EP0766068A3 - Optische Vorrichtung zum Messen physikalischer Grössen - Google Patents

Optische Vorrichtung zum Messen physikalischer Grössen Download PDF

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Publication number
EP0766068A3
EP0766068A3 EP96106812A EP96106812A EP0766068A3 EP 0766068 A3 EP0766068 A3 EP 0766068A3 EP 96106812 A EP96106812 A EP 96106812A EP 96106812 A EP96106812 A EP 96106812A EP 0766068 A3 EP0766068 A3 EP 0766068A3
Authority
EP
European Patent Office
Prior art keywords
grating
measuring
optical device
radiation
physical quantities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96106812A
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English (en)
French (fr)
Other versions
EP0766068A2 (de
Inventor
Pawel Ing. Drabarek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP0766068A2 publication Critical patent/EP0766068A2/de
Publication of EP0766068A3 publication Critical patent/EP0766068A3/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Optical Transform (AREA)

Abstract

Die Erfindung bezieht sich auf eine optische Vorrichtung zum Messen physikalischer Größen, bei der in einer optischen Strecke eine erste beugende Gitterstruktur und nachfolgend ein zumindest teilweise längs eines Kreisrings verlaufendes Meßgitter angeordnet sind, dessen gebeugte Strahlung mittels Strahlungssensoren erfaßt und zum Bereitstellen eines Meßergebnisses in Form elektrischer Signale zu einer Auswerte-Anordnung weitergegeben wird. Eine zuverlässige und genaue Messung der physikalischen Größen wird dadurch unterstützt, daß die erste Gitterstruktur als mindestens ein Korrekturgitter ausgebildet ist, mit dem eine durch die Geometrie des Meßgitters verzerrte Wellenfront derart vorkorrigiert wird, daß die vom Meßgitter gebeugte Strahlung ebene und parallele Wellenfront besitzt.
EP96106812A 1995-09-28 1996-04-30 Optische Vorrichtung zum Messen physikalischer Grössen Withdrawn EP0766068A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1995136141 DE19536141A1 (de) 1995-09-28 1995-09-28 Optische Vorrichtung zum Messen physikalischer Größen
DE19536141 1995-09-28

Publications (2)

Publication Number Publication Date
EP0766068A2 EP0766068A2 (de) 1997-04-02
EP0766068A3 true EP0766068A3 (de) 1998-11-18

Family

ID=7773458

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96106812A Withdrawn EP0766068A3 (de) 1995-09-28 1996-04-30 Optische Vorrichtung zum Messen physikalischer Grössen

Country Status (2)

Country Link
EP (1) EP0766068A3 (de)
DE (1) DE19536141A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110132550B (zh) * 2019-05-16 2020-08-18 清华大学 平面光栅标定系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0453778A2 (de) * 1990-04-27 1991-10-30 Dr. Johannes Heidenhain GmbH Winkelmesseinrichtung
DE4318129A1 (de) * 1993-06-01 1994-12-08 Bosch Gmbh Robert Vorrichtung zur Messung einer Bewegung zwischen zwei Teilen
US5442172A (en) * 1994-05-27 1995-08-15 International Business Machines Corporation Wavefront reconstruction optics for use in a disk drive position measurement system
WO1995033179A1 (en) * 1994-05-27 1995-12-07 Microe, Inc. Apparatus for detecting relative movement

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0453778A2 (de) * 1990-04-27 1991-10-30 Dr. Johannes Heidenhain GmbH Winkelmesseinrichtung
DE4318129A1 (de) * 1993-06-01 1994-12-08 Bosch Gmbh Robert Vorrichtung zur Messung einer Bewegung zwischen zwei Teilen
US5442172A (en) * 1994-05-27 1995-08-15 International Business Machines Corporation Wavefront reconstruction optics for use in a disk drive position measurement system
WO1995033179A1 (en) * 1994-05-27 1995-12-07 Microe, Inc. Apparatus for detecting relative movement

Also Published As

Publication number Publication date
DE19536141A1 (de) 1997-04-03
EP0766068A2 (de) 1997-04-02

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