EP2549112A3 - Pompe à vide multi-étagée de type sèche - Google Patents

Pompe à vide multi-étagée de type sèche Download PDF

Info

Publication number
EP2549112A3
EP2549112A3 EP12177089A EP12177089A EP2549112A3 EP 2549112 A3 EP2549112 A3 EP 2549112A3 EP 12177089 A EP12177089 A EP 12177089A EP 12177089 A EP12177089 A EP 12177089A EP 2549112 A3 EP2549112 A3 EP 2549112A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
dry type
type multi
stage vacuum
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12177089A
Other languages
German (de)
English (en)
Other versions
EP2549112B1 (fr
EP2549112A2 (fr
Inventor
Stéphane Crochet
Patrick Philippe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Adixen Vacuum Products SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adixen Vacuum Products SAS filed Critical Adixen Vacuum Products SAS
Publication of EP2549112A2 publication Critical patent/EP2549112A2/fr
Publication of EP2549112A3 publication Critical patent/EP2549112A3/fr
Application granted granted Critical
Publication of EP2549112B1 publication Critical patent/EP2549112B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

L'invention concerne une pompe à vide multi-étagée de type sèche comportant une pluralité d'étages de pompage (TA, T1, T2, T3, T4, TR) comportant respectivement une entrée et une sortie, les étages de pompage étant montés en série entre une aspiration (2) et 5un refoulement (3) de la pompe à vide, la pompe à vide comportant en outre un moyen de délestage comportant un canal (5) raccordant la sortie (6) d'un étage de pompage à délester (T1) au refoulement (3), caractérisée en ce que le moyen de délestage comporte un joint annulaire (12a, 12b) présentant une embase formant saillie radiale (14a, 14b) surmontée d'une ouverture tronconique (15a, 15b), la saillie radiale (14a, 14b) étant logée dans une gorge annulaire (11a, 11b) du canal (5) et l'ouverture tronconique (15a, 15b) formant un siège pour une bille (13a, 13b) du moyen de délestage, le joint annulaire (12a, 12b) étant réalisé en une seule pièce.
EP12177089.5A 2011-07-21 2012-07-19 Pompe à vide multi-étagée de type sèche Active EP2549112B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1102279A FR2978214B1 (fr) 2011-07-21 2011-07-21 Pompe a vide multi-etagee de type seche

Publications (3)

Publication Number Publication Date
EP2549112A2 EP2549112A2 (fr) 2013-01-23
EP2549112A3 true EP2549112A3 (fr) 2013-02-06
EP2549112B1 EP2549112B1 (fr) 2015-09-02

Family

ID=46508293

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12177089.5A Active EP2549112B1 (fr) 2011-07-21 2012-07-19 Pompe à vide multi-étagée de type sèche

Country Status (3)

Country Link
EP (1) EP2549112B1 (fr)
KR (1) KR101945542B1 (fr)
FR (1) FR2978214B1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202017003212U1 (de) * 2017-06-17 2018-09-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
FR3109806B1 (fr) * 2020-04-29 2022-09-30 Pfeiffer Vacuum Technology AG Pompe à vide primaire et Installation
FR3112176B1 (fr) * 2020-10-09 2023-03-17 Pfeiffer Vacuum Pompe à vide primaire et Installation
WO2021219307A1 (fr) * 2020-04-29 2021-11-04 Pfeiffer Vacuum Pompe à vide primaire et installation
FR3128747B1 (fr) * 2021-11-03 2025-08-22 Pfeiffer Vacuum Pompe à vide multi-étagée

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1503502A1 (de) * 1964-10-08 1969-06-04 Balzers Hochvakuum OElgedichtete,mechanische,rotierende Vakuumpumpe
US4295794A (en) * 1979-01-22 1981-10-20 Robinair Manufacturing Corporation Selective mode multi-stage vacuum pump
EP0347706A1 (fr) * 1988-06-24 1989-12-27 Siemens Aktiengesellschaft Dispositif de pompe à vide multiétagé
EP1947342A1 (fr) * 2007-01-19 2008-07-23 Anest Iwata Corporation Clapet de retenue pour compresseur
DE102009017886A1 (de) * 2009-04-17 2010-10-21 Oerlikon Leybold Vacuum Gmbh Schraubenvakuumpumpe

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2510903Y2 (ja) * 1989-03-24 1996-09-18 株式会社 神戸製鋼所 スクリュ式真空ポンプ用消音器
JP2001263516A (ja) 2000-03-15 2001-09-26 Iseki & Co Ltd リリーフバルブ
KR200444303Y1 (ko) * 2008-10-31 2009-05-04 안영세 가스 자동 차단장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1503502A1 (de) * 1964-10-08 1969-06-04 Balzers Hochvakuum OElgedichtete,mechanische,rotierende Vakuumpumpe
US4295794A (en) * 1979-01-22 1981-10-20 Robinair Manufacturing Corporation Selective mode multi-stage vacuum pump
EP0347706A1 (fr) * 1988-06-24 1989-12-27 Siemens Aktiengesellschaft Dispositif de pompe à vide multiétagé
EP1947342A1 (fr) * 2007-01-19 2008-07-23 Anest Iwata Corporation Clapet de retenue pour compresseur
DE102009017886A1 (de) * 2009-04-17 2010-10-21 Oerlikon Leybold Vacuum Gmbh Schraubenvakuumpumpe

Also Published As

Publication number Publication date
FR2978214A1 (fr) 2013-01-25
EP2549112B1 (fr) 2015-09-02
KR20130011970A (ko) 2013-01-30
KR101945542B1 (ko) 2019-02-07
EP2549112A2 (fr) 2013-01-23
FR2978214B1 (fr) 2013-08-16

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