EP0603694A1 - Système à vide - Google Patents

Système à vide Download PDF

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Publication number
EP0603694A1
EP0603694A1 EP93120036A EP93120036A EP0603694A1 EP 0603694 A1 EP0603694 A1 EP 0603694A1 EP 93120036 A EP93120036 A EP 93120036A EP 93120036 A EP93120036 A EP 93120036A EP 0603694 A1 EP0603694 A1 EP 0603694A1
Authority
EP
European Patent Office
Prior art keywords
pump
stage
vacuum
vacuum pump
pump system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP93120036A
Other languages
German (de)
English (en)
Inventor
Armin Conrad
Otto Dr. Gangschow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Balzers Pfeiffer GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE4331589A external-priority patent/DE4331589C2/de
Application filed by Balzers Pfeiffer GmbH filed Critical Balzers Pfeiffer GmbH
Publication of EP0603694A1 publication Critical patent/EP0603694A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a vacuum pump system according to the preamble of the first claim.
  • the substances to be examined which are gaseous or in the form of liquids, must be brought into a gaseous state specific to the analyzer. This is usually done in a system of interconnected vacuum chambers. In these, the substance, which is either already admitted in the gaseous state or is brought into the gaseous state as a liquid by appropriate pressure or by another method, is reduced in various stages to the working pressure of the analysis device.
  • the system of vacuum chambers consists of several intermediate stages, which are separated from each other by panels. Different pressures prevail in the individual chambers - specified by the analysis method.
  • the vacuum chambers are each individually equipped with vacuum pumps or pump systems, which provide the required pressure and pumping speed.
  • pumps with different modes of operation and with different drive types are necessary.
  • Pump combinations are required in low pressure ranges (e.g. turbomolecular pumps with backing pumps).
  • Such systems are very complex. They take up a lot of space and entail high costs.
  • the object of the invention is to present an effectively working vacuum pump system for gas analysis systems which is less complex, causes lower costs and requires less space.
  • turbomolecular pumps The working pressure of turbomolecular pumps is limited to higher pressures because they are only fully effective in the molecular flow area. Therefore, they only work in combination with backing pumps. These are usually two-stage rotary vane pumps. In recent years it has been possible to expand the range of work of turbomolecular pumps to higher pressures by, for example, following the turbomolecular pump attaches a molecular pump like a Holweck pump. This makes it possible to reduce the effort for generating the forevacuum according to the pump size and final pressure. In particular, there is the possibility of using oil-sealed backing pumps with dry pumps, e.g. Diaphragm pumps to replace. These have proven themselves particularly where an oil-free vacuum is required.
  • the suction connections are connected to connecting flanges via a pipe system.
  • they can be arranged, for example, in one plane with the high vacuum flange.
  • a right-angled arrangement on the top and side surfaces of a cuboid pump housing, for example, is also possible.
  • the pressures between the individual pump stages and their compression ratios are calculated using the gas loads and transition conductance values between the chambers using the following formalism. This results in the pump characteristics, which allow the pump to be designed according to methods known per se.
  • the diagram shown describes the typical application of a pump system according to the invention, a so-called split flow pump in an analysis device using the example of a multi-chamber arrangement.
  • the measuring gas is admitted here from atmospheric pressure via a capillary into the first chamber pumped by a backing pump 2.
  • the pump stages 3, 4 and 5 pump out the gas flows Q3, Q4 and Q5 resulting from the transition conductivities C23, C34 and C45.
  • This formalism provides instructions for the optimal design and dimensioning of the pump system in relation to the vacuum data.
  • the pressure ratio K34 which occurs in operation between the chambers 3 and 4, u.a. determined by the size K034.
  • This size can be influenced by design measures.
