EP0557780A1 - Transducteur ultrasonore à couche polymère piézoélectrique - Google Patents

Transducteur ultrasonore à couche polymère piézoélectrique Download PDF

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Publication number
EP0557780A1
EP0557780A1 EP93101959A EP93101959A EP0557780A1 EP 0557780 A1 EP0557780 A1 EP 0557780A1 EP 93101959 A EP93101959 A EP 93101959A EP 93101959 A EP93101959 A EP 93101959A EP 0557780 A1 EP0557780 A1 EP 0557780A1
Authority
EP
European Patent Office
Prior art keywords
strips
carrier
sections
strip
converter according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP93101959A
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German (de)
English (en)
Inventor
Nils Dr.-Ing. Kroemer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of EP0557780A1 publication Critical patent/EP0557780A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF

Definitions

  • the present invention relates to an air-ultrasonic transducer array with thin shells made of piezoelectric polymer film with the features of claim 1.
  • Air ultrasonic transducer arrays based on the electrostatic principle are known. They consist of flat, parallel, strip-shaped membranes. They have a high sensitivity and wide bandwidth and have very little crosstalk between adjacent transducer elements. In practice, the necessity of an electrostatic bias and the sensitivity to dust and moisture prove to be disadvantageous. Another disadvantage is the high manufacturing outlay, particularly when a large range of variation in the converter properties is required.
  • Piezoceramic layer transducers are also known, which can also be arranged in arrays. Such transducers are very robust, the width of the individual elements in the plane in which the sound beam is to be pivoted can be chosen to be small compared to the sound wavelength. This is a prerequisite for a large acoustic opening angle of an individual element of the array and thus also for a large one Deflection angle of the sound beam.
  • the low bandwidth of the converters and the relatively strong crosstalk between closely adjacent individual elements have proven to be disadvantageous. Adequate damping can only be bought with a larger distance between the individual elements, so that the maximum deflection angle of the sound beam is reduced.
  • the width of the individual elements can also be chosen largely independently of the usable ultrasound frequency, so that arrays with variable deflection areas can be realized. It is disadvantageous that the tangential edge clamping requires correspondingly geometrically adapted components. This leads to increased effort when the geometry of the transducer is to be changed. In addition, flat arrays can only be produced with a comparatively large distance between the individual elements, so that only a very small deflection area for the sound beam is possible.
  • transducers with a coherent piezopolymer film in which the multiple curvature is produced in the form of a corrugated roof with alternating convex and concave curvatures of the same radius.
  • Another disadvantage is the relatively large longitudinal extent.
  • Another disadvantage is the large distance between the vertices of the arches and the continuous metallization of the film on both sides. In the areas of the fixation, the film acts as a parasitic capacitance, so that the efficiency of the converter is impaired.
  • the object of the present invention is to provide an ultrasound transducer, in particular as an array, which can be easily manufactured in different configurations and which guarantees a large deflection angle of the sound radiation and a large variability in terms of frequency range and emitted signal shape.
  • the air-ultrasound transducer array according to the invention consists of several identical, hat-shaped, mechanically decoupled strips metallized on both sides from a piezoelectric polymer film.
  • the strips are aligned parallel to one another and arranged next to one another along a straight line.
  • Short sections at the ends of the strips are fixed on a support that is at least sectionally flat, the distance between the fixing points being smaller than the length of a strip, so that a hat-shaped curvature of the strip results due to the rigidity of the polymer film.
  • the carrier has acoustic damping properties.
  • Fig. 1 is a cross section 1 of a piezoelectric strip Polymer film shown, the sections 3 at their ends on a support 2, z. B. is attached by gluing.
  • the top 4 and bottom 5 of this strip 1 is each provided with a metallization.
  • the direction of the sound radiation is indicated by arrows.
  • the connection contacts are also shown.
  • this converter is shown in supervision.
  • the strips 1 with the fixed sections 3, which are aligned next to one another parallel to one another, are shown on the carrier 2. The distance s between these strips 1 is significantly smaller than the width b of a strip.
  • FIG. 3 shows the cross section from FIG. 1, in which 3 guide elements or guide webs 7 are additionally shown to the side of the attached sections.
