EP0473488A2 - Stigmatisches Massenspektrometer mit hoher Transmission - Google Patents

Stigmatisches Massenspektrometer mit hoher Transmission Download PDF

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Publication number
EP0473488A2
EP0473488A2 EP91402222A EP91402222A EP0473488A2 EP 0473488 A2 EP0473488 A2 EP 0473488A2 EP 91402222 A EP91402222 A EP 91402222A EP 91402222 A EP91402222 A EP 91402222A EP 0473488 A2 EP0473488 A2 EP 0473488A2
Authority
EP
European Patent Office
Prior art keywords
plane
lens
slit
image
sector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP91402222A
Other languages
English (en)
French (fr)
Other versions
EP0473488A3 (en
Inventor
Emmanuel Chambost De
Bernard Rasser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cameca SAS
Original Assignee
Cameca SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cameca SAS filed Critical Cameca SAS
Publication of EP0473488A2 publication Critical patent/EP0473488A2/de
Publication of EP0473488A3 publication Critical patent/EP0473488A3/fr
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/32—Static spectrometers using double focusing

Definitions

  • the present invention relates to a high transmission stigmatic mass spectrometer of the type known by the English abbreviation SIMS and whose descriptions can be found in the book Chemical Analysis vol. 86 entitled "Secondary ion mass spectrometry" by A. Benninghoven et al and published by John Whiley and sons in section 4 pages 329 to 664.
  • the part of the device which is located downstream of the sample and the secondary ion extraction devices forms a mass spectrometer whose spectrometry differs greatly from that of thermionization spectrometers in that the ions secondary emitters generally have a much more significant energy dispersion which can typically range up to 20 eV.
  • it is advantageous in these devices not to filter the beam of particles into energy so as to conserve all of the available ionic signal, one of the performances expected from a spectrometer being to have good transmission for a determined mass resolution.
  • the achromatic plane of exit from an electric or magnetic sector is the plane where the point from which the trajectories dispersed in energy seem to originate.
  • the input achromatic plane is symmetrical to the output plane if the sector is symmetrical.
  • any trajectory of particles having a difference in energy ⁇ E and converging towards the achromatic plane always leaves on the axis, and the achromatism on the axis implies that the achromatic plane of exit of the electrostatic sector SE and the plane input of the magnetic sector SM are combined.
  • An arrangement for performing chromatography on the entire axis of a spectrometer is for example known from the IMS3F device marketed and manufactured by the Applicant Company CAMECA, a corresponding description of which can be found in an article by M. Lepareur entitled “the second generation micro-analyzer CAMECA module 3F "published in the journal THOMSON CSF Vol. 12 no.1, March 1980.
  • the advantage of this arrangement is that it makes it possible, in addition to performing achromatism over the entire axis, to project onto an image intensifier, the ionic image of the sample filtered in mass.
  • the electrostatic or magnetic sectors have, in addition to their deflection properties, focusing properties which depend on the shape which is given to the electrodes of the SE or to the pole pieces of the SM, these generally do not have symmetry of revolution, and the convergence in the two directions Oy and Oz, normal to the optical axis is not identical.
  • the sphere-shaped electrodes of the sector electrostatic SE have a focal fe equal in the directions Oy and Oz and the planes located on either side of the electrostatic sector SE, at a distance from the input faces equal to the radius of the electrostatic sector SE are conjugate.
  • the shape given to the input faces of the magnetic sector SM gives it an optical diagram equivalent to that formed by a pair of lenses.
  • the lenses have equal focal lengths fm for the two directions Oy and Oz, and the space which separates them is not identical in the two directions.
  • An entry slot is arranged at a distance fe upstream from the entry face of the electrostatic sector SE; an outlet slot is arranged at a distance f m downstream of the magnetic sector SM.
  • These two slots are optically combined and have an approximately equivalent role. It is the setting of the input slit that determines the mass resolution.
  • an "energy" slot is arranged at a distance fe from the exit face of the electrostatic sector SE.
  • the pupil of illumination of the secondary emission also called "cross-over" is imaged on the entry slit and therefore on the exit slit.
  • the plane of the sample is imaged on a diaphragm located just at the entrance to the electrostatic sector SE. Because of the disparity in the directions Oy and Oz of the spaces separating the lenses in doublet from the equivalent diagram of the magnetic sector SM, a stigmator is necessary in a plane close to the exit slit to allow to project a stigmatic image of the plane of the 'sample.
  • a coupling optic is placed between the electrostatic sector SE and the magnetic sector SM to compensate, on the one hand, for the chromatic dispersion of the electrostatic sector by that of the magnetic sector and, on the other hand, to combine the planes of the inlet slot and the outlet slot.
  • the coupling optics can be achieved by means of a single lens.
  • the relation (3) expresses that the angular openings in the orthogonal directions 0Y and OZ in the plane of the slits produce second order aberrations in the direction 0Y which is the direction of the mass dispersion.
  • the object of the invention is to overcome the aforementioned drawbacks.
