EP0884475A2 - Pompe d'alimentation - Google Patents

Pompe d'alimentation Download PDF

Info

Publication number
EP0884475A2
EP0884475A2 EP98110233A EP98110233A EP0884475A2 EP 0884475 A2 EP0884475 A2 EP 0884475A2 EP 98110233 A EP98110233 A EP 98110233A EP 98110233 A EP98110233 A EP 98110233A EP 0884475 A2 EP0884475 A2 EP 0884475A2
Authority
EP
European Patent Office
Prior art keywords
feed pump
chambers
pump according
media
volume
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98110233A
Other languages
German (de)
English (en)
Other versions
EP0884475A3 (fr
EP0884475B1 (fr
Inventor
Norbert Schwesinger
Sascha Dipl.-Ing. Bechtel
Cornelius Dr. Schilling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ACCORIS GmbH
Bechtel Sascha Dipl-Ing
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP0884475A2 publication Critical patent/EP0884475A2/fr
Publication of EP0884475A3 publication Critical patent/EP0884475A3/fr
Application granted granted Critical
Publication of EP0884475B1 publication Critical patent/EP0884475B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Definitions

  • the present invention relates to a feed pump and the Application of a feed pump chamber as a valve according to the The preamble of claim 1 or 21.
  • Such a feed pump or such an application Delivery pump chamber as a valve are from EP 0 134 614 A1 known.
  • This document relates to a piezoelectric Micropump that has at least three chambers, one of which at least two through valves (see preamble of claim 22) and at least one is formed by a displacement element will. These chambers are activated by activation if necessary formed by piezoelectric actuators and they are then connected to each other by longer channels.
  • the delivery rate of this pump can only influenced by changing the chamber training frequency be, and it is necessary that the connection channels before vented when the pump is started.
  • valve action of the chambers it should be noted that the use of the piezoelectric actuators leads to that such a valve only occupy two positions can. In the first position, the chamber is formed and that Valve is open while the chamber is in the second position not trained and the valve is closed.
  • the invention is therefore based on the object, one To further develop the feed pump of the type mentioned at the beginning, that the conveying capacity in larger areas and more precisely can be set, and that ventilation of the pump before Start of operation can be omitted.
  • the object of the invention is the application to a feed pump chamber as a valve improve the valve in addition to its open and closed positions can also be brought into intermediate positions.
  • volume adjustment devices or (valve) adjustment devices instead of that known from the prior art piezoelectric actuators electromagnetic lifting elements or overpressure and / or underpressure generating devices used will.
  • overflow channels By using overflow channels, the big ones Volume of connecting channels avoided and venting the Feed pump before commissioning can in most cases omitted.
  • valve can be opened practically anywhere or be closed by the valve inlet or outlet correspondingly strong or by the elastically deformable element is covered to the appropriate extent, creating the desired Media (through) flow can be adjusted precisely. Of course is still (additionally) one only switching operating mode of the valve possible.
  • the medium to be delivered is the based on the conveying direction of the first chamber and overflow ducts connecting this via adjacent chambers up to the last in relation to the conveying direction Chamber forwarded in connection with the media outlet stands.
  • the transfer of the medium to be conveyed from chamber to chamber takes place by changing the chamber volume, or thereby that the fluidic resistance in the conveying direction is reduced and is enlarged in the opposite direction.
  • the Delivery direction of the feed pump can be reversed as desired, whereby the functions of the media inlet and the media outlet change accordingly.
  • This reversal of the conveying direction is preferably carried out exclusively by changing the order in which the Volume adjusters change the volume of the chambers.
  • the volume adjusters and especially the order the volume changes of the chambers achieved with these are preferably from any suitable rule and / or Control device coordinates, preferably at least Periodic operation is provided for individual periods is.
  • the feed pump is in the form of a micro feed pump this should at least be realized partially made of silicon, which is made with the processes known from semiconductor technology are processed can.
  • the feed pump according to the invention is based on the Drawings explained in more detail.
  • FIG. 1 is a very simplified example of the structure a feed pump according to the invention.
  • the illustrated Feed pump has three chambers 3, 4, 5 which are related the conveying direction R arranged essentially one behind the other are.
  • the volume of the chambers 3, 4, 5 can be adjusted using volume adjustment devices 15,16,17 changed or set become what is shown schematically by the dashed lines in Fig. 1 is indicated.
  • the first chamber 3 with respect to the conveying direction R has one Media inlet 1 through which the medium to be conveyed is the first Chamber 3 is supplied. There are two adjacent chambers via also schematically shown overflow channels 6.7 connectable.
  • the medium to be pumped is from the first chamber 3 to last chamber 5 forwarded via the overflow channels 6,7 leaving the chamber 5 via a media outlet 2.
  • the Forwarding of the medium to be conveyed from one chamber to next is achieved in that the volume of at least one of two adjacent chambers 3, 4, 5 using the volume adjustment device 15,16,17 is changed.
  • the volume adjustment devices 15, 16, 17 are electromagnetic Lifting elements and / or positive and / or negative pressure generating devices educated.
  • the change in chamber volume can occur in the chambers generate a positive or negative pressure, with the help of which to promoting medium ejected from the chamber or into the corresponding Chamber can be sucked.
  • the delivery direction R is also during operation of the delivery pump preferably reversible as desired, this reversal of the conveying direction R and the associated change in the functions of the Media inlet 1 and the media outlet 2 thereby achieved will change the order in which the volumes the chambers 3, 4, 5 through the volume adjustment devices 15, 16, 17 can be changed.
  • volume changes for example in such a way that, for example, at the beginning both chamber volumes are reduced to 0, after which the volume of the chamber 3 is enlarged until the desired amount of medium to be conveyed is located in chamber 3, after which simultaneous increase in the volume of the chamber 4 that Volume of the chamber 3 is reduced again, so that the medium reaches the chamber 4 via the overflow channel 6, from the it by reducing the volume of the chamber 4 again is expelled again.
  • the feed pump has a layered structure. How this from the exploded view in FIG. 2 is recognizable, there is the feed pump with respect to the representation from the top down from a silicon wafer 21, the one Media inlet 1 and a media outlet 2, a silicon wafer 14, the two to form the overflow channels 6.7 Breakthroughs 19.20 and media inlet and outlet has two other smaller openings, one elastic deformable material 13 in the form of a polymer film, a Silicon plate 18, which has openings 10, 11, 12 in the the polymer film 13 may extend to between the Silicon plate 14 and the polymer film 13, the chambers 3,4,5 to form, and an element 22 that the volume adjusters 15, 16, 17.
  • the volume adjustment devices in the form of positive and / or negative pressure generating devices 15,16,17 formed in the recesses 10,11,12 can create a negative pressure, whereby the corresponding sections of the polymer film 13 in these recesses 10,11,12 extend and thus between the silicon wafer 14 and the polymer film 13 form the chambers 3, 4, 5.
  • the overflow channels 6,7 are through the silicon plate 21 limited and arranged in the silicon wafer 14 Openings 19, 20 are formed, which are arranged in such a way that each of them has two adjacent breakthroughs 10, 11, 12 and thus overlaps two adjacent chambers 3, 4, 5.
  • the medium to be funded can supplied or discharged via flow diodes and / or flow restrictors to prevent undesired backflow of the medium prevent, in particular flow diodes preferably only be used in the event that any reversibility the conveying direction R is not desired or required.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
EP98110233A 1997-06-09 1998-06-04 Pompe a chambres multiples Expired - Lifetime EP0884475B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19724240 1997-06-09
DE19724240A DE19724240C2 (de) 1997-06-09 1997-06-09 Förderpumpe, insbesondere Mikroförderpumpe

