EP3460249B1 - Pompe à vide à debit partagé - Google Patents

Pompe à vide à debit partagé Download PDF

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Publication number
EP3460249B1
EP3460249B1 EP18201126.2A EP18201126A EP3460249B1 EP 3460249 B1 EP3460249 B1 EP 3460249B1 EP 18201126 A EP18201126 A EP 18201126A EP 3460249 B1 EP3460249 B1 EP 3460249B1
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EP
European Patent Office
Prior art keywords
shaft
rotor
sleeve
vacuum pump
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP18201126.2A
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German (de)
English (en)
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EP3460249A1 (fr
Inventor
Tobias Stoll
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
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Priority to EP18201126.2A priority Critical patent/EP3460249B1/fr
Publication of EP3460249A1 publication Critical patent/EP3460249A1/fr
Application granted granted Critical
Publication of EP3460249B1 publication Critical patent/EP3460249B1/fr
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/053—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a vacuum pump of the split-flow pump type.
  • split-flow vacuum pumps are used in practice to evacuate several chambers, for example a mass spectrometer system, at the same time.
  • the split-flow vacuum pumps make it possible to dispense with a pump system consisting of several individual pumps and to carry out the evacuation of several chambers with a single pump.
  • Splitflow vacuum pumps have the advantage that they only require little space for the vacuum system.
  • Splitflow vacuum pumps are not only used in analysis devices, but also, for example, in leak detectors, the analysis principle of which is also based on mass spectrometry.
  • a turbo molecular pump which has several suction connections, each of which is connected to one of the vacuum chambers of a device, for example a mass spectrometer.
  • the suction connections lead gas to various axially spaced locations on the rotor.
  • Several so-called rotor-stator packs are arranged along the rotor axis, each of which compresses gas.
  • a high vacuum side stator pack creates a pressure relationship between its inlet and outlet. The inlet is connected to a first vacuum chamber. The outlet is connected to the inlet of the next rotor-stator package. In addition, this area between two rotor-stator packs is connected to a second vacuum chamber.
  • vacuum chambers are arranged in series and connected to one another by boreholes with low conductance.
  • the gas pressure within the vacuum chamber decreases from one end of the row to the other.
  • the bores are designed in such a way that a particle beam can pass through them and thus through the row of vacuum chambers.
  • the vacuum chamber with the lowest pressure often contains an analyzer such as a mass spectrometer.
  • Split-flow vacuum pumps are known from practice which have three or four radial inlets and which have at least four pump stages.
  • Pump stages are usually turbo molecular pump stages. These are often combined with further pump stages, for example Holweck pump stages or Gaedepump stages.
  • the overall length and rotor speed of the split-flow vacuum pumps known from practice are limited, among other things, due to the natural vibrations of the rotors.
  • a rotor cannot be operated permanently in the range of a natural oscillation frequency.
  • the limiting element can be the motor end, in which, due to cost, stiffening by means of larger shaft diameters, that is, larger drive magnets and motor stators, is not the goal.
  • the modal behavior of the rotor and in particular of the rotor shaft can be critical with very large overall lengths.
  • U.S. 5,733,104 A includes a vacuum pump with multiple radial inlets, which has a shaft that is formed from solid material.
  • This prior art vacuum pump can be improved to the effect that the mass and thus also the weight of the shaft is reduced.
  • the state of the art ( DE 20 2013 010 209 U1 ) a vacuum pump that has a hollow shaft. Rotor disks and a spacer ring between the rotor disks are arranged on the shaft.
  • the stiffness of the assembly of vacuum pump shaft and rotor elements is reduced by providing such a cavity produced by hollow drilling, so that the reduction in stiffness in this area reduces stresses in the joints and rotor disks of rotor elements at high speeds.
  • the cavity inside the vacuum pump shaft is closed on the high vacuum side by a backup bearing journal, so that complete evacuation is not necessary and pressure equalization is achieved via bores which are made in the end of the shaft facing away from the high vacuum.
  • This prior art rotor shaft can be improved to the effect that the weight of the shaft is reduced without reducing the rigidity.
  • the technical problem on which the invention is based consists in specifying a split-flow vacuum pump in which the weight of the shaft is reduced while maintaining the same rigidity in order to be able to form long split-flow vacuum pumps with long shafts.
  • a split-flow vacuum pump is to be specified which has a rotor shaft with at least one shaft end which has the desired stiffening in a cost-effective manner.
  • the invention provides a split-flow vacuum pump with at least two radial inlets, the vacuum pump having stator disks and rotor disks arranged on the shaft, with at least one disk set on the shaft and with at least one sleeve being arranged on the shaft, with at least one on the shaft
  • the sleeve is arranged in the region of grooves and / or bores and / or of at least one constriction, which is characterized in that at least one bore is arranged in the sleeve.
  • the natural oscillation frequencies of the rotor can be changed so that the rotor does not have to be operated in the range of a natural oscillation frequency. This also allows the support forces to be reduced.