  • the subject of the invention is a double focusing high transmission stigmatic mass spectrometer of the type comprising, arranged between an entry slit and an exit slit crossed by particles emitted by a sample, an optical system for coupling placed between two electrostatic and magnetic sectors respectively, characterized in that the optical coupling system comprises at least two slit lenses oriented respectively in a first direction in which the ion trajectory is curved by the electrostatic and magnetic sectors and in a direction perpendicular to the plane of the trajectory, the positions of the two lenses on the optical axis of the spectrometer being determined to obtain compensation for the chromatic dispersions on the entire axis downstream of the spectrometer, a stigmatic image of the entry slit in the plane from the spectrometer and a stigmatic image downstream of the spectrometer, of a plane not conjugated with the entry slit, in a plane distinct from the exit plane.
  • Figure 1 the construction of the images of the entry slit in an IMS3F type device.
  • FIG. 2 the positions of the images of the plane of the sample in an apparatus of the IMS3F type.
  • Figure 3 the positions of the achromatic planes of the electrostatic and magnetic sectors of an IMS3F device.
  • FIGS. 4A and 4B an embodiment of an optical coupling according to the invention by means of two lenses L y and L z arranged between the two sectors SM and SE.
  • FIGS. 5A and 5B an embodiment of an optical coupling according to the invention by means of a lens Ly and two lenses L 1z and L 2z .
  • FIG. 6A an embodiment of an optical coupling by means of only a single lens Ly.
  • FIG. 6B an embodiment of an optical coupling by means of two lenses L 1y and L 2y .
  • the invention takes advantage of the fact that the opening aberrations in the direction of the axis OZ are much greater in a magnetic sector SM than in an electrostatic sector SE. It allows the realization of an optical coupling between the two sectors allowing to keep the advantages of the IMS3F device.
  • the spectrometer shown in FIG. 1 comprises, arranged on either side of an optical system 1 for coupling L Y in a direction Y situated in the plane of FIG. 1 perpendicular to the direction X of the optical axis of the spectrometer , an electrostatic sector 2 and a magnetic sector 3.
  • An entry slit W 1y arranged in an entry plane P1 has for image through the electrostatic sector 2 a slit W 2y arranged in the plane P2 image of the plane P1.
  • S 2y is the virtual image of the sample provided by the electrostatic sector in the plane P′2.
  • the optical system L y transforms the slit W 2y into an image W 3y arranged, FIG. 1, in a plane P3 and in FIG. 2 it transforms the virtual image of the sample S 2y into an image S 3y in a plane P′3.
  • pairs of planes (P2, P3) and (P′2, P′3) appear to be conjugate with respect to the optical system 1.
  • the arrangements of the achromatic planes of the electrostatic and magnetic sectors are shown in FIG. 3.
  • the same optical coupling system materialized by a lens L Z is used to conjugate the same plane couples (P2, P3) and (P′2, P ′ 3).
  • FIG. 4A as in FIG. 4B, the origin of the abscissae is on the achromatic plane of the electrostatic sector 2.
  • the achromatic plane P′2 is one meter upstream from the exit of the electrostatic sector.
  • P′2 is taken at the origin, as in the case of the IMS3F.
  • P′2 is consequently the achromatic plane of exit of the electrostatic sector 2 and consequently, P′3, conjugate plane of P′2, is the achromatic plane of entry of the magnetic sector SM.
  • the magnification in Z, W 3z / W 2x is then 1.716 or 2.86 times more than the magnification in Y.
  • the ratio of 2.86 can only be obtained if the radius of the electrostatic sector SE is one meter, the radius of the magnetic sector SM being imposed at 0.585 m. Such a dimension can be entirely excessive, by the bulk to which it leads and by the technological difficulty of producing the electrostatic sector.
  • the arrangement shown in FIGS. 5A and 5B overcomes this constraint: it comprises a lens Ly (FIG. 5A) located downstream of the plane P2 and two active lenses at Z, L 1z and L 2z ( Figure 5B).
  • the lens L 1z images the slit W 2z with a magnification close to 1 and the lens L 2z acts as a magnifying glass to produce an image with a magnification of the order of 5 while respecting relation (6).
  • K E 1.17 meters
  • the plane P2 is at 0.585 meters from the exit of the electrostatic sector 2.
  • the achromatic plane is at 0.585 meters upstream from the exit of the electrostatic sector.
  • the magnetic sector 3 is identical to that of the previous example.
  • the origin of the abscissae is located on the achromatic plane of the electrostatic sector 2.
  • the abscissae of the image plane P3 and of the achromatic plane of the magnetic sector 3 are arranged respectively at 1.169 m and 2.769 m,
  • the lens L Y may be advantageous to replace the lens L Y by two lenses L 1y and L 2y located on either side of the plane P2.
  • the position and the convergence of the lens L Y are imposed very strictly by the optical characteristics of the electrostatic 2 and magnetic sectors 3.
  • these are not necessarily known with precision at the time of mounting. of the camera and if it is obviously easy to adjust the focal length of the lens L y , it is not the same for its position.
  • the replacement of the lens Ly by two lenses L 1y and L 2y achieves a zoom effect which gives the operator a latitude of adjustment which he does not have with a single lens.
  • This arrangement makes it possible to put an energy discrimination slot in the intermediate plane P21 where there is a real image of the entry slot. This has an advantage, if the magnification W 3y / W 2y must be close to 1.
  • the magnetic sector 3 being a device which generally does not have the same focusing properties in Y and in Z it is necessary to compensate for its astigmatism.
  • the shape given to the input faces of the magnetic sector 3 gives the latter an equivalent optical diagram consisting of a pair of lenses.
  • the lenses then have an equal focal length for the two directions Oy and Oz, that is to say f m , but the space which separates them is not identical in the two directions.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
EP19910402222 1990-08-24 1991-08-09 High transmission stigmatic mass spectrometer Withdrawn EP0473488A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9010632A FR2666171B1 (fr) 1990-08-24 1990-08-24 Spectrometre de masse stigmatique a haute transmission.
FR9010632 1990-08-24

