EP0205355A1 - Ultraschallreinigungsanlage für mechanische Teile - Google Patents

Ultraschallreinigungsanlage für mechanische Teile Download PDF

Info

Publication number
EP0205355A1
EP0205355A1 EP19860400820 EP86400820A EP0205355A1 EP 0205355 A1 EP0205355 A1 EP 0205355A1 EP 19860400820 EP19860400820 EP 19860400820 EP 86400820 A EP86400820 A EP 86400820A EP 0205355 A1 EP0205355 A1 EP 0205355A1
Authority
EP
European Patent Office
Prior art keywords
transducers
ultrasonic wave
tank
power
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19860400820
Other languages
English (en)
French (fr)
Other versions
EP0205355B1 (de
Inventor
Jean-Jacques Imbault
Bernard Lefevre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OMEGA TECHNOLOGIES
Original Assignee
OMEGA TECHNOLOGIES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OMEGA TECHNOLOGIES filed Critical OMEGA TECHNOLOGIES
Priority to AT86400820T priority Critical patent/ATE68379T1/de
Publication of EP0205355A1 publication Critical patent/EP0205355A1/de
Application granted granted Critical
Publication of EP0205355B1 publication Critical patent/EP0205355B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18Methods or devices for transmitting, conducting or directing sound
    • G10K11/26Sound-focusing or directing, e.g. scanning
    • G10K11/34Sound-focusing or directing, e.g. scanning using electrical steering of transducer arrays, e.g. beam steering
    • G10K11/341Circuits therefor
    • G10K11/346Circuits therefor using phase variation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K13/00Cones, diaphragms, or the like, for emitting or receiving sound in general

