EP0420198A2 - Strahlabtastvorrichtung und Bildinformationsschreibvorrichtung - Google Patents

Strahlabtastvorrichtung und Bildinformationsschreibvorrichtung Download PDF

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Publication number
EP0420198A2
EP0420198A2 EP90118484A EP90118484A EP0420198A2 EP 0420198 A2 EP0420198 A2 EP 0420198A2 EP 90118484 A EP90118484 A EP 90118484A EP 90118484 A EP90118484 A EP 90118484A EP 0420198 A2 EP0420198 A2 EP 0420198A2
Authority
EP
European Patent Office
Prior art keywords
scanning
light beam
optical
detecting
predetermined surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP90118484A
Other languages
English (en)
French (fr)
Other versions
EP0420198B1 (de
EP0420198A3 (en
Inventor
Nozomu C/O Canon Kabushiki Kaisha Nishiberi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP0420198A2 publication Critical patent/EP0420198A2/de
Publication of EP0420198A3 publication Critical patent/EP0420198A3/en
Application granted granted Critical
Publication of EP0420198B1 publication Critical patent/EP0420198B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/047—Detection, control or error compensation of scanning velocity or position
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/113—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/024—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted
    • H04N2201/02406—Arrangements for positioning elements within a head
    • H04N2201/02416—Rotational positioning, i.e. with respect to an axis
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/024—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted
    • H04N2201/02406—Arrangements for positioning elements within a head
    • H04N2201/02439—Positioning method
    • H04N2201/02441—Positioning method using screws
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/024—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof deleted
    • H04N2201/02406—Arrangements for positioning elements within a head
    • H04N2201/02439—Positioning method
    • H04N2201/02443—Positioning method using adhesive
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/0471—Detection of scanning velocity or position using dedicated detectors
    • H04N2201/04712—Detection of scanning velocity or position using dedicated detectors using unbroken arrays of detectors, i.e. detectors mounted on the same substrate
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04729—Detection of scanning velocity or position in the main-scan direction
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04731—Detection of scanning velocity or position in the sub-scan direction
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04734—Detecting at frequent intervals, e.g. once per line for sub-scan control
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04744—Detection of scanning velocity or position by detecting the scanned beam or a reference beam
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04755—Control or error compensation of scanning position or velocity by controlling the position or movement of a scanning element or carriage, e.g. of a polygonal mirror, of a drive motor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04789—Control or error compensation of scanning position or velocity in the main-scan direction
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04791—Control or error compensation of scanning position or velocity in the sub-scan direction
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04794—Varying the control or compensation during the scan, e.g. using continuous feedback or from line to line
    • H04N2201/04796—Varying the sub-scan control during the main-scan, e.g. for correcting skew, tilt or bow of a scanning beam
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04794—Varying the control or compensation during the scan, e.g. using continuous feedback or from line to line
    • H04N2201/04798—Varying the main-scan control during the main-scan, e.g. facet tracking