  • K034 In order to make the pressure ratio K34 large, K034 must also be as large as possible. This is achieved by designing the channel depth of the Holweck stage at the level of the corresponding suction connection in accordance with the teaching of claim 4 in such a way that the backflow against the pump direction is greatly reduced. For this purpose, the channel depth is reduced at the point of the suction connection.
  • the Holweck stage since the Holweck stage must have a sufficiently high pumping speed on its inlet side in order to be able to take up the amount of gas delivered by the last pump stage of the turbomolecular pump, a correspondingly large channel depth must be present at this point. It follows from this that the channel depth increases continuously or in stages from the point of the suction connection counter to the pump direction up to the inlet side. By varying the channel depth, pressure levels at other points in the pump system can be controlled.
  • the Holweck stage must also absorb gas quantities.
  • the channel depth must be increased again from this point in the pumping direction.
  • Diaphragm pumps have the disadvantage, however, that their service life is limited by the constant elastic deformation of the membranes sealing the pumping chamber.
  • the pump stage at the output of which the diaphragm pump is connected, as expressed in claim 9, must have a sufficiently high pressure ratio.
  • the control of the interval operation ie the switching on and off of the diaphragm pump, has to be done depending on the backing pressure.
  • a measure of the backing pressure is the current or power consumption of the turbomolecular pump within certain limits. This results in an elegant control method, since these variables are easily accessible via the drive electronics.
  • the diaphragm pump is mentioned as an example for a pump stage which emits against the atmosphere.
  • the invention also relates to any type of dry backing pump.
  • absorption and / or condensation means are provided between the pump stages and the stages of the gas analysis system.
  • Fig. 1 shows a schematic representation of the pump system in connection with a gas inlet system.
  • Fig. 2 shows the example of a practical embodiment of the first pump unit 4.
  • Fig. 3 shows a section of Fig. 2 at the point at which the suction nozzle opens into the Holweck pump.
  • a gas inlet system for a gas analyzer 2 with a gas inlet 3 consisting of several chambers 1 is evacuated by a vacuum pump system.
  • the vacuum pump system consists of a first pump unit 4.
  • This pump unit is composed of a multi-stage turbomolecular pump 5 and a molecular pump 6, for example one of the Holweck type.
  • the individual stages of this pump unit are connected to one another insofar as they are located in a common housing and the rotors are mounted on a common shaft. This makes it possible to operate this entire first pump unit with a common motor which is driven by drive electronics 7.
  • a dry vacuum pump 8 which emits against the atmosphere
  • a control unit 12 This control unit is integrated in the drive electronics 7 for the first pump unit 4.
  • Suction connections 9 are provided between the individual stages of the pump unit 4 and between the first pump system and the pump 8 emitting against the atmosphere.
  • the inlet pressure level at point 10 and the outlet pressure level at point 11 are defined.
  • a sorption or condensation device is designated, which is located between a pump stage and a stage of the gas analysis system.
  • connection flanges 15, 16, 17, which are arranged in the same plane as the high vacuum flange 14.
  • ring channels 18 are provided, which provide an open connection between the Make suction connections and the pump room.
  • the section shows the point at which one of the suction connections 9 opens into the channel 19 of the Holweck pump.
  • the rotating part is designated 20.
  • the direction of pumping is indicated by arrows.
  • the depth of the latter is reduced in the opposite pumping direction, in order then to become larger again towards the inlet side 21.
  • the channel depth from the suction connection in the pumping direction is greater than in the opposite direction.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
EP93120036A 1992-12-24 1993-12-11 Système à vide Withdrawn EP0603694A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE4244191 1992-12-24
DE4244191 1992-12-24
DE4331589 1993-09-17
DE4331589A DE4331589C2 (de) 1992-12-24 1993-09-17 Vakuumpumpsystem

