EP0363548A1 - Verfahren zum Brechen eines plattenförmigen Werkstücks, insbesondere eines Halbleiterplättchens, und Vorrichtung zum Brechen des genannten zwischen zwei Folien sandwichartig angeordneten Werkstücks - Google Patents

Verfahren zum Brechen eines plattenförmigen Werkstücks, insbesondere eines Halbleiterplättchens, und Vorrichtung zum Brechen des genannten zwischen zwei Folien sandwichartig angeordneten Werkstücks Download PDF

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Publication number
EP0363548A1
EP0363548A1 EP88810694A EP88810694A EP0363548A1 EP 0363548 A1 EP0363548 A1 EP 0363548A1 EP 88810694 A EP88810694 A EP 88810694A EP 88810694 A EP88810694 A EP 88810694A EP 0363548 A1 EP0363548 A1 EP 0363548A1
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EP
European Patent Office
Prior art keywords
workpiece
base element
foil
sandwich
longitudinal direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP88810694A
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English (en)
French (fr)
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EP0363548B1 (de
Inventor
Heinz Richard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
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International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to DE3888685T priority Critical patent/DE3888685T2/de
Priority to EP88810694A priority patent/EP0363548B1/de
Priority to JP21213989A priority patent/JPH0758702B2/ja
Priority to US07/406,943 priority patent/US4995539A/en
Publication of EP0363548A1 publication Critical patent/EP0363548A1/de
Application granted granted Critical
Publication of EP0363548B1 publication Critical patent/EP0363548B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F3/00—Severing by means other than cutting; Apparatus therefor
    • B26F3/002—Precutting and tensioning or breaking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
    • B28D5/0029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rotating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0052—Means for supporting or holding work during breaking
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00—Severing by tearing or breaking
    • Y10T225/10—Methods
    • Y10T225/12—With preliminary weakening
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00—Severing by tearing or breaking
    • Y10T225/30—Breaking or tearing apparatus
    • Y10T225/307—Combined with preliminary weakener or with nonbreaking cutter
    • Y10T225/321—Preliminary weakener
    • Y10T225/325—With means to apply moment of force to weakened work
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00—Severing by tearing or breaking
    • Y10T225/30—Breaking or tearing apparatus
    • Y10T225/371—Movable breaking tool
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00—Severing by tearing or breaking
    • Y10T225/30—Breaking or tearing apparatus
    • Y10T225/371—Movable breaking tool
    • Y10T225/379—Breaking tool intermediate spaced work supports
    • Y10T225/386—Clamping supports

