EP0648607A2 - Plaque de tuyères d'une tête à jet d'encre et procédé pour sa fabrication - Google Patents

Plaque de tuyères d'une tête à jet d'encre et procédé pour sa fabrication Download PDF

Info

Publication number
EP0648607A2
EP0648607A2 EP94250212A EP94250212A EP0648607A2 EP 0648607 A2 EP0648607 A2 EP 0648607A2 EP 94250212 A EP94250212 A EP 94250212A EP 94250212 A EP94250212 A EP 94250212A EP 0648607 A2 EP0648607 A2 EP 0648607A2
Authority
EP
European Patent Office
Prior art keywords
chamber
nozzle
plate
ink
channels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP94250212A
Other languages
German (de)
English (en)
Other versions
EP0648607A3 (fr
EP0648607B1 (fr
Inventor
Wolfgang Dr. Thiel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Francotyp Postalia GmbH
Original Assignee
Francotyp Postalia GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Francotyp Postalia GmbH filed Critical Francotyp Postalia GmbH
Publication of EP0648607A2 publication Critical patent/EP0648607A2/fr
Publication of EP0648607A3 publication Critical patent/EP0648607A3/fr
Application granted granted Critical
Publication of EP0648607B1 publication Critical patent/EP0648607B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2002/14306—Flow passage between manifold and chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece
    • Y10T29/49798—Dividing sequentially from leading end, e.g., by cutting or breaking
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining
    • Y10T29/49904—Assembling a subassembly, then assembling with a second subassembly

