EP0311317A2 - Verbrennungsverfahren für spezifische Abgase mit schädlichen Stoffen - Google Patents

Verbrennungsverfahren für spezifische Abgase mit schädlichen Stoffen Download PDF

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Publication number
EP0311317A2
EP0311317A2 EP88309126A EP88309126A EP0311317A2 EP 0311317 A2 EP0311317 A2 EP 0311317A2 EP 88309126 A EP88309126 A EP 88309126A EP 88309126 A EP88309126 A EP 88309126A EP 0311317 A2 EP0311317 A2 EP 0311317A2
Authority
EP
European Patent Office
Prior art keywords
exhaust gases
combustion
nozzle
top end
flame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP88309126A
Other languages
English (en)
French (fr)
Other versions
EP0311317A3 (de
Inventor
Makoto Saito
Tetsu Shinagawa
Masahiko Hatano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Sanso Ltd
Original Assignee
Toyo Sanso Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Sanso Ltd filed Critical Toyo Sanso Ltd
Publication of EP0311317A2 publication Critical patent/EP0311317A2/de
Publication of EP0311317A3 publication Critical patent/EP0311317A3/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane

Definitions

  • the present invention concerns a method for combustion of exhaust gases containing deleterious substances such as silane exhausted from reaction furnaces, etc.
  • Exhaust gases discharged from reaction furnaces in various plants such as semiconductor production plants contain deleterious substances which are highly toxic and likely to cause pyrophoric danger in contact with air, such as silane (SIH4), disalane (Si2H6), phospine (PH3), arsine (AsH3), germane (GeH4), ammonia (NH3), hydrogen selenide (H2Se), hydrogen sulfide (H2S).
  • silane Si2H6
  • PH3 phospine
  • AsH3 arsine
  • GeH4 germane
  • NH3 ammonia
  • H2Se hydrogen selenide
  • H2S hydrogen sulfide
  • US-A-4,555,389 discloses a method of supplying an inert gas such as a nitrogen gas near the top end of the exhaust gas nozzle thereby forming an inert gas atmosphere, and burning the exhaust gases ahead of this atmosphere, thereby preventing the deposition of combustion oxides at the top end of the nozzle.
  • an inert gas such as a nitrogen gas near the top end of the exhaust gas nozzle thereby forming an inert gas atmosphere
  • burning the exhaust gases ahead of this atmosphere thereby preventing the deposition of combustion oxides at the top end of the nozzle.
  • Another object of the present invention is to provide a combustion method for exhaust gases capable of attaining the above-mentioned purpose for exhaust gases containing a wide range of deleterious substances such as silane, disilane, phosphine, arsine, germane, ammonia, hydrogen selenide, hydrogen sulfide.
  • the method of the invention is capable of maintaining a high decomposition rate upon combustion even when the concentration of the noxious substances is low and is also capable of preventing the deposition of oxides at the top end of the combustion nozzle.
  • Deleterious substance that are contained in specific exhaust gases discharged from reaction furnaces from various plants and which can be disposed of by combustion include for example silane (SiH4), disalane (Si2H6), phospine (PH3), arsine (AsH3), germane (GeH4), ammonia (NH3), hydrogen selenide (H2Se) and hydrogen sulfide (H2S).
  • the present inventors have made an earnest study of methods of burning the specific exhaust gases containing these deleterious substances by reaction with air in a combustion chamber and then applying after treatment in a scrubber, a bag filter, etc., to solve the problem of the deposition of oxides on an exhaust gas nozzle and, in addition, to dispose of these substances at a high rate of decomposition upon combustion over a range of various deleterious substances irrespective of their concentration.
  • the flame barrier of the combustible gas formed around the top end of the exhaust gas nozzle consumes oxygen upon combustion around the top end of the nozzle to suppress the combustion of the exhaust gases at the top end of the nozzle, as well as to heat the exhaust gases as they pass through the flame barrier and burns the gases discharged ahead of the flame barrier, i.e., into air.
  • the flame barrier in the present invention can provide both the effect of preventing the combustion of the exhaust gases at the top end of the nozzle and the effect of forcibly burning the exhaust gases ahead of the flame barrier, which can both prevent the deposition of oxides at the top end of the exhaust gas nozzle and provide improvements in the combustion efficiency.
  • the specific exhaust gases containing deleterious substances may, preferably, be mixed with inert gas such as a nitrogen gas and previously diluted to a desired concentration before combustion treatment.
  • the combustion device comprises a vertical cylindrical body 4 closed at the upper and the lower ends thereof by an upper member 2 having a discharge port 1 and a lower plate 3 respectively.
  • the cylindrical body 4 is vertically partitioned at the intermediate its ends with a perforated plate 5 to constitute a combustion cylinder having a combustion chamber 6 in the upper portion and an air chamber 7 in the lower portion.
  • the air chamber 7 is connected with an air supply pipe 9 having a solenoid valve 8.