Definitions

  • the present invention relates to a device and a method for cleaning mechanical parts by ultrasound.
  • the parts to be cleaned are placed in a tank containing a bath or cleaning agent in which an ultrasonic wave is generated intended to cause in the bath mechanical disturbances.
  • These mechanical disturbances reaching the part or parts to be cleaned cause, in relation to the cleaning agent, pickling of the free surface of the parts by detaching surface particles from the material constituting the part, or traces of finishing materials for machining, fats, glues or the like.
  • the electro-acoustic transducers used must therefore be supplied with high level electrical energy throughout the duration of the cleaning treatment, which leads to high electrical power levels due to the modest efficiency, of the order of 66%, of the cir transducer feeders when the latter, according to the conventional technique, are directly excited from a sinusoidal alternating signal.
  • the present invention aims to remedy the aforementioned drawbacks by the implementation of a device and a method in which the level of electrical power necessary for the excitation of the transmitter transducers is significantly reduced compared to the devices of the prior art for a similar power level in the vicinity of the part to be cleaned.
  • Another object of the present invention is the implementation of a device and a method of ultrasonic cleaning of a significantly improved yield.
  • Another object of the present invention is the implementation of an ultrasonic cleaning device and method in which, due to the focusing of the ultrasonic wave beam, great flexibility in using the device or the process is obtained, the cleaning of the parts can advantageously be programmed in cleaning sequences by specific zones of the part to be cleaned.
  • the device for cleaning mechanical parts by ultrasound comprises a tank intended to receive a cleaning agent in which a piece P to be cleaned is immersed, the tank being provided with electro-acoustic emitting transducers capable of generating power ultrasonic waves within the cleaning agent.
  • the device of the invention is remarkable in that it comprises means for generating periodic electrical signals intended to supply the transducers and means for regulating the power and the frequency of the ultrasonic wave emitted by the transmitting transducers.
  • Means for focusing the beam resulting from the ultrasonic wave emitted by the emitting transducers allow the focusing and / or the deflection of the resulting beam towards the part to be cleaned.
  • the invention finds application in all the machining processes of parts prior to steps such as chrome plating or the like.
  • the device for cleaning mechanical ultrasonic parts shown in FIG. 1, object of the invention comprises a tank 1 intended to receive a cleaning agent in which a part P to be cleaned is immersed.
  • the cleaning agents which can be used are those already mentioned above in the description.
  • the tank 1 is provided with transmitting electro-acoustic transducers capable of generating ultrasonic mechanical power waves within the cleaning agent.
  • the emitting transducers referenced T i are shown arranged in a particular arrangement on a wall of the tank, the wall 10 constituting the bottom of the latter.
  • the power required by the ultrasonic waves to obtain a satisfactory cleaning effect depending on the cleaning agent chosen as mentioned above must be between 1 and 5 Watts / cm2 of the surface of the part to be cleaned.
  • the device also comprises means 3 for generating electrical signals periodicals intended to supply the emitting transducers and means 5 for regulating the power of the ultrasonic wave emitted by the transmitters and means 4 for regulating the frequency of the emission of the ultrasonic wave. All of the aforementioned means allow fine regulation of the ultrasonic power or the ultrasonic power density emitted or to which the part to be cleaned is actually subjected during treatment.
  • Means 6 for focusing the beam resulting from the ultrasonic wave emitted by the electroacoustic transducers also come out in order to ensure the focusing and / or the deflection of the resulting beam towards the part P to be cleaned. It will be understood that the focusing and / or deflection of the resulting beam ultimately allows the localization of the ultrasonic energy emitted in an area delimited substantially by a solid angle in a determined direction. The location of the emission energy consequently allows a reduction in the electrical energy necessary to supply the transducers for obtaining an energy density in the localized area of emission sufficient for obtaining 'A satisfactory cleaning compared to the known devices of the prior art. In FIG. 1, the drive power stages of the transducers are not shown. A particular configuration of the network of transmitter transducers 2 will now be described in connection with FIG. 2.
  • the network 2 of transmitting transducers can be constituted by a set of transducers distributed in a plane according to a rectangular mesh network comprising M columns of transducers aligned parallel to a first reference direction Ox and N lines of transducers arranged parallel to a second direction Oy perpendicular to the first direction Ox.
  • the network 2 thus comprises M x N transmitting transducers, the center of the network corresponding substantially to a transducer is denoted 0 and the order of a line is denoted m, m between 1 and M, the order of a column being denoted n, n being between 1 and N.
