EP0855517A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP0855517A2
EP0855517A2 EP98100372A EP98100372A EP0855517A2 EP 0855517 A2 EP0855517 A2 EP 0855517A2 EP 98100372 A EP98100372 A EP 98100372A EP 98100372 A EP98100372 A EP 98100372A EP 0855517 A2 EP0855517 A2 EP 0855517A2
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
area
pump according
areas
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98100372A
Other languages
German (de)
English (en)
Other versions
EP0855517A3 (fr
EP0855517B1 (fr
Inventor
Kurt Hölss
Heinrich Lotz
Matthias. Mädler
Heinz Reichert
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7818235&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0855517(A2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP0855517A2 publication Critical patent/EP0855517A2/fr
Publication of EP0855517A3 publication Critical patent/EP0855517A3/fr
Application granted granted Critical
Publication of EP0855517B1 publication Critical patent/EP0855517B1/fr
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Definitions

  • the invention relates to a vacuum pump, for example of the turbomolecular pump type or a molecular pump or a combination of both Types in the following also called friction pump according to the generic term of first claim.
  • Such vacuum pumps usually consist of a number of stages, which can be designed differently and each rotor and corresponding Have stator parts. These pump-active parts are in axial Directed by the gas to be pumped. For optimal pump properties how to achieve maximum gas flow and maximum compression, the rotating parts must rotate at high speed. The one about this Purpose required drive energy is only partially converted into kinetic energy. A large part of it is released as heat loss. More unwanted Amounts of heat are released through storage (mechanical losses due to friction in ball bearings or electrical losses in magnetic bearings) or at the compression of gases. These heat sources lead to disturbing increases in temperature in the drive and bearing area and in areas of the pump active Components in which they can have adverse effects. In extreme cases the rotor may start and the pump may be destroyed. Around To avoid overheating of critical components, these pumps are included Cooling facilities equipped.
  • Friction pumps of the type described are increasingly being used Processes such as in chemical processes or in semiconductor manufacturing which generate large amounts of easily condensable gases. In doing so the recipient was evacuated to the ultra high vacuum area. The gases to be extracted are from this area to a printing area in which laminar Current prevails, compressed. That means higher in this area Pressure relatively large amounts of gas are promoted. Then if these gases are easily condensable, which is even more the case at low temperatures, liquid or solid deposits occur to a considerable extent. This can cause corrosion and etching processes which can lead to the destruction of individual components or the entire pump. Due to the deposition of solid lines, especially the very narrow ones Column in the field of molecular pumps narrowed even more, what with a Decrease in performance or in the worst case with the destruction of the pump connected is.
  • vacuum pumps of the type described above which e.g. used in chemical processes or in semiconductor manufacturing and should be functional in a further printing area, of two conflicting, if not mutually exclusive claims certainly.
  • EP O 352 688 is used to prevent heat transfer from one heated part on a cooled part a thermal impedance element as an additional Component between the cooled and the heated part attached. This brings the disadvantage of larger external dimensions. There are also additional Seals and fasteners necessary, which are critical components represent and complicate the structure. These disadvantages multiply when the thermal separation of several areas of the pump is carried out shall be.
  • the invention has set itself the task, one in a wide pressure range introduce usable vacuum pump of the type of a friction pump, at which largely excludes liquid and solid deposits become and at the same time overheating from higher temperatures sensitive components is avoided.
  • the outer dimensions should maintain the pump and avoid additional critical components.
  • Claims 2 to 10 represent further embodiments of the invention.
  • the three areas are thermally decoupled by the contact areas between them can be minimized by radial and axial free rotations. Those contact areas that are still necessary for structural reasons are largely formed by heat-insulating materials.
  • the high vacuum range can be independent of the fore vacuum range and the engine and bearing area are thermally treated, i.e. controlled, be cooled or heated up, as is the case of the respective application and that require the respective stage of the application process. The same applies to the Forevacuum range. For example, here, where by the increased pressure Liquid and solid deposits are favored by targeted Avoid increasing the temperature.
  • the heat, which in the engine and Storage area arises due to operation, is largely removed by cooling, and an uncontrolled or unwanted transition from heat to the other components are avoided.
  • the vacuum pump is divided into three areas: high vacuum area 1, the forevacuum area 2 and the drive and storage area 3
  • the high vacuum region 1 is in the example shown here as a turbomolecular pump formed with rotor and stator disks 9, 10 and with a gas inlet 13 provided.
  • the fore-vacuum region 2 has, for example, a molecular pump of the type of a Holweck pump. This consists of rotating cylinder parts 11 and a stator 12 with spiral grooves.
  • the gas outlet is designated with 14.
  • the drive and storage area 3 essentially houses a drive motor 4 for the shaft 8 on which the rotating components of the High vacuum area and the fore vacuum area are located as well as storage facilities for the shaft 8, in the present example from an axial and a radial magnetic bearings 5 and 6.
  • Another radial passive magnetic bearing 7 is in High vacuum area 1 arranged. Will be whole or instead of magnetic bearings some other storage types, e.g. Ball bearing used, then this changes on Essence of the invention nothing.
  • radial and axial free rotations 15 are between the high vacuum area 1 and the fore vacuum area 2 radial and axial free rotations 15 for the purpose of thermal insulation available. Radial and axial free rotations 16 are also between the Forevacuum area 2 and the drive and bearing area 3 are provided.
  • the High vacuum area 1 can be moved from the drive and storage area 3, e.g. by Free rotations 17, which are located in the shaft 8, are thermally insulated. In places where there are no free spins for structural reasons possible and contact surfaces cannot be avoided, these can be achieved through materials be formed with low heat conduction.
  • the high vacuum area 1 and the drive and storage area 3 can be replaced by inserts made from poorly heat-conducting materials, e.g. in the wave at the point designated 20, are thermally decoupled from one another.
  • the high vacuum area With a cooling device 21 and a heater 23.
  • temperature sensors 25 the high vacuum area can be thermally monitored and the heating or cooling being controlled.
  • Rod-shaped heating elements are used to heat the fore-vacuum area 24 introduced radially from the outside into the housing.
  • temperature sensors 26 the forevacuum area can be thermally monitored and the heating elements be managed.
  • the engine and bearing area is equipped with a cooling device 22 Provide heat dissipation there.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Electrophonic Musical Instruments (AREA)
EP98100372A 1997-01-24 1998-01-12 Pompe à vide Revoked EP0855517B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19702456 1997-01-24
DE19702456A DE19702456B4 (de) 1997-01-24 1997-01-24 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP0855517A2 true EP0855517A2 (fr) 1998-07-29
EP0855517A3 EP0855517A3 (fr) 1999-07-07
EP0855517B1 EP0855517B1 (fr) 2003-10-08