Definitions

  • the invention relates to a face shooter ink jet print head of the type specified in the preamble of claim 1 and a method for its production.
  • Such an ink jet printhead can be used in small, fast printers. Such will be used for example for franking machines for franking mail.
  • ink jet printheads are constructed according to the edge shooter or face shooter principle (First annual ink jet printing workshop, March 26-27, 1992, Royal Sonesta Hotel, Cambridge, Massachusetts). Efforts have been made to minimize the dimensions of the chambers to increase the nozzle density. However, the measures proposed there are only useful for inkjet modules with a few nozzles in a row and fail with a large number of nozzles.
  • a face shooter liquid jet head which, in a variant, has nozzle groups lying in a nozzle line in such a way that adjacent plumbum zirconate titanate elements (PZT elements) are supplied with liquid separately.
  • PZT elements plumbum zirconate titanate elements
  • a comb-like branching of the ink channels leads from the feed channel to the elements on each side.
  • the longitudinal axes of the ink chambers lie in the direction of the ink jet outlet from the face shooter nozzles. This arrangement limits the chamber size under the PZT elements and does not achieve a high nozzle density.
  • nozzle openings are located in a central part, which are connected to chambers arranged on both sides in side parts.
  • such an arrangement is not easy to transfer to a face shooter ink jet print head without other disadvantages.
  • a round head piece for a paint spraying device has been proposed from DE 33 31 488, with a plurality of chambers located in a further plane, each of which has an associated row of nozzles a nozzle plate are connected via ink channels. On the nozzle plate, the rows of nozzles are arranged parallel to one another and laterally offset.
  • such a face shooter ink jet head requires relatively long ink channels to the nozzles because the space is restricted radially inwards to the row of nozzles. Due to the circular arrangement of the chambers at a radial distance, the width of the chamber under the PZT elements is limited, but also the maximum possible length of the row of nozzles, and a high nozzle density is not achieved with a maximum of 40 nozzle openings. In addition, several such head pieces cannot be combined to form a higher resolution print head.
  • Ink-jet printheads that were later developed according to the face-shooting principle, such as described in the relevant patents US 47 30 197, US 47 03 333, US 46 95 854, US 46 35 079, US 46 41 153 and US 46 80 595 also consist of ink chambers which are orthogonal to the left and right of a line of nozzle outlet openings are arranged to the longitudinal axes of the ink chambers. With their longitudinal axis, the ink chambers are all in one plane. With this arrangement, too, the density that can be achieved in the arrangement of the nozzles is determined by the width of the chamber and by the thickness of the partition wall between two chambers, which, due to the cross-talk effect, cannot fall below a certain minimum.
  • a manufacturing method for a face shooter ink jet print head is known a nozzle line between two groups of ink chambers known, which has a doubled nozzle density.
  • a chamber plate carrying the chambers in a symmetrical arrangement to the nozzle line is produced, on which a membrane plate is later to be positioned.
  • a single PZT layer is attached over the membrane plate and then separated into discrete PZT elements by material removal. The membrane plate is then positioned and fastened over the chamber plate, under which a number of other worktops are arranged.
  • Each rectangular chamber is assigned a supply channel and a nozzle as well as a vibrating plate with a piezoceramic element.
  • the disadvantage here is that the pressure waves occurring in the ink supply and in each chamber can cause crosstalk to other pressure chambers. This crosstalk can only be eliminated subsequently by very complex measures, so that these inkjet print heads ultimately consist of many individual plates which have to be produced in a complex and expensive manufacturing process.
  • DE 34 45 761 A1 also discloses a method for producing a transducer arrangement from a single plate of a transducer material. After coating the lower plate surface with a membrane layer, material is removed from the upper plate surface of the transducer material in order to create separate areas which are arranged on the membrane above each pressure chamber (area 25.4 mm * 2.54 mm). This eliminates the need to create an adhesive connection between the individual transducer elements and the membrane by means of adhesive, and the uniformity of all distances is improved. However, the resulting nozzle spacing is still relatively large in the case of a printhead produced in this way.
  • P 42 25 799.9 proposed to arrange several chambers horizontally and vertically offset from each other.
  • the channels leading to the nozzles from the far lower level are longer than those from the upper closer level, which leads to a phase shift of the individual ink jets, which has to be compensated electronically.
  • larger forces have to be exerted by the piezo crystals through very long channels, so that these fail sooner than other piezo crystals.
  • the channel lengths are shorter and essentially the same due to a symmetrical arrangement of all ink chambers in one plane, so that one of the above-mentioned. Disadvantage is avoided, but at the expense of the dissolution.
  • the object is to create a compact, high-resolution inkjet print head which does not have the disadvantages of the prior art. It is also a task to create a manufacturing process with low manufacturing costs. Small differences in size or material between the glass pieces should not lead to deviations in the nozzle shape and position. The object is achieved with the characterizing features of claim 1.
  • the invention is based on the fact that due to this solution according to the invention with horizontally and vertically staggered ink chambers, a higher nozzle density, completely independent of the dimensions of the ink chambers, can be achieved for a face-shooter-ink-jet print head.
  • An approximately equal channel length is achieved by a defined offset of the ink chamber group to the nozzle line within each level, which compensates for the differently designed channel length caused by vertical offset of the levels.
  • Channels of a first type connect the first level ink chambers to the nozzle plate.
  • Channels of a second type connect the ink chambers of the second level through the chamber plate lying in the first level to the nozzle plate.
  • nozzles are to be supplied with ink, which in turn are arranged between those nozzles which are supplied by the ink chambers of the first level and form a dense line of equidistant nozzles in the z direction.
  • differences must be compensated for, which would lead to distortion of the printed image.
  • the arrangement of the chambers to the nozzle line on the one hand and to a suction chamber on the other hand is therefore such that differently long ink channels (nozzle and inlet channels) are provided, the sum of the ink channel lengths per chamber remaining approximately constant.
  • the first level ink chambers form a first Chamber group, which is connected to the associated nozzle group via nozzle channels.
  • the ink chambers of the second level likewise form a second chamber group which is connected to the associated nozzle group via inlet channels.
  • ink chambers of further levels can be connected to associated nozzle groups via channels of the second type.
  • the chamber groups of at least one chamber plate lie symmetrically to the row of nozzles in the ink jet print head, which is arranged in the middle of a module on the print side.
  • third and / or fourth chamber groups are provided, which lie symmetrically to the row of nozzles to the first and second chamber groups of the chamber plate and which is arranged in the middle of a module on the pressure side.
  • chambers of a further chamber group are arranged in this first plane symmetrically to the nozzle line, so that there are several rows of chamber groups in the first plane. It is envisaged that under these ink chambers of a chamber group of the first level, additional ink chambers of a chamber group of the second level are laterally offset in the z direction and to the nozzle line in the x direction. By means of these additional chambers which are arranged offset in the plane, the dimensions of the individual ink chambers can even be increased without the nozzle density having to be reduced.
  • the larger plane and the horizontal offset in the x-, z-direction mean that the chamber width is larger in each plane higher resolution possible.
  • the chamber width can be doubled according to the invention with the same nozzle density.
  • the nozzle density can be doubled with the same chamber width in the other limit case.
  • the ink jet print head is constructed from only one module which contains chamber groups in at least one chamber plate arranged in several rows parallel to the nozzle line at different distances. The distances are bridged by ink channels, which are in the volume of the module and partly between the chambers.
  • the ink channels are offset in the x direction and z direction.
  • the nozzles of at least two ink channels, each offset in the z direction by at most half a nozzle distance, are arranged in the same piece of glass and connected to the aforementioned ink channels via vertical nozzle channels.
  • the nozzle channels from the chambers to the nozzles on the one hand have a defined first flow resistance and the inlet channels from the suction chamber to the chambers on the other hand have a defined second flow resistance.
  • This can be achieved in that the channels lead in a vertical direction through several levels to the chambers or to the nozzles, all channels of one type having the same length with the same cross section.
  • Each nozzle channel has a defined lower first flow resistance than each inlet channel. This can also be achieved by changing the cross-section and / or winding in the horizontal direction.
  • ink jet print head that several rows of ink chamber groups are arranged parallel and symmetrically to the nozzle line in each plane, with symmetrical to the chamber groups of the first plane in at least a second plane Nozzle line chambers of another chamber group are arranged, which are laterally offset in the z direction and to the nozzle line in the x direction.
  • the process for manufacturing the inkjet printhead is based on the CAD development of a printhead design. A mask is made to cover a photosensitive glass plate.
  • the masked glass plate is exposed at least once to radiation with a corresponding wavelength of UV light, followed by heat treatment.
  • the areas to be removed are then preferably etched out of each plate.
  • the duration of the etching bath determines the layer thickness of the removed material.
  • the layer thickness of the membrane remaining when etching out is monitored.
  • the surface is treated by means of fine grinding or a defined membrane thickness is set.
  • the membrane plate and a chamber plate are provided with conductor tracks for the PZT elements that will be applied later.
  • Each three individual parts each consisting of two chamber parts, and consisting of at least one further plate, simultaneously serving as a spacer, are aligned and tacked together and then annealed or fed to the diffusion bonding process.