Publications (1)

Publication Number Publication Date
EP0603694A1 true EP0603694A1 (fr) 1994-06-29

Family

ID=25921815

Family Applications (1)

Application Number Title Priority Date Filing Date
EP93120036A Withdrawn EP0603694A1 (fr) 1992-12-24 1993-12-11 Système à vide

Country Status (2)

Country Link
EP (1) EP0603694A1 (fr)
JP (1) JPH06280785A (fr)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0751297A1 (fr) * 1995-06-30 1997-01-02 Alcatel Cit Pompe turbomoléculaire
EP0919726A1 (fr) * 1997-11-27 1999-06-02 The BOC Group plc Pompes à vide
WO1999060275A1 (fr) * 1998-05-14 1999-11-25 Leybold Vakuum Gmbh Pompe a vide a friction dotee d'un stator et d'un rotor
WO1999061799A1 (fr) * 1998-05-26 1999-12-02 Leybold Vakuum Gmbh Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type
EP1408237A1 (fr) * 2002-10-11 2004-04-14 Alcatel Pompe turbomoléculaire
EP1422423A1 (fr) * 1998-05-26 2004-05-26 Leybold Vakuum GmbH Appareil avec boítier pouvant être mis à vide
WO2004077005A1 (fr) * 2003-02-27 2004-09-10 Leybold Vakuum Gmbh Detecteur de fuites de gaz traceur
WO2005033522A1 (fr) * 2003-09-30 2005-04-14 The Boc Group Plc Pompe a vide
WO2005040615A2 (fr) 2003-09-30 2005-05-06 The Boc Group Plc Pompe a vide
WO2006048602A2 (fr) 2004-11-01 2006-05-11 The Boc Group Plc Ensemble pompe
EP1840383A1 (fr) * 2006-03-31 2007-10-03 Air Products And Chemicals, Inc. Pompe turbomoléculaire de séparation de gas
DE102007010068A1 (de) 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
CN102107159A (zh) * 2010-11-21 2011-06-29 任永斌 一种多级离心空气分离机
US8757987B2 (en) 2004-06-25 2014-06-24 Edwards Limited Vacuum pump for differentially pumping multiple chambers
DE102014012317A1 (de) 2013-08-20 2015-02-26 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpsystem mit mehreren Anschlüssen
EP2933497A3 (fr) * 2014-04-17 2015-12-02 Pfeiffer Vacuum GmbH Pompe à vide

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
DE10032607B4 (de) * 2000-07-07 2004-08-12 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät mit einer im Ultrahochvakuum zu betreibenden Teilchenquelle und kaskadenförmige Pumpanordnung für ein solches Teilchenstrahlgerät
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0503946D0 (en) * 2005-02-25 2005-04-06 Boc Group Plc Vacuum pump
DE102012112492A1 (de) * 2012-12-18 2014-06-18 Pfeiffer Vacuum Gmbh Vakuumsystem
JP6413926B2 (ja) * 2015-05-20 2018-10-31 株式会社島津製作所 真空ポンプおよび質量分析装置
EP3460249B1 (fr) * 2015-07-01 2021-03-24 Pfeiffer Vacuum GmbH Pompe à vide à debit partagé

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
DE2049117A1 (de) * 1969-10-27 1971-05-06 Sargent Welch Scientific Co Gasleckanzeigesystem
FR2236545A1 (fr) * 1973-07-12 1975-02-07 Balzers Patent Beteilig Ag
EP0344345A1 (fr) * 1988-06-01 1989-12-06 Leybold Aktiengesellschaft Système à pompe pour un appareil de détection de fuite
EP0397051A1 (fr) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Appareil et méthode de production de vide
EP0472933A2 (fr) * 1990-08-01 1992-03-04 Matsushita Electric Industrial Co., Ltd. Appareil rotatif à fluide

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
DE2049117A1 (de) * 1969-10-27 1971-05-06 Sargent Welch Scientific Co Gasleckanzeigesystem
FR2236545A1 (fr) * 1973-07-12 1975-02-07 Balzers Patent Beteilig Ag
EP0344345A1 (fr) * 1988-06-01 1989-12-06 Leybold Aktiengesellschaft Système à pompe pour un appareil de détection de fuite
EP0397051A1 (fr) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Appareil et méthode de production de vide
EP0472933A2 (fr) * 1990-08-01 1992-03-04 Matsushita Electric Industrial Co., Ltd. Appareil rotatif à fluide