Family

ID=7818235

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98100372A Revoked EP0855517B1 (fr) 1997-01-24 1998-01-12 Pompe à vide

Country Status (4)

Country Link
EP (1) EP0855517B1 (fr)
JP (1) JP4235273B2 (fr)
AT (1) ATE251722T1 (fr)
DE (2) DE19702456B4 (fr)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1236906A1 (fr) * 2001-02-16 2002-09-04 Pfeiffer Vacuum GmbH Pompe à vide
EP1178217A3 (fr) * 2000-07-31 2003-01-02 Seiko Instruments Inc. Pompe à vide
EP1344940A1 (fr) * 2002-03-13 2003-09-17 BOC Edwards Technologies, Limited Pompe à vide
EP1288502A3 (fr) * 2001-08-30 2003-10-29 Pfeiffer Vacuum GmbH Pompe à vide turbo-moléculaire
EP2846044A1 (fr) * 2013-09-04 2015-03-11 Pfeiffer Vacuum GmbH Pompe à vide et système doté d'une pompe à vide
WO2015043962A1 (fr) * 2013-09-24 2015-04-02 Oerlikon Leybold Vacuum Gmbh Pompe à vide
CN105358835A (zh) * 2013-07-31 2016-02-24 埃地沃兹日本有限公司 真空泵
US9745989B2 (en) 2012-09-24 2017-08-29 Shimadzu Corporation Turbo-molecular pump
EP2589814B1 (fr) 2010-07-02 2018-12-26 Edwards Japan Limited Pompe à vide
CN114555951A (zh) * 2019-11-05 2022-05-27 埃地沃兹日本有限公司 真空泵

