EP0347367B1 - Verfahren zur Erzeugung eines Vakuums - Google Patents

Verfahren zur Erzeugung eines Vakuums Download PDF

Info

Publication number: EP0347367B1
Authority: EP; European Patent Office
Prior art keywords: hollow body; metal hydride; vacuum; hydride; hydrogen
Prior art date: 1988-06-16
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

EP89730135A

Other languages

German (de)

English (en)

French (fr)

Other versions

EP0347367A3 (de

EP0347367A2 (de

Inventor

Otto Dr. Dipl.-Phys. Bernauer

Manfred Dr. Dipl.-Ing. Keller

Clemens Dipl.-Ing. Halene

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Mercedes Benz AG

Original Assignee

Hwt Gesellschaft fur Hydrid- und Wasserstofftechnik Mbh

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-06-16

Filing date

1989-06-01

Publication date

1993-04-14

1989-06-01 Application filed by Hwt Gesellschaft fur Hydrid- und Wasserstofftechnik Mbh filed Critical Hwt Gesellschaft fur Hydrid- und Wasserstofftechnik Mbh

1989-12-20 Publication of EP0347367A2 publication Critical patent/EP0347367A2/de

1991-02-27 Publication of EP0347367A3 publication Critical patent/EP0347367A3/de

1993-04-14 Application granted granted Critical

1993-04-14 Publication of EP0347367B1 publication Critical patent/EP0347367B1/de

2009-06-01 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Definitions

the invention relates to a method for generating a vacuum in hollow bodies according to the preamble of patent claim 1.
Evacuation of cavities is required for many technical applications, for example in electrical tubes, in liquid gas pipelines and in so-called vacuum insulation.
the gas atmosphere in the cavity to be evacuated is extracted with the help of a vacuum pump, which works according to different functional principles depending on the required level of the vacuum to be applied (e.g. liquid jet pump, piston pump, centrifugal pump).
the pumping time required not only depends on the performance and the volume of the evacuation room, but is also strongly influenced by the geometry of the evacuation room and increases disproportionately the lower the pressure level of the vacuum to be reached.
getter materials into the evacuated cavity in order to maintain a high vacuum for a longer period of time (over several years). These getter materials are solids and have the property of absorbing gases which are subsequently released in the evacuation space or penetrate into it from the outside.
a known agent for this purpose is activated carbon.
metal hydrides based on Ti-V-Fe-Al-Cr-Mn as getter material for maintaining a vacuum in the vacuum jacket of thermal insulating containers.
DE-A-31 39 368 also discloses such a getter material, but only suggests its use as a heat store.
the vacuum is generated by pumping.
the amount of metal hydride introduced into the evacuation room is 2-4 g / dm3 vacuum space.
the walls of a corresponding insulating jacket are usually made of metallic materials, especially stainless steel.
the cavity is often filled with porous (e.g. diatomaceous earth) or fibrous insulating materials (e.g. glass fibers).
a method for evacuating electrical vacuum discharge devices in which the gas atmosphere is removed from the evacuation space without pumping.
the housing of the device to be evacuated is placed in a hydrogen oven and baked at 450-500 ° C. with constant purging with hydrogen, so that all foreign gases and adhering contaminants, which decompose into gases due to the effects of temperature, are removed.
An evacuated capsule which is largely filled with titanium powder, is inserted into the housing before heating begins. After sufficient hydrogen purging, the purging openings in the housing are sealed gas-tight and the housing is cooled. Then the capsule with the titanium is pierced by a device to be actuated from the outside, so that the hydrogen contained in the housing has access to the titanium powder. Because of its hydride-forming properties, titanium eagerly absorbs the gaseous hydrogen, so that a vacuum is created inside the housing.
This method is very cumbersome and also dangerous (risk of explosion) because of the use of a capsule for the hermitic inclusion of the hydride-forming titanium and because of the necessary piercing mechanism and because of the need for a special furnace with a hydrogen atmosphere, and is therefore unsuitable for large-scale production.
the object of the invention is therefore to provide a method with which rapid evacuation of cavities is made possible in the simplest and cheapest possible way; in particular, the method for the rapid generation of a high vacuum should also be suitable in "filled" evacuation rooms and should not lead to impairment of material properties as a result of excessive heating.
the basic idea of the invention is to be seen in the fact that the metal hydride, which is already known as getter material, is already used to create this vacuum in addition to its function of maintaining a vacuum. For this purpose, it is necessary to introduce the metal hydride into the evacuation space in a comparatively large amount.
the heating of the evacuation room is according to the invention to 400 to max. 500 ° C limited, so that no material impairments are to be feared. It is advantageously carried out so that at least the metal hydride (possibly by separate heating) in the final phase is heated particularly strongly. In any case, the hydrogen gas stored should be largely released from the metal hydride.
the metal hydride used must have a corresponding storage characteristic (pressure-temperature curve) and is set to a correspondingly predetermined one in the heating phase brought high temperature.
the alloy for the metal hydride should expediently be selected in such a way that the stored hydrogen is released to the greatest possible extent only at a temperature which is at least about 200-300 K above the normal later operating temperature of the hollow body.
the process according to the invention can be used with particular advantage for the evacuation of cavities which are filled with porous or fibrous materials (for example vacuum superinsulations) or which have an extensive and branched spatial structure (for example a branched piping system).
porous or fibrous materials for example vacuum superinsulations
an extensive and branched spatial structure for example a branched piping system.
a heat insulation container 1 (without a lid) is shown in axial longitudinal section, which has an inner stainless steel jacket 2 and an outer stainless steel jacket 3.
the cavity 4 formed between the two shells 2, 3 is provided with a filling made of glass fiber material 5. This supports the inner jacket 2 with respect to the outer jacket 3 and causes a reduction in radiation losses. So that the container 1 reaches the high value of a vacuum super insulation, the pressure in the cavity 4 must be reduced to a value below 10 ⁇ 3 mbar.
a gas outlet 6 is inserted in places that are as far away from the outlet nozzle 6, an amount of 20 to 30 g of metal hydride 7 per dm3 of the cavity 4 has been introduced.
the metal hydride 7 is selected so that its hydrogen loading, based on the storage mass at room temperature and normal ambient pressure, is in the range 2 to 3% by weight.
the container 1 is heated, for example in a normal heating oven, to above 200 ° C., if possible to about 450 to 500 ° C.
hydrogen gas is released in the cavity 4, penetrates into the finest cavities of the glass fiber filling 5 and, for example, displaces the specifically heavier original gas atmosphere practically completely against the normal outlet pressure via the outlet port 6 below.
the total amount (at normal pressure) is about 10 times the volume of the cavity 4, an intensive flushing of the cavity 4 anyway
this temperature increase can even be over 500 ° C without heating the walls of the hollow body so much too, if, for example, for local heating electrical resistance heating is carried out directly on the metal hydride.
the container 1 As soon as the gas flow in the outlet nozzle 6 has dropped to a predetermined minimum value, its opening is closed gas-tight and the container 1 is cooled. With increasing cooling of the metal hydride 7, this absorbs the hydrogen gas present in the cavity 4.
a temperature of the metal hydride 7 of 200 ° C e.g. corresponds to the later maximum operating temperature of the container 1, the hydrogen discharge pressure of the metal hydride 7 and thus the vacuum achieved is less than 10 ⁇ 4 mbar.
room temperature a value of less than 10 ⁇ 5 mbar is even reached.
This vacuum can additionally be improved in that, in addition to the hydrogen gas flushing, a final reduction in the amount of hydrogen gas is carried out by means of a vacuum pump.
the vacuum levels that can be achieved in this way are 10 ⁇ 8 to 10 ⁇ 9 mbar.

