EP0347706A1 - Dispositif de pompe à vide multiétagé - Google Patents

Dispositif de pompe à vide multiétagé Download PDF

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Publication number
EP0347706A1
EP0347706A1 EP89110607A EP89110607A EP0347706A1 EP 0347706 A1 EP0347706 A1 EP 0347706A1 EP 89110607 A EP89110607 A EP 89110607A EP 89110607 A EP89110607 A EP 89110607A EP 0347706 A1 EP0347706 A1 EP 0347706A1
Authority
EP
European Patent Office
Prior art keywords
pump
gas ring
unit according
ring pump
pumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP89110607A
Other languages
German (de)
English (en)
Other versions
EP0347706B1 (fr
Inventor
Kurt-Willy Dipl.-Ing. Mugele
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Priority to AT89110607T priority Critical patent/ATE75007T1/de
Publication of EP0347706A1 publication Critical patent/EP0347706A1/fr
Application granted granted Critical
Publication of EP0347706B1 publication Critical patent/EP0347706B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Definitions

  • the invention relates to a multi-stage vacuum pump unit in which an oil-lubricated or dry-running mechanical displacement pump is provided in the last, atmospheric stage and this is preceded by at least one further pump on the vacuum side.
  • Roots pumps are characterized by an excellent efficiency due to the contact-free rotation of their Roots compared to other mechanical vacuum pumps.
  • an overall efficiency can be improved by connecting a Roots pump.
  • this only applies to pressure differences Roots pump of less than 50 mbar.
  • the many narrow gaps of this pump do not allow larger pressure differences, because the greater heating associated with higher pressure differences causes thermal expansions which, due to the narrow gaps, can easily cause the roots to jam.
  • the invention has for its object to develop a multi-stage vacuum pump unit of the type described in such a way that on the one hand the oil consumption and thus the contaminated oil quantity is significantly reduced and on the other hand the efficiency compared to known multi-stage vacuum pump units is still improved.
  • the upstream pump is a gas ring pump.
  • the efficiency of a gas ring pump is only half as high as the efficiency of a Roots pump, tests have shown that the use of a gas ring pump in a multi-stage vacuum pump unit can significantly reduce both the energy requirement and the cost, with no losses in terms of the operational safety of the unit must be accepted.
  • gas ring pumps work oil-free in the compressor chamber, the amount of oil otherwise required when using a mechanical displacement pump is completely eliminated. Because of the higher pressure ratio that can be achieved with a gas ring pump, the size of the downstream positive displacement pump is reduced. Smaller sizes of these pumps also require less lubricating oil, and the power requirement also decreases.
  • Appropriate cooling of the medium compressed by the gas ring pump or the gas ring pump itself also contributes to reducing the amount of lubricating oil.
  • a further, very effective cooling of the gas ring pump is achieved in that cooling ducts for jacket cooling are provided on its housing and these cooling ducts are connected to a coolant circuit. Because the gas ring pump is connected to the coolant circuit of the rotary vane pump, a single cooler or heat exchanger for the unit is sufficient.
  • the speed of each pump can be optimally adapted to the prevailing operating conditions. If only one drive motor is used for both pumps, the different speeds that may be necessary for an optimal adaptation of both pumps can be achieved in that one of the two pumps is coupled to the drive motor directly and the other is coupled to the drive motor via a belt drive or a gear.
  • a gas ring pump 2 driven by its own electric motor 1 has an intake pipe 3, via which the gas ring pump 2 is connected to a container to be evacuated, which is not shown in the drawing. With its outlet 4, the gas ring pump 2 is connected via a connecting pipe 5 to the inlet opening 6 of a rotary vane pump 7. Through this rotary vane pump 7, the medium pre-compressed by the gas ring pump 2 is further compressed and expelled through the outlet opening 8.
  • the size of the rotary vane pump, which compresses to atmosphere can be selected to be considerably smaller as a result of the precompression by the gas ring pump, as a result of which the amount of lubricating oil produced is significantly reduced compared to a multi-stage vacuum pump unit consisting only of rotary vane pumps. Since the gas ring pump 2 works completely oil-free in the compression chamber, the amount of oil otherwise required for the preliminary stage is also eliminated. In addition, a gas ring pump with only one shaft and without gear can be inexpensively built in multiple stages, so that a large pressure difference, i.e. high pre-compression, can be achieved.
  • a gas ring pump is significantly less sensitive due to the fact that the gap is two to three times larger than Roots pumps, whereby the gap losses are not higher or even lower due to the division into several stages. Furthermore, due to its mode of operation (freely rotating impeller), the gas ring pump is only limited in the permissible speed by the type of material used for the impeller. With a multi-stage version of the gas ring pump, particularly good and intensive cooling can be achieved due to the larger surface area compared to a Roots pump, which contributes to an improvement in efficiency.
  • Injection cooling is another advantageous cooling option.
  • a coolant is injected into the gas ring pump 2.
  • the cooling of the volume of the medium to be compressed, which can be handled by the downstream rotary vane pump 7, is reduced, so that the downstream rotary vane pump 7 can be designed correspondingly smaller.
  • a very intensive cooling of the medium to be compressed is achieved by jacket cooling of the gas ring pump 2.
  • cooling channels 10 are formed on the housing of the gas ring pump 2, through which a cooling liquid flows.
  • the cooling ducts 10 of the gas ring pump 2 are connected via pipes 12 to a cooling jacket 11 of the rotary vane pump 7 which also has the cooling liquid flowing through it.
  • the cooling ducts 10 of the gas ring pump 2 are connected to one connection of a cooler 13 and the cooling jacket 11 of the rotary vane pump 7 to the other connection of the cooler 13 via further pipelines 12a and 12b.
  • the cooler 13 has a fan 15 which is driven by an electric motor 14.
  • a circulation pump 16 can be arranged in the course of the pipes 12a or 12b.
  • a series connection of the coolant circuits of the two pumps 2 and 7 is shown.
  • a parallel connection of these cooling circuits is also possible.
  • a cooler for the two pumps 2 and 7 is sufficient, so that the construction work is kept to a minimum.
  • the intercooler 9 can be omitted.
  • a reduction in the cost of materials is also possible in that the rotary vane pump 7 is connected directly to the outlet of the gas ring pump 2 with its inlet opening 6. This also results in a compact design of the compressor unit.
  • each of the two pumps 2 and 7 with its own drive motor offers the possibility of optimal power control, since each pump can be regulated in its speed so that optimal conditions arise.
  • optimal operation is ensured by regulating the speed of the electric motor 1 assigned to it so that the current consumption remains constant over the entire speed range.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Centrifugal Separators (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP89110607A 1988-06-24 1989-06-12 Dispositif de pompe à vide multiétagé Expired - Lifetime EP0347706B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT89110607T ATE75007T1 (de) 1988-06-24 1989-06-12 Mehrstufiges vakuumpumpenaggregat.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3821437 1988-06-24
DE3821437 1988-06-24