Definitions

  • the present invention relates to a method of breaking a plate-like workpiece such as a semiconductor wafer and to a device for breaking a plate-like workpiece sandwiched between two flexible foils.
  • a method of this kind has been disclosed in IBM Technical Disclosure Bulletin Vol. 23 No. 10 (March 1981) pp. 4749-4750 for cleaving GaAs and similar materials. It involves scribing the wafer surface and then controllably bending the wafer so that it fractures along the scribed lines.
  • the following are of relevance in the present invention: - To cleave a bar of given length L the wafer should be thinner than L/2. - The scribed wafer should be bent in such manner that the plane of the bending radius is normal to the scribed lines, which should be on the convex side of the wafer.
  • the wafer must be mounted on a substrate which is sufficiently rigid to support the wafer but is also deformable to the necessary bending radius and then located on the concave side of the wafer when bent.
  • the convex side of the wafer must be constrained in order to prevent stress from being applied on the side of the wafer adjoining the substrate, which stress could separate the wafer from the substrate.
  • a flexible material can be used to cover the wafer and the substrate.
  • the sandwich of substrate, wafer and flexible upper foil must be joined by flexible adhesives which are readily removable and which will not in any way damage the cleaved pieces.
  • Non-rigid adhesive sheets are known in the art of fixing semiconductor wafers. They are designed for use in holding semiconductor wafers firmly in place e.g. while breaking processes are performed thereon and made as a sandwich comprised of a non-rigid PVC-foil and a polyester foil joined together by means of an acrylic adhesive. They are available for instance from Nitto Electric Industrial Co. Ltd. (Japan). The adhesion of such foils to each other in the sandwich is indicated to be about 100 to 350 N/m, depending of the type of sheet and the duration of its storage.
  • a device suitable for breaking a plate-like workpiece sandwiched between two flexible foils of a sheet of the above indicated kind is known in the art and available for instance from Dynatex Corporation (U.S.A.).
  • This known device is comprised of a movable cross-table having the wafer affixed thereon, a wedge and an anvil therefor.
  • the cross-table has an aperture adapted to be overlaid by the properly oriented wafer.
  • the wedge is made to press the wafer against the anvil through the aperture, the anvil being made of hard rubber so as to be slightly resilient.
  • the process of breaking a wafer comprises the steps of: scribing one of the workpiece surfaces with at least one scribing line to define a plane where the workpiece is to be broken; placing the workpiece, with its scribed surface facing upwards, between an upper and a lower foil, both foils being flexible and extending beyond the margins of the workpiece, an adhesive serving to join the workpiece to the lower foil; applying an upward force to the lower side of the sandwich structure to bend the workpiece, the plane of the radius being normal to the scribed lines on the convex side of the workpiece, so that the workpiece breaks into individual bars as determined by the scribed lines; and removing the upper foil whereafter the lower foil can be stretched so that the individual bars become separated and can be taken from the lower foil for further processing.
  • Such known device and method of breaking a wafer are not specifically designed and adapted for the manufacture of semiconductor lasers whose mirror facets are obtained as cleavage planes of the semiconductor wafer. Indeed, these mirror facets are very fragile and very often become damaged by crushing which occurs between adjacent laser elements before the latter become separated by stretching the lower foil.
  • the known device also is extremely costly in that the cross-table must be moved while the wafer is observed under a microscope to precisely position the wedge and anvil at each scribed line in succession, and then the wedge must be precisely operated by means of a controlled wedge drive means.
  • an object of the present invention is to provide a method of breaking a plate-like workpiece such as a semiconductor wafer, which method prevents facets of workpiece elements that are created when the workpiece is being broken from abutting and damaging each other.
  • Another object of the present invention is to provide a device for breaking a plate-like workpiece sandwiched between two flexible foils, which device is cheap to manufacture as well as simple and easy to operate, and does not require any controlled drive means nor any microscope permanently mounted at the device.
  • a method of breaking a plate-like workpiece such as a semiconductor wafer, the method comprising the steps of scribing one of the workpiece surfaces with at least one scribing line to define a plane where the workpiece is to be broken; placing the workpiece, with its scribed surface facing upwards, between an upper and a lower foil, both foils being flexible and stretchable and extending beyond the margins of the workpiece, an adhesive serving to join the workpiece to the lower foil; stretching the two foils with the workpiece sandwiched in-between, the workpiece preventing such stretching at least partly within that part of the lower foil to which it adheres; applying an upward force to the lower side of the sandwich structure to bend the workpiece, the plane of the radius being normal to the scribed lines on the convex side of the workpiece, so that the workpiece breaks into individual bars as determined by the scribed lines thus enabling the part of the lower foil to which the workpiece was initially joined