  • the transmitting transducers T The transmitting transducers T.
  • any point F of the space exposed to the radiation of the network will thus be identified in spherical coordinates by the parameters 80 angle of OF, Oz and angle of Ox with the projection of OF onto the plane Ox, Oy containing the network 2.
  • the interference field of the set of sources at point F is given by the relation I below: in which A represents the emission amplitude of an emitting transducer, ⁇ the wavelength of ultrasonic emission in the propagation medium constituted by the cleaning agent.
  • the maximum field that is to say the maximum density of ultrasonic energy at point F is obtained when the parameters 8 0 and ⁇ 0 verify the relationship II below:
  • This new relation II then makes it possible to define the direction, defined by the guiding parameters ⁇ 0 , ⁇ 0 in which the resulting radiated field is maximum, this direction being analyzed as the intersection of a first cone of axis Ox of half -angle at the top ao and a second cone with axis Oy, with a half-angle at the top ⁇ o, these cones being defined by the above-mentioned relation II.
  • phase shifts ⁇ x and fy necessary to obtain a maximum field at a point F located in a direction of guiding parameters ⁇ 0 , ⁇ 0 are given for the directions Ox and Oy of the network by the relation III below:
  • the sign - indicates that the maximum field direction is inclined towards the negative phases, that is to say the delays with respect to the phase of the center O of the network.
  • the maximum resulting field value obtained is equal to M x N x A where M x N is the total number of sources or transmitters and A the amplitude radiated by a transmitter.
  • the concentration or localization of radiated ultrasound energy in the direction d' réelle 0 , ⁇ 0 above will be called focusing or deflection.
  • the distance d separating the transmitters from the network can be chosen so as to eliminate the second order focusing which can be obtained.
  • the distance d satisfies the relation IV: in which 6 m represents the maximum admissible value for the half-angles at the top of the cones defining the direction of the maximum field with respect to the axes Ox and Oy already mentioned.
  • the device of the invention due to the focusing of the ultrasonic energy in a preferred direction, makes it possible to carry out a concentration of this ultrasonic energy in the localized area cited above.
  • This focusing has the effect of causing in particular in the vicinity of the part to be cleaned a series of overpressures and depressions in the propagation medium constituted by the cleaning agent, which have the effect, in connection with this cleaning agent, of pickling of the workpiece surface.
  • the stripping phenomenon is in fact obtained by a phenomenon analogous to a cavitation phenomenon due to the overpressures and depressions generated, which causing turbulence around the resulting beam in the vicinity of the impact on the part, causes the latter to be cleaned.
  • the propagation of ultrasound in the propagation fluid or cleaning agent causes the formation of bubbles which implode under the action of ultrasonic acoustic pressure.
  • This implosion generates a very large shock wave.
  • This phenomenon known as cavitation originates in certain zones, functions of parameters such as, frequency of emission, power, temperature.
  • the emission frequency of the ultrasonic waves is taken to be equal to or greater than 20 kHz.
  • the transducers T i are fixed to the wall 10 of the tank projecting relative to the latter.
  • the transducers constituted substantially by a sandwich of piezoelectric ceramic and vibrating metallic masses were fixed on a diaphragm integral with the wall of the tank at one end of the metallic masses.
  • the mechanical vibration of the vibrating masses is maximum at the free ends of the vibrating masses and minimum or zero in the center, that is to say at the level of the junction of the two piezoelectric ceramic pellets.
  • transducers are perfectly known from the state of the art.
  • the necessary connection of the free end of a vibrating mass to the diaphragm is normally carried out by gluing, soldering or welding.
  • This technique however has the disadvantage that the connection of the transducer to the diaphragm is located at the place of greatest amplitude of vibration. This necessarily results in fatigue of the diaphragm transducer mechanical connection and, in the long run, faulty operation of the assembly.
  • the powers necessary to obtain the cleaning effect in the absence of focusing of the resulting beam most often require the presence of several transducers on the same diaphragm.
  • This latter feature has the drawback of an inevitable mechanical coupling between transducers located on the same diaphragm, any phase shift applied to one of the transducers being necessarily coupled to neighboring transducers. There can therefore be no independent emission or ultimately separate control of the transducers.
  • the particular embodiment shown by means of Figures 3a and 3b overcomes the aforementioned drawbacks.
  • the transducers T. according to the invention are fixed to the iodine wall of the tank in the vicinity of their middle part substantially. It will thus be understood that the transducers can be fixed to the wall by soldering at the end not free of a vibrating mass, that is to say the end of the vibrating mass directly in contact with one of the piezoelectric pellets constituting the transducer.
