EP0874159A2 - Pompe à vide à friction avec étage du type à canal de Gaede - Google Patents

Pompe à vide à friction avec étage du type à canal de Gaede Download PDF

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Publication number
EP0874159A2
EP0874159A2 EP98110191A EP98110191A EP0874159A2 EP 0874159 A2 EP0874159 A2 EP 0874159A2 EP 98110191 A EP98110191 A EP 98110191A EP 98110191 A EP98110191 A EP 98110191A EP 0874159 A2 EP0874159 A2 EP 0874159A2
Authority
EP
European Patent Office
Prior art keywords
section
pump
rotor
groove
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP98110191A
Other languages
German (de)
English (en)
Other versions
EP0874159A3 (fr
Inventor
Günter Schütz
Heinrich Engländer
Friedrich Karl Dr. Von Schulz-Hausmann
Hinrich Dr. Henning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP0874159A2 publication Critical patent/EP0874159A2/fr
Publication of EP0874159A3 publication Critical patent/EP0874159A3/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Definitions

  • the invention relates to a friction pump the features of the preamble of claim 1.
  • friction vacuum pumps include Gaede pumps (Rotating cylinder with pump gap in a housing and blocking gap between inlet and outlet), Holweck pumps (rotating in a housing Cylinder with helical, stator or rotor side arranged grooves), Siegbahn pumps (rotating and standing ring disks with spiral grooves) and turbomolecular pumps with rotor and guide vanes are equipped.
  • Friction pumps are known with differently designed pump sections equip.
  • the present invention is based on the object a friction vacuum pump with a simple Gaeda pump stage equip that in the area of transition between Molecular flow and viscous flow have good pumping properties Has.
  • Gaede pump stage can be combined with a Siegbahn stage is so that a compact pump stage with optimal pumping properties can be realized.
  • an in This type of vacuum pump can be a relative high backing pressure (greater than 10 mbar) are generated, making pumps of this type with small and inexpensive Backing pumps can be operated.
  • the embodiment according to FIG. 1 is a Friction vacuum pump 1, the housing of which is designated 2. Of the includes upper, cylindrical housing section 3 and centers the stator 4, which has a plurality of stator rings 5, 6 and 7.
  • the rotor 8 is supported on the bearings 9 and Pump shaft 10 in the pump housing 2.
  • the drive motor is with Designated 11.
  • the Inlet flange 12 a recipient to be evacuated connected.
  • the gases become the outlet 13 promoted to which a backing pump is connected.
  • the embodiment according to FIG. 1 is 3 in total Pump sections equipped.
  • the high vacuum pump section consists of turbomolecular pump stages.
  • the stator rings 5 each carry the inward stator blades 14, which are associated with rotor blades 15 attached to the rotor 8.
  • the second pump section has Siegbahn pump stages. This comprise rotating ring disks 16 fastened to the rotor 8, whose surfaces are flat. Between the rotor ring disks 16 are the stator ring washers 17.
  • the stator rings 6 wear the stator washers 17; they are preferably in one piece educated.
  • the stator washers 17 are on the end face with spiral projections 18 and corresponding grooves 19 equipped (see FIG. 2).
  • the spiral shape is each chosen so that a continuous gas flow from Inlet 12 to outlet 13 is secured, i.e. that at embodiment shown the above a stator washer 6 pump active areas of the Siegbahnhaven the gases from the outside in and those below one Stator ring 6 located pump active areas of the Siegbahnhaven convey the gases from the inside out.
  • There are three spiral grooves or projections are provided, which each extend over approximately 360 °.
  • the number, depth, The width and slope of the spirals determine the pump properties of the pump section consisting of Siegbahn stages.
  • the first Siegbahn stage following the turbomolecular pump stages the gases from the outside in.
  • the stator washer 17 rotor ring disk 16 upstream of the first Siegbahn stage has one smaller diameter than the other rotor ring disks 16 and bears on its circumference in relation to the other rotor blades 15 Shortened blades 27. This is as trouble-free as possible Transition between the different pump sections guaranteed.
  • the first Siegbahnlope If gases are to be conveyed from the inside out, one can do this accordingly designed first stator washer 17 with compared to the rest Disks with an enlarged inner diameter may be provided the inside carries shortened stator blades.
  • high vacuum or initially a turbomolecular pump section on the inlet side followed by a Siegbahn pump section.
  • the pre-vacuum side that follows the Siegbahn pump section Pump stage is like a side channel pump educated. To do this, they face each other radially extending surfaces of the last rotor ring disk 28 (Fig. 5) and the last stator washer 29 (Fig. 6) in cross section essentially semicircular, facing each other circular grooves 31, 32 are provided.