  • the tensile strength of the lower foil is lower that the tensile strength of the upper foil.
  • the workpiece may be made of gallium arsenide, indium phosphide or silicon, or consist of an amorphous material and made of glass.
  • a piece of intermediate foil is interposed between the upper surface of the workpiece and the upper foil, with the piece of intermediate foil being larger than the workpiece so as to extend all around beyond the workpiece covered therewith.
  • This intermediate foil may be made of polyester or polyimide.
  • a device for breaking a plate-like workpiece sandwiched between two flexible foils comprises: a base element having an essentially plane upper surface, its longitudinal extension being larger than that in the transverse direction; first gripping means fixedly positioned in respect of the base element, provided and arranged for releasably holding one sandwich end; second gripping means movably arranged at the base element for movement in the longitudinal direction, provided and arranged for releasably holding the other sandwich end; displacing means arranged for adjustably displacing the second gripping means in the longitudinal direction; and a cylindrical rod adapted to be placed on the upper surface of the base element with its cylinder axis parallel to the transverse direction and to be movable in the longitudinal direction.
  • the base element is provided at its upper surface with a groove parallel to the transverse direction and adapted to receive the rod so as to completely accommodate it below the plane of the upper surface of the base element
  • the rod is provided with a pair of rollers symmetrically mounted thereon by means of respective bearings and spaced from each other by more than the width of the sandwich transverse to its lengthwise direction extending between its ends
  • the base element is provided at its upper surface with a pair of recessed cavities each connected to the groove and each adapted to accommodate at least a portion of a respective roller when the rod is accommodated in the groove.
  • the base element may be provided at its upper surface with a pair of recessed tracks each connected to a respective recessed cavity, extending in longitudinal direction and adapted to accommodate a portion of a respective roller so as to position the rod parallel to the transverse direction.
  • the displacing means are comprised of two guide bars affixed to the base element parallel to the longitudinal direction, a chariot gliding on the guide bars and having a threaded bore parallel to the longitudinal direction, and a spindle adapted to be screwed into the bore and to have one end abutting on the base element, the other end of the spindle being operable to rotate the spindle, the second gripping means being affixed to the chariot so as to be arranged at the base element by means of the displacing means.
  • the gripping means may be clamps adapted to be pressed in a pressing direction perpendicular to the upper surface of the base element, respectively against the base element and the chariot, by means of a respective pair of spindles screwed in pressing direction into respective bores of the base element and the chariot, the spindles having respective knobs adapted to abut in pressing direction against an upper face of the respective clamp parallel to and facing away from the upper surface of the base element, the spindles being spaced from each other by more than the width of the sandwich.
  • spring means may be provided to press the clamps away from the base element and the chariot, respectively, into abutment on the knobs of the respective spindles.
  • the method of the invention allows to stretch the lower foil after the workpiece has been adhered to it.
  • the lower foil has been at least partly prevented from stretching at such locations where it adheres to the workpiece, when the workpiece is broken the foil becomes capable of stretching at least in the vicinity of the newly created facets obtained as breakage planes of the workpiece. This allows the facets to become spaced from each other, which efficiently prevents damage by crushing to occur between adjacent elements of the workpiece when broken.
  • the device according to the invention is cheap to manufacture as well as simple and easy to operate. It is small and light and thus easy to be installed for operation or put away for storage in a cabinet. Thus, it is suitable for mass production and for use by non-skilled operators.
  • base element 1 adapted to receive a workpiece and foils sandwich 3.
  • base element 1 has an essentially plane upper surface 2, and is constructed rectangular with greater extension in a longitudinal extension of base element 1 than in a transverse extension thereof.
  • Sandwich 3 is comprised of a wafer-like workpiece 4 about to be broken and which is scribed on one of its surfaces with at least one scribing line to define a plane where workpiece 4 is to be broken.
  • Such wafer-like workpiece 4 is delimited by plane upper and lower surfaces parallel to each other and spaced by less than half the smallest dimension of its upper or lower surface.
  • workpiece 4 is a semiconductor wafer of gallium arsenide.
  • workpiece 4 can be any wafer-like piece of monocristalline material which is to be cleaved along a desired cleavage plane, such as the aforesaid gallium arsenide or indium phosphide or silicon, or any a plate-like piece of amorphous material which is to be broken along a desired breakage plane, such as glass.
