EP0332741A1 - Pompe à vide à plusieurs étages - Google Patents

Pompe à vide à plusieurs étages Download PDF

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Publication number
EP0332741A1
EP0332741A1 EP88117706A EP88117706A EP0332741A1 EP 0332741 A1 EP0332741 A1 EP 0332741A1 EP 88117706 A EP88117706 A EP 88117706A EP 88117706 A EP88117706 A EP 88117706A EP 0332741 A1 EP0332741 A1 EP 0332741A1
Authority
EP
European Patent Office
Prior art keywords
pump according
sleeve
plug
channel
bore
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP88117706A
Other languages
German (de)
English (en)
Other versions
EP0332741B1 (fr
Inventor
Hanns-Peter Dr. Berges
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to JP1036453A priority Critical patent/JPH01247787A/ja
Priority to US07/313,165 priority patent/US4943215A/en
Publication of EP0332741A1 publication Critical patent/EP0332741A1/fr
Application granted granted Critical
Publication of EP0332741B1 publication Critical patent/EP0332741B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Definitions

  • the invention relates to a multi-stage vacuum pump with a housing, with at least two scoops in the housing and with a channel connecting the scoops with each other.
  • Multi-stage vacuum pumps are known from DE-OS 31 47 824 and DE-OS 32 44 099. If pumps of this or a similar type are used to evacuate chambers in which etching, coating or other vacuum treatment or manufacturing processes are carried out, it often happens that solids get into the pump. There is even the possibility that such solids only arise during the compression of the gases, that is, during the passage of the gases to be pumped out through the vacuum pump. Examples are the formation of aluminum chloride in aluminum etching, ammonium chloride in coating processes, etc.
  • the present invention has for its object to provide a vacuum pump of the type mentioned, in which the detection of contamination of the endangered passage channels is particularly simple.
  • this object is achieved in that the passage channel which is at risk of contamination is part of an outwardly leading bore which can be closed with a stopper.
  • This solution makes it possible to inspect the connection channel or channels without dismantling the pump. After removing the plug, the connecting channel is z. B. accessible for the introduction of an endoscope.
  • the stopper is expediently provided with a longitudinal bore, to which a pipe section provided with a flange connects to the outside. About the flange z. B. pressure or temperature sensors are inserted in a vacuum-tight manner into the interior of the connecting channel, so that these parameters can be monitored during operation.
  • a sleeve is inserted into the bore, which forms at least a part of the inner wall of the passage channel. Due to the outward opening of the bore, the sleeve in which the solids are deposited can be removed and either cleaned or replaced with a new sleeve. This makes it particularly easy to clean critical areas of passage channels.
  • the exemplary embodiment shown in FIG. 1 is a three-stage vacuum pump 1 with two shafts 2 and 3 and three pairs of rotors 4, 5 or 6, 7 or 8, 9.
  • the axial length of the rotors decreases from the suction side to the pressure side .
  • the rotary pistons are of the claw type (see FIG. 2) and rotate in the scoops 11, 12, 13, which are formed by the shields or side walls 14 to 17 and the housing rings 18 to 20.
  • the shafts 2, 3 are arranged vertically. This also applies to the drive motor 22 arranged next to the pump housing. Below the lower bearing plate 17, the shafts 2, 3 are equipped with gear wheels 23, 24 of the same diameter, which synchronize the movement of the rotor pairs 4, 5 or 6, 7 or 8 , 9 serve.
  • the drive motor 22 also has a gearwheel 25 on its underside. The drive connection is established by a further gearwheel 26 which is in engagement with the gearwheels 24 and 25.
  • the upper bearing wall 14 is equipped with a horizontally arranged connecting flange 28, which forms the inlet 29 of the pump.
  • the inlet channel 31 opens at the end (opening 32) into the scoop chamber 11 of the first stage.
  • the front opening of the first stage is designated 33 and leads into the connecting channel 34.
  • the connecting channel 34 located in the wall 15 communicates with the second stage inlet port 35.
  • the bearing wall 16 is designed accordingly. Below the lowest (third) pump stage is the outlet 36, which is connected to the front outlet opening 37 in the lower bearing wall 17.
  • the side wall 16 shown in FIGS. 3 to 6 serves to separate two scooping spaces 12, 13 of the claw pump 1.
  • one (12) of the scooping spaces is above and the second scooping space (14) below the shield (16).
  • the contour of the scoops 12, 13 is shown in dash-dot lines.
  • the shafts 2, 3 carrying the rotors pass through the disk 16. Their direction of rotation is indicated by the arrows 49 and 51.
  • the passage channel 52 is provided. It connects the outlet 53 of the scoop chamber 12 located on the front side to the inlet 54 of the scoop chamber 13 also located on the front side. Outlet 53 and inlet 54 are formed by arcuate cutouts in the disk 16.
  • the channel 52 is formed by a blind bore 55 in the disk 16, which intersects the outlet 53 and inlet 54 and thus establishes their connection.
  • a sleeve 56 is inserted into the bore 55, which in particular in the region of the section that connects the outlet 53 and the inlet 54 forms the inner wall of the passage 52.
  • Outlet 53 is assigned to the inclined inner end face 57 of the sleeve 56, while the inlet 54 is assigned an opening 58 in the sleeve.
  • the outer end face of the sleeve 56 is equipped with a plug 59.
  • Sleeve 56 and plug 59 are welded together.
  • the plug 59 serves to seal the outer opening of the blind bore 55.
  • the plug is equipped with the radial sealing ring 61.
  • the plug has a thread 62 which is accessible from the outside. This thread 62 receives a screw 63 with which a bolt 64 is fastened on the stopper 59.
  • the plug 59 is equipped with the edge 65. With the help of a further screw 66, the bolt 64 is fastened to the disk 16.
  • the invention has been described with the aid of a multi-stage vacuum pump of the claw type, the stages of which have inlets and outlets located on the end face.
  • the inlets and outlets are usually peripheral. Your connecting channels therefore have different directions than with claw pumps.
  • the possibility of providing them with a sleeve 56 according to the invention is, however, independent of the direction of the channels.
  • FIGS. 5 and 6 show exemplary embodiments in which - as in the other exemplary embodiments - the connecting channel 52 is part of an outwardly leading bore 55 in the side wall 16.
  • the bore 55 is closed with the plug 59.
  • the connecting channel 52 is used for inspections, e.g. B. with the help of an endoscope, accessible without disassembly.
  • FIG. 6 shows a variant in which the stopper 59 is provided with a longitudinal bore 67 in which there is a pipe section 68 leading to the outside.
  • the outer end of the pipe section 68 is provided with a flange 69, on which a blind flange 70 is placed in a vacuum-tight manner in the exemplary embodiment shown.
  • holders for sensors inserted into the connecting channel 52 can be attached to the flange 69 in a vacuum-tight manner.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP88117706A 1988-02-29 1988-10-25 Pompe à vide à plusieurs étages Expired - Lifetime EP0332741B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1036453A JPH01247787A (ja) 1988-02-29 1989-02-17 多段真空ポンプ
US07/313,165 US4943215A (en) 1988-02-29 1989-02-17 Multistage vacuum pump with bore for fouling removal