  • This embodiment of course allows a better lifetime of the transducer connection wall of the tank since the connecting element used, such as a solder or a weld or the like, is subjected to a vibration of amplitude substantially zero or very weak.
  • the transducers T. 1 are constituted by piezoelectric ceramics 103, 104, the vibrating masses 101, 102, the vibrating mass 101 being fixed to the wall 10 in the vicinity of the piezo ceramic pellet. -electric 103.
  • the excitation of each transducer is obtained from an excitation wire 106 connected to an electrode 105 ensuring the junction of the piezoelectric pads 103, 104.
  • the transducers can be fixed to a removable part of the tank 1, the removable part itself being able to constitute a wall of a sealed box containing the electronic control and supply circuits of the emitting transducers.
  • the arrangement of transmitter transducers is constituted by a plate 100 in one piece on which are distributed pads 1011 or mechanical weights in a network configuration.
  • Each stud 1011 is in fact intended to constitute the vibrating mass located in the tank of each transducer.
  • the active part of each transducer is attached opposite each stud on the opposite face of the plate 100.
  • the same references 103, 104, 105, 106 represent the same elements as in the figure 3a.
  • a seal 110 can also be provided to ensure repetitive assembly / disassembly of the removable plate for cleaning purposes for example.
  • the embodiment of FIG. 3b also has certain advantages from the point of view of ease of implementation, the plate 100, in one piece, which can be machined under conditions of mechanical tolerance that are entirely satisfactory. , which allow good focusing accuracy of the resulting beam.
  • the means for regulating the power and the frequency of emission of the ultrasonic wave comprise a receiver transducer 7 arranged in the tank and preferably placed in the vicinity of the location intended for part P to be cleaned.
  • the receiver transducer 7 can be removably mounted with respect to the part P in a direction of translation denoted for example X parallel to the network 2 and in the vertical direction denoted z.
  • the receiver transducer 7 thus makes it possible to record the ultrasonic power received by the part to be cleaned P in different localized areas of the surface thereof.
  • the transducer 7 can be mounted on a mobile carriage, which will not be described since it is perfectly known from the state of the art.
  • the transducer 7 delivers an electrical signal representative of the frequency and of the transmission power of the ultrasonic wave emitted by the transmitting transducers to a first detection circuit 4 capable of generating a signal proportional to the frequency of the electrical signal delivered by the receiving transducer 7.
  • the signal delivered by the receiving transducer 7 being substantially sinusoidal, the detection circuit 4 can be constituted by a zero crossing detection circuit normally available on the market or by a frequency discriminator.
  • the signal delivered by the receiving transducer 7 is also also delivered to a second detection circuit 5 capable of generating a signal proportional to the level of the electrical signal delivered by the receiving transducer 7.
  • the second detection circuit 5 can be constituted by a simple double-wave rectification circuit then delivering a signal representative of the power of the signal generated by the receiver transducer 7 and therefore of the power of the ultrasonic wave emitted by the transmitter transducers 2 or of the power ultrasonic received by the localized area of the part subjected to the impact of the beam.
  • the signals delivered by the detectors 4 and 5 then make it possible to control the means 3 for generating periodic electrical signals intended to supply the transducers.
  • the control in transmission frequency of the ultrasonic wave and in transmission power can thus be implemented with respect to respective set values of frequency and / or transmission power.
  • the generator means 3 preferably deliver to the transmitter transducers 2 electrical signals formed by rectangular pulses of adjustable repetition frequency.
  • the frequency of recurrence of the signals is controlled from the signal delivered by the detection circuit 4.
  • the generator means 3 deliver to the transmitting transducers electrical signals with adjustable duty cycle thereby allowing power regulation. of the ultrasonic wave emitted by the transmitting transducers.
  • the control of the value of the cyclic ratio of the signals delivered by the generator means 3 is carried out on the basis of the signal delivered by the detector 5.
  • the supply of the transmitting transducers by means of rectangular pulses therefore allows precise control of the emission parameters which are the frequency and the power of emission.
  • This type of supply to the transmitting transducers also allows an improvement in the efficiency of the electrical circuits, as well as a reduction in the width to 6 dB of the beams emitted by the transducers.
  • the generating means 3 can be constituted by a pulse generator with repetition frequency and adjustable duty cycle on the market and for example by an integrated circuit MC 3420 distributed by the company MOTOROLA.
  • the generator 3 controlled by the detectors 4 and 5 delivers the rectangular pulses to focusing means 6 of the beam resulting from the emitted ultrasonic wave constituted by programmable delay means.
  • the programmable delay means 6 comprise a control input denoted C and a plurality of outputs denoted S each connected to a transducer T i of the network 2.