  • nozzle channels and the cavities (chambers) and the nozzle plate of the module are specially treated before the print head is contacted with driver circuits, completed and assembled.
  • a glass plate is separated directly into individual module plates. It is possible for a composite of at least two module plates of the same type which are offset next to one another to remain. This has the advantage that the litographic process allows the module plates to be offset with respect to one another in the z direction by half a nozzle spacing with high precision. Due to the increased nozzle density of maximum 128 dpi per module plate on the one hand and the combination of two module plates on the other hand, a resolution of the order of magnitude up to a maximum of 256 dpi can be achieved. The principle of the simultaneous production of several staggered module plates, the bond of which remains intact, is only limited by the yield that can be achieved according to the process mastery.
  • An advantage in addition to the increased nozzle density of the face shooter ink jet in-line printhead is that all nozzles are arranged in the same piece of glass, because corresponding vertical nozzle channels into the prior to the diffusion bonding process the piece of glass forming the nozzle plate of the module is etched or introduced in a comparable manner. This makes it possible to achieve a constant nozzle size and distance for all nozzles and a uniform offset from nozzle line to nozzle line. This reduces the manufacturing costs.
  • FIG. 1 a shows the face-shooter ink jet in-line print head in a top view from the nozzle side of the second chamber plate according to the invention from the nozzle side in the first variant.
  • the underlying chambers of the known first chamber plate are drawn in dashed lines to clarify their position relative to the second chamber plate according to the invention.
  • the overlap area F of a chamber of the chamber group 102 in the second chamber plate with a chamber of the chamber group 104 in the first chamber plate is shown hatched. Both chambers have an offset of size X in the x direction and an offset of size Z in the z direction.
  • the individual chamber groups are mutually offset in the x and z directions.
  • the nozzles forming a nozzle group 1.1, 1.2, 1.3, 1.4 are arranged in a row in a direction z.
  • the ink drops will eject in a y direction orthogonal to the x and z directions.
  • the associated chamber groups 101, 102 are offset in the x direction and the chamber groups 103, 104 are offset in a direction y orthogonal to these two directions x and z.
  • the nozzle groups are connected to the associated chamber groups 101, 102, 103, 104 located in the chamber plates 3 and 2, respectively, via ink channels in order to supply the ink. It is provided that the nozzles of the nozzle groups alternate with nozzles of the other nozzle groups in the row of nozzles.
  • FIG. 1b shows the nozzle arrangement in the nozzle line according to the first variant of the FSIJIL printhead.
  • FIG. 1c shows the face-shooter ink jet in-line print head in a top view of the second chamber plate according to the invention from the nozzle side in the second variant.
  • the underlying chambers of the known first chamber plate are also drawn in dashed lines to clarify their position relative to the second chamber plate according to the invention.
  • the coverage area F is advantageously smaller than in FIG. 1a.
  • Figure 1d shows the nozzle arrangement in the nozzle line 1 according to the second variant of the FSIJIL printhead.
  • the nozzle row 1 comprises the nozzles belonging to different nozzle groups 1.1, 1.2, 1.3, 1.4, which alternate in such a way that the overlap of chamber groups on one level with those on the other level is effective only at the chamber edges.
  • each chamber of chamber group 101 or 102 in the second chamber plate with chambers of chamber group 103 or 104 in the first chamber plate can be minimized by the offset in the x and z directions.
  • FIGS. 2a to 2e show the layered structure of the print head and the path of the ink flow according to the preferred embodiment of the invention (second variant, FIG. 1c).
  • a first chamber plate 2 carrying ink chambers lying in a first plane is equipped with means for supplying 151, 110 and actuators for driving out 10 ink from a chamber associated with a nozzle.
  • the print head consists of only 3 plates. There is one in each chamber plate 2, 3 Group 101, 102, 103, 104 of ink chambers worked in on the side facing the nozzle plate 4.
  • the inkjet print head has a nozzle plate 4 based on the face-shooter principle.
  • the nozzle plate 4 functions on the one hand as a membrane plate for the second level ink chambers. In addition, it contains the nozzles and nozzle channels 112 in the form of cylindrical through openings running perpendicularly through the nozzle plate.
  • the nozzle plate 4 is arranged on the second chamber plate bearing the ink chambers according to the invention and carries a single row of nozzles 1 which have nozzle groups 1.1, 1.2, 1.3, 1.4, ... belonging to k chamber groups 101, 102, 103, 104, and which is arranged in the middle of the surface of the nozzle plate 4.
  • nozzles of a nozzle group 1.1, 1.2 are connected via ink channels 115 to the associated chamber group 101, 102 located in the same chamber plate 3, and that at least nozzles of a further nozzle group 1.3, 1.4 are connected through passage openings 112 and ink channels 111 in the aforementioned first chamber plate 2 are connected to the associated chambers at least one further chamber group 103, 104.
  • FIG. 2a shows the section A-A 'with an ink channel guide from a suction chamber 151 to an ink chamber 104 of the first level and from there to the associated nozzle in the nozzle plate 4.
  • FIG. 2b shows a section BB 'with an ink channel guide from the suction space 151, the suction channel 110, 113, 114 to an ink chamber 102 of the second level and from there via the nozzle channels 115, 112 to the associated nozzle.
  • the chamber plate 3 in addition to the structure of the ink chambers, the inflow (suction channels) from the ink supply (suction chamber) and the nozzle channel also has the vertical connecting channels 112 from the ink chambers of the first chamber plate 2 to their associated nozzles in the nozzle plate 4.
  • the chamber plate 2 contains the structures of the ink chambers and horizontally extending ink channels 111 as well as at least one suction chamber 151, 152 and horizontal connecting channels 110 (suction channels) to the suction chamber 151, 152.
  • the section C-C 'shown in FIG. 2c is placed along the nozzle line 1 and in the y-direction of the nozzle axes. It illustrates how a particularly high density in the arrangement of the nozzles is achieved through the interlocking of the ink channels of the left and right half of the top view shown in FIG. 1c.
  • the nozzle channels 112 of the left half are drawn in bold.
  • the associated ink chambers 101 and 103 are drawn in bold lines.
  • 2d shows a section through the line D-D 'of the top view shown in FIG. 1c for the left half, the section going through the chambers of the 1st level.
  • FIG. 2e shows a section through the line E-E 'on the left half of the top view according to FIG. 1c, the section E-E' going through all the chambers of the plane of the left half.
  • the through openings can be made in different ways, so they can be etched, burned with a laser beam or punched with special tools. The selection of the process depends, among other things, on the material used.
  • the nozzle plate 4 carries not only the nozzles but also the actuators 10 for changing the volume of the ink chambers, a homogeneous connection with the material of the chamber plate underneath is required.
  • the material of the chamber plate underneath is used as the material for all plates of the printhead photosensitive glass.
  • the structuring, including the formation of the nozzles, is achieved by a photolithographic process and etching of the exposed parts.
  • the homogeneous and tight-fitting connection of the plates is produced by thermal diffusion bonding.
  • FIGS. 3a to 3c The preferred embodiment of the invention (variant 3) is shown in FIGS. 3a to 3c, the offset, as explained in principle for variant 1 in FIG. 1a, being chosen.
  • the print head consists of more than 3 plates, a central plate 5 of thickness H being used as a spacer plate between the chamber plates 2 and 3.
  • This allows the offset in the x-direction to be increased by the thickness H while maintaining the principle of the same nozzle channel length.
  • the nozzle plate 4 functions as a cover plate for the second level ink chambers.
  • it contains the nozzles in the form of cylindrical openings running perpendicularly through the plate.
  • FIG. 3a shows the section through the line A-A 'shown in FIG. 1a for part of the FSIJIL print head according to the third variant.
  • FIG. 3b shows the corresponding section through line B-B '
  • FIG. 3c shows the section through line C-C'
  • FIG. 3d shows the section through line D-D 'for part of the FSIJIL print head according to the third variant.
  • the offset in the x direction is determined by the sum of all thicknesses H of the second chamber plate 3 and the spacing or middle gaps 7 or 5 determined.
  • FIG. 3e shows the section through the line AA 'shown in FIG. 1a for part of the FSIJIL print head according to a third variant modified in this way with a further spacer plate 7.
  • the corresponding sections through the lines BB' and CC 'for one Part of the FSIJIL printhead does not need to be explained in detail since it is similar to the cuts according to the third variant.
  • FIGS. 4a to 4c A further embodiment with several rows of ink channel groups 101 to 108 parallel and symmetrical to the nozzle line per plane is explained for a fourth variant with reference to FIGS. 4a to 4c.
  • the nozzle density can be doubled in this way.
  • Figure 4a shows a section through the line A-A 'of a part of the FSIJIL printhead, the plan view shown in Figure 4b on the nozzle side of the fourth variant.
  • the course of closely arranged ink channels outside the section plane A-A ' is shown in dashed lines.
  • FIG. 4b shows the fourth variant of a face shooter ink jet in-line print head in a top view of the second chamber plate 3 (nozzle side).
  • the chambers and ink channels underneath in the volume are drawn with dashed lines.
  • FIGS. 4a and 4b it can be seen from FIGS. 4a and 4b that the ink channels between the chambers lie in the volume of the module. According to the invention, the distance between the aforementioned rows of ink channel groups within each level is increased to such an extent that this further minimizes the coverage area. Thus, the offset according to the first principle variant FIG. 1a can also be used with a good result.
  • FIG. 4c illustrates the ink guidance in FIG perspective view for a detail of the FSIJIL printhead to the right of the nozzle line 1 based on Figures 4a and 4b.
  • Each ink channel 111 and 115 has sections for ink guidance in other planes and the ink chambers of groups 101 and 103 as well as 102 and 104 are arranged one path closer to the nozzle line.
  • the ink chambers of the additional groups 105 and 107 and 106 and 108 are arranged closer to the suction space 151, 152, and each ink inlet channel 124 and 120 thus has cuts of the ink guide in other planes.