  • Workpiece 4 is sandwiched with its scribed surface facing upwards between a lower foil 5 and an upper foil 6. Both foils 5 and 6 extend beyond the margins of workpiece 4 so as to completely enclose the latter.
  • workpiece 4 is a gallium arsenide chip having dimensions of about 8 x 8 x 0,1 mm and sandwich 3 has dimensions of about 50 x 10 x 0,2 mm to 100 x 25 x 0,2 mm.
  • workpiece 4 is a glass plate having dimensions of about 18 x 18 x 0,16 mm and sandwich 3 has approximately the same dimensions as above.
  • An adhesive which may be of the acrylic type, as known in the art, is provided on the upper face of lower foil 5 and serves to join the latter to either workpiece 4 or upper foil 6.
  • the adhesive force may be selected as small as possible but sufficient to prevent workpiece 4 and the individual bars into which workpiece 4 is eventually broken from falling off lower foil 5 on manipulation thereof.
  • An adhesive force of about 100 N/m may be considered proper.
  • Both foils 5 and 6 are flexible and can be stretched by more than 10 % without being damaged, and the tensile strength of lower foil 5 is lower that the tensile strength of upper foil 6.
  • the lower foil 5 may be for instance about 0,1 mm thick and made of polyvinyl chloride and the upper foil 6 may be for instance about 0,01 mm thick and made of polyester.
  • base element 1 is provided with first and second gripping means 7 and 8 each for releasably holding a portion of sandwich 3 near to a respective end thereof on the whole width thereof in the plane of the upper surface parallel to the transverse direction of base element 1, and with displacing means arranged for adjustably displacing the second gripping means in the longitudinal direction of base element 1.
  • First gripping means 7 is fixedly positioned in respect of base element 1 and constructed as a clamp 9 adapted to be pressed against base element 1 in a direction perpendicular its upper surface 2 by means of a pair of spindles 10 screwed into respective bores 11 of base element 1.
  • Spindles 10 have respective knobs 12 adapted to abut in pressing direction against an upper face of clamp 9.
  • Spindles 10 are spaced from each other by more than the width of sandwich 3 to provide passage of the latter between them.
  • Spring means not shown are provided to press clamp 9 away from upper surface 2 of base element 1 into abutment onto knobs 12.
  • screwing or unscrewing knobs 12 allows to respectively hold or release the clamped portion of sandwich 3.
  • Second gripping means 8 is constructed similar to first gripping means 7 but positioned spaced therefrom at a chariot 13, an upper surface of which is in the same plane as upper surface 2 of base element 1.
  • Chariot 13 is movably arranged at base element 1 for movement in its longitudinal direction and is thus part of the aforesaid displacing means.
  • the displacing means further comprise a pair of guide bars 14 affixed to base element 1 parallel to its longitudinal direction and which can be inserted into respective bores 15 of chariot 13 to serve as support and guide means on which chariot 13 can be made to glide.
  • chariot 13 has a threaded bore 16 parallel to the longitudinal direction of base element 1 and a spindle 17 adapted to be screwed into bore 16.
  • One end of spindle 17 can be made to abut base element 1 and at its other end spindle 17 is operable to be rotated by means of a knob 18.
  • Screwing or unscrewing spindle 17 while it is abutting base element 1 allows to move chariot 13 to respectively increase or decrease the spacing between chariot 13 and base element 1.
  • second gripping means 8 is movably arranged at base element 1 by means of the displacing means for being adjustably displaced in the longitudinal direction of base element 1.
  • a bending tool To proceed to break workpiece 4, a bending tool must be provided whose purpose is to apply an upward force to the lower side of sandwich 3 to bend workpiece 4 in such manner that the plane of the bending radius is normal to the scribed lines on the convex side of workpiece 4.
  • the workpiece Upon bending, the workpiece breaks into individual bars as determined by the scribed lines and also by preferential cleavage planes if the workpiece material is crystalline.
  • the bending tool generally is not needle-shaped and contacts the lower side of workpiece 4 along a breakage line which, together with the scribed line, determines the breakage plane.
  • workpiece 4 and the bending tool should be properly oriented in respect of each other to ensure that breaking occurs along the desired plane.
  • the bending tool is a cylindrical rod 19 adapted to be placed on the upper surface 2 of base element 1 with its cylinder axis parallel to the transverse direction of base element 1 and to be movable in the longitudinal direction of base element 1.
  • the diameter of this rod is about 5 % of the length of the sandwich between gripping means 7 and 8.
  • rod 19 is provided with a pair of rollers 20 symmetrically mounted thereon by means of respective bearings and spaced from each other by more than the width of sandwich 3 transverse to the longitudinal direction of base element 1.
  • upper surface 2 of base element 1 is provided with a pair of recessed tracks 21 extending in longitudinal direction of base element 1 and adapted to accommodate a portion of a respective roller 20 so that rollers 20 and tracks 21 cooperate to position and maintain rod 19 parallel to the transverse direction of base element 1.
  • upper surface 2 of base element 1 is provided with a groove 22 (shown in Figs. 4 and 5) parallel to the transverse direction of base element 1.