  • the connection between an output S of the focusing means 6 and a transducer T i has been represented by means of power circuits capable of generating pulses capable of exciting the transducers T. while of course imperatively preserving the phase relationships or delays between pulses in accordance with the phase laws as given previously in by means of relation III.
  • FIG. 1 the generator 3 controlled by the detectors 4 and 5 delivers the rectangular pulses to focusing means 6 of the beam resulting from the emitted ultrasonic wave constituted by programmable delay means.
  • the programmable delay means 6 comprise a control input denoted C and a plurality of outputs denoted S each connected to a transduc
  • power circuits have been shown as consisting of two circuits connected in parallel 41, 43, 46; 42, 44, 47 allowing the application of a power voltage pulse to an isolation transformer 48.
  • the circuits 41, 42 can be constituted by opto-electronic coupling circuits forming galvanic isolation of all the control circuits of the power control part. These circuits are normally available in trade.
  • the circuits 43 and 44 are logic command and control circuits, allowing the corresponding control of power switching transistors constituting the circuits 46 and 47.
  • the switching transistors constituting the aforementioned circuits 46 and 47 are connected in series with the primary winding of the isolation transformer 48 so as to apply to it a DC voltage of a power supply rated power + on the circuit 46.
  • the logic control circuits 43 and 44 will not be the object a detailed description because their function is limited to the restitution of the pulses transmitted by the opto-electronic coupling circuits 41 and 42 with possibly, if necessary, additional functions capable of ensuring the safety of the switching operations generated by the switching transistors circuits 46 and 47.
  • the secondary winding of isolation transformer 48 is in or- trerelié the transmitting transducers T. by means of a compensation circuit 49 making it possible for example to obtain for each transducer calibrated pulses of the same level. It will of course be understood that each of the outputs S of the focusing means 6 is connected to the corresponding transmitting transducers T i by a power circuit identical to that shown in FIG. 4.
  • the focusing means 6 will now be described in connection with FIG. 5.
  • the focusing means 6 are constituted by delay circuits capable of each delivering the pulse or pulses delivered by the general means sensors 3 with a delay determined according to the address and the position of the corresponding transmitter transducer T i .
  • the excitation delay of each transducer obtained by the corresponding delay of the pulses applied to the excitation electrode 106 of the transducers, allows the application of the phase shifts ⁇ x , ⁇ y to each transmitting transducer of the network 2 as a function of l address m, n thereof for obtaining a focusing of the beam in a given direction ⁇ 0 , ⁇ 0 according to relation III already cited.
  • the delay circuits or means as shown in FIG. 5, comprise a plurality of D type flip-flops connected in cascade.
  • the flip-flops have been noted 1 to R.
  • Each flip-flop receives a synchronization clock signal noted H and the output Q of a flip-flop of order smaller than R is connected to the input of the flip-flop next.
  • the input of the first flip-flop receives the rectangular pulse signal - delivered by the pulse generator 3.
  • the output Q of any flip-flop of order k delivers a pulse delayed with respect to the pulse delivered to the input of the first flip-flop of order 1 by the generator 3 delayed by kx ⁇ T.
  • the output of each of the D type flip-flops is also connected to the power stage of the transmitter transducers by means of a channel selector circuit noted 61 in FIG. 6.
  • the channel selector circuits 61 can be constituted by 8, 12, 16 bit programmable channel selector circuits, depending on the number of channels, normally available commercially.
  • Each channel selector circuit61 is further connected to a control BUS 62 in fact constituting the control input denoted C shown previously in FIG. 4.
  • the delay circuits or means as represented in FIG. 5 thus make it possible to apply a quantized phase shift value to a number of determined levels of elementary values at the pulses supplying each of the transducers as a function of a program capable of taking account of course of the direction in which it is necessary to focus the ultrasonic energy in the resulting beam but also of other parameters such as the shape and the dimensions of the part to be cleaned, the beam opening angle, the level of ultrasonic energy to be applied to the part as a function of the cleaning agent constituting the propagation medium, all of the aforementioned parameters being able to be organized in order to: constitute any optimal sequence for cleaning the part according to the past or subsequent treatments applied.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Brushes (AREA)
EP86400820A 1985-04-16 1986-04-16 Ultraschallreinigungsanlage für mechanische Teile Expired - Lifetime EP0205355B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT86400820T ATE68379T1 (de) 1985-04-16 1986-04-16 Ultraschallreinigungsanlage fuer mechanische teile.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8505710 1985-04-16
FR8505710A FR2580198B1 (fr) 1985-04-16 1985-04-16 Dispositif de nettoyage de pieces mecaniques par ultrasons

