EP0660337A3 - Metalloxid-Dünnschichtwiderstand und Herstellungsverfahren. - Google Patents

Metalloxid-Dünnschichtwiderstand und Herstellungsverfahren. Download PDF

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Publication number
EP0660337A3
EP0660337A3 EP94120409A EP94120409A EP0660337A3 EP 0660337 A3 EP0660337 A3 EP 0660337A3 EP 94120409 A EP94120409 A EP 94120409A EP 94120409 A EP94120409 A EP 94120409A EP 0660337 A3 EP0660337 A3 EP 0660337A3
Authority
EP
European Patent Office
Prior art keywords
thin film
metal oxide
manufacturing process
oxide thin
film resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP94120409A
Other languages
English (en)
French (fr)
Other versions
EP0660337A2 (de
Inventor
Akiyoshi Hattori
Yoshihiro Hori
Akihiko Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of EP0660337A2 publication Critical patent/EP0660337A2/de
Publication of EP0660337A3 publication Critical patent/EP0660337A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/10—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material voltage responsive, i.e. varistors
    • H01C7/105—Varistor cores
    • H01C7/108—Metal oxide
    • H01C7/112—ZnO type

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
EP94120409A 1993-12-24 1994-12-22 Metalloxid-Dünnschichtwiderstand und Herstellungsverfahren. Withdrawn EP0660337A3 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP326588/93 1993-12-24
JP32658893 1993-12-24
JP2020994 1994-02-17
JP20209/94 1994-02-17

Publications (2)

Publication Number Publication Date
EP0660337A2 EP0660337A2 (de) 1995-06-28
EP0660337A3 true EP0660337A3 (de) 1995-11-08

Family

ID=26357116

Family Applications (1)

Application Number Title Priority Date Filing Date
EP94120409A Withdrawn EP0660337A3 (de) 1993-12-24 1994-12-22 Metalloxid-Dünnschichtwiderstand und Herstellungsverfahren.

Country Status (1)

Country Link
EP (1) EP0660337A3 (de)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3612620C1 (en) * 1986-04-15 1987-07-02 Swf Auto Electric Gmbh Circuit arrangement with a drive motor
FR2670200A1 (fr) * 1990-12-06 1992-06-12 Saint Gobain Vitrage Int Procede de formation d'une couche semi-conductrice d'oxyde de zinc dope a l'aluminium sur du verre, vitrage ainsi obtenu.
JPH04201251A (ja) * 1990-11-29 1992-07-22 Matsushita Electric Ind Co Ltd セラミックス―金属積層体
JPH05262524A (ja) * 1992-03-19 1993-10-12 Idemitsu Kosan Co Ltd 酸化亜鉛薄膜の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3612620C1 (en) * 1986-04-15 1987-07-02 Swf Auto Electric Gmbh Circuit arrangement with a drive motor
JPH04201251A (ja) * 1990-11-29 1992-07-22 Matsushita Electric Ind Co Ltd セラミックス―金属積層体
FR2670200A1 (fr) * 1990-12-06 1992-06-12 Saint Gobain Vitrage Int Procede de formation d'une couche semi-conductrice d'oxyde de zinc dope a l'aluminium sur du verre, vitrage ainsi obtenu.
JPH05262524A (ja) * 1992-03-19 1993-10-12 Idemitsu Kosan Co Ltd 酸化亜鉛薄膜の製造方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Section Ch Week 9345, Derwent World Patents Index; Class E32, AN 93-357028 *
PATENT ABSTRACTS OF JAPAN vol. 016, no. 534 (M - 1334) 4 November 1992 (1992-11-04) *

Also Published As

Publication number Publication date
EP0660337A2 (de) 1995-06-28

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