  • the sleeve has a ring on at least one end.
  • the sleeve can be arranged, for example, on a tapering shaft end.
  • the sleeve there is also the possibility of precisely fitting the sleeve on the shaft, for example on a constant outer diameter of the shaft.
  • a sleeve is arranged on the shaft at least in the area of the grooves and / or bores and / or the at least one constriction.
  • a further advantageous embodiment of the invention provides that at least one sleeve is arranged on at least one shaft end in the region of a taper.
  • the shaft ends are usually tapered in order to be arranged in bearings, for example ball bearings or magnetic bearings.
  • the sleeve helps increase the rigidity of the shaft.
  • the at least one sleeve is mounted on one side on the shaft and on an opposite side on at least one support ring.
  • the shaft has, for example, a step-shaped longitudinal section, that is to say it tapers in a step-shaped manner, the sleeve can be arranged in the area of two adjacent steps. At the step with the larger diameter, the sleeve can rest directly on the shaft. At the step with the smaller diameter, the sleeve rests on the at least one support ring.
  • a particularly preferred embodiment of the invention provides that at least one magnetic ring of a magnetic bearing is arranged between an area of the shaft that carries the sleeve and the at least one support ring. This makes it possible to stiffen the shaft at the shaft end and still provide magnetic rings which are arranged on the smaller diameter of the shaft and are therefore more cost-effective.
  • Another advantageous embodiment of the invention provides that the at least one sleeve is arranged on a region of the shaft with solid material. This embodiment makes it possible to change the natural oscillation frequency of the rotor in such a way that the rotor is not operated in the range of the natural oscillation frequency.
  • a modified advantageous embodiment of the invention provides that the at least one sleeve is arranged in an area without a rotor shaft between shaft elements.
  • the shaft is designed as a split shaft and the sleeve connects the shaft elements. This significantly reduces the weight of the rotor shaft, which has a beneficial effect on the modal behavior of the wave.
  • Another advantageous embodiment of the invention provides that at least one bore is arranged in the sleeve.
  • the bore is advantageously arranged in the area of the grooves and / or bores and / or constrictions. In the area of a vacuum pump, no gas-filled cavities should be present during evacuation, since these gas-filled cavities degas during the evacuation process and as a result the actual achievable final pressure of the pump is not reached.
  • the at least one sleeve is advantageously made of metal.
  • Aluminum, titanium or stainless steel can be selected as the metal.
  • the at least one sleeve can also consist of a composite material with carbon fiber, for example carbon fiber reinforced plastic. It is also possible to use a combination of the materials made of metal and the composite material with carbon fibers.
  • the axial extent of the sleeve is advantageously greater than its outer diameter. According to this embodiment, the sleeve makes an optimal contribution to improving the rigidity of the shaft.
  • the at least one sleeve can be designed in such a way that it is fastened on the rotor shaft in front of and behind the motor magnet. This makes it possible to design the magnet rings with a small diameter and thus to run them inexpensively.
  • the at least one sleeve can be applied to the rotor shaft and connected to the shaft in the direction of the bearing end, for example by a ring.
  • a sleeve according to the invention can also be provided here.
  • This sleeve can be arranged on the solid shaft.
  • the connection between the solid shaft and the sleeve can be made, for example, by shrinking, pressing and / or gluing or other types of fastening.
  • the sleeve in a region of the shaft with at least one constriction or at least one recess and / or grooves and / or bores. Due to the reduced mass, which contributes little to the rigidity due to the small diameter of the rotor, the natural frequency of the rotor can be increased through the sleeve. It is also positive that the bearing forces are reduced in this way and, for example, when using a permanent magnet bearing, ring magnet pairs can possibly be saved to reduce costs.
  • the fit seat of the rotor disks can be provided on a smaller outer diameter than the outer diameter of the sleeve. This is advantageous if the collar of the rotor disk around which the rotor blades are arranged would otherwise become too weak if the fit diameter was too large, as a result of which the rotor disk would no longer sit securely on the rotor during operation.
  • a pump structure is additionally applied to the outer jacket surface of the sleeve.
  • Pump structures can be, for example, a turbo structure, a cross channel structure, a thread structure or a Holweck structure or a combination of these structures.
  • the at least one ring can be arranged on one or both sides, preferably at the end of the sleeve.
  • the ring can be fixedly arranged on the sleeve.
  • the ring is designed as an inner ring on the sleeve.
  • the purpose of the sleeve is to increase stability.
  • a sleeve can be provided to increase the stability. Bores can be provided in the sleeve in order to be able to degas cavities in the shaft that are covered by the sleeve.
  • the sleeve is advantageously made of a material which has a quotient of the modulus of elasticity and density, which is greater than the quotient of the modulus of elasticity and density of the shaft.
  • Another embodiment of the invention provides a split-flow vacuum pump with at least two radial inlets, the vacuum pump having stator disks and rotor disks arranged on a shaft, with at least one disk set being arranged on the shaft, which thereby is characterized in that the shaft has an inner bore arranged along a longitudinal axis.
