EP0487919B1 - Appareil détecteur de fuites - Google Patents

Appareil détecteur de fuites Download PDF

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Publication number
EP0487919B1
EP0487919B1 EP91118497A EP91118497A EP0487919B1 EP 0487919 B1 EP0487919 B1 EP 0487919B1 EP 91118497 A EP91118497 A EP 91118497A EP 91118497 A EP91118497 A EP 91118497A EP 0487919 B1 EP0487919 B1 EP 0487919B1
Authority
EP
European Patent Office
Prior art keywords
valves
vacuum pump
leak detector
detector apparatus
leak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP91118497A
Other languages
German (de)
English (en)
Other versions
EP0487919A1 (fr
Inventor
Ernst Holthaus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0487919A1 publication Critical patent/EP0487919A1/fr
Application granted granted Critical
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Anticipated expiration legal-status Critical
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Definitions

  • the invention relates to a leak detector for use in vacuum leak detection with a test gas detector, with a backing pump and with valves that control the sequence of the leak detection process.
  • a leak that may be present is determined with the help of a test gas, which is on the side with the higher pressure and which in the event of a leak passes through the wall of the test object.
  • the differential pressure is generated by creating a negative pressure on one side of the wall of the test specimen. This can be done by connecting the device under test to a vacuum pump and exposing it to a test gas atmosphere from the outside (whether by spraying or by generating the test gas atmosphere in a test chamber).
  • the test object contains test gas and is placed in a test chamber, which in turn is evacuated.
  • Equipment suitable for carrying out vacuum leak detection is therefore equipped with a vacuum pump which is used to generate the differential pressure.
  • Gas ballast pumps are often used used.
  • a high-vacuum pump In the case of leak detectors that are equipped with a mass spectrometer as a test gas detector, a high-vacuum pump must also be provided so that the pressure of approximately 10 ⁇ 4 mbar required for the operation of a mass spectrometer can be generated.
  • a leak detector for vacuum leak detection requires several valves with which the leak detection process is controlled. It is known to actuate these valves electromagnetically and to equip them with a spring acting in the closing direction, so that all the valves assume their closed position in the event of a power failure. Valves of this type are large-volume, complex and therefore expensive.
  • the present invention has for its object to reduce the effort for the valves in a leak detector of the type mentioned.
  • this object is achieved in that at least two valves (11 to 14) are pneumatically actuated valves, that the actuating devices (15) of the pneumatically actuated valves (11 to 14) each comprise a drive cylinder (16) and a drive piston (18) and that the respective drive cylinder (16) via control valves (21, 22) is connected to the backing pump (1) in such a way that the underpressure generated by the backing pump (1) can be used to control the pneumatically actuated valves (11 to 14).
  • the fact that the vacuum generated by the vacuum pump is used to control the valves means that there is no need for electromagnetic actuating devices.
  • the vacuum pump in the leak detector is a gas ballast pump
  • the vacuum in the area of the gas ballast connection is sufficient to actuate the valves. A disturbance of the vacuum generated by the vacuum pump does not occur when the valves are actuated.
  • valves are equipped with a spring, the spring force of which acts in the closing direction, then it is expedient to connect both sides of the drive cylinder to the vacuum pump or to the gas ballast connection of the vacuum pump via control valves. It is then possible to support the effect of the spring force by generating a vacuum on one side of the drive cylinder.
  • the advantage of these measures is that the spring force and thus the size of the spring can be kept small without having to forego fast and safe closing operations for the valves.
  • the leak detector comprises a fore-vacuum pump 1 with a gas ballast connection 2, a high-vacuum pump 3 and a test gas detector 4, which is designed, for example, as a mass spectrometer.
  • the inlet of the leak detector is labeled 5.
  • a test object or a test chamber is connected to this.
  • the inlet 5 is connected via line 6 to the vacuum pump 1 and via line 7 to the mass spectrometer 4.
  • the mass spectrometer 4 is in turn connected via line 8 to the inlet of the high vacuum pump 3, the outlet of which is connected to the vacuum pump 1 via line 9.
  • the lines 6 to 9 are equipped with valves 11 to 14, of which the valves 11 to 13 are equipped with the actuating device 15 according to the invention.
  • the valves 11 to 14 serve to control the sequence of the leak detection processes, which essentially comprise the steps of evacuation and leak detection, preferably with different sensitivities.
  • the valves 11 to 13 are each equipped with the actuating device 15 according to the invention. These each include the drive cylinder 16, which forms the control chamber 17. In this Control chamber 17 contains the drive piston 18 and a spring 19, the spring force of which acts in the closing direction.
  • Both sides of the drive cylinder 16 and the control chamber 17 are connected to the gas ballast connection 2 of the vacuum pump 1 via control valves 21, 22 (3/2-way valves) and via the lines 23 shown in broken lines.
  • the control valves 21, 22 are actuated at the respectively desired point in time via a control, not shown.
  • the electrical actuation takes place simultaneously for both valves.
  • the control chamber (17) for opening the main valve is ventilated from the outside, and the control chamber for closing the main valve is supplied with negative pressure.
  • the function is reversed when switched on.
  • a vacuum supply of approx. 0.5 - 1 liter volume, as well as a weak spiral spring in the bellows ensure the automatic closing of the main valve in the event of a power failure.
  • the overall for the described actuators of the valves 11, 12 and 13 is relatively small compared to the prior art.
  • the fact that the action of the spring 18 can be supported by negative pressure ensures a quick and safe closing of the valves.
  • the gas ballast connection 2 is also assigned a vacuum storage container 24. This ensures that the valves close quickly even in the event of a power failure. In addition, disturbing influences of an air swallow in the area of the gas ballast connection of the pump 1 are avoided.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Claims (5)