Publications (2)

Publication Number Publication Date
EP0473488A2 true EP0473488A2 (de) 1992-03-04
EP0473488A3 EP0473488A3 (en) 1992-07-08

Family

ID=9399836

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910402222 Withdrawn EP0473488A3 (en) 1990-08-24 1991-08-09 High transmission stigmatic mass spectrometer

Country Status (5)

Country Link
US (1) US5189304A (de)
EP (1) EP0473488A3 (de)
JP (1) JPH04289653A (de)
AU (1) AU8269791A (de)
FR (1) FR2666171B1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010089260A1 (fr) 2009-02-06 2010-08-12 Cameca Spectrometre de masse magnetique achromatique a double focalisation

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5534699A (en) * 1995-07-26 1996-07-09 National Electrostatics Corp. Device for separating and recombining charged particle beams
FR2806527B1 (fr) * 2000-03-20 2002-10-25 Schlumberger Technologies Inc Colonne a focalisation simultanee d'un faisceau de particules et d'un faisceau optique
FR2837931B1 (fr) * 2002-03-29 2004-12-10 Cameca Dispositif de mesure de l'emission de rayons x produite par un objet soumis a un faisceau d'electrons
GB0624677D0 (en) * 2006-12-11 2007-01-17 Shimadzu Corp A co-axial time-of-flight mass spectrometer
LU100773B1 (en) * 2018-04-24 2019-10-24 Luxembourg Inst Science & Tech List Multiple beam secondary ion mass spectometry device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5836464B2 (ja) * 1975-09-12 1983-08-09 株式会社島津製作所 シツリヨウブンセキソウチ
JPS5240393A (en) * 1975-09-26 1977-03-29 Hitachi Ltd Mass spectrometer
JPS5364090A (en) * 1976-11-19 1978-06-08 Hitachi Ltd Mass analyzer
DE2856244A1 (de) * 1978-12-27 1980-07-03 Kernforschungsanlage Juelich Elektronenstosspektrometer
US4329618A (en) * 1980-05-29 1982-05-11 Rca Corporation Horizontal deflection enhancement for kinescopes
JPS5829577B2 (ja) * 1980-06-13 1983-06-23 日本電子株式会社 二重収束質量分析装置
FR2544914B1 (fr) * 1983-04-19 1986-02-21 Cameca Perfectionnements apportes aux spectrometres de masse
JPS59215650A (ja) * 1983-05-24 1984-12-05 Jeol Ltd 質量分析装置
JPS60138833A (ja) * 1983-12-26 1985-07-23 Jeol Ltd 質量分析装置
FR2558988B1 (fr) * 1984-01-27 1987-08-28 Onera (Off Nat Aerospatiale) Spectrometre de masse, a grande clarte, et capable de detection multiple simultanee
JPS6188445A (ja) * 1984-10-05 1986-05-06 Hitachi Ltd 質量分析装置
DE3522340A1 (de) * 1985-06-22 1987-01-02 Finnigan Mat Gmbh Linsenanordnung zur fokussierung von elektrisch geladenen teilchen und massenspektrometer mit einer derartigen linsenanordnung
JPS62108438A (ja) * 1985-11-01 1987-05-19 バリアン・アソシエイツ・インコ−ポレイテツド 空間電荷レンズを使用した高電流質量分光計

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010089260A1 (fr) 2009-02-06 2010-08-12 Cameca Spectrometre de masse magnetique achromatique a double focalisation
FR2942072A1 (fr) * 2009-02-06 2010-08-13 Cameca Spectrometre de masse magnetique achromatique a double focalisation.
US8373121B2 (en) 2009-02-06 2013-02-12 Cameca Magnetic achromatic mass spectrometer with double focusing

Also Published As

Publication number Publication date
AU8269791A (en) 1992-02-27
JPH04289653A (ja) 1992-10-14
US5189304A (en) 1993-02-23
EP0473488A3 (en) 1992-07-08
FR2666171B1 (fr) 1992-10-16
FR2666171A1 (fr) 1992-02-28

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