  • a shaft end, in which the inner bore is arranged is cup-shaped in cross section without an inner bearing journal. By omitting the inner bearing journal, it is possible to arrange the inner bore in the named shaft end.
  • split-flow vacuum pump with at least three radial inlets and with at least four pump stages, with at least one pump stage being designed as a turbo-molecular pump stage, the at least three inlets being designed as main inlets which are arranged in the axial direction between the pump stages, provides that in addition at least one radial secondary inlet is provided, which is arranged in the area of at least one turbo-molecular pumping stage.
  • This advantageous design of the vacuum pump makes it possible to provide at least one secondary inlet in addition to the main inlets.
  • the main inlets are arranged between the pumping stages, as is known in the art.
  • at least one further inlet is provided, which is arranged in the region of at least one turbo-molecular pumping stage.
  • a so-called tap that is, the inlet is not between the turbo molecular pumping stages is, but that the tap leads radially into a disk pack of the at least one turbo-molecular pumping stage.
  • the invention makes it possible to evacuate as many chambers of a multi-chamber system as possible over a short axial length.
  • the at least one secondary inlet has a central axis and the central axis is arranged between a first and a last disk of the at least one turbo-molecular pumping stage.
  • the at least one secondary inlet is arranged between two stator disks and / or between two rotor disks and / or between a stator disk and a rotor disk of at least one turbo-molecular pumping stage.
  • the secondary inlet is arranged between the disks of a stator pack, while a main inlet is arranged between the stator packs.
  • the at least one secondary inlet is arranged between two adjacent stator disks and / or between adjacent rotor disks and / or between a stator disk and an adjacent rotor disk of at least one turbo-molecular pumping stage.
  • the secondary inlets are chosen to be relatively small with regard to their diameter and are arranged between the disks.
  • a pumping speed of the at least one secondary inlet is lower than the pumping speed of a main inlet.
  • the secondary inlets serve to increase the number of taps in a multi-chamber system to be evacuated.
  • n ⁇ 1 secondary inlets provision is made for n disks.
  • the number of secondary inlets is less than the number of discs. If a disk pack of the turbo-molecular pumping stage is formed from two disks, a secondary inlet can be provided between these two disks.
  • turbo-molecular pumping stages can be designed with and without secondary inlets.
  • At least one turbomolecular pump stage in addition to the at least one turbomolecular pump stage, at least one Holweck pump stage and / or a Siegbahn pump stage and / or a Gaede pump stage and / or a side channel pump stage and / or a threaded pump stage is provided.
  • Split-flow vacuum pumps usually consist of one or more turbo-molecular pump stages and at least one further of the named pump stages.
  • the pressure conditions in the chambers to be evacuated can be adjusted accordingly.
  • a main inlet between the pump stages for example between two turbo-molecular pump stages, and, for example, to additionally arrange a Holweck pump stage.
  • at least one further secondary inlet is additionally arranged in the area of the at least one turbo-molecular pump stage.
  • a turbo-molecular pump stage is formed from one or more rotor disks and / or from one or more stator disks.
  • a pump stage usually consists of at least one stator disk and at least one rotor disk. Frequently, several stator disks and several rotor disks which alternately intermesh are provided. According to the invention it is advantageously provided that n ⁇ 1 secondary inlets are provided for n disks. If, for example, a stator disk and a rotor disk are provided, which form a turbo-molecular pumping stage, the inlet is arranged between these disks.
  • a further advantageous embodiment of the invention provides that a stator disk and an adjacent rotor disk of a turbo-molecular pump stage define an axial length L, and that a distance between two turbo-molecular pump stages is at least as great as this length L.
  • At least one stator disk and / or one rotor disk form at least one turbo-molecular pumping stage. If the distance between adjacent stator disks and / or adjacent rotor disks is so great that the length L is exceeded, a new turbo-molecular pumping stage begins according to the invention. An inlet in this area between the turbo molecular pumping stages is considered the main inlet. An inlet in the area of the turbo molecular pumping stage itself is regarded as a secondary inlet.
  • a turbo-molecular pump stage is formed from at least one rotor disk.
  • the embodiment according to the invention with regard to the inlets can in principle also be used in a turbo molecular pump.
  • a pump stage advantageously consists of at least one rotor disk and at least one stator disk.
  • the secondary inlet is arranged between the rotor disk and the stator disk.
  • the vacuum pump having stator disks and rotor disks arranged on a shaft, with at least two disk packs being disposed on the shaft, the shaft having at least two different outer diameters and the disk packs on the Have outer diameter matched inner diameter, provides that in addition to an area with a largest diameter in the axial direction, the shaft has at least two areas with smaller diameters on both sides.
  • the embodiment according to the invention enables a large number of individual disk packs on the shaft. According to this embodiment it is possible to arrange four or more disk packs on the rotor.
  • the shaft has at least two areas with smaller diameters on both sides in addition to an area with a largest diameter in the axial direction, at least one disk pack can be arranged in each of these areas.