  • FIGS. 5 and 9 show the conductor track guide for contacting the PZT elements on the nozzle side.
  • the conductor track on the circuit side is arranged comparably.
  • the cables from the PZT elements of the second chamber plate are added on the circuit side.
  • the conductor track on the circuit side of this module is shown in another pending application.
  • the type HV 04 or HV 06 in HVCMOS technology from Supertexinc comes as a driver circuit. for use.
  • the suction spaces 151, 152 unite at the periphery of the module to form a space 150, from which a passage 153 leads to an attenuator 154 on the surface (circuit side) of the module, which is connected via feed channels 155, 156 to an ink supply opening.
  • the module 200 shown in FIG. 5 has bores 177 for fastening the module and ground conductor tracks 180 with an attached electrode surface 181.
  • the respective PZT crystal is later arranged and contacted on the latter.
  • the other electrode on the surface of the PZT crystal is connected via a bonded wire to the associated conductor track 190, which leads to the corresponding output of the driver circuit.
  • FIG. 6 shows a section of the FSIJIL printhead according to the invention cut in line A-A 'according to a first variant.
  • the circuit 160 and the actuators 10 are protected against environmental influences by external plastic molded parts 170, 171.
  • the PZT elements are connected to conductor tracks 190, 191 via bonded wires 131, 132. which lead to the aforementioned drive circuit 160.
  • a flat cable 185 establishes the connection to the control electronics, for example a franking machine. A defined distance is maintained between the print head and the postal item surface 100.
  • the manufacturing process for the FSIJIL printhead according to the invention is based on the use of a wafer made of photosensitive glass, on which a mask is placed. After exposure to UV light, a phase transformation of amorphous materials into its crystalline phase is brought about in the exposed areas by heat treatment. Crystalline material is then removed in layers by etching, as was already proposed by IBM in US Pat. No. 4,092,166.
  • Step a) consists of several sub-steps a1) to a3), which can be designed differently.
  • the known processing steps a1) etching and a2) fine grinding are used, as was already proposed in principle in pending application P 42 25 799.9 (here, however, for the production of an ESIJIL printhead).
  • etching agents with different concentrations and / or different exposure times are used for the three areas in order to be able to remove the corresponding areas with different depth accuracy, the depth accuracy when etching the areas for through bores being less than when etching very shallow Areas for the channels in the chamber parts and where the through holes first, then the chambers and then the nozzle channels are etched. It is further provided that the thickness of the bottom layer is monitored during the etching of the chambers and that the Completion of the manufacture of the chambers required thickness of the bottom layer (membrane) of the chambers is achieved by fine grinding each of the chamber parts.
  • the conductor tracks are applied in step a3).
  • the conductor tracks are preferably produced by sputtering, but other methods, such as conventional photoresist and metallization methods, are also suitable. Where possible, metals are used that survive a subsequent annealing process. It is known from DE OS 37 33 109 to use platinum or platinum group metals which can withstand a sintering process up to 1300 ° C.
  • step b) The individual parts for the chamber parts, if necessary the spacer part or for the nozzle plate of each module, are separated in step b) and then connected to form a module, the individual parts being aligned. After the individual parts have been tacked together, a module is created, which is then tempered. During tempering, a phase transition from amorphous to crystalline takes place in the glass material.
  • step c) further electrical conductor tracks are applied to the chamber surface, the piezocrystals are applied and the contact is made in a manner known per se.
  • the piezocrystals can be glued on individually with subsequent curing of the adhesive.
  • a layer of piezoelectric material can also be applied to the chamber surface provided with conductor tracks, which is later structured and contacted. It is envisaged that the PZT layer is first separated into individual PZT elements. Laser beam machining is advantageously used for this purpose. After additional conductor tracks have been applied, the PZT elements are contacted.
  • metallize a pretreated PZT plate and to apply it to the second chamber plate or nozzle plate.
  • the application can advantageously be done by gluing.
  • a number of individual PZT elements are then separated for each module. If necessary, the PZT elements are contacted after additional conductor tracks have been applied.
  • the last step d) is to assemble the modules into a printhead.
  • FIG. 8 shows a fifth variant for the construction of an ink jet print head, in which the ink chambers of the second chamber plate have been arranged in a structured manner from the opposite side. In this case, no additional cover plate, which closes off the ink chambers, is required. Instead, a center plate is used to seal off the ink chambers.
  • nozzle dimensions alone determine the maximum number of nozzles in the row. If there is a need for increased resolution, a further printing module would have to be arranged.
  • an inkjet print head is built up in blocks from several modules. Such a block construction is known for example from US 4,703,333.
  • at least two similar chamber plates are distributed among one another in several levels and / or offset next to one another in one level.
  • the chamber parts for the lower levels are produced simultaneously from those for the upper level and at the same time with the spacer parts or the nozzle plate from a common glass plate.
  • chamber plates are provided which are offset from one another in one plane and each belong to a different module. It is not necessary to separate both chamber plates from one another during production step b).
  • the ink jet print head which contains a row of nozzles arranged in the area of a nozzle plate in the z direction according to the face shooter principle, which allows an ink jet to be ejected in the y direction, thus consisting of several modules.
  • a chamber plate with a membrane supporting the ink chambers is arranged in a first level, with each chamber part being assigned means for supplying and expelling ink from each chamber.
  • At least one further chamber plate 3 is arranged per module in a further plane between the nozzle plate 4 and the first chamber plate 2 and has chamber groups, the chamber groups of at least one chamber plate 2, 3 per module being symmetrical to the nozzle row 1 of the respective module lie, which is arranged in the middle of each module on the printed side in the nozzle plate 4 and the nozzle plate 4 has membrane regions 20 which are provided with ink expulsion means 10.
  • interrelated complexes of similar chamber plates or nozzle plates are optionally arranged spacer plates. It is provided that at least the structures of the chamber plates 2, 3 and nozzle plate 4 of two modules are incorporated in the respective x, z plane in the z direction by a maximum of half the nozzle spacing next to one another.
  • the nozzle row 1 in the nozzle plate 4 of each module comprises a plurality of nozzle groups 1.1, 1.2, 1.3 and 1.4, each module of the ink jet print head having at least one group 101, 102 of ink chambers on the side of the second chamber plate 3 facing the nozzle plate 4, at least one nozzle group 1.1, 1.2 with the in associated chamber groups 101, 102 located in the same chamber plate 3, and at least one further nozzle group 1.3, 1.4 is connected via through openings in the aforementioned chamber plate 3 to the associated chambers at least one further chamber group 103, 104 located in the chamber plate 2 on the first level.
  • the individual chamber groups 101, 103 and 102, 104 per module are offset from one another in the x- and z-directions so that an approximately equal channel length is reached from each ink chamber to the associated nozzle in the nozzle line and the coverage of chamber groups of one level with which the other level is minimal.
  • FIG. 9 the conductor track guidance on the nozzle side of an FSIJIL print head manufactured on the basis of the above-mentioned production method according to the sixth variant is partially shown.
  • the neighboring modules of each complex are spaced apart from one another on the glass plate in the x direction in order to make room for the required electrical conductor tracks.
  • step aa first through bores and vertical nozzle channels and non-through openings and chambers are produced simultaneously.
  • the first areas for example continuous nozzle channels, are pretreated for etching by multiple exposure (through-exposure) and heat treatment.
  • second areas for example chambers, are only exposed to a predetermined depth. From this depth, the etching speed in the second areas decreases compared to the first areas.
  • the plate surface is pretreated Fine grinding and exposure with UV light as well as a subsequent heat treatment.
  • the first conductor tracks can now be applied (by sputtering).
  • the middle parts can also be provided with conductor tracks.
  • the module plates are coated with a metal by sputtering. As a result, the lines can be routed from the other layers to the upper layers of the module without crossing, particularly if a large number of elements are to be contacted.
  • step b) separation there is a sub-step b1) separating the required parts of the module from the glass plate or the related complexes. It is envisaged that spacer parts lie between the modules or are additionally arranged and that the spacer parts are produced from the same plate material, with structuring by etching in step aa3) being provided before the separation.
  • sub-step b2) the individual module parts are aligned and annealed, with a phase transition from amorphous to crystalline.
  • each wafer has only one of the same module plate types.
  • step bb) Only then, in contrast to the production according to the method according to FIGS. 7a and 7b, is a step bb) separated into a multiplicity of individual or connected modules, which are then processed separately in the steps c) and d) mentioned above. Because of the previous step ii), this step bb) therefore does not include a sub-step for connecting Individual parts or related complexes.
  • the aforementioned method according to FIG. 7c can also be used to produce a large number of individual modules which have an extended single row of nozzles.
  • a further increase in the printing density can be achieved here by customarily tilting a module in relation to the printing direction.
  • the invention is not limited to the present embodiment. Rather, a number of variants are conceivable which make use of the solution shown, even in the case of fundamentally different types.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP94250212A 1993-10-19 1994-08-24 Module de tête à jet d'encre pour tête à jet d'encre éjectant de face et procédé pour sa fabrication Expired - Lifetime EP0648607B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4336416A DE4336416A1 (de) 1993-10-19 1993-10-19 Face-Shooter-Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
DE4336416 1993-10-19