Publications (2)

Publication Number Publication Date
EP0205355A1 true EP0205355A1 (de) 1986-12-17
EP0205355B1 EP0205355B1 (de) 1991-10-16

Family

ID=9318279

Family Applications (1)

Application Number Title Priority Date Filing Date
EP86400820A Expired - Lifetime EP0205355B1 (de) 1985-04-16 1986-04-16 Ultraschallreinigungsanlage für mechanische Teile

Country Status (4)

Country Link
EP (1) EP0205355B1 (de)
AT (1) ATE68379T1 (de)
DE (1) DE3681968D1 (de)
FR (1) FR2580198B1 (de)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988006927A1 (en) * 1987-03-18 1988-09-22 Mcqueen Douglas H Ultrasonic instrument
GB2220678A (en) * 1988-05-12 1990-01-17 Ae Turbine Components Removal of contaminants from articles
EP0424239A1 (de) * 1989-10-20 1991-04-24 Thomson-Csf Strahlbündelungsverfahren fÀ¼r Sonar
WO1996015863A1 (en) * 1994-11-22 1996-05-30 United Technologies Corporation Cleaning method for turbine airfoils by ultrasonics
CN102350418A (zh) * 2011-06-24 2012-02-15 戚祖强 基于ZigBee无线控制的超声波水槽
KR20160127644A (ko) * 2015-04-27 2016-11-04 삼성전자주식회사 국소 진동장 형성 장치 및 방법과, 가진기 배치 방법
CN112044861A (zh) * 2020-08-27 2020-12-08 湖州南浔吾心信息技术有限公司 一种利用超声波实现杀菌的键盘清理装置
CN120001719A (zh) * 2025-01-26 2025-05-16 哈尔滨工业大学(深圳)(哈尔滨工业大学深圳科技创新研究院) 一种超声清洗系统

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0774305A3 (de) * 1995-11-16 1998-07-01 Keith S. Campbell Ultraschallreinigungsvorrichtung und Verfahren zur Reinigung von Kronleuchtern
FR2762240B1 (fr) * 1997-04-18 1999-07-09 George Lucien Michel Procede et dispositif de nettoyage d'elements electroniques par moyennes ou hautes frequences
JP2007500941A (ja) 2003-07-31 2007-01-18 エフエスアイ インターナショナル インコーポレイテッド 高度に均一な酸化物層、とりわけ超薄層の調節された成長
TW200515475A (en) * 2003-09-11 2005-05-01 Fsi Int Inc Acoustic diffusers for acoustic field uniformity
DE112009002186B4 (de) * 2008-09-09 2016-03-03 Mitsubishi Electric Corp. Ultraschallgenerator und Vorrichtung zu dessen Befestigung
WO2010058293A2 (en) * 2008-11-21 2010-05-27 Insightec Ltd. Method and apparatus for washing fabrics using focused ultrasound
FI127711B (en) * 2016-05-13 2018-12-31 Altum Tech Oy METHOD FOR CLEANING THE APPLIANCE
CN111359977B (zh) * 2018-09-09 2021-09-21 陈丹青 一种汽车零件处理用滤除杂质的清洗装置
WO2020202200A1 (en) * 2019-03-29 2020-10-08 S Nikhil Das Apparatus and method for reducing concentration polarization and membrane fouling on membrane surface in a filter unit

