EP0249834A2 - Production de structures fines pour l'établissement de contacts sur semi-conducteurs - Google Patents

Production de structures fines pour l'établissement de contacts sur semi-conducteurs Download PDF

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Publication number
EP0249834A2
EP0249834A2 EP87108195A EP87108195A EP0249834A2 EP 0249834 A2 EP0249834 A2 EP 0249834A2 EP 87108195 A EP87108195 A EP 87108195A EP 87108195 A EP87108195 A EP 87108195A EP 0249834 A2 EP0249834 A2 EP 0249834A2
Authority
EP
European Patent Office
Prior art keywords
metal
etching
underside
etched
electrocoating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP87108195A
Other languages
German (de)
English (en)
Other versions
EP0249834A3 (fr
Inventor
Alfred Gröber
Hans Hadersbeck
Fritz Müller
Hubert Zukier
Hans Jürgen Hacke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of EP0249834A2 publication Critical patent/EP0249834A2/fr
Publication of EP0249834A3 publication Critical patent/EP0249834A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/04—Manufacture or treatment of leadframes
    • H10W70/042—Etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/421—Shapes or dispositions
    • H10W70/424—Cross-sectional shapes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
    • H05K2203/1333—Deposition techniques, e.g. coating
    • H05K2203/135—Electrophoretic deposition of insulating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1572—Processing both sides of a PCB by the same process; Providing a similar arrangement of components on both sides; Making interlayer connections from two sides
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061—Etching masks
    • H05K3/064—Photoresists
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • H05K3/202—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using self-supporting metal foil pattern

Definitions

  • the invention relates to a method for producing fine structures for semiconductor contacting, preferably in the form of a tape, in particular for contacting semiconductor devices with the highest poles.
  • Semiconductor chips are usually contacted with fine wires on system carriers, which are then encapsulated in packages.
  • TAB tape automated bonding
  • the semiconductor chip is first contacted with all of its connections into the interior of the fine structure (internal contacting) and then connected to the wiring by the user via the external area of the fine structure (external contacting).
  • This design is extremely small, flat and light. It is increasingly being used in semiconductor devices with the highest number of poles, in which contacting in the conventional way is no longer possible or disadvantageous.
  • contacting in the conventional way is no longer possible or disadvantageous.
  • the requirements for the fine structure increase so much that they can no longer be met using conventional manufacturing processes.
  • a common method for producing a so-called 3-layer tape which is printed, for example, in Solid State Technology 3.78 "Beam Tape Carriers - A Design Guide”, first punched the openings in the adhesive-coated plastic tape, onto which copper was then laminated becomes.
  • This tape is coated with photoresist, exposed on the copper side with the negative pattern of the fine structure, developed and then electroplated in the form of the structure, for example with tin. After stripping, the band with the galvanically deposited surface is etched as a protection against etching.
  • a disadvantage of this method is the pronounced bowl formation when the copper is laminated over large openings in the plastic strip, which prevents precise phototechnical structure generation. Even coating with photoresist on the back of the tape with the openings is not possible, which hinders the drying of the paint and later leads to uncontrolled errors due to paint flaking and electroplating.
  • the openings in the plastic strip are produced by etching or removing the plastic, and the conductor structures are optionally produced by additive metal construction.
  • the invention is based on the object of designing the method mentioned at the outset which can be used to meet the following requirements for fine structures for contacting even multi-pole semiconductors: Sufficient conductor cross-section at 35 ⁇ m thick despite the narrowest division. Internal and external contact on different sides of the fine structure and thus different surfaces in defined areas. Stabilization of the fine structure to prevent bending processes without being able to change the grid. A plastic carrier must serve as an adjustment aid and enable electrical testing.
  • Electrophoresis is the movement of colloidal particles under the influence of an electric current.
  • the smooth tape allows an even and problem-free paint coating. Warpage and kinks do not occur.
  • the two-sided phototechnical structuring provides the conditions for reproducibility and precise assignment of both sides.
  • the etching on both sides reduces the overall undercutting and, with the same metal thickness, a finer structure is achieved than with one-sided etching.
  • a special metal plating makes it possible to deposit metal on one side.
  • the electrophoretic paint deposition or electrocoating enables the grid-accurate production and subsequent deformation of even extremely fine structures.
  • the manufacturing quality is not affected.
  • the process can also be carried out without electrophoretic paint deposition or electrocoating for stiffening and without special metallization (items 7 to 11).
  • the method can be modified in such a way that an etching mask is formed instead of the galvanizing mask during the phototechnical structuring and is etched in the etching channel on the underside at half the depth. Electrophoretic paint is then deposited into the deeply etched areas between the conductor tracks or electrocoating.
  • the top is etched. After the finished etching, electrophoretic deposition or electrocoating is also carried out on the top. As a result, the conductor flanks exposed after the etching of the upper side are also covered with electrophoretic lacquer.
  • metal preferably tin
  • metal is deposited on top of the exposed metal layers. This is also done using the electroplating system.
  • plastic stabilization is applied in individual pieces.
  • a screen printing varnish can also be applied.
  • a metal strip 1 serves as the starting material.
  • the structures are denoted by 2 and are composed of conductor tracks which, in length, form the inner connection area 3 in addition to the central support, the outer connection range 4 and the test connection area 5 include. 6 with a plastic stabilization from a plastic film is referred to, which is applied as a single piece before the last etching on the fine structure.
  • Perforation holes 7 and adjustment holes 8 can be made in the plastic stabilization and in the copper strip for further processing.
  • FIG. 2 additionally shows the lacquer 9 deposited electrophoretically or by electrodeposition, preferably tin 10 is applied to the top of the copper 1 and SnPb 11 is optionally applied to the underside in desired areas.
  • Fine structures produced according to the method according to the invention by advantageously combining process steps and measures, meet all the requirements for a fine structure for contacting ultrapole semiconductors.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Wire Bonding (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
EP87108195A 1986-06-20 1987-06-05 Production de structures fines pour l'établissement de contacts sur semi-conducteurs Withdrawn EP0249834A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3620628 1986-06-20
DE3620628 1986-06-20