Publications (3)

Publication Number Publication Date
EP0648607A2 true EP0648607A2 (fr) 1995-04-19
EP0648607A3 EP0648607A3 (fr) 1996-03-20
EP0648607B1 EP0648607B1 (fr) 1998-10-14

Family

ID=6500995

Family Applications (1)

Application Number Title Priority Date Filing Date
EP94250212A Expired - Lifetime EP0648607B1 (fr) 1993-10-19 1994-08-24 Module de tête à jet d'encre pour tête à jet d'encre éjectant de face et procédé pour sa fabrication

Country Status (5)

Country Link
US (3) US5752303A (fr)
EP (1) EP0648607B1 (fr)
CA (1) CA2125250C (fr)
DE (2) DE4336416A1 (fr)
IL (1) IL111422A0 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0750987A1 (fr) * 1995-06-27 1997-01-02 Seiko Epson Corporation Actionneur pour une tête d'impression à jet d'encre
EP0755791A3 (fr) * 1995-07-24 1997-11-05 Seiko Epson Corporation Organe d'actionnement pour une tête d'enregistrement à jet d'encre et procédé de fabrication de celle-ci
EP0799699A3 (fr) * 1996-04-04 1998-12-23 Seiko Epson Corporation Tête stratifiée d'enregistrement à jet d'encre
CN1827375B (zh) * 2005-03-04 2011-12-28 理光打印系统有限公司 喷墨记录头
EP4223542A1 (fr) * 2022-02-04 2023-08-09 Seiko Epson Corporation Tête d'éjection de liquide et appareil d'éjection de liquide

