EP0303769A2 - Dispositif pour la transmission de mouvements rotatifs à travers la paroi d'une chambre sous vide - Google Patents

Dispositif pour la transmission de mouvements rotatifs à travers la paroi d'une chambre sous vide Download PDF

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Publication number
EP0303769A2
EP0303769A2 EP88106545A EP88106545A EP0303769A2 EP 0303769 A2 EP0303769 A2 EP 0303769A2 EP 88106545 A EP88106545 A EP 88106545A EP 88106545 A EP88106545 A EP 88106545A EP 0303769 A2 EP0303769 A2 EP 0303769A2
Authority
EP
European Patent Office
Prior art keywords
wall
shaft
sleeve
bore
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP88106545A
Other languages
German (de)
English (en)
Other versions
EP0303769A3 (fr
Inventor
Walter Schädler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of EP0303769A2 publication Critical patent/EP0303769A2/fr
Publication of EP0303769A3 publication Critical patent/EP0303769A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/54—Other sealings for rotating shafts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S277/00—Seal for a joint or juncture
    • Y10S277/913—Seal for fluid pressure below atmospheric, e.g. vacuum
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S277/00—Seal for a joint or juncture
    • Y10S277/935—Seal made of a particular material
    • Y10S277/944—Elastomer or plastic

Definitions

  • the present invention relates to a device for transmitting rotary movements in a vacuum chamber, which has a shaft guided in a bore in the chamber wall and transmitting the rotary movement and between the inner wall of the bore and the shaft sealing rings for vacuum-tight sealing.
  • Lubrication of the sliding surfaces is absolutely necessary for rotary unions with seals of the previously common design (e.g. with lip seals).
  • the main task of the lubricant is to form a lubricating film between the sliding surfaces of the shaft and the sealing rings, and the mutual contact pressure of the sliding surfaces must always be dimensioned such that a sufficiently thick lubricating film can form. In the best case, a coefficient of friction of about 0.05 can be achieved.
  • such a lubricating film always has the undesirable property of flowing along the surfaces wetted by it, and it can also get inside the vacuum chamber and contaminate it.
  • a single injury of such a lubricating film does not heal on its own but can continue to spread and cause the complete loss of the emergency running properties.
  • the coefficient of friction (with ⁇ approximately equal to 0.1) is still relatively high, so that the seal can be thermally overloaded under higher loads and due to the low thermal conductivity of each sealing material.
  • the object of the present invention is to alleviate these disadvantages of known seals and to provide a rotary leadthrough for vacuum devices which does not require any lubricant and results in the least possible wear and tear and therefore a long service life.
  • This object is transmitted in a device for transmitting rotary movements through the wall of a vacuum chamber, which is guided in a bore in the chamber wall, the rotary movement Gende shaft and between the inner wall of the bore and the shaft has sealing rings for vacuum-tight sealing, solved according to the invention in that the inner wall of the bore is lined with a sleeve made of low-friction plastic and the sleeve in turn by means of sealing rings against the inner wall of the bore and against the Shaft is sealed.
  • the sleeve consists of polytetrafluoroethylene (PTFE, trade name "Teflon”) and the sealing rings consist of an elastomer, since it has been shown that, particularly with such a material pairing, a rotary leadthrough with minimal constant friction and a secure seal can be created without using an additional lubricant.
  • PTFE polytetrafluoroethylene
  • a rotary leadthrough according to the invention can be constructed with small dimensions, the sealing ability of which is still fully retained even after a large number of rotary movements (for example 100,000), and it can be assembled from simple, easily produced rotary parts.
  • the drawing shows a section through a rotary vacuum feedthrough through the bottom of a vacuum chamber.
  • the base 1 with a thickness of, for example, 13 mm has a bore of 10 mm inside width, the inner wall 2 of which has a lining in the form of a sleeve or sleeve 3 made of polytetrafluor ethylene is provided.
  • the outside of the sleeve 3 lies, as the drawing shows, snugly against the inner wall 2 of the bore and is sealed against this by a seal 5 inserted into an annular groove 4.
  • this seal consists, for. B. from a conventional vacuum sealing material, preferably an elastomer.
  • the rotation-transmitting shaft 6 is passed through the sleeve 3 and, in order to fix it axially, is reinforced in diameter on one (in the drawing, upper) side of the wall and on the other side is connected to an annular disc 7, which is connected by means of a Screw 8 can be attached to the shaft 6.
  • the latter is provided with a shoulder 10, into which a further sealing ring 11 is inserted, which preferably also consists of an elastomer.
  • the sealing ring 11 moves with the shaft, so it in turn also only slides on a polytetrafluoroethylene surface of the shoulder 10, which results in a low cleaning.
  • Another important advantage of the invention in many applications is that it allows rotary unions with shafts of very small diameter to be built. While the ring-shaped lip seals of classic rotary unions are at most biz down to a diameter of about 4 mm commercially available, the round cord seals, as used in the invention, are also available for smaller diameters of, for example, only 2 mm. If such a thin shaft is sufficient in itself for the transmission of the desired torque in the vacuum space in the given application, such a smaller diameter has the advantage that the friction becomes lower, so that cheaper motors with lower power can also be used.
  • the sleeve 3 and the sealing rings 5 and 11 are enclosed between other components in such a way that they are neither subject to plastic deformation which impair their function, nor can they be displaced from their functional position during operation by any forces.
  • the rotary feedthrough shown in the drawing through the bottom of a vacuum chamber can of course also be used in a corresponding manner as a rotary feedthrough through any wall of a vacuum chamber.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sealing Devices (AREA)
  • Sealing With Elastic Sealing Lips (AREA)
  • Sliding-Contact Bearings (AREA)
EP88106545A 1987-08-18 1988-04-23 Dispositif pour la transmission de mouvements rotatifs à travers la paroi d'une chambre sous vide Withdrawn EP0303769A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH317187 1987-08-18
CH3171/87 1987-08-18