  • the areas with the larger diameters each serve as a stop for the disk packs, which are mounted on the areas with the slightly smaller diameters.
  • stator disk stacks are arranged at a distance from one another and thus the rotor disk stacks are also arranged at a distance from one another, it makes sense to work with stops on the shaft. The more stops there are, the fewer tolerances are required for the disks and the gaps between the stator and rotor disks can be made smaller.
  • the rotor disks must be manufactured with corresponding precision, which means a high manufacturing cost or the distance between rotor and stator disks must be selected to be correspondingly large so that the manufacturing tolerance does not lead to a collision between stator and rotor disks.
  • the at least one disk pack is advantageously mounted against a stop if the stop is not formed by a sleeve.
  • the areas with the smaller diameters on both sides of the area with the largest diameter in pairs have the same diameter.
  • transitions between the areas with different diameters are designed as stops for the disk packs. These stops ensure that the disk packs of the rotor disks are positioned exactly between the stator disks and that manufacturing tolerances of the individual disk packs do not add up over the entire length of the shaft.
  • the shaft provides a pyramidal symmetrical structure.
  • both sides of the shaft can each be equipped with the same disk packs.
  • the different geometries that is, the stepped and conical geometry of the shaft, can also be combined with one another.
  • a further advantageous embodiment of the split-flow vacuum pump according to the invention with a housing, a shaft arranged rotatably in the housing, on which rotor disks are arranged and stator disks arranged on the housing, provides that the housing has at least two housing areas that are or are thermally decoupled between which a reduced thermal coupling is formed.
  • the opposite side of the pump which in most cases is the side in which the bearings are arranged, should not be heated if possible, or this side is even cooled if possible in order to achieve a trouble-free bearing of the shaft.
  • the at least two housing areas are connected by a housing section with a wall thickness that is smaller than the wall thickness of the two housing areas.
  • a wall area between the two housing areas has a thinner cross section than the rest of the housing.
  • the housing has a constriction for this purpose, for example.
  • a reinforcement made of a material with a lower thermal conductivity than the thermal conductivity of the housing is arranged in the area of the housing section.
  • Such a reinforcement can advantageously be arranged in particular in an area with a constriction.
  • a further advantageous embodiment of the invention provides that the at least two housing areas are formed from two separate housing components and that at least one thermal seal is arranged between the housing components.
  • the seal advantageously has a poorer thermal conductivity than the housing.
  • the seal can advantageously be formed from glass and / or ceramic and / or plastic. This seal ensures that no heat is transferred from the heated part of the housing to the cooled part of the housing.
  • At least one bore and / or at least one groove, in which heating elements and / or coils for heating the housing and / or cooling elements are arranged, is arranged in the housing.
  • a vacuum system with at least one vacuum pump and at least one recipient in which a detachable connection is provided between the vacuum pump and the recipient, with the purpose of sealing the connection towards the atmosphere side at least one elastomer seal and towards the vacuum side at least one gap seal are provided, in which it is provided that at least one suction channel and / or at least one suction opening is / is provided between the elastomer seal and the gap seal.
  • This embodiment has the advantage that an elastomer seal is used at the sealing points on the atmospheric side. This is advantageously designed as an O-ring. At least one gap seal is used as a second sealing element between the elastomer seal and the ultra-high vacuum connection, for example. The surfaces of the recipient (chamber) and a surface of the pump housing are pressed against one another.
  • the vacuum pump according to the invention can have grooves and / or bores and / or constrictions in the rotor shaft.
  • At least one sleeve can be arranged on at least one end of the rotor shaft. There is also the possibility of arranging at least one sleeve in front of or between the rotor disk stacks and / or the rotor disks.
  • the at least one sleeve can be arranged in the area of solid material of the rotor shaft.
  • the at least one sleeve can be designed to cover at least one constriction and / or the grooves and / or the bores.
  • the sleeve can also be arranged in an area free from the rotor shaft.
  • the rotor shaft is designed as a split shaft and the at least one sleeve supports and covers the area free from the rotor shaft.
  • the shaft can also be designed as a shaft with an inner bore along the longitudinal axis of the shaft.
  • Fig. 1 shows a vacuum pump 1, which is designed as a so-called split-flow vacuum pump.
  • the vacuum pump 1 is connected to a multi-chamber vacuum system 2.
  • the multi-vacuum system 2 has four chambers 3, 4, 5, 6, the to be evacuated by the vacuum pump 1.
  • the gas pressure in chambers 3, 4, 5, 6 increases in this order.
  • the chambers 3, 4, 5, 6 are separated from one another by partition walls 7, 8, 9, with bores 9, 10, 11 establishing a connection.
  • These bores 9, 10, 11 are arranged and dimensioned, for example, in such a way that a particle beam can pass through all of the chambers 3, 4, 5, 6.
  • first partition 7 separates the first chamber 3 and the second chamber 4 from one another
  • second partition 8 separates the second chamber 4 from the third chamber 5
  • third partition 9 separates the third chamber 5 from the fourth chamber 6.