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6729002B1 (en) * 1995-09-05 2004-05-04 Seiko Epson Corporation Method of producing an ink jet recording head
DE69719747T2 (de) * 1996-11-18 2004-02-05 Seiko Epson Corp. Tintenstrahlschreibkopf
US7891767B2 (en) * 1997-07-15 2011-02-22 Silverbrook Research Pty Ltd Modular self-capping wide format print assembly
US7337532B2 (en) 1997-07-15 2008-03-04 Silverbrook Research Pty Ltd Method of manufacturing micro-electromechanical device having motion-transmitting structure
US7465030B2 (en) 1997-07-15 2008-12-16 Silverbrook Research Pty Ltd Nozzle arrangement with a magnetic field generator
US7468139B2 (en) 1997-07-15 2008-12-23 Silverbrook Research Pty Ltd Method of depositing heater material over a photoresist scaffold
US6712453B2 (en) 1997-07-15 2004-03-30 Silverbrook Research Pty Ltd. Ink jet nozzle rim
US6188415B1 (en) 1997-07-15 2001-02-13 Silverbrook Research Pty Ltd Ink jet printer having a thermal actuator comprising an external coil spring
US6648453B2 (en) 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
US6857724B2 (en) * 1997-07-15 2005-02-22 Silverbrook Research Pty Ltd Print assembly for a wide format pagewidth printer
US6682174B2 (en) 1998-03-25 2004-01-27 Silverbrook Research Pty Ltd Ink jet nozzle arrangement configuration
US7303254B2 (en) * 1997-07-15 2007-12-04 Silverbrook Research Pty Ltd Print assembly for a wide format pagewidth printer
US6935724B2 (en) 1997-07-15 2005-08-30 Silverbrook Research Pty Ltd Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point
US7195339B2 (en) 1997-07-15 2007-03-27 Silverbrook Research Pty Ltd Ink jet nozzle assembly with a thermal bend actuator
US7556356B1 (en) 1997-07-15 2009-07-07 Silverbrook Research Pty Ltd Inkjet printhead integrated circuit with ink spread prevention
EP2000307B1 (fr) * 1997-07-18 2013-09-11 Seiko Epson Corporation Tête d'enregistrement à jet d'encre, son procédé de fabrication, et enregistreur à jet d'encre
US6036874A (en) * 1997-10-30 2000-03-14 Applied Materials, Inc. Method for fabrication of nozzles for ink-jet printers
JP3267937B2 (ja) * 1998-09-04 2002-03-25 松下電器産業株式会社 インクジェットヘッド
US6726304B2 (en) * 1998-10-09 2004-04-27 Eastman Kodak Company Cleaning and repairing fluid for printhead cleaning
RU2143343C1 (ru) * 1998-11-03 1999-12-27 Самсунг Электроникс Ко., Лтд. Микроинжектор и способ изготовления микроинжектора
RU2144471C1 (ru) * 1998-11-03 2000-01-20 Самсунг Электроникс Ко., Лтд. Способ сборки микроинжектора и устройство для осуществления способа
US6656432B1 (en) * 1999-10-22 2003-12-02 Ngk Insulators, Ltd. Micropipette and dividedly injectable apparatus
DE69931526T2 (de) * 1999-12-10 2007-04-26 Fuji Photo Film Co., Ltd., Minami-Ashigara Tintenstrahldruckkopf, verfahren zur herstellung von druckköpfen und drucker
WO2001072519A1 (fr) * 2000-03-27 2001-10-04 Fujitsu Limited Tete a jet d'encre a buses multiples et procede de fabrication de celle-ci
US6540339B2 (en) * 2001-03-21 2003-04-01 Hewlett-Packard Company Flextensional transducer assembly including array of flextensional transducers
US20020196314A1 (en) * 2001-06-25 2002-12-26 Xerox Corporation Piezoelectric transducer
KR100395529B1 (ko) * 2001-10-30 2003-08-25 삼성전자주식회사 잉크젯 프린트 헤드 및 그 제조방법
US6984027B2 (en) * 2001-11-30 2006-01-10 Brother Kogyo Kabushiki Kaisha Ink-jet head and ink-jet printer having ink-jet head
US6953241B2 (en) * 2001-11-30 2005-10-11 Brother Kogyo Kabushiki Kaisha Ink-jet head having passage unit and actuator units attached to the passage unit, and ink-jet printer having the ink-jet head
CN1273298C (zh) * 2002-02-18 2006-09-06 兄弟工业株式会社 喷墨打印头及具有喷墨打印头的喷墨打印机
US6846069B2 (en) * 2002-05-10 2005-01-25 Brother Kogyo Kabushiki Kaisha Ink-jet head
US7052117B2 (en) 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
JP4218444B2 (ja) * 2003-06-30 2009-02-04 ブラザー工業株式会社 インクジェットヘッドの製造方法
US6890067B2 (en) * 2003-07-03 2005-05-10 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US20050206679A1 (en) * 2003-07-03 2005-09-22 Rio Rivas Fluid ejection assembly
JP2005035013A (ja) * 2003-07-15 2005-02-10 Brother Ind Ltd 液体移送装置の製造方法
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
JP4218594B2 (ja) * 2004-06-08 2009-02-04 ブラザー工業株式会社 インクジェットヘッド
JP2006027132A (ja) * 2004-07-16 2006-02-02 Fuji Photo Film Co Ltd 液滴吐出ヘッド及び画像形成装置
JP5004806B2 (ja) 2004-12-30 2012-08-22 フジフィルム ディマティックス， インコーポレイテッド インクジェットプリント法
US7380914B2 (en) * 2005-04-26 2008-06-03 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US7540593B2 (en) * 2005-04-26 2009-06-02 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US7694398B2 (en) * 2005-09-15 2010-04-13 Fujifilm Corporation Method of manufacturing a liquid ejection head
US7686432B2 (en) * 2006-01-20 2010-03-30 Samsung Electro-Mechanics Co., Ltd. Inkjet printer head and fabricating method thereof
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
CN101977773B (zh) * 2008-03-17 2013-08-07 惠普开发有限公司 一种打印头和用于制造打印头的方法
US8814328B2 (en) * 2011-12-13 2014-08-26 Xerox Corporation Polymer film as an interstitial fill for PZT printhead fabrication
JP6260096B2 (ja) * 2013-03-27 2018-01-17 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置
JP6318475B2 (ja) * 2013-06-10 2018-05-09 セイコーエプソン株式会社 流路ユニットおよび流路ユニットを搭載した液体噴射ヘッド、液体噴射装置
JP6402573B2 (ja) * 2014-10-08 2018-10-10 ローム株式会社 インクジェット装置およびインクジェット装置の製造方法
JP6492756B2 (ja) * 2015-02-25 2019-04-03 ブラザー工業株式会社 液体吐出装置
JP6520237B2 (ja) * 2015-03-10 2019-05-29 株式会社リコー 液滴吐出ヘッド、液体カートリッジおよび画像形成装置
JP6447819B2 (ja) * 2015-03-10 2019-01-09 セイコーエプソン株式会社 ヘッド及び液体噴射装置
GB2547951A (en) * 2016-03-04 2017-09-06 Xaar Technology Ltd Droplet deposition head and manifold component therefor
JP2017185826A (ja) * 2017-07-14 2017-10-12 セイコーエプソン株式会社 液体噴射ヘッド、及び、液体噴射装置
JP7027950B2 (ja) * 2018-02-24 2022-03-02 株式会社リコー 液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置
US11760091B2 (en) 2019-03-20 2023-09-19 Kyocera Corporation Liquid discharge head and recording apparatus
JP7505179B2 (ja) 2019-12-03 2024-06-25 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射システム
JP2021088083A (ja) 2019-12-03 2021-06-10 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射システム
JP7545623B2 (ja) * 2020-03-16 2024-09-05 株式会社東芝 インクヘッドユニット