  • the arranged on the suction side rotating groove 31 is with a plurality of crosspieces 33 equipped.
  • the fixed groove 32 arranged on the pressure side has an inlet 34 and an inlet with respect to the extracted gases Outlet 35.
  • Its inlet 34 is a radially outwardly extending one Groove section that through the peripheral pumping gap gases flowing between the annular disc 27 and the stator 4 records.
  • the outlet 35 is substantially axial extending bore, which the groove 32 with the fore-vacuum space connects. Inlet 34 and outlet 35 are immediately adjacent and are separated from one another by a web 36 Avoid backflow. A division of the groove 32 into two or more groove sections, each with an inlet 34 and one Outlet 35 is possible.
  • the exemplary embodiment according to FIGS. 7 and 8 is based the shaft 10 via its bearings 9 initially on the inside a sleeve-shaped carrier 41.
  • the top end of the carrier 41 is equipped with a collar 42.
  • the lower end of the The carrier projects into a recess 43 in a housing component 44 into it, which has only a slightly larger diameter than the outer diameter of the carrier 41.
  • An O-ring 45 between the carrier 41 and the inside of the recess 43 secures the central position of the carrier 41.
  • To support the carrier 41 in the housing 2 are three substantially axially extending Bars 46 are provided on the collar 42 and on the housing component 44 are attached.
  • the O-ring 45 acts Vibrations of this type as a damping element. This allows the pumping gaps between the active pumping surfaces, in particular between the stator and rotor ring disks of the Siegbahn stages, very small design and therefore a very good pump effect be achieved.
  • Fig. 9 shows an embodiment for a pump according to the Invention in which the rotor is on a fixed Pins 51 of the housing 2 supports and the drive motor 11 as External rotor motor is formed.
  • the bars 46 is the pin 51 at its upper end with a collar 52 equipped.
  • the sleeve-shaped carrier 41 has on its lower end an inward edge 53. Between Collar 52 and edge 53 extend the rods 46.
  • the Siegbahn pump section follows on the pressure side to a Holweck pump section that comes from the stator ring 55 with the helically shaped projections 56 and Outside of the cylindrical rotor section 57. This carries the motor rotor on the inside.
  • Gaeda pump section there is also a Gaeda pump section on.
  • This includes the stator ring 60 on the stator side with two circumferential webs 61, 62 which form the groove 63, and the correspondingly elongated rotor section on the rotor side 57.
  • the inlet to the Gaedepumpgen form an or several openings 64 (see also FIG. 10) in the upper web 61. These are located directly next to one or more fixed, in the groove 63 protruding projections 65 which with the Rotor 57 form the blocking gap 66.
  • the outlet opening (s) 67 are located in the lower web 62 and open into the fore-vacuum space the pump 1.
  • the groove 63 divided into two sections. There are two in parallel mutually arranged gate pump stages are provided. You point in each case the inlet opening 64 and the outlet openings 67 and each extend over approximately 180 °.
  • the arrow 68 indicates the direction of rotation of the rotor 57.
  • the groove is 63 no longer designed in a ring shape.
  • Groove depth or groove width
  • Fig. 11 decreasing
  • Fig. 12 constantly changing
  • the desired pressure build-up is thereby achieved.
  • several chambers 69 are present, in which a relatively slow pressure build-up in succession and relatively rapid expansion is taking place. The pressure increases from chamber to chamber.
  • Figures 13 to 18 show embodiments for Siegbahnhaven, which are combined with gaed stages.
  • the outside diameter of the rotating ring disks 17 are selected in such a way that between its periphery and that surrounding it Stator 4 each have an outer annular space 71, 72.
  • the inner diameter of the stator washers 16 chosen such that an inner annular space 73, 74 is present is.
  • Figure 13 which is a plan view of a Stator ring disk with two spiral grooves 19 shows is can be seen that stationary in the annular spaces 71, 72 Projections 75, 76 and 77, 78 are located together with the Outer circumference of the rotor ring disks 16 or the rotating one Central part (e.g. rotor 8 or shaft 10) locking gaps 79, 80 form.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP98110191A 1993-05-03 1994-03-31 Pompe à vide à friction avec étage du type à canal de Gaede Withdrawn EP0874159A3 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4314418 1993-05-03
DE4314418A DE4314418A1 (de) 1993-05-03 1993-05-03 Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
EP94913098A EP0697069B1 (fr) 1993-05-03 1994-03-31 Pompe a vide rotative a friction comportant des sections de conception differente