Publications (2)

Publication Number Publication Date
EP0249834A2 true EP0249834A2 (fr) 1987-12-23
EP0249834A3 EP0249834A3 (fr) 1990-06-06

Family

ID=6303301

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87108195A Withdrawn EP0249834A3 (fr) 1986-06-20 1987-06-05 Production de structures fines pour l'établissement de contacts sur semi-conducteurs

Country Status (3)

Country Link
US (1) US4795694A (fr)
EP (1) EP0249834A3 (fr)
JP (1) JPS6313338A (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0393997A3 (fr) * 1989-04-20 1991-04-17 Honeywell Inc. Procédé pour fabriquer un boítier à cadre de connection dont les contacts sont à pas variable
DE4017863C1 (fr) * 1990-06-02 1991-07-18 Du Pont De Nemours (Deutschland) Gmbh, 4000 Duesseldorf, De
EP0617332A1 (fr) * 1993-03-24 1994-09-28 Fuji Photo Film Co., Ltd. Procédé de fabrication d'un matériau servant à la réalisation de cadres de connexion
EP0672951A3 (fr) * 1994-03-14 1995-12-13 Fuji Photo Film Co Ltd Matériau servant à la réalisation de cadres de connexion.
EP0671660A3 (fr) * 1994-03-10 1996-01-03 Fuji Photo Film Co Ltd Matériau servant à la réalisation de cadres de connexion.

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0234984A (ja) * 1988-04-13 1990-02-05 Mitsubishi Electric Corp プリント回路基板の製造方法
US20040055893A1 (en) * 2002-09-23 2004-03-25 Applied Materials, Inc. Wafer backside electrical contact for electrochemical deposition and electrochemical mechanical polishing
US8709870B2 (en) * 2009-08-06 2014-04-29 Maxim Integrated Products, Inc. Method of forming solderable side-surface terminals of quad no-lead frame (QFN) integrated circuit packages

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4063993A (en) * 1975-07-07 1977-12-20 National Semiconductor Corporation Method of making gang bonding interconnect tape for semiconductive devices
DE2658532C2 (de) * 1976-12-23 1984-02-16 Siemens AG, 1000 Berlin und 8000 München Zwischenträger zur Halterung und Kontaktierung eines Halbleiterkörpers und Verfahren zu dessen Herstellung
JPS5826828B2 (ja) * 1978-04-26 1983-06-06 新光電気工業株式会社 テ−プキヤリアの製造方法
US4209355A (en) * 1978-07-26 1980-06-24 National Semiconductor Corporation Manufacture of bumped composite tape for automatic gang bonding of semiconductor devices
US4308339A (en) * 1980-02-07 1981-12-29 Westinghouse Electric Corp. Method for manufacturing tape including lead frames
US4472876A (en) * 1981-08-13 1984-09-25 Minnesota Mining And Manufacturing Company Area-bonding tape
GB2103248B (en) * 1982-07-28 1984-12-19 Nat Semiconductor Corp Selective plating apparatus
GB2172430B (en) * 1982-09-30 1987-05-07 Sumitomo Metal Mining Co Manufacture of carrier tapes
JPS6070185A (ja) * 1983-09-26 1985-04-20 Toshiba Corp シヤドウマスクの製造方法
US4585727A (en) * 1984-07-27 1986-04-29 Probe-Tronics, Inc. Fixed point method and apparatus for probing semiconductor devices
US4707418A (en) * 1985-06-26 1987-11-17 National Semiconductor Corporation Nickel plated copper tape
GB2178894B (en) * 1985-08-06 1988-07-27 Gen Electric Co Plc Preparation of fragile devices
GB2178895B (en) * 1985-08-06 1988-11-23 Gen Electric Co Plc Improved preparation of fragile devices
US4701363A (en) * 1986-01-27 1987-10-20 Olin Corporation Process for manufacturing bumped tape for tape automated bonding and the product produced thereby

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0393997A3 (fr) * 1989-04-20 1991-04-17 Honeywell Inc. Procédé pour fabriquer un boítier à cadre de connection dont les contacts sont à pas variable
DE4017863C1 (fr) * 1990-06-02 1991-07-18 Du Pont De Nemours (Deutschland) Gmbh, 4000 Duesseldorf, De
EP0617332A1 (fr) * 1993-03-24 1994-09-28 Fuji Photo Film Co., Ltd. Procédé de fabrication d'un matériau servant à la réalisation de cadres de connexion
EP0671660A3 (fr) * 1994-03-10 1996-01-03 Fuji Photo Film Co Ltd Matériau servant à la réalisation de cadres de connexion.
US5670293A (en) * 1994-03-10 1997-09-23 Fuji Photo Film Co., Ltd. Lead-frame forming material
EP0672951A3 (fr) * 1994-03-14 1995-12-13 Fuji Photo Film Co Ltd Matériau servant à la réalisation de cadres de connexion.
US5641577A (en) * 1994-03-14 1997-06-24 Fuji Photo Film Co., Ltd. Lead-frame forming material

Also Published As

Publication number Publication date
JPS6313338A (ja) 1988-01-20
US4795694A (en) 1989-01-03
EP0249834A3 (fr) 1990-06-06

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Inventor name: ZUKIER, HUBERT

Inventor name: HACKE, HANS JUERGEN

Inventor name: GROEBER, ALFRED

Inventor name: MUELLER, FRITZ

Inventor name: HADERSBECK, HANS