  • the air chamber 7 formed below the combustion chamber 6 is in communication with the combustion chamber 6 by way of apertures 19 in the perforated plate 5 thereby constituting an air supply section to the combustion chamber 6.
  • An exhaust gas introduction pipe 11 is inserted from below the air chamber 7 in the axial direction of the cylindrical body 4 and the pipe 11 is disposed such that it penetrates the lower plate 3 and the perforated plate 5 and a top end nozzle thereof protrudes inside of the combustion chamber 6.
  • the rear end of the exhaust gas introduction pipe 11 is conected by way of an exhaust gas pipe 12 with a gas supply section 13 for receiving specific exhaust gases from a reaction furnace 14 that contains silane gas, etc.
  • the exhaust gas introduction pipe 11 is also connected with an inert gas mixing pipe 15, such that an inert gas is mixed into the exhaust gases in the exhaust gas introduction pipe 11 to dilute the exhaust gases.
  • a flow rate controller 16 is disposed in the inert gas mixing pipe 15 so that the concentration and the flow rate of the exhaust gases jetted out from the top end nozzle of the exhaust gas introduction pipe 11 are controlled.
  • the boundary between the combustion chamber 6 and the air chamber 7 is constituted only by the perforated plate 5, it may cause the localization of air flow from the air chamber 7 to the combustion chamber 6 to a specific position, or may cause a backfire danger in which the flame in the combustion chamber 6 enters into the air chamber 7.
  • a porous filler layer 17 made of non-combustible but air-­permeable material of an appropriate thickness is applied to the lower surface of the perforated plate 5.
  • a metal gage or a lattice-like support member 18 is fitted to the lower surface of the filler layer 17 so that the filler does not fall.
  • an outer pipe 19 is provided passing through the lower plate 3 and the perforated plate 5 of the air chamber 7 in the same manner as the exhaust gas introduction pipe 11 and spaced from the outer periphery of the exhaust gas introduction pipe 11 substantially in a coaxial manner to constitute a double-walled tubular combustion nozzle 20.
  • a pipe 22 connected with a source 21 of combustible gas such as propane, natural gas or hydrogen is connected to the rear end of the outer pipe 19 by way of a flow rate controller 23 such that the flow rate and the flow speed of the combustible gas jetted out from the top end of the nozzle of the outer pipe 19 may be controlled.
  • a view window 26 is disposed in the combustion chamber 6 so that the state of the inside, particularly state of the flame generated above the nozzle of the exhaust gas introduction pipe 11 and the outer pipe 19, can be observed.
  • a pressure gauge 25 is fitted to the combustion chamber 6.
  • An automatic ignition device 28 is preferably disposed near the upper jetting portion 27 of the double-walled tubular combustion nozzle 20 for the combustion of the combustible gases supplied from the outer tube 19.
  • the combustible gas is supplied from the outer pipe 19 and burnt by the nozzle of the outer pipe 19 to form a flame barrier composed of the combustible gas around the top end of the nozzle of the exhaust gas introduction pipe 11.
  • exhaust gas containing deleterious substances such as silane, etc. sent from the reaction furnace are supplied, after dilution, by way of the exhaust gas introduction pipe 11 and jetted out from the top end nozzle thereof passing through the inside of the flame barrier into the combustion chamber 6.
  • the exhaust gases pass through the flame barrier without combustion since the periphery around the top end of the nozzle of the exhaust gas introduction pipe 11 is surrounded with the flame barrier of the combustible gas and oxygen required for the combustion of the exhaust gases is insufficient there and also due to the effect of the flow rate of the flame.
  • FIG 2 shows the combustion method as disclosed in US-A-4,555,389 for the combustion of exhaust gases, by using the combustion device shown in Figure 1.
  • an inert gas barrier is formed at the top end of a double-walled tubular combustion nozzle 20 by supplying an inert gas (for example, nitrogen) from an outer pipe 19 and, at the same time, diluted silane-containing exhaust gases are supplied in the same manner as the present invention from an exhaust gas introduction pipe 11, passed through the inside of and burnt ahead of the inert gas barrier.
  • an inert gas for example, nitrogen
  • Combustion processing data for the silane-­containing exhaust gases are shown below in comparison between the present invention and conventional examples.
  • silane when using the prior art inert gas curtain (nitrogen), silane is not burnt at all if the silane concentration is less than 0.33%, and the combustion ratio of silane can not attain 100% even at a silane concentration as high as 2.9%.
  • complete combustion takes place according to the present invention even if the silane concentration is as low as 0.16% in exhaust gases.
  • the flame barrier can provide both the effect of preventing the deposition of oxides and the effect of improving the combustion ratio, the structure of the device is not complicated and the existing device used for the conventional method can be utilized as it is.