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Hydrogen, Water And Hydrids (AREA)
Filling Or Discharging Of Gas Storage Vessels (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Manufacture And Refinement Of Metals (AREA)
Powder Metallurgy (AREA)

EP89730135A 1988-06-16 1989-06-01 Verfahren zur Erzeugung eines Vakuums Expired - Lifetime EP0347367B1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE3820951		1988-06-16
DE3820951		1988-06-16

Publications (3)

Publication Number	Publication Date
EP0347367A2 EP0347367A2 (de)	1989-12-20
EP0347367A3 EP0347367A3 (de)	1991-02-27
EP0347367B1 true EP0347367B1 (de)	1993-04-14

Family

ID=6356939

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP89730135A Expired - Lifetime EP0347367B1 (de)	1988-06-16	1989-06-01	Verfahren zur Erzeugung eines Vakuums

Country Status (5)

Country	Link
US (1)	US4973227A (ja)
EP (1)	EP0347367B1 (ja)
JP (1)	JP2721996B2 (ja)
DE (1)	DE58904045D1 (ja)
ES (1)	ES2041033T3 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE4039735A1 (de) *	1990-12-10	1992-06-11	Mannesmann Ag	Waermegedaempftes auspuffrohr und verfahren zur herstellung desselben
JP4843845B2 (ja)	2000-07-03	2011-12-21	トヨタ自動車株式会社	燃料電池システムおよびその制御方法
CN1656316A (zh) *	2002-05-20	2005-08-17	Ts株式会社	真空泵
DE102008040367A1 (de)	2008-07-11	2010-02-25	Evonik Degussa Gmbh	Bauteil zur Herstellung von Vakuumisolationssystemen
CN116263147A (zh) *	2021-12-14	2023-06-16	中国科学院大连化学物理研究所	一种内部加热式填充结构非蒸散型吸气剂泵