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002115692A (ja) * 2000-10-04 2002-04-19 Osaka Vacuum Ltd 複合真空ポンプ
JP2010025122A (ja) * 2003-02-18 2010-02-04 Osaka Vacuum Ltd 分子ポンプの断熱構造
JP2004270692A (ja) * 2003-02-18 2004-09-30 Osaka Vacuum Ltd 分子ポンプの断熱構造
JP4243996B2 (ja) * 2003-08-21 2009-03-25 株式会社荏原製作所 ターボ真空ポンプおよび該ターボ真空ポンプを備えた半導体製造装置
JP4916655B2 (ja) * 2004-11-17 2012-04-18 株式会社島津製作所 真空ポンプ
JP5104288B2 (ja) * 2007-12-25 2012-12-19 富士通セミコンダクター株式会社 真空ポンプ、半導体装置の製造装置及び半導体装置の製造方法
JP5486184B2 (ja) * 2008-12-10 2014-05-07 エドワーズ株式会社 真空ポンプ
JP2014029129A (ja) * 2012-07-31 2014-02-13 Edwards Kk 真空ポンプ
JP6484919B2 (ja) * 2013-09-24 2019-03-20 株式会社島津製作所 ターボ分子ポンプ
JP6375631B2 (ja) * 2014-02-05 2018-08-22 株式会社島津製作所 ターボ分子ポンプ
JP6287475B2 (ja) * 2014-03-28 2018-03-07 株式会社島津製作所 真空ポンプ
JP6776971B2 (ja) 2017-03-27 2020-10-28 株式会社島津製作所 真空ポンプおよびポンプ一体型の電源装置
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
JP7048391B2 (ja) 2018-03-30 2022-04-05 エドワーズ株式会社 真空ポンプ
JP7566540B2 (ja) 2020-09-10 2024-10-15 エドワーズ株式会社 真空ポンプ
JP7555870B2 (ja) 2021-03-29 2024-09-25 株式会社荏原製作所 真空ポンプ装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE619944A (fr) * 1961-08-04 1963-01-09 Snecma Pompe à vide turbomoleculaire perfectionnée
DE2757599A1 (de) * 1977-12-23 1979-06-28 Kernforschungsz Karlsruhe Turbo-molekularpumpe
DE3508483A1 (de) * 1985-03-09 1986-10-23 Leybold-Heraeus GmbH, 5000 Köln Gehaeuse fuer eine turbomolekularvakuumpumpe
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
JP3616639B2 (ja) * 1992-06-19 2005-02-02 ウナクシス ドイチュラント ホールディング ゲゼルシャフト ミット ベシュレンクテル ハフツング 気体摩擦真空ポンプ
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1178217A3 (fr) * 2000-07-31 2003-01-02 Seiko Instruments Inc. Pompe à vide
US6629824B2 (en) 2000-07-31 2003-10-07 Seiko Instruments Inc. Vacuum pump
EP1236906A1 (fr) * 2001-02-16 2002-09-04 Pfeiffer Vacuum GmbH Pompe à vide
EP1288502A3 (fr) * 2001-08-30 2003-10-29 Pfeiffer Vacuum GmbH Pompe à vide turbo-moléculaire
US6824357B2 (en) 2001-08-30 2004-11-30 Pfeiffer Vacuum Gmbh Turbomolecular pump
EP1344940A1 (fr) * 2002-03-13 2003-09-17 BOC Edwards Technologies, Limited Pompe à vide
EP2589814B1 (fr) 2010-07-02 2018-12-26 Edwards Japan Limited Pompe à vide
US9745989B2 (en) 2012-09-24 2017-08-29 Shimadzu Corporation Turbo-molecular pump
CN105358835A (zh) * 2013-07-31 2016-02-24 埃地沃兹日本有限公司 真空泵
US20160160877A1 (en) * 2013-07-31 2016-06-09 Edwards Japan Limited Vacuum Pump
EP3029328A4 (fr) * 2013-07-31 2017-03-22 Edwards Japan Limited Pompe à vide
US10954962B2 (en) * 2013-07-31 2021-03-23 Edwards Japan Limited Vacuum pump
EP2846044A1 (fr) * 2013-09-04 2015-03-11 Pfeiffer Vacuum GmbH Pompe à vide et système doté d'une pompe à vide
WO2015043962A1 (fr) * 2013-09-24 2015-04-02 Oerlikon Leybold Vacuum Gmbh Pompe à vide
US10221864B2 (en) 2013-09-24 2019-03-05 Leybold Gmbh Vacuum pump
CN114555951A (zh) * 2019-11-05 2022-05-27 埃地沃兹日本有限公司 真空泵

Also Published As

Publication number Publication date
EP0855517A3 (fr) 1999-07-07
JP4235273B2 (ja) 2009-03-11
EP0855517B1 (fr) 2003-10-08
ATE251722T1 (de) 2003-10-15
JPH10205486A (ja) 1998-08-04
DE19702456A1 (de) 1998-07-30
DE59809829D1 (de) 2003-11-13
DE19702456B4 (de) 2006-01-19

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