Definitions

  • the present invention relates to a beam scanning apparatus, more specifically, to a laser beam scanning apparatus in which, for example, a scanning surface arranged with elements for recording image is scanned with light beam emitted from a laser and information for the applied position of the laser beam on the scanning surface is precisely detected when recording image informa­tion, and thereby realizing the scanning on the scanning surface with high precision.
  • Figure 1 schematically shows the main components of a galvanometer used as a deflector in conventional laser beam scanners to control the deflection of a laser beam.
  • the reference numeral 8 indicates a mirror fixed to a rotation shaft 9.
  • An electric motor 10 rotates the shaft 9 at a constant speed.
  • a spring 11, used to cause a rotating force in the reverse direc­tion to the rotational direction of the shaft 9, is attached at one end to the shaft 9 and at the other end to the case 13.
  • an object of the present invention is to provide a light beam scanning apparatus capable of more accurately controlling the state of the applied position of light beam on a scanning surface and to an image information writing apparatus employing such the scanning apparatus.
  • a laser scanning apparatus functions as follows.
  • light beam from a light source is reflected by at least one beam deflecting means and is directed to a scanning surface.
  • a beam splitter is placed between the beam deflecting means and the scanning surface, in the scanning, and by the beam splitter a part of the light beam from the beam deflecting means is perpendicularly splitted to an optical path from the deflecting means when the deflecting means is in the reference state.
  • One of these beams is guided to an optical detection means to control the deflecting angle of the deflecting means by control means by the use of the output from the optical detection means.
  • Figure 2 outlines the main components of one embodiment according to the present invention.
  • the reference numeral 1 denotes a laser oscillator and the numeral 2 represents the laser beam.
  • a x-axis beam scanning mechanism 3 can be driven by an electric motor (such as a servo motor or galvanometer) with a plane mirror 3a fixed at one end. By oscillating or rotating this mirror 3a (in this embodiment by rotating the mirror around its support­ing shaft), laser beam 2 is reflected and deflected to scan on a scanning surface 6 described later in the X direction.
  • a Y-axis beam scanning mechanism 4 can be driven by an electric motor (such as a servo motor or galvanometer in this embodiment) as a driving means with a plane mirror 4a fixed at one end.
  • the laser beam 2 deflected by the Y-axis beam scanning mechanism 4 is reflected and deflected to scan on the scanning surface 6 described later in the Y direction.
  • the reference numeral 5 denotes a beam splitter comprising a half-mirror. It splits the laser beam deflected by the mirror 4a of the Y-axis optical scanning mechanism 4 into two beams, the transmitted beam 2a and the reflected beam 2b.
  • the scanning surface 6 is the object scanned by laser beam 2a to write image informa­tion thereon.
  • This embodiment employs a high-polymer liquid crystal capable of thermally writing.
  • An optical detecting means 7 comprising a two-dimensional CCD area sensor detects information of applied position of the laser beam 2b reflected by the beam splitter 5.
  • the information of applied position of the laser beam on the object can be obtained by detecting the light beam from the mirrors 3a and 4a, so that more accurate control for the applied position is realized.
  • the beam splitter 5 is set so that laser beam 2b is split perpendicularly to the optical path of laser beam 2a coming from the mirror 4a when the mirror surface 3a of the X-axis beam scanning mechanism 3 and the mirror surface 4a of the Y-axis beam scanning mechanism 4 are in the standard state (for example, when the point of incidence of laser beam 2 is set at the center 6a of the scanning surface 6).
  • the two split laser beams, 2a and 2b are in the standard state, they are set to be perpendicular each other.
  • the scanning distance of laser beam 2a on the scanning surface 6 and the scanning distance of laser beam 2b on the surface of the optical detecting means 7 are set so as to have similar relationship.
  • the optical detecting means 7 is placed in an equivalent position on the transmission beam path from the beam splitter 5, the light receiving surface of the optical detecting means 7 would be parallel to the scanning surface 6 (or the incident angle of the scanning light beam on the light receiving surface of the detecting means is always same as that on the scanning surface 6).
  • the scanning beam is thus detected actually, so that bath an error and information for the optical scanning mechanism to be controlled can be found by just one area sensor.
  • a deviation outputting part 21 calculates the deviation between the signal output from the optical detecting means 7 and the target value signal input from the outside, and sends this deviation signal to a controlling part 22.
  • the controlling part 22 causes a driving part 23 to be driven on the basis of the signal from the deviation outputting part 21.
  • the driving part 23 Based on the signal from the controlling part 22, the driving part 23 adjusts the rotations of the mirror 3a of the X-­axis optical scanning mechanism 3 and the mirror 4b of the Y-axis optical scanning mechanism 4, and controls the applied position of the laser beam 2a on the scanning surface 6.
  • the laser beam oscillated from the oscillator 1 is reflected and deflected by the mirror 3a of the X-axis beam scanning mechanism 3 and the mirror 4a of the Y-­axis beam scanning mechanism 4, and is scanned on both the scanning surface 6 and the surface of the beam detecting means 7 through the beam splitter 5.
  • the positional relationship between the scanning surface 6 and the surface of the beam detecting means 7 is established beforehand. Hence, by detection of the point of incidence of the laser beam 2b on the surface of the beam detecting means 7, the applied position (scanning position) of laser beam 2a on the scanning surface 6 can be obtained with high accuracy. Then, the deviation between the signal output from the beam detecting means 7 and the target value signal input from the outside is obtained by the deviation outputting part 21 which sends the deviation signal to the control­ling part 22.
  • the controlling part 22 controls the driving part 23 in compliance with the deviation signal from the deviation outputting part 21. From this, the driving part 23 causes the X-axis beam scanning mechanism 3 and the Y-axis beam scanning mechanism 4 to be driven, and thereby controlling the applied position of laser beam 2a on the scanning surface 6.
  • FIG. 3 The numbering of the parts in Figure 3 is the same as for Figure 2.
  • the numerals 3′ and 4′ indicate scanning mechanisms for the X-axis and Y-axis scanning mechanisms, respectively.
  • Each scanning mechanism contains a piezo-electric element. These can make mirrors 3a and 4a oscillate without changing the angles of the reflective surfaces.
  • the X-axis beam scanning mechanism 3a oscillates in the X-axis direction
  • the Y-axis beam scanning mechanism 4a oscillate in the Y-axis direction.
  • the driving part 23 is set to send a control voltage to the piezo-­electric elements of respective beam scanning mechanisms, thus achieving the same control as in the previous embodiment.
  • Another way to deflect the laser beam may be by using the path of a guided wave, for example.
  • this invention can also be applied as a laser beam scan­ning apparatus in which only one optical deflector is used to one-dimensionally scan the scanning surface.
  • the respective element is set as illustrated above to obtain the information of the applied position of laser beam on the scanning surface, so that the information of the applied position of the laser beam can be accurately obtained without suffering from the influences from distortion of the rotating shaft during high-speed rotation of the optical deflector. Further, there is no need for providing a sensor to detect the rotation angle on the optical deflector. Also, the moment of inertia of the rotating portion can be decreased, and the deflec­tion response is improved. In addition, because the signal output from the beam detecting means is propor­tional to the change in scanned distance for the object such as the scanning surface, the output signal does not have to be compensated.
  • a beam scanning apparatus for scanning light beam on a scanning surface has a deflector, a scanning mechanism, a detector and a controller.
  • the deflector deflects the light beam so as to guide it to the scanning surface.
  • the scanning mechanism functions to change at least one of a deflection angle and a deflection position of the deflector so that the light beam is scanned on the scanning surface.
  • the detector detects the scanning state of the light beam by the scanning mechanism on the scanning surface by receiving the light beam from the deflector.
  • the controller corrects at least one of the deflection angle and the deflection position of the deflector on the basis of the detection result of the detector.