  • Groove 22 is adapted to receive rod 19 (as shown in Figs. 1 and 2) so as to completely accommodate it in a rest position thereof below the plane of upper surface 2 of base element 1.
  • upper surface 2 of base element 1 is provided with a pair of recessed cavities 23 each connected to groove 22 and to a respective track 21 and each adapted to accommodate at least a portion of a respective roller 20 in the rest position of rod 19.
  • rod 19 is made longer than the width of base element 1 parallel to its transverse direction and is provided with a pair of operating knobs 24 symmetrically mounted at the ends of rod 19 by means of respective bearings 25. This provision also ensures that rod 19 is able to rotate freely as required by its eventual friction on upper surface 2 of base element 1 and on the lower side of lower foil 5.
  • workpiece 4 is required to lie on base element 1 with the desired breakage planes oriented parallel to the transverse direction of base element 1. This is attained by orienting sandwich 3 in respect of rod 19 prior to clamping it in gripping means 7 and 8, which can be done manually by moving sandwich 3 in respect of upper surface 2 of base element 1 while observing workpiece 4 under a microscope through upper foil 6, which usually is transparent or at least translucent.
  • rod 19 is moved still further in the same longitudinal direction of base element 1 sufficient to prevent any future interference between rod 19 and the workpiece elements. In order to maintain the tension, it must be assured that rod 19 does not drop from upper surface 2 into the space between base element 1 and chariot 13.
  • a stop (not shown) mounted on base element 1 can serve this purpose.
  • the operator then cuts upper foil 6 in the vicinity of each of clamps 9, using for instance a cutter blade or small scissors. After having removed the cut off portion of upper foil 6 for instance by means of tweezers or of a suction device, the operator actuates knob 18 to further increase the spacing between chariot 13 and base element 1 so as to further stretch lower foil 5 considerably, e.g.
  • a piece of intermediate foil 26 is interposed between the upper surface of workpiece 4 and upper foil 6 when sandwich 3 is made.
  • This piece of intermediate foil 26 is larger than workpiece 4 and placed thereon so as to extend all around beyond workpiece 4.
  • Sandwich 3 then consists of three layers of foil as shown in Fig. 6, namely (from bottom to top) of lower foil 5, intermediate foil 26 and upper foil 6, while workpiece 4 is inserted between lower foil 5 and intermediate foil 26 in a portion of sandwich 3.
  • the purpose of intermediate foil 26 is to reduce friction between the upper surface of workpiece 4 and upper foil 6 so as to improve the gliding ability of the upper surface of workpiece 4 in respect of that foil which is constraining workpiece 4 without having to reduce the strain applied to workpiece 4. This results in reduced stress and ensuing damage at edges and corners of workpiece 4.
  • the intermediate foil may be made of polyester or polyimide for instance about 0,02 mm thick.
  • rod 19 which is functional in performing the breaking of workpiece 4 is only the upper part of its cylindrical mantle surface.
  • it is equivalent to use the rod-shaped breaking tool described in the preceding or to use any breaking tool having at its upper portion a mantle surface whose mantle lines are parallel to the desired breaking planes. In this sense, even the straight edge of a blade is equivalent to rod 19. Breaking is then performed by displacing the breaking tool so as to bring it into tangential contact with sandwich 3 and then bending sandwich 3 along the mantle surface of the breaking tool.
  • the operator scribes an upper surface of the workpiece to define one or more planes where the workpiece is to be broken; he places the workpiece in sandwich between an upper and a lower foil with its scribed surface facing upwards, preferably after having inserted an intermediate foil between the workpiece and the upper foil; he stretches the sandwich; he applies an upward force to the lower side of the sandwich structure to bend the workpiece; and he removes the upper foil (and the intermediate foil if need be), whereafter he takes the individual bars from the lower foil for further processing.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Dicing (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
EP88810694A 1988-10-10 1988-10-10 Verfahren zum Brechen eines plattenförmigen Werkstücks, insbesondere eines Halbleiterplättchens, und Vorrichtung zum Brechen des genannten zwischen zwei Folien sandwichartig angeordneten Werkstücks Expired - Lifetime EP0363548B1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE3888685T DE3888685T2 (de) 1988-10-10 1988-10-10 Verfahren zum Brechen eines plattenförmigen Werkstücks, insbesondere eines Halbleiterplättchens, und Vorrichtung zum Brechen des genannten zwischen zwei Folien sandwichartig angeordneten Werkstücks.
EP88810694A EP0363548B1 (de) 1988-10-10 1988-10-10 Verfahren zum Brechen eines plattenförmigen Werkstücks, insbesondere eines Halbleiterplättchens, und Vorrichtung zum Brechen des genannten zwischen zwei Folien sandwichartig angeordneten Werkstücks
JP21213989A JPH0758702B2 (ja) 1988-10-10 1989-08-19 板状体を切断する方法
US07/406,943 US4995539A (en) 1988-10-10 1989-09-13 Method and apparatus for cleaving wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP88810694A EP0363548B1 (de) 1988-10-10 1988-10-10 Verfahren zum Brechen eines plattenförmigen Werkstücks, insbesondere eines Halbleiterplättchens, und Vorrichtung zum Brechen des genannten zwischen zwei Folien sandwichartig angeordneten Werkstücks