Publications (2)

Publication Number Publication Date
EP0347706A1 true EP0347706A1 (fr) 1989-12-27
EP0347706B1 EP0347706B1 (fr) 1992-04-15

Family

ID=6357218

Family Applications (2)

Application Number Title Priority Date Filing Date
EP89907120A Pending EP0420899A1 (fr) 1988-06-24 1989-06-12 Agregat de pompe a vide a plusieurs etages
EP89110607A Expired - Lifetime EP0347706B1 (fr) 1988-06-24 1989-06-12 Dispositif de pompe à vide multiétagé

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP89907120A Pending EP0420899A1 (fr) 1988-06-24 1989-06-12 Agregat de pompe a vide a plusieurs etages

Country Status (7)

Country Link
US (1) US5244352A (fr)
EP (2) EP0420899A1 (fr)
JP (1) JPH0545827Y2 (fr)
AT (1) ATE75007T1 (fr)
DE (1) DE58901145D1 (fr)
ES (1) ES2030561T3 (fr)
WO (1) WO1989012751A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19500823A1 (de) * 1995-01-13 1996-07-18 Sgi Prozess Technik Gmbh Vakuum-Pumpstand
WO1998040194A1 (fr) * 1997-03-12 1998-09-17 Ohl Apparatebau & Verfahrenstechnik Gmbh Procede de production d'un recyclat de pet a base de flocons ainsi que produit en pet fabrique selon ce procede
CN1065026C (zh) * 1993-09-08 2001-04-25 日本真空技术株式会社 两级旋转真空泵
FR2978214A1 (fr) * 2011-07-21 2013-01-25 Adixen Vacuum Products Pompe a vide multi-etagee de type seche
CN105756936A (zh) * 2016-04-29 2016-07-13 东莞市佛尔盛智能机电股份有限公司 一种气环式真空泵

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK9300484U4 (da) * 1993-11-02 1994-07-22 Apv Rosista Hygiejnisk tankvognspumpe samt tankvogn forsynet med en sådan
US6692234B2 (en) * 1999-03-22 2004-02-17 Water Management Systems Pump system with vacuum source
DE19929519A1 (de) 1999-06-28 2001-01-04 Pfeiffer Vacuum Gmbh Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage
DE102004010061B9 (de) * 2004-03-02 2006-02-16 Friedhelm Gevelhoff Seitenkanal-Drehschieberpumpe
DE102004038924B4 (de) * 2004-03-02 2007-03-01 Friedhelm Gevelhoff Seitenkanal-Drehschieberpumpe
US7033137B2 (en) 2004-03-19 2006-04-25 Ametek, Inc. Vortex blower having helmholtz resonators and a baffle assembly
US20090142212A1 (en) * 2007-12-03 2009-06-04 Paul Xiubao Huang Rotary blower with noise abatement jacket enclosure
DE202012008133U1 (de) * 2012-08-25 2013-11-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
CN118669343B (zh) * 2024-08-22 2024-10-25 中国空气动力研究与发展中心超高速空气动力研究所 一种大流量高压比离心真空泵机组