  • This guide web 7 can be present in common for all strips 1.
  • the radius of the concave curvature of the strips (at the fixing point) is reduced, so that the shape of the curvature of the strip z. B. can be approximately a section of the jacket of a circular cylinder. This results in a more homogeneous distribution of the mechanical stress in the film and thus, among other things, a lower distortion factor when the array is in operation.
  • FIG. 4 shows an embodiment in which a shaped body or shaped element 8 is arranged between the strip 1 and the carrier 2.
  • This shaped element 8 has the purpose of determining the shape in which the film of the strip 1 is bulged.
  • the shaped element 8 is therefore geometrically adapted to this shape and is arranged such that only negligible mechanical stress occurs in the film of the strip 1.
  • the shape of the curvature is set to one to two thirds of the free length of the strips 1.
  • 5 shows, for example, an arrangement in which the curvature in the area of the sound radiation has a constant radius of curvature due to a cylindrical shaped body.
  • the shaped element 8 supports here in essentially only the area around the vertex of the curvature of the film.
  • the radius of curvature in the area of the concave curvature (lateral fixation) therefore results from the distance between the lateral fixation points.
  • the shaped element 8 is preferably elastic and has acoustically damping properties, z. B. a foam comes into question.
  • FIG. 6 shows an embodiment in which the strips 1 are fastened to the carrier 2 not by gluing but by clamping elements 9.
  • the top of the carrier 2 can form a counterpart to these clamping elements 9.
  • This counterpart lower clamping element
  • This counterpart can in particular have a correspondingly adapted surface shape.
  • a guide bar as in FIG. 3 can be integrated here.
  • the upper clamping elements 9 are adapted to the width of the strips 1.
  • the carrier 2 is preferably designed to be acoustically damping. As a result, the individual elements of the array are acoustically decoupled from one another.
  • the clamping elements 9 can also be used to contact the metallization of the respective strip present on the upper side 4.
  • the strips can also be fastened with further sections 6 in the middle on the carrier 2, so that they are curved several times and the respective curvatures are hat-shaped.
  • the distance between the fixing points is at most twice as large as the maximum distance of the strip 1 from the carrier 2.
  • the distances of the fixing points or the distances d of the points of maximum distance of the strip from the carrier and this maximum distance h are in FIG. 7 drawn.
  • grooves 10 or grooves are additionally provided in the carrier 2.
  • guide webs 7 can also be provided on the inside of the strips in addition to the fixed sections, in particular also between the middle sections 6, for changing the shape of the curvature. These guide webs 7 are otherwise arranged analogously to FIG. 3.
  • FIG. 9 shows a section of the transducer according to the invention in cross section, in which it can be seen that the metallization on the underside 5 of the strip 1 can be interrupted in the area of the fixing points.
  • the sections 3, 6 with which the strip is fastened to the carrier 2 are free of the metallization on the underside 5.
  • the metallization is then contacted by means of specially provided contact wires 11, which, for. B. are guided through openings in the carrier 2 to the outside.
  • 10 shows a converter according to the invention in a perspective top view. Five strips 1 are shown on a carrier 2.
  • the contact wires 11 are laterally guided to solder pins in a housing 12.
  • the connection of the contact wires 11 to the metallizations corresponds, for. B. the representation of Fig. 1st
  • the array according to the invention is suitable for complex measurement tasks such as object identification or acoustic image processing in the industrial field.
  • the main advantages are the large bandwidth, which is a prerequisite for high local resolution, as well as the possibility of great variability in the geometry of the transducer and the resulting electroacoustic properties.
  • An advantage over known airborne sound arrays based on polymer films is the extremely low manufacturing outlay and the very good ratio of active transducer area to the overall dimensions of the array, so that hybrid integration is also possible.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
EP93101959A 1992-02-25 1993-02-08 Transducteur ultrasonore à couche polymère piézoélectrique Withdrawn EP0557780A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4205749 1992-02-25
DE4205749 1992-02-25

Publications (1)

Publication Number Publication Date
EP0557780A1 true EP0557780A1 (fr) 1993-09-01

Family

ID=6452525

Family Applications (1)

Application Number Title Priority Date Filing Date
EP93101959A Withdrawn EP0557780A1 (fr) 1992-02-25 1993-02-08 Transducteur ultrasonore à couche polymère piézoélectrique

Country Status (1)