Publications (2)

Publication Number Publication Date
EP0363548A1 true EP0363548A1 (de) 1990-04-18
EP0363548B1 EP0363548B1 (de) 1994-03-23

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP88810694A Expired - Lifetime EP0363548B1 (de) 1988-10-10 1988-10-10 Verfahren zum Brechen eines plattenförmigen Werkstücks, insbesondere eines Halbleiterplättchens, und Vorrichtung zum Brechen des genannten zwischen zwei Folien sandwichartig angeordneten Werkstücks

Country Status (4)

Country Link
US (1) US4995539A (de)
EP (1) EP0363548B1 (de)
JP (1) JPH0758702B2 (de)
DE (1) DE3888685T2 (de)

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DE69006353T2 (de) * 1990-05-25 1994-06-23 Ibm Verfahren und Vorrichtung zum Spalten von Halbleiterplatten und Bekleiden der gespalteten Facetten.
JP2924588B2 (ja) * 1992-08-31 1999-07-26 住友電気工業株式会社 基板の切断方法
US5454002A (en) * 1994-04-28 1995-09-26 The Board Of Regents Of The University Of Oklahoma High temperature semiconductor diode laser
US5868603A (en) * 1996-12-12 1999-02-09 Corning Incorporated Method for edge finishing glass sheets
US6048747A (en) * 1998-05-01 2000-04-11 Lucent Technologies, Inc. Laser bar cleaving apparatus
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US6247625B1 (en) 1998-05-18 2001-06-19 Lucent Technologies, Inc. Anvil pad configuration for laser cleaving
US6125530A (en) 1999-01-05 2000-10-03 Lucent Technologies, Inc. Method and apparatus for handling laser bar
US6267282B1 (en) * 1999-04-01 2001-07-31 Agere Systems Optoelectronics Guardian Corp. Method and apparatus for handling laser bars
US8574259B2 (en) * 2005-05-10 2013-11-05 Lifescreen Sciences Llc Intravascular filter with drug reservoir
JP2008147344A (ja) * 2006-12-08 2008-06-26 Disco Abrasive Syst Ltd 加工装置
US10773420B2 (en) * 2011-11-10 2020-09-15 LatticeGear, LLC Device and method for cleaving a substrate
US10065340B2 (en) * 2011-11-10 2018-09-04 LatticeGear, LLC Device and method for cleaving
DE102012013465A1 (de) * 2012-07-09 2014-05-08 Eppendorf Ag Haltevorrichtung
CN109968283B (zh) * 2019-03-25 2024-04-02 林华勇 一种拉伸顶压型led灯丝灯的基板条拆分器及其拆分方法

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JPH02116520A (ja) 1990-05-01
EP0363548B1 (de) 1994-03-23
US4995539A (en) 1991-02-26
DE3888685D1 (de) 1994-04-28
DE3888685T2 (de) 1994-10-20
JPH0758702B2 (ja) 1995-06-21

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