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE364385B (fr) * 1973-04-25 1974-02-18 Original Odhner Ab
DE2349555C2 (de) * 1973-04-25 1983-04-07 Siemens AG, 1000 Berlin und 8000 München Druckkopf für Farbflüssigkeits-Spritzdrucker und dergleichen
US4216477A (en) * 1978-05-10 1980-08-05 Hitachi, Ltd. Nozzle head of an ink-jet printing apparatus with built-in fluid diodes
AT368283B (de) * 1980-11-07 1982-09-27 Philips Nv Duesenplatte fuer einen tintenstrahlschreibkopf und verfahren zur herstellung einer solchen duesen- platte
AT372651B (de) * 1980-12-15 1983-11-10 Philips Nv Tintenstrahlschreibkopf und verfahren zur herstellung eines solchen tintenstrahlschreibkopfes
DE3117028A1 (de) * 1981-04-29 1982-11-18 Siemens AG, 1000 Berlin und 8000 München Schreibkopf fuer tintenschreibeinrichtungen mit zylinderfoermigen tintenkanaelen
DE3222636A1 (de) * 1981-06-18 1983-01-05 Konishiroku Photo Industry Co., Ltd., Tokyo Schreibkopf fuer einen tintenstrahlschreiber
US4611219A (en) * 1981-12-29 1986-09-09 Canon Kabushiki Kaisha Liquid-jetting head
DE3311956A1 (de) * 1982-03-31 1983-10-13 Ricoh Co., Ltd., Tokyo Farbstrahl-druckerkopf
JPS58187365A (ja) * 1982-04-27 1983-11-01 Seiko Epson Corp オンデマンド型インクジエツト記録ヘツド
DE3331488A1 (de) * 1982-09-01 1984-03-01 Konishiroku Photo Industry Co., Ltd., Tokyo Kopfstueck fuer eine farbspritz-druckvorrichtung
GB8431676D0 (en) * 1983-12-16 1985-01-30 Pitney Bowes Inc Fabrication technique
US4635079A (en) * 1985-02-11 1987-01-06 Pitney Bowes Inc. Single element transducer for an ink jet device
US4601777A (en) * 1985-04-03 1986-07-22 Xerox Corporation Thermal ink jet printhead and process therefor
US4641153A (en) * 1985-09-03 1987-02-03 Pitney Bowes Inc. Notched piezo-electric transducer for an ink jet device
DE3630206A1 (de) * 1985-09-06 1987-03-19 Fuji Electric Co Ltd Tintenstrahldruckkopf
US4730197A (en) * 1985-11-06 1988-03-08 Pitney Bowes Inc. Impulse ink jet system
US4680595A (en) * 1985-11-06 1987-07-14 Pitney Bowes Inc. Impulse ink jet print head and method of making same
US4703333A (en) * 1986-01-30 1987-10-27 Pitney Bowes Inc. Impulse ink jet print head with inclined and stacked arrays
US4695854A (en) * 1986-07-30 1987-09-22 Pitney Bowes Inc. External manifold for ink jet array
DE3710654A1 (de) * 1987-03-31 1988-10-13 Siemens Ag Mehrschichtig aufgebauter tintenschreibkopf
WO1988002698A1 (fr) * 1986-10-16 1988-04-21 Siemens Aktiengesellschaft Tete d'ecriture a l'encre a couches multiples
US4835554A (en) * 1987-09-09 1989-05-30 Spectra, Inc. Ink jet array
DE3730844A1 (de) * 1987-09-14 1989-03-23 Siemens Ag Matrix-schreibeinrichtung
US4812859A (en) * 1987-09-17 1989-03-14 Hewlett-Packard Company Multi-chamber ink jet recording head for color use
DE3803432A1 (de) * 1988-02-05 1989-08-17 Olympia Aeg Piezoelektrisch betriebener schreibkopf in tintenmosaikschreibeinrichtungen
DE3805279A1 (de) * 1988-02-19 1989-08-31 Siemens Ag Piezoelektrischer tintendruckkopf und verfahren zu seiner herstellung
GB8810241D0 (en) * 1988-04-29 1988-06-02 Am Int Drop-on-demand printhead
DE3814720A1 (de) * 1988-04-30 1989-11-09 Olympia Aeg Verfahren zur herstellung einer grundplatte mit durch aetzen hergestellte einarbeitungen fuer einen tintendruckkopf
US4878992A (en) * 1988-11-25 1989-11-07 Xerox Corporation Method of fabricating thermal ink jet printheads
DE3917434A1 (de) * 1989-05-29 1989-11-09 Siemens Ag Mehrschichtig aufgebauter tintendruckkopf mit durch selektives aetzen erzeugten tintenkanaelen
US5157420A (en) * 1989-08-17 1992-10-20 Takahiro Naka Ink jet recording head having reduced manufacturing steps
JPH0392355A (ja) * 1989-09-05 1991-04-17 Seiko Epson Corp インクジェットヘッド製造方法
US5087930A (en) * 1989-11-01 1992-02-11 Tektronix, Inc. Drop-on-demand ink jet print head
US5059989A (en) * 1990-05-16 1991-10-22 Lexmark International, Inc. Thermal edge jet drop-on-demand ink jet print head
US5265315A (en) * 1990-11-20 1993-11-30 Spectra, Inc. Method of making a thin-film transducer ink jet head
EP0488675A1 (fr) * 1990-11-28 1992-06-03 Canon Kabushiki Kaisha Méthode pour la production d'une tête d'enregistrement à jet d'encre et téte d'enregistrement à jet d'encre
JP2744536B2 (ja) * 1991-10-04 1998-04-28 株式会社テック インクジェットプリンタヘッド及びその製造方法
US5194877A (en) * 1991-05-24 1993-03-16 Hewlett-Packard Company Process for manufacturing thermal ink jet printheads having metal substrates and printheads manufactured thereby
JPH05104714A (ja) * 1991-10-17 1993-04-27 Canon Inc 液体噴射記録ヘツドおよびその製造方法
US5218754A (en) * 1991-11-08 1993-06-15 Xerox Corporation Method of manufacturing page wide thermal ink-jet heads
JP2843199B2 (ja) * 1992-03-26 1999-01-06 株式会社テック インクジェットプリンタヘッドの製造方法
JP2798845B2 (ja) * 1992-03-26 1998-09-17 株式会社テック インクジェットプリンタヘッドの製造方法
JP3308337B2 (ja) * 1992-04-02 2002-07-29 ヒューレット・パッカード・カンパニー インクジェット・プリンタ用プリントヘッド，インクジェット・プリンタ用プリントヘッドの形成方法及び部品組立方法
DE4225799A1 (de) * 1992-07-31 1994-02-03 Francotyp Postalia Gmbh Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
US5365645A (en) * 1993-03-19 1994-11-22 Compaq Computer Corporation Methods of fabricating a page wide piezoelectric ink jet printhead assembly
US5408739A (en) * 1993-05-04 1995-04-25 Xerox Corporation Two-step dieing process to form an ink jet face