Publications (3)

Publication Number Publication Date
EP0884475A2 true EP0884475A2 (fr) 1998-12-16
EP0884475A3 EP0884475A3 (fr) 2000-10-25
EP0884475B1 EP0884475B1 (fr) 2003-10-15

Family

ID=7831912

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98110233A Expired - Lifetime EP0884475B1 (fr) 1997-06-09 1998-06-04 Pompe a chambres multiples

Country Status (2)

Country Link
EP (1) EP0884475B1 (fr)
DE (2) DE19724240C2 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000039463A1 (fr) * 1998-12-23 2000-07-06 Battelle Memorial Institute Micropompe piezo-electrique
CN101749219B (zh) * 2008-12-11 2012-06-20 清华大学 微型蠕动泵
JP2012217684A (ja) * 2011-04-11 2012-11-12 Murata Mfg Co Ltd 流体制御装置
US20220268268A1 (en) * 2021-02-24 2022-08-25 Toyota Motor Engineering & Manufacturing North America, Inc. Electroactive polymer actuator for multi-stage pump

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19912606A1 (de) * 1999-03-22 2000-12-14 Johannes Trabert Pumpeneinrichtung unter Anwendung eines elektrisch gesteuerten chemomechanischen Antriebs
DE102006003744B3 (de) * 2006-01-26 2007-09-13 Albert-Ludwigs-Universität Freiburg Vorrichtung zur Bewegung von Flüssigkeiten und/oder Gasen
DE102011056273B4 (de) * 2011-12-12 2013-11-21 sense2care GmbH Fluidreservoir für eine Vorrichtung zur Analyse von Patientenproben

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4265601A (en) * 1978-09-05 1981-05-05 Harold Mandroian Three valve precision pump apparatus with head pressure flowthrough protection
NL8302860A (nl) * 1983-08-15 1985-03-01 Stichting Ct Voor Micro Elektr Piezo-elektrische micropomp.
DE3618107A1 (de) * 1986-05-30 1987-12-03 Siemens Ag Tintenschreibkopf mit piezoelektrisch anregbarer membran
US5096388A (en) * 1990-03-22 1992-03-17 The Charles Stark Draper Laboratory, Inc. Microfabricated pump
JP3328300B2 (ja) * 1991-07-18 2002-09-24 アイシン精機株式会社 流体制御装置
US5499909A (en) * 1993-11-17 1996-03-19 Aisin Seiki Kabushiki Kaisha Of Kariya Pneumatically driven micro-pump
US5593290A (en) * 1994-12-22 1997-01-14 Eastman Kodak Company Micro dispensing positive displacement pump

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000039463A1 (fr) * 1998-12-23 2000-07-06 Battelle Memorial Institute Micropompe piezo-electrique
AU755023B2 (en) * 1998-12-23 2002-11-28 Battelle Memorial Institute Piezoelectric micropump
CN1097676C (zh) * 1998-12-23 2003-01-01 巴特勒纪念研究院 压电微型泵
CN101749219B (zh) * 2008-12-11 2012-06-20 清华大学 微型蠕动泵
JP2012217684A (ja) * 2011-04-11 2012-11-12 Murata Mfg Co Ltd 流体制御装置
US20220268268A1 (en) * 2021-02-24 2022-08-25 Toyota Motor Engineering & Manufacturing North America, Inc. Electroactive polymer actuator for multi-stage pump
US11598331B2 (en) * 2021-02-24 2023-03-07 Toyota Motor Engineering & Manufacturing North America, Inc. Electroactive polymer actuator for multi-stage pump

Also Published As

Publication number Publication date
DE19724240A1 (de) 1998-12-10
EP0884475A3 (fr) 2000-10-25
DE19724240C2 (de) 2003-06-05
DE59809902D1 (de) 2003-11-20
EP0884475B1 (fr) 2003-10-15

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