Publications (2)

Publication Number Publication Date
EP0303769A2 true EP0303769A2 (fr) 1989-02-22
EP0303769A3 EP0303769A3 (fr) 1989-10-25

Family

ID=4250157

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88106545A Withdrawn EP0303769A3 (fr) 1987-08-18 1988-04-23 Dispositif pour la transmission de mouvements rotatifs à travers la paroi d'une chambre sous vide

Country Status (3)

Country Link
US (1) US4828273A (fr)
EP (1) EP0303769A3 (fr)
JP (1) JPH0246316A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6536777B2 (en) * 1999-03-31 2003-03-25 Lam Research Corporation Sealing techniques suitable for different geometries and constrained spaces
GB0027471D0 (en) * 2000-11-08 2000-12-27 Smithkline Beecham Plc Processes
US20030047879A1 (en) * 2001-09-10 2003-03-13 Bowen Willard L. Rotary sealing device
WO2008109097A1 (fr) * 2007-03-06 2008-09-12 Advanced Vacuum Company, Inc. Cartouche à joint pour pompes à vide

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH392179A (de) * 1962-04-24 1965-05-15 Burckhardt Ag Maschf Selbsttätige Abdichtung eines Zylinders gegen hohen Innendruck
US3331609A (en) * 1965-04-07 1967-07-18 Edwin W Plumb Rotary fluid seal
US3526407A (en) * 1968-03-11 1970-09-01 Goodrich Co B F Rotary seal
US3494677A (en) * 1968-04-15 1970-02-10 Acme Machine Works Inc Means to journal and seal a rotary shaft
DE2163095A1 (de) * 1971-12-18 1973-06-20 Dorma Baubeschlag Selbsttaetiger tuerschliesser
US4020910A (en) * 1976-05-19 1977-05-03 Rapidex, Inc. Sealing between relatively rotating members in boring apparatus
IT8504780U1 (it) * 1985-02-22 1986-08-22 Selvatici Franco Dispositivo di tenuta radiali, in acciaio per gruppi volventi.

Also Published As

Publication number Publication date
US4828273A (en) 1989-05-09
JPH0246316A (ja) 1990-02-15
EP0303769A3 (fr) 1989-10-25

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