à vide Expired EP0173787B1 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
DE3404556 1984-02-09
DE3404556 1984-02-09
DE3425177 1984-07-09
DE19843425177 DE3425177A1 (de) 1984-02-09 1984-07-09 Vakuumpumpe
DE3435921 1984-09-29
DE19843435921 DE3435921A1 (de) 1984-09-29 1984-09-29 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP0173787A2 true EP0173787A2 (fr) 1986-03-12
EP0173787A3 EP0173787A3 (en) 1986-10-08
EP0173787B1 EP0173787B1 (fr) 1989-05-17

Family

ID=27191673

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19850100240 Expired EP0173787B1 (fr) 1984-02-09 1985-01-11 Pompe à vide

Country Status (3)

Country Link
US (1) US4612957A (fr)
EP (1) EP0173787B1 (fr)
DE (1) DE3570266D1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0396008A3 (fr) * 1989-04-29 1990-12-27 Leybold Aktiengesellschaft Pompe à vide avec filtre d'aspiration

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19952144B4 (de) * 1998-11-17 2014-01-16 Ixetic Bad Homburg Gmbh Druckmittelfördereinrichtung mit einer Pumpeneinrichtung oberhalb einer Druckmittelvorratsmenge mit Verbindung zur zugehörigen Druckleitung
KR20010102639A (ko) * 2000-05-03 2001-11-16 김명희 중대형 건축구조물 지하용출수의 사이펀식 이송장치
US20070166101A1 (en) * 2006-01-18 2007-07-19 Michael Scheu Vehicle Shield
US7967083B2 (en) * 2007-09-06 2011-06-28 Schlumberger Technology Corporation Sensor for determining a position of a jack element

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE569212C (de) * 1933-01-30 Wolfgang Gaede Dr Nass-Trocken-Luftpumpe, insbesondere Drehkolbenpumpe
US339749A (en) * 1886-04-13 Abraham edwards
US953040A (en) * 1909-12-18 1910-03-29 Heinrich Krueger Pressure-regulator.
US1243604A (en) * 1916-04-03 1917-10-16 Honeywell Heating Specialties Company Safafety relief device for low-pressure steam-boilers.
US2620749A (en) * 1950-07-08 1952-12-09 Standard Railway Equipment Mfg Hatch frame and insulation supporting pan for refrigerator cars
US2929335A (en) * 1958-07-30 1960-03-22 Ernst E Seiler Liquid valves
US3802455A (en) * 1969-07-31 1974-04-09 Zink Co John Apparatus for controlling the flow of gases
NL147942B (nl) * 1971-01-19 1975-12-15 Anvar Hydraulische beveiligingsinrichting voor gasvormige fluida.
AT309911B (de) * 1971-08-13 1973-09-10 Maximilian Gruber Angasreinigungseinrichtung
GB1517115A (en) * 1977-04-29 1978-07-12 Hunslet Ltd Exhaust gas water conditioner for an internal combustion engine
DE2913580A1 (de) * 1979-04-04 1980-10-09 Crede Helfried Verfahren zur entgiftung der abgase eines dieselmotors sowie abgasreiniger fuer ein solches verfahren

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0396008A3 (fr) * 1989-04-29 1990-12-27 Leybold Aktiengesellschaft Pompe à vide avec filtre d'aspiration

Also Published As

Publication number Publication date
DE3570266D1 (en) 1989-06-22
EP0173787B1 (fr) 1989-05-17
EP0173787A3 (en) 1986-10-08
US4612957A (en) 1986-09-23

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