EP0821077A3 - Objet revêtu d'une couche de carbone et procédé pour sa production - Google Patents

Objet revêtu d'une couche de carbone et procédé pour sa production Download PDF

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Publication number
EP0821077A3
EP0821077A3 EP97110500A EP97110500A EP0821077A3 EP 0821077 A3 EP0821077 A3 EP 0821077A3 EP 97110500 A EP97110500 A EP 97110500A EP 97110500 A EP97110500 A EP 97110500A EP 0821077 A3 EP0821077 A3 EP 0821077A3
Authority
EP
European Patent Office
Prior art keywords
carbon film
contact
manufacturing
same
well
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97110500A
Other languages
German (de)
English (en)
Other versions
EP0821077A2 (fr
Inventor
Takahiro C/O Nissin Elec. Co. Ltd. Nakahigashi
Akira c/o Nissin Elec. Co. Ltd. Doi
Yoshihiro c/o Nissin Elec Co. Ltd. Izumi
Hajime c/o Nissin Elec. Co. Ltd. Kuwahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP16702796A external-priority patent/JP3374661B2/ja
Priority claimed from JP20291796A external-priority patent/JP3861332B2/ja
Priority claimed from JP20291696A external-priority patent/JP3637687B2/ja
Priority claimed from JP22745696A external-priority patent/JP3791060B2/ja
Priority claimed from JP22113396A external-priority patent/JP3355950B2/ja
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to EP03012938A priority Critical patent/EP1340835B1/fr
Publication of EP0821077A2 publication Critical patent/EP0821077A2/fr
Publication of EP0821077A3 publication Critical patent/EP0821077A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y10S427/104—Utilizing low energy electromagnetic radiation, e.g. microwave, radio wave, IR, UV, visible, actinic laser

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
EP97110500A 1996-06-27 1997-06-26 Objet revêtu d'une couche de carbone et procédé pour sa production Withdrawn EP0821077A3 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP03012938A EP1340835B1 (fr) 1996-06-27 1997-06-26 Objet revêtu d'une couche de carbone et procédé pour sa production

Applications Claiming Priority (15)

Application Number Priority Date Filing Date Title
JP167027/96 1996-06-27
JP16702796A JP3374661B2 (ja) 1996-06-27 1996-06-27 画像形成装置回転部品及びその製造方法
JP16702796 1996-06-27
JP20291796A JP3861332B2 (ja) 1996-07-13 1996-07-13 自転車用部品及びその製造方法
JP202916/96 1996-07-13
JP202917/96 1996-07-13
JP20291796 1996-07-13
JP20291696 1996-07-13
JP20291696A JP3637687B2 (ja) 1996-07-13 1996-07-13 自動車用ダイヤフラムの製造方法
JP227456/96 1996-08-08
JP22745696 1996-08-08
JP22745696A JP3791060B2 (ja) 1996-08-08 1996-08-08 ゴム・樹脂にダイヤモンド状炭素膜を形成する方法
JP22113396 1996-08-22
JP22113396A JP3355950B2 (ja) 1996-08-22 1996-08-22 機械部品及びその製造方法
JP221133/96 1996-08-22

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP03012938A Division EP1340835B1 (fr) 1996-06-27 1997-06-26 Objet revêtu d'une couche de carbone et procédé pour sa production

Publications (2)

Publication Number Publication Date
EP0821077A2 EP0821077A2 (fr) 1998-01-28
EP0821077A3 true EP0821077A3 (fr) 2000-09-06

Family

ID=27528418

Family Applications (2)

Application Number Title Priority Date Filing Date
EP97110500A Withdrawn EP0821077A3 (fr) 1996-06-27 1997-06-26 Objet revêtu d'une couche de carbone et procédé pour sa production
EP03012938A Expired - Lifetime EP1340835B1 (fr) 1996-06-27 1997-06-26 Objet revêtu d'une couche de carbone et procédé pour sa production

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP03012938A Expired - Lifetime EP1340835B1 (fr) 1996-06-27 1997-06-26 Objet revêtu d'une couche de carbone et procédé pour sa production

Country Status (4)

Country Link
US (1) US6136386A (fr)
EP (2) EP0821077A3 (fr)
CA (1) CA2208718C (fr)
DE (1) DE69736790T2 (fr)

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CN116947398B (zh) * 2023-09-14 2023-11-24 成都源盟石油科技有限公司 一种树脂水泥浆体及其制备方法
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DE69736790D1 (de) 2006-11-16
CA2208718A1 (fr) 1997-12-27
EP0821077A2 (fr) 1998-01-28
EP1340835A3 (fr) 2003-11-26
EP1340835B1 (fr) 2006-10-04
EP1340835A2 (fr) 2003-09-03
DE69736790T2 (de) 2007-08-16
US6136386A (en) 2000-10-24

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