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE414133C (de) * 1922-07-05 1925-05-23 Der Maschinenfabriken Escher A Mehrstufige Kreiselverdichteranlage
US2936107A (en) * 1956-06-14 1960-05-10 Nat Res Corp High vacuum device
DE2138383A1 (de) * 1971-07-31 1973-02-08 Siemens Ag Pumpenaggregat zur mehrstufigen verdichtung von gasen
FR2276487A1 (fr) * 1974-06-24 1976-01-23 Siemens Ag Pompe a vide a anneau liquide precedee d'un compresseur
FR2346580A1 (fr) * 1976-04-02 1977-10-28 Gutehoffnungshuette Sterkrade Compresseur a plusieurs etages
US4090815A (en) * 1975-12-03 1978-05-23 Aisin Seiki Kabushiki Kaisha High vacuum pump

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1248031A (en) * 1967-09-21 1971-09-29 Edwards High Vacuum Int Ltd Two-stage rotary vacuum pumps
US3642384A (en) * 1969-11-19 1972-02-15 Henry Huse Multistage vacuum pumping system
US3922110A (en) * 1974-01-28 1975-11-25 Henry Huse Multi-stage vacuum pump
US3956072A (en) * 1975-08-21 1976-05-11 Atlantic Fluidics, Inc. Vapor distillation apparatus with two disparate compressors
DE2841906C2 (de) * 1978-09-26 1980-02-21 Siemens Ag, 1000 Berlin Und 8000 Muenchen Flüssigkeitsringverdichter oder -vakuumpumpe
US4588358A (en) * 1984-07-02 1986-05-13 Werner Rietschle Maschinen-Und Apparatebau Gmbh Rotary vane evacuating pump
JPS62119946A (ja) * 1985-11-19 1987-06-01 Mitsubishi Cable Ind Ltd ヒ−トシンクの製造方法
DE3545982A1 (de) * 1985-12-23 1987-07-02 Busch Gmbh K Drehschieber-vakuumpumpe
JPH0733834B2 (ja) * 1986-12-18 1995-04-12 株式会社宇野澤組鐵工所 ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
FR2647853A1 (fr) * 1989-06-05 1990-12-07 Cit Alcatel Pompe primaire seche a deux etages
US5131817A (en) * 1990-03-22 1992-07-21 The Nash Engineering Company Two-stage pumping system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE414133C (de) * 1922-07-05 1925-05-23 Der Maschinenfabriken Escher A Mehrstufige Kreiselverdichteranlage
US2936107A (en) * 1956-06-14 1960-05-10 Nat Res Corp High vacuum device
DE2138383A1 (de) * 1971-07-31 1973-02-08 Siemens Ag Pumpenaggregat zur mehrstufigen verdichtung von gasen
FR2276487A1 (fr) * 1974-06-24 1976-01-23 Siemens Ag Pompe a vide a anneau liquide precedee d'un compresseur
US4090815A (en) * 1975-12-03 1978-05-23 Aisin Seiki Kabushiki Kaisha High vacuum pump
FR2346580A1 (fr) * 1976-04-02 1977-10-28 Gutehoffnungshuette Sterkrade Compresseur a plusieurs etages

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1065026C (zh) * 1993-09-08 2001-04-25 日本真空技术株式会社 两级旋转真空泵
DE19500823A1 (de) * 1995-01-13 1996-07-18 Sgi Prozess Technik Gmbh Vakuum-Pumpstand
WO1998040194A1 (fr) * 1997-03-12 1998-09-17 Ohl Apparatebau & Verfahrenstechnik Gmbh Procede de production d'un recyclat de pet a base de flocons ainsi que produit en pet fabrique selon ce procede
FR2978214A1 (fr) * 2011-07-21 2013-01-25 Adixen Vacuum Products Pompe a vide multi-etagee de type seche
EP2549112A3 (fr) * 2011-07-21 2013-02-06 Adixen Vacuum Products Pompe à vide multi-étagée de type sèche
CN105756936A (zh) * 2016-04-29 2016-07-13 东莞市佛尔盛智能机电股份有限公司 一种气环式真空泵

Also Published As

Publication number Publication date
EP0347706B1 (fr) 1992-04-15
JPH03500007U (fr) 1991-12-05
DE58901145D1 (de) 1992-05-21
ES2030561T3 (es) 1992-11-01
WO1989012751A1 (fr) 1989-12-28
US5244352A (en) 1993-09-14
EP0420899A1 (fr) 1991-04-10
JPH0545827Y2 (fr) 1993-11-26
ATE75007T1 (de) 1992-05-15

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