  1. Appareil de détection de fuites à mettre en oeuvre lors de la détection de fuites de vide avec un détecteur de gaz de test (4), comportant une pompe à vide préparatoire (1) ainsi que des vannes (11 à 14) qui commandent le déroulement du processus de détection de fuites, caractérisé par le fait qu'au moins deux vannes (11 à 14) sont des vannes à manoeuvre pneumatique, que les dispositifs de manoeuvre (15) des vannes à manoeuvre pneumatique (11 à 14) comportent pour chacune un cylindre d'entrainement (16) et un piston d'entrainement (18) et que le cylindre d'entrainement respectif (16) est, par l'intermédiaire de robinets de commande (21, 22), relié à la pompe à vide préparatoire (1) de façon telle que la dépression produite par la pompe à vide préparatoire (1) est utilisable pour la commande des vannes à manoeuvre pneumatique (11 à 14).
  2. Appareil de détection de fuites selon la revendication 1, caractérisé par le fait que la pompe à vide (1) est une pompe à ballast de gaz et que les robinets de commande (21, 22) sont reliés au raccord (2) de ballast de gaz.
  3. Appareil de fuites selon la revendication 1 ou 2, caractérisé par le fait qu'aux pistons d'entrainement (18) correspondent des ressorts (19) dont la force agit dans le sens de la fermeture.
  4. Appareil de détection de fuites selon l'une des revendications précédentes, caractérisé par le fait qu'à la pompe à vide (1) correspond une boîte (24) de réserve de vide.
  5. Appareil de détection de fuites selon l'une des revendications précédentes, caractérisé par le fait que les robinets de commande (21, 22) sont conçus sous forme de robinets distributeurs 3/2.
EP91118497A 1990-11-26 1991-10-30 Appareil détecteur de fuites Expired - Lifetime EP0487919B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4037524A DE4037524A1 (de) 1990-11-26 1990-11-26 Lecksuchgeraet
DE4037524 1990-11-26

Publications (2)

Publication Number Publication Date
EP0487919A1 EP0487919A1 (fr) 1992-06-03
EP0487919B1 true EP0487919B1 (fr) 1994-12-07

Family

ID=6418915

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91118497A Expired - Lifetime EP0487919B1 (fr) 1990-11-26 1991-10-30 Appareil détecteur de fuites

Country Status (4)

