EP0285020A3 - Dispositif pour coupler de l'énergie micro-onde à une ligne micro-onde ouverte - Google Patents

Dispositif pour coupler de l'énergie micro-onde à une ligne micro-onde ouverte Download PDF

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Publication number
EP0285020A3
EP0285020A3 EP88104822A EP88104822A EP0285020A3 EP 0285020 A3 EP0285020 A3 EP 0285020A3 EP 88104822 A EP88104822 A EP 88104822A EP 88104822 A EP88104822 A EP 88104822A EP 0285020 A3 EP0285020 A3 EP 0285020A3
Authority
EP
European Patent Office
Prior art keywords
microwave
energy
arrangement
leaky
coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP88104822A
Other languages
German (de)
English (en)
Other versions
EP0285020A2 (fr
Inventor
Jörg Dr. Kieser
Hans-Georg Dr. Lotz
Gonde Dr. Dittmer
Michael Dr. Sellschopp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0285020A2 publication Critical patent/EP0285020A2/fr
Publication of EP0285020A3 publication Critical patent/EP0285020A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/78—Arrangements for continuous movement of material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/12—Coupling devices having more than two ports
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/70—Feed lines

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Waveguide Aerials (AREA)
EP88104822A 1987-04-02 1988-03-25 Dispositif pour coupler de l'énergie micro-onde à une ligne micro-onde ouverte Withdrawn EP0285020A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19873711184 DE3711184A1 (de) 1987-04-02 1987-04-02 Vorrichtung zur einbringung von mikrowellenenergie mit einem offenen mikrowellenleiter
DE3711184 1987-04-02

Publications (2)

Publication Number Publication Date
EP0285020A2 EP0285020A2 (fr) 1988-10-05
EP0285020A3 true EP0285020A3 (fr) 1990-04-04

Family

ID=6324755

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88104822A Withdrawn EP0285020A3 (fr) 1987-04-02 1988-03-25 Dispositif pour coupler de l'énergie micro-onde à une ligne micro-onde ouverte

Country Status (3)

Country Link
US (1) US4847460A (fr)
EP (1) EP0285020A3 (fr)
DE (1) DE3711184A1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4037091C2 (de) * 1990-11-22 1996-06-20 Leybold Ag Vorrichtung für die Erzeugung eines homogenen Mikrowellenfeldes
US5146058A (en) * 1990-12-27 1992-09-08 E. I. Du Pont De Nemours And Company Microwave resonant cavity applicator for heating articles of indefinite length
EP0502269A1 (fr) * 1991-03-06 1992-09-09 Hitachi, Ltd. Méthode et dispositif pour traitements par plasma micro-onde
FR2685821B1 (fr) * 1991-12-31 1994-03-25 Thomson Tubes Electroniques Circuit de repartition et de couplage d'energie hyperfrequence.
ATE169458T1 (de) * 1993-11-01 1998-08-15 Unilever Nv Verfahren zum thermischen fixierung von dem überzugsteig eines beschichteten nahrungsmittels durch dielektrische heizung
US5714009A (en) 1995-01-11 1998-02-03 Deposition Sciences, Inc. Apparatus for generating large distributed plasmas by means of plasma-guided microwave power
FR2798552B1 (fr) 1999-09-13 2001-11-30 Centre Nat Rech Scient Dispositif assurant une division de puissance micro-onde predeterminee sur une pluralite de charges, notamment pour la production de plasma
DE10138693A1 (de) * 2001-08-07 2003-07-10 Schott Glas Vorrichtung zum Beschichten von Gegenständen
US7326872B2 (en) * 2004-04-28 2008-02-05 Applied Materials, Inc. Multi-frequency dynamic dummy load and method for testing plasma reactor multi-frequency impedance match networks
US20120241445A1 (en) * 2009-09-01 2012-09-27 Lg Electronics Inc. Cooking appliance employing microwaves
EP2815405B1 (fr) * 2012-02-14 2018-01-10 Goji Limited Dispositif d'application d'énergie rf à une cavité
DE102014204105B3 (de) * 2014-03-06 2015-08-06 Karlsruher Institut für Technologie Vorrichtung zur Eintragung eines Eintragsgutes in einen Reaktor und ihre Verwendung