  • the dashed arrows in the Fig. 1 illustrate the gas flow.
  • the vacuum pump 1 has a shaft 13 which carries rotor disks 14 to 19.
  • the rotor disks 14 to 19 are in engagement with stator disks 20.
  • the rotor disks 14, 15, 16 form a first disk package 21 and the rotor disks 17 to 19 form a second disk package 22.
  • the disk package 22 and the stators 20 form a high vacuum-side rotor-stator package.
  • the disk pack 21 forms with the stator disks 20 a rotor-stator pack on the intermediate vacuum side.
  • the blades in both packs are, as is known in the prior art, attached to support rings on both the stator and rotor sides or formed in one piece therewith.
  • a first gas inlet 23 is located in front of the rotor-stator packet on the high vacuum side
  • a second gas inlet 24 is located in front of the rotor-stator packet on the fore-vacuum side.
  • a first main inlet 23 leads from the multi-chamber vacuum system into the vacuum pump 1.
  • a second main inlet 24 leads from the second chamber 4 into the vacuum pump 1.
  • a further main inlet 25 leads into the vacuum chamber 5 the vacuum pump 1 and from the vacuum chamber 6 a further main inlet 26 leads into the vacuum pump 1.
  • the main inlets 23, 24, 25, 26 are arranged between the turbo-molecular pump stages 21, 22.
  • a first secondary inlet which leads from the vacuum chamber 5 into the vacuum pump 1, is arranged in the area of the turbo-molecular pump stage 22.
  • a further secondary inlet 28 leads from the vacuum chamber 6 in the area of the turbo-molecular pump stage 21 into the vacuum pump 1.
  • the secondary inlets 27, 28 are arranged in the area of the turbo-molecular pump stages 21, 22.
  • the rotor shaft 13 has areas with different diameters.
  • a first area 29 is an area with the largest diameter. On both sides of the shaft 13, two areas 30, 31 with smaller diameters adjoin. This in turn is followed by areas 32, 33 with an even smaller diameter of the shaft 13. No rotor disks are arranged in the area 29 of the largest diameter of the shaft 13.
  • the rotor disk 16 is arranged in the area 30 and is clearly defined locally by a stop 34 which is formed by the step-shaped shoulder between the area 29 and the area 30.
  • Another advantage of the invention is that the rotor disks 14 to 19 are placed exactly on the shaft, so that very small gaps can be formed. This increases the pumping capacity of the vacuum pump 1. By using many identical parts, the pump is inexpensive to manufacture.
  • two rotor disk stacks each with the same inner diameter are arranged on the two sides of the area 29 of the shaft 13 with the largest diameter.
  • Another advantageous embodiment of the invention is an embodiment in which in the area of the largest diameter 29 grooves 39, 40 are arranged, which reduce the mass of the shaft. Since the split-flow vacuum pumps have a very long overall length, the modal behavior of the rotor and especially the rotor shaft is critical. For this reason, according to the invention, the mass and thus also the weight of the shaft is reduced while the rigidity remains the same.
  • the vacuum pump 1 has a housing 41.
  • the housing 41 In order to reduce thermal transitions between the high vacuum side and the fore-vacuum side in the housing 41, the housing 41 has a constriction 42. This constriction reduces the thermal conductivity. It is possible, in the area of the constriction 42, to add an additional one, not shown Provide reinforcement.
  • the housing can also be designed to be divided in the area of the constriction 42 and a thermal seal can be arranged between the two parts of the housing.
  • the shaft 13 is mounted on one side by means of a magnetic bearing 43.
  • Counter bearings 43b are arranged in a holder 43a, which is only shown schematically. On the other hand, the camp is not shown.
  • the bearing on the non-illustrated side can, for example, be an oil-lubricated ball bearing.
  • the rotor disk 15 and the stator disk 20 have an axial length L viewed in the axial direction.
  • the distance between the turbo molecular pump stages 21, 22 is greater than the length L.
  • Fig. 2 and in Fig. 3 show a rotor shaft 13 on which rotor disk stacks 21, 22, 44 are arranged.
  • the rotor shaft 13 is stepped, so that the rotor disk stacks 21, 22, 44 each rest on a step and are thus positioned exactly.
  • a sleeve 59 is arranged, which is supported with one end 105 on the shaft 13 and with its other end 106 on a support ring 103.
  • the support ring 103 is in turn supported on the rotor shaft 13.
  • the sleeve is thus mounted on the rotor shaft 13 in front of and behind a motor magnet 101.
  • the stiffness of the rotor, in particular at the strongly tapering end 104, is significantly increased by the sleeve 59.
  • the motor magnets 101 that is to say the magnet rings, can be produced with the usual, relatively small diameter, which has a cost-effective effect. If the shaft 13 were to be improved in terms of rigidity by a shaft end 104 with a larger diameter, the motor magnets would also have to be made larger, which would have a detrimental effect on costs.