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Laser Beam Printer (AREA)
  • Mechanical Optical Scanning Systems (AREA)
EP90118484A 1989-09-27 1990-09-26 Strahlabtastvorrichtung und Bildinformationsschreibvorrichtung Expired - Lifetime EP0420198B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP251281/89 1989-09-27
JP1251281A JPH03113410A (ja) 1989-09-27 1989-09-27 レーザ走査装置

Publications (3)

Publication Number Publication Date
EP0420198A2 true EP0420198A2 (de) 1991-04-03
EP0420198A3 EP0420198A3 (en) 1992-04-08
EP0420198B1 EP0420198B1 (de) 1996-04-17

Family

ID=17220469

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90118484A Expired - Lifetime EP0420198B1 (de) 1989-09-27 1990-09-26 Strahlabtastvorrichtung und Bildinformationsschreibvorrichtung

Country Status (3)

Country Link
EP (1) EP0420198B1 (de)
JP (1) JPH03113410A (de)
DE (1) DE69026564T2 (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0549254A1 (de) * 1991-12-24 1993-06-30 Xerox Corporation Digitaler Positionsdetektor mit verbesserter Auflösung
EP0583982A1 (de) * 1992-08-20 1994-02-23 Xerox Corporation Strahlsteuerungssensor für einen Rasterabtaster
EP0661867A3 (de) * 1993-12-03 1996-01-17 Keyence Co Ltd Laserabtastmarkiergerät.
US5606647A (en) * 1993-12-08 1997-02-25 Keyence Corporation Laser marking device for continuous marking and for compensating for inertial force of optical scanning devices
US10583668B2 (en) 2018-08-07 2020-03-10 Markem-Imaje Corporation Symbol grouping and striping for wide field matrix laser marking
CN117806026A (zh) * 2024-02-28 2024-04-02 安徽瑞控信光电技术股份有限公司 高精度光束切换装置及快反镜

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6791592B2 (en) 2000-04-18 2004-09-14 Laserink Printing a code on a product
US7046267B2 (en) 2003-12-19 2006-05-16 Markem Corporation Striping and clipping correction
US7394479B2 (en) 2005-03-02 2008-07-01 Marken Corporation Pulsed laser printing

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6313015A (ja) * 1986-07-04 1988-01-20 Hitachi Koki Co Ltd 光偏向装置のビ−ム位置制御装置
US4829339A (en) * 1987-05-26 1989-05-09 Silhouette Technology, Inc. Film printing/reading system

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0549254A1 (de) * 1991-12-24 1993-06-30 Xerox Corporation Digitaler Positionsdetektor mit verbesserter Auflösung
EP0583982A1 (de) * 1992-08-20 1994-02-23 Xerox Corporation Strahlsteuerungssensor für einen Rasterabtaster
US5386123A (en) * 1992-08-20 1995-01-31 Xerox Corporation Beam steering sensor for a raster scanner using a lateral effect detecting device
US5451778A (en) * 1992-08-20 1995-09-19 Xerox Corporation Apparatus and method for beam steering in a raster output scanner
EP0661867A3 (de) * 1993-12-03 1996-01-17 Keyence Co Ltd Laserabtastmarkiergerät.
US5734412A (en) * 1993-12-03 1998-03-31 Keyence Corporation Scan type laser marking device including a scanning speed setting a device
EP0883277A3 (de) * 1993-12-03 1999-08-18 Keyence Corporation Laserabtastmarkiergerät
US6061081A (en) * 1993-12-03 2000-05-09 Keyence Corporation Scan type laser marking device including a scanning speed setting device
US5606647A (en) * 1993-12-08 1997-02-25 Keyence Corporation Laser marking device for continuous marking and for compensating for inertial force of optical scanning devices
US10583668B2 (en) 2018-08-07 2020-03-10 Markem-Imaje Corporation Symbol grouping and striping for wide field matrix laser marking
CN117806026A (zh) * 2024-02-28 2024-04-02 安徽瑞控信光电技术股份有限公司 高精度光束切换装置及快反镜
CN117806026B (zh) * 2024-02-28 2024-05-03 安徽瑞控信光电技术股份有限公司 高精度光束切换装置及快反镜

Also Published As

Publication number Publication date
DE69026564D1 (de) 1996-05-23
JPH03113410A (ja) 1991-05-14
EP0420198B1 (de) 1996-04-17
DE69026564T2 (de) 1996-10-31
EP0420198A3 (en) 1992-04-08

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