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR764869A (fr) * 1933-07-29 1934-05-29 Dispositif pour la transformation de l'énergie acoustique en énergie électrique, et inversement
FR876822A (fr) * 1940-11-18 1942-11-18 Atlas Werke Ag Dispositif pour la production de champs sonores convergents
FR1142784A (fr) * 1955-03-07 1957-09-23 Bendix Aviat Corp Agitateur de liquide perfectionné
FR1207076A (fr) * 1957-07-10 1960-02-15 Pfenningsberg Gmbh Maschfab Procédé et appareil pour le lavage ultrasonore, notamment des matières solides
FR1459910A (fr) * 1965-09-11 1966-06-17 Ultrasonics Ltd Dispositif de montage d'une sonde formant transducteur dans un récipient contenant un liquide de nettoyage
DE2600810A1 (de) * 1975-01-13 1976-07-15 Furuno Electric Co Ultraschall-sendersystem
US4120699A (en) * 1974-11-07 1978-10-17 Alvin B. Kennedy, Jr. Method for acoustical cleaning
DE3114657A1 (de) * 1980-04-11 1982-01-07 Dario Guissano Milano Felisari Vorrichtung zur erzeugung von ultraschallwellen in einer fluessigkeitsmenge

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR764869A (fr) * 1933-07-29 1934-05-29 Dispositif pour la transformation de l'énergie acoustique en énergie électrique, et inversement
FR876822A (fr) * 1940-11-18 1942-11-18 Atlas Werke Ag Dispositif pour la production de champs sonores convergents
FR1142784A (fr) * 1955-03-07 1957-09-23 Bendix Aviat Corp Agitateur de liquide perfectionné
FR1207076A (fr) * 1957-07-10 1960-02-15 Pfenningsberg Gmbh Maschfab Procédé et appareil pour le lavage ultrasonore, notamment des matières solides
FR1459910A (fr) * 1965-09-11 1966-06-17 Ultrasonics Ltd Dispositif de montage d'une sonde formant transducteur dans un récipient contenant un liquide de nettoyage
US4120699A (en) * 1974-11-07 1978-10-17 Alvin B. Kennedy, Jr. Method for acoustical cleaning
DE2600810A1 (de) * 1975-01-13 1976-07-15 Furuno Electric Co Ultraschall-sendersystem
DE3114657A1 (de) * 1980-04-11 1982-01-07 Dario Guissano Milano Felisari Vorrichtung zur erzeugung von ultraschallwellen in einer fluessigkeitsmenge

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, vol. SU-31, no. 4, juillet 1984, pages 432-435, IEEE, New York, US; S. HOSSEINI et al.: "Computer controlled focused ultrasonic transmitting array" *

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988006927A1 (en) * 1987-03-18 1988-09-22 Mcqueen Douglas H Ultrasonic instrument
GB2220678A (en) * 1988-05-12 1990-01-17 Ae Turbine Components Removal of contaminants from articles
EP0424239A1 (de) * 1989-10-20 1991-04-24 Thomson-Csf Strahlbündelungsverfahren fÀ¼r Sonar
FR2653564A1 (fr) * 1989-10-20 1991-04-26 Thomson Csf Procede de formation de voies pour sonar.
US5101383A (en) * 1989-10-20 1992-03-31 Thomson-Csf Method for the formation of channels for sonar
WO1996015863A1 (en) * 1994-11-22 1996-05-30 United Technologies Corporation Cleaning method for turbine airfoils by ultrasonics
US5707453A (en) * 1994-11-22 1998-01-13 United Technologies Corporation Method of cleaning internal cavities of an airfoil
CN102350418A (zh) * 2011-06-24 2012-02-15 戚祖强 基于ZigBee无线控制的超声波水槽
KR20160127644A (ko) * 2015-04-27 2016-11-04 삼성전자주식회사 국소 진동장 형성 장치 및 방법과, 가진기 배치 방법
KR102631306B1 (ko) 2015-04-27 2024-01-30 삼성전자주식회사 국소 진동장 형성 장치 및 방법과, 가진기 배치 방법
CN112044861A (zh) * 2020-08-27 2020-12-08 湖州南浔吾心信息技术有限公司 一种利用超声波实现杀菌的键盘清理装置
CN120001719A (zh) * 2025-01-26 2025-05-16 哈尔滨工业大学(深圳)(哈尔滨工业大学深圳科技创新研究院) 一种超声清洗系统