  • Fig. 4 shows a modified embodiment.
  • the rotor shaft 13 is stiffened by a sleeve 59 between the disk packs 21, 22.
  • the sleeve 59 is arranged on the solid shaft 13. It can be attached to the shaft 13 by shrinking, pressing or gluing.
  • the sleeve 59 fills the distance between the disk packs 21, 22 completely or almost completely. If it completely fills the distance between the disk packs 21, 22, it simultaneously takes on the function of a spacer sleeve like the sleeves 38 in FIG Fig. 1 .
  • Fig. 5 shows a modified embodiment in which the sleeve 59 is arranged on the rotor shaft 13 between the disk packs 21, 22.
  • the sleeve 59 is arranged at a distance from the disk pack 21.
  • the sleeve 59 is fastened to the shaft 13 made of solid material and stiffens the rotor shaft 13.
  • Fig. 6 shows the rotor shaft 13, which has a constriction 102.
  • the sleeve is in the region of the constriction 102 59 arranged.
  • the sleeve 59 has bores 83 through which the constriction 102 can be degassed. If a recipient is evacuated by the vacuum pump, cavities in the area of the vacuum pump, such as the constriction 102, must also be evacuated at the same time, since otherwise the cavities 102 will degas during the evacuation process and thus the final pressure of the vacuum pump cannot be achieved.
  • Fig. 7 shows the rotor shaft 13, which is formed as a split rotor shaft with shaft elements 107, 108.
  • the shaft elements 107, 108 are connected to one another by the sleeve 59.
  • the sleeve 59 has bores 83 through which a cavity 109 between the shaft elements 107, 108 can be evacuated.
  • Fig. 8 shows various ways in which the grooves 39, 40 can be formed.
  • Fig. 8 13 different embodiments of grooves are shown in the shaft.
  • the grooves can be arranged rotationally symmetrically in the shaft 13 with the same cross-sections.
  • the embodiments shown are only exemplary. In practice, one embodiment is selected in each case and arranged in a rotationally symmetrical manner in the shaft.
  • a groove 53 is shown which has a rectangular cross-section.
  • a groove 54 is according to one second embodiment in the direction of the central axis M is conically tapered.
  • Bores 55 are designed in such a way that they form through bores in the shaft 13.
  • the bores 55 converge at a point 56.
  • a groove 57 has a stepped cross-section.
  • a groove 58 is designed to widen conically in the direction of the central axis. This embodiment has the advantage that the shaft 13 retains a high degree of rigidity. The material on the outer radius of the shaft 13 contributes more to the modal rigidity than the material on the inner radius. For this reason, the groove 58 is a particularly advantageous embodiment.
  • a sleeve 59 can be provided.
  • the sleeve 59 should be formed from a rigid material, but have a low mass.
  • the sleeve 59 advantageously has bores 83 in the area of the grooves. These bores are used to ensure that the grooves 53, 54, 57, 58 and / or bores 55 can be evacuated so that they do not degas during the evacuation of the recipient.
  • Fig. 9 shows the shaft 13 with grooves 39, 40.
  • the grooves 39, 40 are arranged at a height when viewed in the axial direction, that is, they form a ring in the shaft 13.
  • further grooves 63, 64 are provided, which are also arranged corresponding to one another in the axial direction and form a second ring of grooves.
  • the sleeves 59 have bores 83 in order to be able to evacuate the grooves 39, 40, 63, 64.
  • Fig. 10 shows a shaft end 110 of the rotor shaft 13.
  • the shaft 13 is supported by a magnetic bearing 111.
  • the magnetic rings 112 of the magnetic bearing 111 are arranged on the shaft 13.
  • Magnet rings 113 of the magnetic bearing 111 are arranged on a housing 114.
  • a ball bearing 114 is provided, which is designed as an emergency bearing.
  • the ball bearing 114 is preloaded by a spring 115.
  • An inner bore 116 is arranged in the shaft 13. This significantly reduces the weight of the shaft, so that the modal behavior of the rotor is changed.
  • Fig. 11 shows the shaft 13 with rotor disk packs 44, 45, 46, which together with stator disk packs (not shown) form turbo-molecular pump stages 44, 45, 46.
  • the gas flow is shown by an arrow 47.
  • Arrows 48 represent the gas flow which is fed from two main inlets 24, 25 to the turbo-molecular pumping stages 45, 46.
  • the arrows 49 identify the gas flow which is fed to the pump system from two secondary inlets 27, 28 in the area of the turbo-molecular pump stages 44, 45.
  • the secondary inlets 27, 28 are arranged in the area of the turbo-molecular pump stages 44, 45, while the main inlets 24, 25 have their feed between the turbo-molecular pump stages 44, 45 and 46.
  • Fig. 12 shows vacuum pump 1 which once again makes clear that it has turbo-molecular pump stages 44, 45, 46, 49.
  • the turbo-molecular pump stages 44, 45, 46, 49 consist of rotor disks and stator disks which are arranged in an interlocking manner.