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1029963B (de) * 1956-12-24 1958-05-14 Mikrowellen Ges M B H Deutsche Einrichtung zur Einstrahlung von Mikrowellenenergie in dielektrische Koerper
EP0027471A1 (fr) * 1979-03-31 1981-04-29 Osaka Gas Co., Ltd Dispositif de chauffage a haute frequence
EP0036040A1 (fr) * 1980-03-18 1981-09-23 Robert Bosch Gmbh Radiateur de microondes à contact pour applications diathermiques
FR2520160A1 (fr) * 1982-01-20 1983-07-22 Sairem Sarl Dispositif de traitement ho
EP0085110A1 (fr) * 1981-08-07 1983-08-10 Matsushita Electric Industrial Co., Ltd. Dispositif chauffant a haute frequence
FR2525063A1 (fr) * 1982-04-10 1983-10-14 Toyoda Gosei Kk
US4688009A (en) * 1985-05-13 1987-08-18 Varian Associates, Inc. Triple-pane waveguide window

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2921174A (en) * 1959-02-13 1960-01-12 Gen Electric Electric surface heating unit system
DE6606894U (de) * 1962-11-07 1970-12-10 Siemens Ag Druckfestes reflexionskompensiertes abschlussfenster fuer hohlleitungen
US3472200A (en) * 1964-05-15 1969-10-14 Litton Industries Inc Striping apparatus for highways
US3496571A (en) * 1967-01-09 1970-02-17 Univ Ohio State Res Found Low profile feedback slot antenna
BE758571A (fr) * 1969-11-06 1971-04-16 Euratom Generateur de plasma a haute frequence
US3611582A (en) * 1969-11-07 1971-10-12 Canadian Patents Dev Microwave package for control of moisture content and insect infestations of grain
FR2076405A5 (fr) * 1970-01-14 1971-10-15 Materiel Telephonique
US3715551A (en) * 1971-07-01 1973-02-06 Raytheon Co Twisted waveguide applicator
US3814983A (en) * 1972-02-07 1974-06-04 C Weissfloch Apparatus and method for plasma generation and material treatment with electromagnetic radiation
US3851132A (en) * 1973-12-10 1974-11-26 Canadian Patents Dev Parallel plate microwave applicator
GB2040103B (en) * 1978-12-08 1983-03-02 Raytheon Co Slow wave coupling circuit
US4266162A (en) * 1979-03-16 1981-05-05 Gte Laboratories Incorporated Electromagnetic discharge apparatus with double-ended power coupling
US4314128A (en) * 1980-01-28 1982-02-02 Photowatt International, Inc. Silicon growth technique and apparatus using controlled microwave heating
DE3147986C2 (de) * 1981-12-04 1992-02-27 Leybold-Heraeus GmbH, 5000 Köln Vorrichtung zur Erzeugung eines Mikrowellenplasmas für die Behandlung von Substraten, insbesondere zur Plasmapolymerisation von Monomeren
EP0086558A1 (fr) * 1982-02-08 1983-08-24 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Réseau d'antennes
US4629847A (en) * 1985-11-07 1986-12-16 Gics Paul W Resonator device for a microwave heat applicator

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1029963B (de) * 1956-12-24 1958-05-14 Mikrowellen Ges M B H Deutsche Einrichtung zur Einstrahlung von Mikrowellenenergie in dielektrische Koerper
EP0027471A1 (fr) * 1979-03-31 1981-04-29 Osaka Gas Co., Ltd Dispositif de chauffage a haute frequence
EP0036040A1 (fr) * 1980-03-18 1981-09-23 Robert Bosch Gmbh Radiateur de microondes à contact pour applications diathermiques
EP0085110A1 (fr) * 1981-08-07 1983-08-10 Matsushita Electric Industrial Co., Ltd. Dispositif chauffant a haute frequence
FR2520160A1 (fr) * 1982-01-20 1983-07-22 Sairem Sarl Dispositif de traitement ho
FR2525063A1 (fr) * 1982-04-10 1983-10-14 Toyoda Gosei Kk
US4688009A (en) * 1985-05-13 1987-08-18 Varian Associates, Inc. Triple-pane waveguide window

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, Band 7, Nr. 229 (E-203)[1374], 12. Oktober 1983; & JP-A-58 120 303 (SANYO DENKI K.K.) 18-07-1983 *

Also Published As

Publication number Publication date
US4847460A (en) 1989-07-11
EP0285020A2 (fr) 1988-10-05
DE3711184A1 (de) 1988-10-20

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