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0750987A1 (fr) * 1995-06-27 1997-01-02 Seiko Epson Corporation Actionneur pour une tête d'impression à jet d'encre
EP0755791A3 (fr) * 1995-07-24 1997-11-05 Seiko Epson Corporation Organe d'actionnement pour une tête d'enregistrement à jet d'encre et procédé de fabrication de celle-ci
US5907340A (en) * 1995-07-24 1999-05-25 Seiko Epson Corporation Laminated ink jet recording head with plural actuator units connected at outermost ends
EP1034930A1 (fr) * 1995-07-24 2000-09-13 Seiko Epson Corporation Tête d'enregistrement à jet d'encre
EP0799699A3 (fr) * 1996-04-04 1998-12-23 Seiko Epson Corporation Tête stratifiée d'enregistrement à jet d'encre
US6024436A (en) * 1996-04-04 2000-02-15 Seiko Epson Corporation Laminated ink jet recording head
CN1827375B (zh) * 2005-03-04 2011-12-28 理光打印系统有限公司 喷墨记录头
EP4223542A1 (fr) * 2022-02-04 2023-08-09 Seiko Epson Corporation Tête d'éjection de liquide et appareil d'éjection de liquide

Also Published As

Publication number Publication date
US5752303A (en) 1998-05-19
IL111422A0 (en) 1994-10-27
EP0648607A3 (fr) 1996-03-20
EP0648607B1 (fr) 1998-10-14
DE59407085D1 (de) 1998-11-19
US5845380A (en) 1998-12-08
US6070972A (en) 2000-06-06
CA2125250C (fr) 1999-10-05
DE4336416A1 (de) 1995-08-24
CA2125250A1 (fr) 1995-04-20

Similar Documents

Publication Publication Date Title
EP0648607B1 (fr) Module de tête à jet d'encre pour tête à jet d'encre éjectant de face et procédé pour sa fabrication
EP0581395B1 (fr) Tête d'impression à jet d'encre
DE69117948T2 (de) Gesteuerte druckvorrichtung und herstellverfahren dafür
DE68917250T2 (de) Hochauflösende vielkanalige Anordnung zum elektrisch gepulsten Niederschlag von Tröpfchen.
DE69806086T2 (de) Verfahren zur Herstellung eines Tintenstrahlkopfes
EP0713777B1 (fr) Agencement de modules individuels d'impression à encre pour une tête d'impression à encre
DE69429021T2 (de) Tintenstrahlaufzeichnungskopf
DE69030912T2 (de) Tropfen-Bei-Bedarf-Tintenstrahldruckkopf
DE69423187T2 (de) Tintenstrahlaufzeichnungskopf
DE69530280T2 (de) Farbstrahldruckkopfherstellungsverfahren
DE3248087A1 (de) Fluessigkeitsstrahlkopf
DE2703320A1 (de) Troepfchenstrahlen-aufzeichnungsvorrichtung
DE60222367T2 (de) Flüssigkeitsausstosskopf
DE69613636T2 (de) Antriebseinheit für einen Tintenstrahl-Aufzeichnungskopf und zugehöriges Herstellungsverfahren
DE69804724T2 (de) Tintenstrahldruckkopf und sein Herstellungsverfahren
DE4435914C2 (de) Piezoelektrischer Antrieb für einen Tintenstrahlaufzeichnungskopf und Verfahren zu dessen Herstellung
EP0671270B1 (fr) Tête d'impression par jet d'encre
DE69011694T2 (de) Anordnung zur gesteuerten tintentropfenerzeugung.
DE69704456T2 (de) Kopf für Druckapparat
DE69810799T2 (de) Tröpfchenaufzeichnungsgerät und herstellungsverfahren
DE4443244C2 (de) Anordnung für einen Tintendruckkopf aus einzelnen Tintendruckmodulen
DE69822928T2 (de) Tintenstrahldruckkopf
DE69514610T2 (de) Struktur einer Antriebsplatte für ein Tintenausstossgerät
DE69020021T2 (de) Tintendruckkopf-Substrat und Tintendruckkopf mit einem solchen Substrat.
DE10026133A1 (de) Verfahren zum Herstellen eines Tintenstrahldruckkopfs

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): CH DE FR GB IT LI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): CH DE FR GB IT LI

17P Request for examination filed

Effective date: 19960419

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: FRANCOTYP-POSTALIA AKTIENGESELLSCHAFT & CO.

RAP3 Party data changed (applicant data changed or rights of an application transferred)

Owner name: FRANCOTYP-POSTALIA AKTIENGESELLSCHAFT & CO.

17Q First examination report despatched

Effective date: 19970403

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): CH DE FR GB IT LI

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: ROTTMANN, ZIMMERMANN + PARTNER AG

Ref country code: CH

Ref legal event code: EP

REF Corresponds to:

Ref document number: 59407085

Country of ref document: DE

Date of ref document: 19981119

ET Fr: translation filed
GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 19990115

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

REG Reference to a national code

Ref country code: CH

Ref legal event code: PUE

Owner name: DIGITAL GRAPHICS INCORPORATION

Free format text: FRANCOTYP-POSTALIA AKTIENGESELLSCHAFT & CO.#TRIFTWEG 21-26#16547 BIRKENWERDER (DE) -TRANSFER TO- DIGITAL GRAPHICS INCORPORATION#517, DEOKE-DON YANGJU-SHI#KYUNGGI-DO, 482-050 (KR)

REG Reference to a national code

Ref country code: FR

Ref legal event code: TP

REG Reference to a national code

Ref country code: GB

Ref legal event code: 732E

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20050804

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20050830

Year of fee payment: 12

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060831

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060831

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20060831

Year of fee payment: 13

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20070430

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20071031

Year of fee payment: 14

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060831

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20071116

Year of fee payment: 14

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20080824

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090303

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070824

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20080824