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP94913098A Division EP0697069B1 (fr) 1993-05-03 1994-03-31 Pompe a vide rotative a friction comportant des sections de conception differente

Publications (2)

Publication Number Publication Date
EP0874159A2 true EP0874159A2 (fr) 1998-10-28
EP0874159A3 EP0874159A3 (fr) 1998-11-18

Family

ID=6486923

Family Applications (2)

Application Number Title Priority Date Filing Date
EP98110191A Withdrawn EP0874159A3 (fr) 1993-05-03 1994-03-31 Pompe à vide à friction avec étage du type à canal de Gaede
EP94913098A Expired - Lifetime EP0697069B1 (fr) 1993-05-03 1994-03-31 Pompe a vide rotative a friction comportant des sections de conception differente

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP94913098A Expired - Lifetime EP0697069B1 (fr) 1993-05-03 1994-03-31 Pompe a vide rotative a friction comportant des sections de conception differente

Country Status (5)

Country Link
US (1) US5695316A (fr)
EP (2) EP0874159A3 (fr)
JP (1) JPH08511071A (fr)
DE (2) DE4314418A1 (fr)
WO (1) WO1994025760A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1081387A3 (fr) * 1999-09-06 2002-04-17 Pfeiffer Vacuum GmbH Pompe à vide
EP1201929A3 (fr) * 2000-10-31 2003-04-23 Seiko Instruments Inc. Pompe à vide
WO2008035112A1 (fr) * 2006-09-22 2008-03-27 Edwards Limited Mécanisme de pompage moléculaire
GB2589151A (en) * 2019-11-25 2021-05-26 Edwards Ltd Molecular drag vacuum pump

Families Citing this family (54)