  • main inlets 23, 24, 25, 26 are provided, which are arranged in front of the pump stage 44 or between the pump stages 44, 45, 46, 49.
  • the shaft 13 is supported by means of a magnetic bearing 43 and a ball bearing 50.
  • the ball bearing 50 is an oil-lubricated ball bearing.
  • the shaft 13 is driven by a motor 51.
  • a secondary inlet 27 is provided in the area of the turbo molecular pumping stage 44.
  • a secondary inlet 28 is provided in the area of the turbo-molecular pump stage 45 and a secondary inlet 52 is provided in the area of the turbo-molecular pump stage 46.
  • This embodiment increases the number of inlets from the four main inlets 23, 24, 25, 26 to a total of seven inlets, namely plus the three secondary inlets 27, 28, 52.
  • Fig. 13 shows a partial section through the shaft 13.
  • the shaft 13 has the in Fig. 1 Areas 29 shown with the largest diameter, the adjoining areas 30, 31 with a smaller diameter and the areas 32, 33 adjoining them in turn with a further reduced diameter.
  • the rotor disks 16, 17 are arranged in the areas 30, 31.
  • the rotor disks 15, 18, 19 are arranged in the areas 32, 33.
  • the rotor disks 15, 18, 19 all have the same inner diameter.
  • the rotor disks 16, 17 also have the same inner diameter. This makes it possible to build an inexpensive pump using a large number of identical parts.
  • the difference in diameter between the areas 29, 30 forms the stop 34.
  • the stop 36 is provided between the areas 29, 31.
  • the stop 35 is arranged between the areas 30, 32 and the stop 37 is provided between the areas 31, 33.
  • the direction of assembly of the disks 15, 16 is indicated by the arrow A.
  • the direction of assembly of the rotor disks 17, 18, 19 is indicated by the arrow B.
  • a central axis of the shaft 13 is identified by M.
  • the shaft 13 and the rotor disks 15, 16, 17, 18, 19 are constructed to be rotationally symmetrical about the central axis M.
  • Fig. 14 shows the shaft 13 with turbo-molecular pump stages 21, 22.
  • the shaft 13 has grooves 39, 40 in an area in which no rotor disks 14, 15, 16, 17, 18, 19 are arranged.
  • the mass of the shaft is reduced so that the modal behavior of the rotor is significantly improved.
  • Fig. 15 shows a shaft 13 with two turbo-molecular pump stages 21, 22, which are arranged in a housing 41 of a split-flow pump.
  • the housing 41 has an inlet 24.
  • a customer housing 60 has an inlet 61 which is formed offset in the radial direction with respect to the inlet 24.
  • the axial length of the pump and customer chamber 60 do not match.
  • the housing 41 has a web 62 in the area of the inlet 24.
  • the formation of the web to which the stator disks (not shown) can be attached results in a larger cross-section and thus a higher conductance in the area of the inlet 24.
  • Fig. 17 shows a vacuum pump 1 with vacuum connections 72, 73, 75.
  • the vacuum connection 72 has an elastomer seal 76 and a gap seal 77. Between the elastomer seal 76 and the gap seal 77 there is a suction channel 78, in which intermediate suction devices 79 are arranged.
  • a suction opening 80 is arranged in the vacuum connection 75.
  • the intermediate suction devices 79 lead into a feed-through bore 81 which is led to the intermediate stage 73.
  • a connection channel 82 is provided for a sealing arrangement of the vacuum connection 75, so that the vacuum connection 75 is also evacuated via the suction opening 80 via the feed-through bore 82.
  • Fig. 18 shows the sleeve 59, which has a carrier 117, which is designed as a substantially cylinder jacket-shaped base section. Structuring with a plurality of structural elements 118 is provided on the radial outside of the carrier 14, which in the present illustrative embodiment are designed as straight webs elongated in the direction of the longitudinal axis of the sleeve 59.
  • the structural elements 118 can be designed as a Holweck or cross-channel pump stage.
  • the structural elements 118 can also have other pump stage structures.
  • Fig. 19 shows the shaft 13 on which the sleeve 59 is arranged.
  • the sleeve 59 carries a turbo molecular pumping structure, which consists of discs 119, 120.
  • the rotor disk 14 is provided adjacent to the sleeve 59.
  • Stator disks 121, 122, 123 engage in the turbo-molecular pump structure of the sleeve 59, formed by the disks 119, 120.
  • the disks 14, 119 to 120 are only shown schematically.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (8)

  1. Pompe à vide à écoulement divisé comprenant au moins deux entrées radiales, la pompe à vide possédant un arbre, des disques de stator et des disques de rotor disposés sur l'arbre, au moins un paquet de disques étant disposé sur l'arbre et au moins une douille (59) étant disposée sur l'arbre (13), la douille (59) étant disposée sur l'arbre (13) au moins dans une zone de rainures (39, 40, 53, 54, 57, 58, 63, 64) et/ou de perçages et/ou d'au moins un resserrement,
    caractérisée en ce qu'au moins un perçage (83) est disposé dans la douille (59).