Also Published As

Publication number Publication date
EP0205355B1 (de) 1991-10-16
DE3681968D1 (de) 1991-11-21
FR2580198B1 (fr) 1988-09-09
FR2580198A1 (fr) 1986-10-17
ATE68379T1 (de) 1991-11-15

Similar Documents

Publication Publication Date Title
EP0205355B1 (de) Ultraschallreinigungsanlage für mechanische Teile
EP0148653B1 (de) Vorrichtung zur Zertrümmerung von Konkrementen mit Ultraschallstosswellen
US4979994A (en) Method and apparatus for cleaning by ultrasonic wave energy
EP0383650B1 (de) Verfahren und Vorrichtung zum Orten und Fokussieren von Wellen
CA2318378C (fr) Transducteur ultrasonore de contact, a elements multiples
JP4984519B2 (ja) 超音波による金属材料の断面検査方法及び装置
EP0176155A1 (de) Vorrichtung mit Winkelfokussierung zur echographischen Untersuchung von Medien mittels Ultraschall
EP0543445B1 (de) Untersuchungsgerät von Medien mittels Ultraschall-Echographie
US20050210985A1 (en) Time-reversed photoacoustic system and uses thereof
JPH11507723A (ja) 超音波行路バンドル及びシステム
CA2657708C (fr) Procede et dispositif de transmission d'ondes
US3836948A (en) Echo sounding technique
KR102214167B1 (ko) 초음파 트랜스듀서
US6489707B1 (en) Method and apparatus for generating acoustic energy
JPH0211867B2 (de)
FR2762240A1 (fr) Procede et dispositif de nettoyage d'elements electroniques par moyennes ou hautes frequences
FR2695727A1 (fr) Procédé de contrôle ultrasonore en immersion d'une pièce métallique et son utilisation.
KR100819079B1 (ko) 건식 표면 클리닝 장치
WO1996037314A1 (fr) Procede et dispositif de lavage et de nettoyage
JP5145783B2 (ja) 超音波による断面検査方法及び装置
EP0040566A1 (de) Echographisches Gerät mit dynamischer Fokussierung und Sektorabtastung
EP0150843A2 (de) Gerät mit lokalisierten Schallwellen zur Objektstrukturuntersuchung
Köymen et al. Focusing surface waves using an axicon
SU1374101A1 (ru) Способ контрол качества адгезии пленок
SU166189A1 (ru) Способ генерации ультра- и гиперзвуковыхколебаний

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH DE FR GB IT LI LU NL SE

17P Request for examination filed

Effective date: 19870518

17Q First examination report despatched

Effective date: 19880728

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

RAP3 Party data changed (applicant data changed or rights of an application transferred)

Owner name: OMEGA TECHNOLOGIES

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH DE FR GB IT LI LU NL SE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Effective date: 19911016

Ref country code: NL

Effective date: 19911016

Ref country code: AT

Effective date: 19911016

REF Corresponds to:

Ref document number: 68379

Country of ref document: AT

Date of ref document: 19911115

Kind code of ref document: T

REF Corresponds to:

Ref document number: 3681968

Country of ref document: DE

Date of ref document: 19911121

ITF It: translation for a ep patent filed
GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)
NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 19920416

Year of fee payment: 7

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19920430

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 19921027

Year of fee payment: 7

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 19921028

Year of fee payment: 7

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: BE

Payment date: 19921116

Year of fee payment: 7

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Effective date: 19930416

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Effective date: 19930430

Ref country code: CH

Effective date: 19930430

Ref country code: BE

Effective date: 19930430

BERE Be: lapsed

Owner name: OMEGA TECHNOLOGIES

Effective date: 19930430

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 19930416

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Effective date: 19940101

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 19980527

Year of fee payment: 13

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19991231

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED.

Effective date: 20050416