Cited By (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2736103A1 (fr) * 1995-06-30 1997-01-03 Cit Alcatel Pompe turbomoleculaire
US5722819A (en) * 1995-06-30 1998-03-03 Alcatel Cit Molecular drag pump
EP0751297A1 (fr) * 1995-06-30 1997-01-02 Alcatel Cit Pompe turbomoléculaire
EP0919726A1 (fr) * 1997-11-27 1999-06-02 The BOC Group plc Pompes à vide
CN1115488C (zh) * 1998-05-14 2003-07-23 莱博尔德真空技术有限责任公司 有定子和转子的摩擦式真空泵
WO1999060275A1 (fr) * 1998-05-14 1999-11-25 Leybold Vakuum Gmbh Pompe a vide a friction dotee d'un stator et d'un rotor
EP1422423A1 (fr) * 1998-05-26 2004-05-26 Leybold Vakuum GmbH Appareil avec boítier pouvant être mis à vide
DE19901340B4 (de) * 1998-05-26 2016-03-24 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
US6457954B1 (en) 1998-05-26 2002-10-01 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump
WO1999061799A1 (fr) * 1998-05-26 1999-12-02 Leybold Vakuum Gmbh Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type
US6887032B2 (en) 2002-10-11 2005-05-03 Alcatel Turbo/drag pump having a composite skirt
EP1408237A1 (fr) * 2002-10-11 2004-04-14 Alcatel Pompe turbomoléculaire
FR2845737A1 (fr) * 2002-10-11 2004-04-16 Cit Alcatel Pompe turbomoleculaire a jupe composite
WO2004077005A1 (fr) * 2003-02-27 2004-09-10 Leybold Vakuum Gmbh Detecteur de fuites de gaz traceur
US7240536B2 (en) 2003-02-27 2007-07-10 Oerlikon Leybold Vacuum Gmbh Test-gas leak detector
WO2005040615A2 (fr) 2003-09-30 2005-05-06 The Boc Group Plc Pompe a vide
WO2005040615A3 (fr) * 2003-09-30 2005-06-16 Boc Group Plc Pompe a vide
WO2005033522A1 (fr) * 2003-09-30 2005-04-14 The Boc Group Plc Pompe a vide
EP2375080A3 (fr) * 2003-09-30 2017-05-24 Edwards Limited Pompe a vide
US7762763B2 (en) 2003-09-30 2010-07-27 Edwards Limited Vacuum pump
CN100429406C (zh) * 2003-09-30 2008-10-29 爱德华兹有限公司 真空泵
US8672607B2 (en) 2003-09-30 2014-03-18 Edwards Limited Vacuum pump
US8757987B2 (en) 2004-06-25 2014-06-24 Edwards Limited Vacuum pump for differentially pumping multiple chambers
WO2006048602A2 (fr) 2004-11-01 2006-05-11 The Boc Group Plc Ensemble pompe
US8235678B2 (en) 2004-11-01 2012-08-07 Edwards Limited Multi-stage vacuum pumping arrangement
US8764413B2 (en) 2004-11-01 2014-07-01 Edwards Limited Pumping arrangement
WO2006048602A3 (fr) * 2004-11-01 2006-08-24 Boc Group Plc Ensemble pompe
EP1840383A1 (fr) * 2006-03-31 2007-10-03 Air Products And Chemicals, Inc. Pompe turbomoléculaire de séparation de gas
DE202008017530U1 (de) 2007-02-28 2009-12-17 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102007010068A1 (de) 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102007010068B4 (de) 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
CN102107159A (zh) * 2010-11-21 2011-06-29 任永斌 一种多级离心空气分离机
DE102014012317A1 (de) 2013-08-20 2015-02-26 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpsystem mit mehreren Anschlüssen
DE102014012317B4 (de) 2013-08-20 2022-07-14 Thermo Fisher Scientific (Bremen) Gmbh Massenspektrometersystem mit einer Ionenquelle und entsprechendes Verfahren
EP2933497A3 (fr) * 2014-04-17 2015-12-02 Pfeiffer Vacuum GmbH Pompe à vide

Also Published As

Publication number Publication date
JPH06280785A (ja) 1994-10-04

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