Country Link
EP (1) EP0557780A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996006688A1 (fr) * 1994-08-31 1996-03-07 The Whitaker Corporation Detecteur de proximite comprenant un film piexoelectrique polymere soude a une couche protectrice en metal
WO2003087737A1 (fr) * 2002-04-08 2003-10-23 Meditron Asa Capteur de vibration piezo-electrique
WO2004016311A3 (fr) * 2002-07-22 2004-05-06 Hans-Werner Bender Dispositif d'application d'ultrasons destine a ameliorer les conditions de traitement
EP1403212A3 (fr) * 2002-09-26 2005-07-13 Samsung Electronics Co., Ltd. Transducteur flexible micro-électromécanique (mems) et procédé de fabrication dudit transducteur, et microphone flexible micro-électromécanique
DE102012211404A1 (de) 2012-07-02 2014-01-02 Robert Bosch Gmbh Resistiver akustischer Sensor mit PEDOT

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1902849A1 (de) * 1968-01-25 1969-09-11 Pioneer Electronic Corp Wandler zum Umwandeln elektrischer Energie in mechaniche Energie oder Schallenergie,oder umgekehrt
US4056742A (en) * 1976-04-30 1977-11-01 Tibbetts Industries, Inc. Transducer having piezoelectric film arranged with alternating curvatures
US4170742A (en) * 1974-07-15 1979-10-09 Pioneer Electronic Corporation Piezoelectric transducer with multiple electrode areas
WO1991017637A1 (fr) * 1990-04-27 1991-11-14 Commonwealth Scientific And Industrial Research Organisation Transducteur a ultrasons

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1902849A1 (de) * 1968-01-25 1969-09-11 Pioneer Electronic Corp Wandler zum Umwandeln elektrischer Energie in mechaniche Energie oder Schallenergie,oder umgekehrt
US4170742A (en) * 1974-07-15 1979-10-09 Pioneer Electronic Corporation Piezoelectric transducer with multiple electrode areas
US4056742A (en) * 1976-04-30 1977-11-01 Tibbetts Industries, Inc. Transducer having piezoelectric film arranged with alternating curvatures
WO1991017637A1 (fr) * 1990-04-27 1991-11-14 Commonwealth Scientific And Industrial Research Organisation Transducteur a ultrasons

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF THE AUDIO ENGINEERING SOCIETY Bd. 23, Nr. 1, Januar 1975, NEW YORK, USA Seiten 21 - 26 TAMURA ET AL 'Electroacoustic transducers with piezoelectric high polymer films' *
PATENT ABSTRACTS OF JAPAN vol. 11, no. 104 (E-494)(2551) 2. April 1987 & JP-A-61 252 798 ( KUREHA CHEM IND CO LTD ) 10. November 1986 *
PATENT ABSTRACTS OF JAPAN vol. 12, no. 342 (E-658)14. September 1988 & JP-A-63 103 600 ( ONKYO CORP. ) 9. Mai 1988 *
PATENT ABSTRACTS OF JAPAN vol. 4, no. 165 (E-34)(647) 15. November 1980 & JP-A-55 114 099 ( NIPPON DENKI KK ) 3. September 1980 *
TECHNISCHES MESSEN TM Bd. 56, Nr. 10, Oktober 1989, MUNCHEN DE Seiten 377 - 384 MANTHEY ET AL 'Ultraschallsensoren auf der Basis piezoelektrischer Polymere' *

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996006688A1 (fr) * 1994-08-31 1996-03-07 The Whitaker Corporation Detecteur de proximite comprenant un film piexoelectrique polymere soude a une couche protectrice en metal
WO2003087737A1 (fr) * 2002-04-08 2003-10-23 Meditron Asa Capteur de vibration piezo-electrique
US7368855B2 (en) 2002-04-08 2008-05-06 Vibrotron As Piezoelectric vibration sensor
CN100445707C (zh) * 2002-04-08 2008-12-24 韦伯罗特龙股份有限公司 压电振动传感器
WO2004016311A3 (fr) * 2002-07-22 2004-05-06 Hans-Werner Bender Dispositif d'application d'ultrasons destine a ameliorer les conditions de traitement
EP1403212A3 (fr) * 2002-09-26 2005-07-13 Samsung Electronics Co., Ltd. Transducteur flexible micro-électromécanique (mems) et procédé de fabrication dudit transducteur, et microphone flexible micro-électromécanique
CN100411968C (zh) * 2002-09-26 2008-08-20 三星电子株式会社 柔性微机电系统换能器及其制造方法和无线扩音器
DE102012211404A1 (de) 2012-07-02 2014-01-02 Robert Bosch Gmbh Resistiver akustischer Sensor mit PEDOT

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