  2. Pompe à vide selon la revendication 1, caractérisée en ce que la douille (59) possède une bague (103) à au moins une extrémité (106).
  3. Pompe à vide selon l'une des revendications 1 et 2, caractérisée en ce que l'au moins une douille (59) est disposée à au moins une extrémité d'arbre (104) dans la zone d'un rétrécissement.
  4. Pompe à vide selon la revendication 3, caractérisée en ce que l'au moins une douille (59) est montée sur un côté (105) sur l'arbre (13) et sur un côté opposé (106) sur au moins une bague porteuse (103).
  5. Pompe à vide selon la revendication 4, caractérisée en ce qu'au moins une bague magnétique (101) d'un palier magnétique est disposée entre une zone de l'arbre (13) qui porte la douille (59) et l'au moins une bague porteuse (103) .
  6. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce que l'au moins une douille (59) est disposée sur une zone de l'arbre (13) avec du matériau plein.
  7. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce que l'au moins une douille (59) est disposée dans une zone sans arbre de rotor entre deux éléments d'arbre (107, 108).
  8. Pompe à vide à écoulement divisé comprenant au moins deux entrées radiales, la pompe à vide possédant un arbre, des disques de stator et des disques de rotor disposés sur l'arbre, au moins un paquet de disques étant disposé sur l'arbre, l'arbre (13) étant porté par un palier magnétique (111) et des bagues magnétiques (112) du palier magnétique (111) étant disposées sur l'arbre (13) du côté du rotor et des bagues magnétiques (113) du palier magnétique (111) étant disposées sur un boîtier (114) du côté du stator,
    et un roulement à billes (114) étant en plus présent, lequel est réalisé sous la forme d'un palier de secours et lequel est précontraint par un ressort (115), l'arbre (13) possédant un alésage interne (116) disposé le long d'un axe longitudinal et une extrémité d'arbre (110), dans laquelle est disposé l'alésage interne (116), étant en plus formée en section transversale en forme de pot sans tourillon interne.
EP18201126.2A 2015-07-01 2015-07-01 Pompe à vide à debit partagé Active EP3460249B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP18201126.2A EP3460249B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP18201126.2A EP3460249B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé
EP15174845.6A EP3112689B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP15174845.6A Division EP3112689B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé
EP15174845.6A Division-Into EP3112689B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé

Publications (2)

Publication Number Publication Date
EP3460249A1 EP3460249A1 (fr) 2019-03-27
EP3460249B1 true EP3460249B1 (fr) 2021-03-24

Family

ID=53496582

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Application Number Title Priority Date Filing Date
EP18201126.2A Active EP3460249B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé
EP15174845.6A Active EP3112689B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP15174845.6A Active EP3112689B1 (fr) 2015-07-01 2015-07-01 Pompe à vide à debit partagé

Country Status (2)

Country Link
EP (2) EP3460249B1 (fr)
JP (1) JP6438916B2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7196763B2 (ja) * 2018-10-25 2022-12-27 株式会社島津製作所 ターボ分子ポンプおよび質量分析装置
GB2604382A (en) * 2021-03-04 2022-09-07 Edwards S R O Stator Assembly
EP4239200B1 (fr) * 2022-02-09 2026-04-01 Shimadzu Corporation Pompe à vide avec palier magnétique ajustable dans la direction axiale

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02142860A (ja) * 1988-11-22 1990-05-31 Dai Ichi High Frequency Co Ltd 角部を有する部材への樹脂ライニング方法
DE4331589C2 (de) 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
EP0603694A1 (fr) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Système à vide
WO1999061799A1 (fr) * 1998-05-26 1999-12-02 Leybold Vakuum Gmbh Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type
DE10043235A1 (de) * 2000-09-02 2002-03-14 Leybold Vakuum Gmbh Vakuumpumpe
JP2002213214A (ja) * 2000-11-16 2002-07-31 Honda Motor Co Ltd Ｏｈｖ型四サイクル内燃機関の動弁装置
GB0124731D0 (en) * 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
GB0424198D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Pumping arrangement
JP4933921B2 (ja) * 2007-03-08 2012-05-16 京セラミタ株式会社 シート給紙装置及びこのシート給紙装置を備えた画像形成装置
JP2011126639A (ja) * 2009-12-16 2011-06-30 Murata Machinery Ltd 糸巻取機
DE102010045716A1 (de) * 2010-09-16 2012-03-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2012189004A (ja) * 2011-03-10 2012-10-04 Mitsubishi Heavy Ind Ltd スクロール流体機械
DE202013010209U1 (de) * 2013-11-12 2015-02-16 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Welle

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
EP3460249A1 (fr) 2019-03-27
JP6438916B2 (ja) 2018-12-19
EP3112689A1 (fr) 2017-01-04
EP3112689B1 (fr) 2018-12-05
JP2017061922A (ja) 2017-03-30

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