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  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Incineration Of Waste (AREA)
EP88309126A 1987-10-06 1988-09-30 Verbrennungsverfahren für spezifische Abgase mit schädlichen Stoffen Withdrawn EP0311317A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP25226287A JPH0195214A (ja) 1987-10-06 1987-10-06 特殊材料ガスの燃焼方法
JP252262/87 1987-10-06

Publications (2)

Publication Number Publication Date
EP0311317A2 true EP0311317A2 (de) 1989-04-12
EP0311317A3 EP0311317A3 (de) 1990-03-28

Family

ID=17234785

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88309126A Withdrawn EP0311317A3 (de) 1987-10-06 1988-09-30 Verbrennungsverfahren für spezifische Abgase mit schädlichen Stoffen

Country Status (2)

Country Link
EP (1) EP0311317A3 (de)
JP (1) JPH0195214A (de)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0694735A1 (de) * 1994-07-25 1996-01-31 Alzeta Corporation Zerstörung giftiger Substanzen durch Verbrennung
EP0735321A3 (de) * 1995-03-30 1997-03-26 Das Duennschicht Anlagen Sys Verfahren und Einrichtung zur Reinigung von schadstoffhaltigen Abgasen durch chemische Umsetzung
EP0802370A3 (de) * 1996-04-16 1997-12-10 The BOC Group plc Entsorgung schädlicher Substanzen aus Gasströmen
WO2006117531A1 (en) * 2005-05-05 2006-11-09 Edwards Limited Gas combustion apparatus
WO2006123092A1 (en) * 2005-05-16 2006-11-23 Edwards Limited Gas combustion apparatus
CN103471108A (zh) * 2013-07-22 2013-12-25 北京航天动力研究所 笑气焚烧燃烧器
WO2022171383A1 (de) * 2021-02-12 2022-08-18 Das Environmental Expert Gmbh Verfahren und brenner zur thermischen entsorgung von schadstoffen in prozessgasen

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6017611A (en) * 1998-02-20 2000-01-25 Felix Schoeller Technical Papers, Inc. Ink jet printable support material for thermal transfer
JP7027817B2 (ja) * 2017-11-02 2022-03-02 株式会社Ihi 燃焼装置及びボイラ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE508951A (de) * 1951-02-07
US3365274A (en) * 1964-07-13 1968-01-23 Cabot Corp Metal and metalloid oxide production
DE2241891C3 (de) * 1972-08-25 1980-04-03 Didier-Engineering Gmbh, 4300 Essen Verfahren und Vorrichtung zur Verbrennung von bei der Reinigung von Koksofengasen anfallenden Ammoniakschwaden
JPS5984019A (ja) * 1982-11-05 1984-05-15 Toyo Sanso Kk 排ガス処理におけるモノ・シランガス燃焼方法
US4555389A (en) * 1984-04-27 1985-11-26 Toyo Sanso Co., Ltd. Method of and apparatus for burning exhaust gases containing gaseous silane
JPS6387519A (ja) * 1986-09-29 1988-04-18 Mitsubishi Jushi Eng Kk 半導体製造装置の排ガス燃焼方法
FR2612606B1 (fr) * 1987-03-18 1990-09-14 Air Liquide Procede et dispositif de destruction d'effluents gazeux toxiques

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0694735A1 (de) * 1994-07-25 1996-01-31 Alzeta Corporation Zerstörung giftiger Substanzen durch Verbrennung
EP0735321A3 (de) * 1995-03-30 1997-03-26 Das Duennschicht Anlagen Sys Verfahren und Einrichtung zur Reinigung von schadstoffhaltigen Abgasen durch chemische Umsetzung
EP0802370A3 (de) * 1996-04-16 1997-12-10 The BOC Group plc Entsorgung schädlicher Substanzen aus Gasströmen
WO2006117531A1 (en) * 2005-05-05 2006-11-09 Edwards Limited Gas combustion apparatus
CN101171455B (zh) * 2005-05-05 2012-05-09 爱德华兹有限公司 气体燃烧设备
TWI391611B (zh) * 2005-05-05 2013-04-01 Edwards Ltd 氣體燃燒裝置
US8647111B2 (en) 2005-05-05 2014-02-11 Edwards Limited Gas combustion apparatus
US8662883B2 (en) 2005-05-16 2014-03-04 Edwards Limited Gas combustion apparatus
WO2006123092A1 (en) * 2005-05-16 2006-11-23 Edwards Limited Gas combustion apparatus
CN101175949B (zh) * 2005-05-16 2011-08-31 爱德华兹有限公司 燃烧废气的设备和方法
CN103471108A (zh) * 2013-07-22 2013-12-25 北京航天动力研究所 笑气焚烧燃烧器
CN103471108B (zh) * 2013-07-22 2016-08-31 北京航天动力研究所 笑气焚烧燃烧器
WO2022171383A1 (de) * 2021-02-12 2022-08-18 Das Environmental Expert Gmbh Verfahren und brenner zur thermischen entsorgung von schadstoffen in prozessgasen
CN115210502A (zh) * 2021-02-12 2022-10-18 达斯环境专家有限责任公司 用于热清除工艺气体中的有害物质的方法和燃烧器
CN115210502B (zh) * 2021-02-12 2025-02-18 达斯环境专家有限责任公司 用于热清除工艺气体中的有害物质的方法和燃烧器
US12601479B2 (en) 2021-02-12 2026-04-14 Das Environmental Expert Gmbh Process and burner for the thermal disposal of pollutants in process gases

Also Published As

Publication number Publication date
EP0311317A3 (de) 1990-03-28
JPH0195214A (ja) 1989-04-13

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