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GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
US5496149A (en) * 1995-03-10 1996-03-05 Basf Corporation Thin plate turbine
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
IT1281025B1 (it) * 1995-11-10 1998-02-11 Varian Spa Pompa turbomolecolare.
DE19632874A1 (de) * 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Reibungsvakuumpumpe
JP4520636B2 (ja) * 1998-05-26 2010-08-11 ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング シャシ、ロータ及びケーシングを有する摩擦真空ポンプ並びにこの形式の摩擦真空ポンプを備えた装置
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
JP3788558B2 (ja) 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
US6220824B1 (en) * 1999-06-21 2001-04-24 Varian, Inc. Self-propelled vacuum pump
ES2219956T3 (es) * 1999-07-19 2004-12-01 Sterling Fluid Systems (Germany) Gmbh Maquina volumetrica para medios comprimibles.
SG97943A1 (en) * 1999-10-04 2003-08-20 Ebara Corp Vacuum exhaust system
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
US6394747B1 (en) 2000-06-21 2002-05-28 Varian, Inc. Molecular drag vacuum pumps
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
DE10046766A1 (de) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe
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GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
DE10357546A1 (de) * 2003-12-10 2005-07-07 Pfeiffer Vacuum Gmbh Seitenkanalpumpstufe
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US20080056886A1 (en) * 2006-08-31 2008-03-06 Varian, S.P.A. Vacuum pumps with improved pumping channel cross sections
US7628577B2 (en) * 2006-08-31 2009-12-08 Varian, S.P.A. Vacuum pumps with improved pumping channel configurations
DE102006043327A1 (de) * 2006-09-15 2008-03-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP4885000B2 (ja) * 2007-02-13 2012-02-29 株式会社ニューフレアテクノロジー 気相成長装置および気相成長方法
JP5056152B2 (ja) * 2007-05-15 2012-10-24 株式会社島津製作所 ターボ分子ポンプ
DE102008004297A1 (de) * 2008-01-15 2009-07-16 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
EP2108844A3 (fr) * 2008-03-26 2013-09-18 Ebara Corporation Pompe à vide turbomoléculaire
EP2105615A3 (fr) * 2008-03-26 2013-09-25 Ebara Corporation Pompe à vide turbomoléculaire
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
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JP2010174779A (ja) * 2009-01-30 2010-08-12 Hitachi High-Technologies Corp 真空処理装置
JP5397138B2 (ja) * 2009-10-02 2014-01-22 株式会社島津製作所 ターボ分子ポンプ
GB2474507B (en) * 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
JP5758303B2 (ja) * 2009-12-11 2015-08-05 エドワーズ株式会社 ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ
WO2013065440A1 (fr) * 2011-10-31 2013-05-10 エドワーズ株式会社 Élément fixe et pompe à vide
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
JP6353195B2 (ja) 2013-05-09 2018-07-04 エドワーズ株式会社 固定円板および真空ポンプ
DE102013213815A1 (de) * 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102013214662A1 (de) 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6616560B2 (ja) * 2013-11-28 2019-12-04 エドワーズ株式会社 真空ポンプ用部品、および複合型真空ポンプ
JP6692635B2 (ja) * 2015-12-09 2020-05-13 エドワーズ株式会社 連結型ネジ溝スペーサ、および真空ポンプ
JP7108377B2 (ja) * 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
IT201700075054A1 (it) * 2017-07-04 2017-10-04 Agilent Tech Inc A Delaware Corporation Stadio di pompaggio molecolare per pompa da vuoto e pompa da vuoto comprendente detto stadio di pompaggio molecolare
GB2569314A (en) * 2017-12-12 2019-06-19 Edwards Ltd A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber
GB2575450B (en) * 2018-07-09 2022-01-26 Edwards Ltd A variable inlet conductance vacuum pump, vacuum pump arrangement and method
JP2020186687A (ja) * 2019-05-15 2020-11-19 エドワーズ株式会社 真空ポンプとそのネジ溝ポンプ部の固定部品
JP7348753B2 (ja) * 2019-05-31 2023-09-21 エドワーズ株式会社 真空ポンプ、および連結型ネジ溝スペーサ
JP7590851B2 (ja) * 2020-11-04 2024-11-27 エドワーズ株式会社 真空ポンプ
JP7672849B2 (ja) * 2021-03-17 2025-05-08 エドワーズ株式会社 真空ポンプ
JP7546621B2 (ja) * 2022-05-26 2024-09-06 エドワーズ株式会社 真空ポンプ及び真空排気システム
JP2025035506A (ja) * 2023-09-01 2025-03-13 エドワーズ株式会社 真空ポンプ、固定円板および後付け部品

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1081387A3 (fr) * 1999-09-06 2002-04-17 Pfeiffer Vacuum GmbH Pompe à vide
EP1201929A3 (fr) * 2000-10-31 2003-04-23 Seiko Instruments Inc. Pompe à vide
US6672827B2 (en) 2000-10-31 2004-01-06 Seiko Instruments Inc. Vacuum pump
WO2008035112A1 (fr) * 2006-09-22 2008-03-27 Edwards Limited Mécanisme de pompage moléculaire
US8662841B2 (en) 2006-09-22 2014-03-04 Edwards Limited Vacuum pump
EP2064448B2 (fr) † 2006-09-22 2021-03-24 Edwards Limited Pompe à vide
GB2589151A (en) * 2019-11-25 2021-05-26 Edwards Ltd Molecular drag vacuum pump

Also Published As

Publication number Publication date
WO1994025760A1 (fr) 1994-11-10
EP0697069B1 (fr) 2000-05-24
EP0874159A3 (fr) 1998-11-18
EP0697069A1 (fr) 1996-02-21
US5695316A (en) 1997-12-09
DE59409375D1 (de) 2000-06-29
JPH08511071A (ja) 1996-11-19
DE4314418A1 (de) 1994-11-10

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