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2668253A (en) *	1950-07-06	1954-02-02	American Television Inc	Getter for electron discharge devices
NL181727B (nl) *	1953-09-30		Krupp Koppers Gmbh	Werkwijze voor het bedrijven van extractie- en/of extractiefdestillatie-inrichtingen, onder toepassen van n-gesubstitueerde morfolinen als selectief oplosmiddel.
US3302990A (en) *	1965-03-11	1967-02-07	Gen Electric	Method and apparatus for evacuating an electric discharge device of the vacuum type
NL7513159A (nl) *	1975-11-11	1977-05-13	Philips Nv	Titaan en ijzer bevattend materiaal voor het opslaan van waterstof.
JPS53146910A (en) *	1977-05-10	1978-12-21	Matsushita Electric Ind Co Ltd	Hydrogen storing material
CH636130A5 (fr) *	1978-11-14	1983-05-13	Battelle Memorial Institute	Composition d'alliage a base de titane et de fer pour le stockage de l'hydrogene.
IT1110295B (it) *	1979-02-05	1985-12-23	Getters Spa	Lega ternaria getterante non evaporabile particolarmente per l'assorbimento di acqua e vapore d'acqua in barre combustibili di reattori nucleari
DE3139368C1 (de) *	1981-10-03	1983-01-27	Daimler-Benz Ag, 7000 Stuttgart	Legierung zum Speichern von Wasserstoff
JPS5950742B2 (ja) *	1982-03-26	1984-12-10	工業技術院長	チタン四元系水素吸蔵用合金
JPS59200078A (ja) *	1983-04-27	1984-11-13	Matsushita Electric Ind Co Ltd	真空排気方法
DE3425055C1 (de) *	1984-07-07	1985-07-25	Daimler-Benz Ag, 7000 Stuttgart	Getterstoff

1989
- 1989-06-01 EP EP89730135A patent/EP0347367B1/de not_active Expired - Lifetime
- 1989-06-01 DE DE8989730135T patent/DE58904045D1/de not_active Expired - Fee Related
- 1989-06-01 ES ES198989730135T patent/ES2041033T3/es not_active Expired - Lifetime
- 1989-06-14 JP JP1152009A patent/JP2721996B2/ja not_active Expired - Lifetime
- 1989-06-16 US US07/367,025 patent/US4973227A/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
DE58904045D1 (de)	1993-05-19
US4973227A (en)	1990-11-27
EP0347367A3 (de)	1991-02-27
ES2041033T3 (es)	1993-11-01
JPH0243938A (ja)	1990-02-14
JP2721996B2 (ja)	1998-03-04
EP0347367A2 (de)	1989-12-20

Legal Events

Date	Code	Title	Description
1989-11-04	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
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1991-01-08	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
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1992-07-22	17Q	First examination report despatched	Effective date: 19920610
1993-02-26	GRAA	(expected) grant	Free format text: ORIGINAL CODE: 0009210
1993-04-14	AK	Designated contracting states	Kind code of ref document: B1 Designated state(s): DE ES FR GB IT
1993-05-19	REF	Corresponds to:	Ref document number: 58904045 Country of ref document: DE Date of ref document: 19930519
1993-06-28	ITF	It: translation for a ep patent filed
1993-07-16	ET	Fr: translation filed
1993-08-25	GBT	Gb: translation of ep patent filed (gb section 77(6)(a)/1977)	Effective date: 19930722
1994-02-17	PLBE	No opposition filed within time limit	Free format text: ORIGINAL CODE: 0009261
1994-02-17	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT
1994-04-06	26N	No opposition filed
1995-04-12	REG	Reference to a national code	Ref country code: GB Ref legal event code: 732E
1995-04-21	REG	Reference to a national code	Ref country code: FR Ref legal event code: TP
1995-06-01	REG	Reference to a national code	Ref country code: ES Ref legal event code: PC2A Owner name: MERCEDES-BENZ AKTIENGESELLSCHAFT
1995-07-07	ITPR	It: changes in ownership of a european patent	Owner name: CESSIONE;MERCEDES - BENZ AG
1998-03-04	REG	Reference to a national code	Ref country code: GB Ref legal event code: 732E
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2000-05-12	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: GB Payment date: 20000512 Year of fee payment: 12
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