Country Link
US (1) US5369982A (fr)
EP (1) EP0487919B1 (fr)
JP (1) JP3149226B2 (fr)
DE (2) DE4037524A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5369892A (en) * 1993-06-04 1994-12-06 Dhaemers; Gregory L. Armoire
DE4408877A1 (de) * 1994-03-16 1995-09-21 Leybold Ag Testgaslecksucher
US5767391A (en) * 1996-11-25 1998-06-16 Taiwan Semiconductor Manufacturing Company, Ltd Leakage detect tool for vacuum bellows
US6779555B2 (en) * 2001-08-31 2004-08-24 Siemens Vdo Automotive, Inc. Vacuum generating method and device including a charge valve and electronic control
DE102011107334B4 (de) * 2011-07-14 2023-03-16 Leybold Gmbh Lecksucheinrichtung sowie Verfahren zum Überprüfen von Gegenständen auf Dichtigkeit mittels einer Lecksucheinrichtung
DE102013213257B4 (de) 2013-07-05 2024-09-19 Pfeiffer Vacuum Gmbh Membranvakuumpumpe mit Gasballastventil und Pumpenanordnung
CN104155099B (zh) * 2014-09-01 2016-07-20 天津精通控制仪表技术有限公司 低压水泵校验高压阀门耐压强度专用组合装置及校验方法
US11105702B2 (en) 2019-11-13 2021-08-31 José Antonio Rodríguez-Casiano Device and method for detecting cylinder leaks
DE102020119600A1 (de) 2020-07-24 2022-01-27 Inficon Gmbh Vakuumlecksuchsystem, Gassteuereinheit und Verfahren zur Gaslecksuche

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2690224A (en) * 1951-01-13 1954-09-28 Jack S Roberts Hydraulic pump apparatus
US3186214A (en) * 1963-07-29 1965-06-01 Gen Electric Leak test station
DE1916394A1 (de) * 1969-03-31 1970-10-15 Balzers & Pfeiffer Hochvakuum Als Verdraengerpumpe ausgebildete Vakuumpumpe
GB1301851A (fr) * 1969-04-03 1973-01-04
FR2229055B1 (fr) * 1973-05-11 1978-12-29 Chausson Usines Sa
FR2257080B1 (fr) * 1974-01-08 1976-05-14 Sud Ouest Ste Nationale Gaz
EP0037384A1 (fr) * 1980-03-28 1981-10-07 Bo Reiner Andersson Soupape à siège à haute pression
US4294107A (en) * 1980-05-19 1981-10-13 Walle L Irwin Self-purging probe for low pressure leak detection
DE3038926A1 (de) * 1980-10-15 1982-05-27 Wabco Steuerungstechnik GmbH & Co, 3000 Hannover Dichtigkeitspruefeinrichtung
US4480462A (en) * 1982-10-25 1984-11-06 Damco Testers, Inc. Hydrostatic test apparatus
DE3308555C1 (de) * 1983-03-10 1984-07-19 Cit-Alcatel GmbH, 6980 Wertheim Vorrichtung zur automatischen Messung der Leckrate eines Behälters
US4499752A (en) * 1983-06-22 1985-02-19 Varian Associates, Inc. Counterflow leak detector with cold trap
US4558587A (en) * 1984-08-29 1985-12-17 Varian Associates, Inc. Ball-type vacuum valve for leak detection apparatus
DE3613694A1 (de) * 1986-04-23 1987-10-29 Leybold Heraeus Gmbh & Co Kg Vorrichtung zur kalibrierung des detektors eines lecksuchgeraetes
US5022265A (en) * 1987-03-31 1991-06-11 Finn-Aqua Method and apparatus for leak testing fluid conducting freeze-drying apparatus
EP0374287A1 (fr) * 1988-12-21 1990-06-27 Coherent General, Inc. Laser à gaz
CH681380A5 (fr) * 1990-04-09 1993-03-15 Asea Brown Boveri

Also Published As

Publication number Publication date
JP3149226B2 (ja) 2001-03-26
JPH04268430A (ja) 1992-09-24
US5369982A (en) 1994-12-06
DE4037524A1 (de) 1992-05-27
EP0487919A1 (fr) 1992-06-03
DE59103806D1 (de) 1995-01-19

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