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP88102986 1988-02-29
EP88102986 1988-02-29

Publications (2)

Publication Number Publication Date
EP0332741A1 true EP0332741A1 (fr) 1989-09-20
EP0332741B1 EP0332741B1 (fr) 1991-09-18

Family

ID=8198761

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88117706A Expired - Lifetime EP0332741B1 (fr) 1988-02-29 1988-10-25 Pompe à vide à plusieurs étages

Country Status (2)

Country Link
EP (1) EP0332741B1 (fr)
DE (1) DE3865009D1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0476631A1 (fr) * 1990-09-21 1992-03-25 Ebara Corporation Pompe à vide, multiétagée
EP1024290A1 (fr) * 1999-01-29 2000-08-02 The BOC Group plc Système de pompe à vide
DE10019066A1 (de) * 2000-04-18 2001-10-25 Leybold Vakuum Gmbh Vakuumpumpe mit zwei zusammenwirkenden Rotoren

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1626484A (en) * 1926-11-24 1927-04-26 James Mccaffrey R Pump
GB315365A (fr) * 1928-07-12 1930-02-06 Gebrueder Ludwig
US1854318A (en) * 1926-06-17 1932-04-19 Westinghouse Electric & Mfg Co Compressor
GB531798A (en) * 1939-08-02 1941-01-10 Siemens Brothers & Co Ltd Improvements in or relating to electrical filter networks
FR1120279A (fr) * 1955-01-24 1956-07-03 Groupe compresseur hermétique
DE2158868A1 (de) * 1971-11-27 1973-06-07 Claas Maschf Gmbh Geb Maschine zum zerkleinern von sperrigen abfaellen
US3837764A (en) * 1972-05-11 1974-09-24 Robinair Mfg Corp Multi-stage rotary vacuum pump with separate oil reservoir
DE2503020A1 (de) * 1975-01-25 1976-07-29 Wikotool Syst Tech Maschbau Drehkolbenmaschine sowie verfahren zu ihrer herstellung

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2158866A1 (de) * 1971-11-27 1973-05-30 Engstfeld Wilh Fa Vorrichtung zum entgasen von metallschmelzen

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1854318A (en) * 1926-06-17 1932-04-19 Westinghouse Electric & Mfg Co Compressor
US1626484A (en) * 1926-11-24 1927-04-26 James Mccaffrey R Pump
GB315365A (fr) * 1928-07-12 1930-02-06 Gebrueder Ludwig
GB531798A (en) * 1939-08-02 1941-01-10 Siemens Brothers & Co Ltd Improvements in or relating to electrical filter networks
FR1120279A (fr) * 1955-01-24 1956-07-03 Groupe compresseur hermétique
DE2158868A1 (de) * 1971-11-27 1973-06-07 Claas Maschf Gmbh Geb Maschine zum zerkleinern von sperrigen abfaellen
US3837764A (en) * 1972-05-11 1974-09-24 Robinair Mfg Corp Multi-stage rotary vacuum pump with separate oil reservoir
DE2503020A1 (de) * 1975-01-25 1976-07-29 Wikotool Syst Tech Maschbau Drehkolbenmaschine sowie verfahren zu ihrer herstellung

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0476631A1 (fr) * 1990-09-21 1992-03-25 Ebara Corporation Pompe à vide, multiétagée
US5173041A (en) * 1990-09-21 1992-12-22 Ebara Corporation Multistage vacuum pump with interstage solid material collector and cooling coils
EP1024290A1 (fr) * 1999-01-29 2000-08-02 The BOC Group plc Système de pompe à vide
DE10019066A1 (de) * 2000-04-18 2001-10-25 Leybold Vakuum Gmbh Vakuumpumpe mit zwei zusammenwirkenden Rotoren
US6964559B2 (en) 2000-04-18 2005-11-15 Leybold Vakuum Gmbh Two shaft vacuum pump with cantilevered rotors

Also Published As

Publication number Publication date
EP0332741B1 (fr) 1991-09-18
DE3865009D1 (de) 1991-10-24

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