EP0884475B1 - Pompe a chambres multiples - Google Patents

Pompe a chambres multiples Download PDF

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Publication number
EP0884475B1
EP0884475B1 EP98110233A EP98110233A EP0884475B1 EP 0884475 B1 EP0884475 B1 EP 0884475B1 EP 98110233 A EP98110233 A EP 98110233A EP 98110233 A EP98110233 A EP 98110233A EP 0884475 B1 EP0884475 B1 EP 0884475B1
Authority
EP
European Patent Office
Prior art keywords
chamber
chambers
plate portion
diaphragm
openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98110233A
Other languages
German (de)
English (en)
Other versions
EP0884475A3 (fr
EP0884475A2 (fr
Inventor
Sascha Dipl.-Ing. Bechtel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ACCORIS GmbH
Bechtel Sascha Dipl-Ing
Original Assignee
accoris GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by accoris GmbH filed Critical accoris GmbH
Publication of EP0884475A2 publication Critical patent/EP0884475A2/fr
Publication of EP0884475A3 publication Critical patent/EP0884475A3/fr
Application granted granted Critical
Publication of EP0884475B1 publication Critical patent/EP0884475B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Definitions

  • the invention relates to a multi-chamber pump for metered Conveying small amounts of fluid according to the in the preamble of Claim 1 specified genus.
  • a pump of this type in particular the delivery of Blood serum in the microliter range is from US-A-5 593 290 known.
  • the chambers are in one Pump body designed as hemispherical depressions and are covered by a membrane on the top.
  • the hemispherical chambers stand through overflow channels with each other and through further channels with the inlet or outlet in connection.
  • the channels open inside the curved Chamber walls, and in the idle state all chambers stand together and in connection with inlet and outlet.
  • the volume of the chambers must first be brought to zero, by subjecting the membrane to excess pressure adapt to the internal shape of the chambers. Only then can you create a vacuum the pumping process by enlarging of the chamber volume can be initiated.
  • the pumping chamber and the diaphragm valves between the inlet and outlet are housed in a massive split block, the is provided with appropriate connecting holes.
  • the Pumping process is effected here by a single diaphragm pump, which is operated depending on the temperature via the heating device becomes.
  • the pump membrane is magnetic or electrical Field actuated, with inlet and outlet channels in a semiconductor material are provided and with a semiconductor membrane a pattern of channels under selective control of activation agents interacts to form a wavy on the membrane To induce movement that has a pumping action between Inlet and outlet causes.
  • a piezoelectric can also be used or electrostrictive mechanism are used to bring about the membrane movement.
  • connections are in a micropump according to EP-A-0 134 614 between two neighboring chambers, each via one circular membrane covered, the piezoelectrically raised can be and thereby causes suction, while the Pressurization occurs when the membrane is at rest returns in which the connecting lines again are cordoned off.
  • An operational change for the Pumping the necessary volume is not possible, so that the delivery rate is only set by changing the switching frequency can be.
  • the invention has for its object a generic To create multi-chamber pump, which from the rest position responds instantaneously, a sensitive and accurate Setting the delivery rate guaranteed and with simple Construction works reliably.
  • the layer structure consisting of the individual silicon wafers is easy to manufacture with high precision. At rest, i.e. without pressure supply, the chamber volume equals zero, and the chambers are against and against each other Inlet and outlet blocked. The pumping process can be done from this Rest position immediately with the required precision be initiated.
  • feed pumps allow actuators provided according to the invention within large areas a practically continuous adjustment or Changing the chamber volume, reducing the delivery rate can be adjusted accordingly.
  • valve can be opened practically anywhere or be closed by the valve inlet or outlet correspondingly strong due to the elastically deformable element or is covered to the appropriate extent, creating the desired Media (through) flow can be adjusted precisely.
  • a feed pump chamber as a valve partially blocking a media flow
  • the valve can be opened practically anywhere or be closed by the valve inlet or outlet correspondingly strong due to the elastically deformable element or is covered to the appropriate extent, creating the desired Media (through) flow can be adjusted precisely.
  • the medium to be delivered is the based on the conveying direction of the first chamber and overflow ducts connecting this via adjacent chambers up to the last in relation to the conveying direction Chamber forwarded in connection with the media outlet stands.
  • the transfer of the medium to be conveyed from chamber to chamber takes place by changing the chamber volume, or thereby that the fluidic resistance in the conveying direction is reduced and is enlarged in the opposite direction.
  • the Delivery direction of the feed pump can be reversed as desired, whereby the functions of the media inlet and the media outlet change accordingly.
  • This reversal of the conveying direction is preferably carried out exclusively by changing the order in which the Volume adjusters change the volume of the chambers.
  • the volume adjusters and especially the order the volume changes of the chambers achieved with these are preferably from any suitable rule and / or Control device coordinates, preferably at least Periodic operation is provided for individual periods is.
  • the feed pump is in the form of a micro feed pump this should at least be realized partially made of silicon, which is made with the processes known from semiconductor technology are processed can.
  • the feed pump according to the invention is based on the Drawings explained in more detail.
  • Fig. 1 is a highly simplified example of the structure a feed pump according to the invention.
  • the illustrated Feed pump has three chambers 3, 4, 5 which are related the conveying direction R arranged essentially one behind the other are.
  • the volume of the chambers 3, 4, 5 can be adjusted using volume adjustment devices 15,16,17 changed or set become what is shown schematically by the dashed lines in Fig. 1 is indicated.
  • the first chamber 3 with respect to the conveying direction R has one Media inlet 1 through which the medium to be conveyed is the first Chamber 3 is supplied. There are two adjacent chambers via also schematically shown overflow channels 6.7 connectable.
  • the medium to be pumped is from the first chamber 3 to last chamber 5 forwarded via the overflow channels 6,7 leaving the chamber 5 through a media outlet 2.
  • the Forwarding of the medium to be conveyed from one chamber to next is achieved in that the volume of at least one of two adjacent chambers 3, 4, 5 using the volume adjustment device 15,16,17 is changed.
  • the volume adjustment devices 15, 16, 17 are electromagnetic Lifting elements and / or positive and / or negative pressure generating devices educated.
  • the change in chamber volume can occur in the chambers generate a positive or negative pressure, with the help of which to promoting medium ejected from the chamber or into the corresponding Chamber can be sucked.
  • the delivery direction R is when the feed pump is operating preferably reversible as desired, this reversal of the conveying direction R and the associated change in the functions of the Media inlet 1 and the media outlet 2 thereby achieved will change the order in which the volumes the chambers 3, 4, 5 through the volume adjustment devices 15, 16, 17 can be changed.
  • volume changes for example in such a way that at the beginning both chamber volumes, for example are reduced to 0, after which the volume of the chamber 3 is enlarged until the desired amount of medium to be conveyed is located in chamber 3, after which at simultaneous increase in the volume of the chamber 4 that Volume of the chamber 3 is reduced again, so that the medium reaches the chamber 4 via the overflow channel 6, from the it by reducing the volume of the chamber 4 again is expelled again.
  • the feed pump has a layered structure. How this from the exploded view in FIG. 2 is recognizable, the feed pump exists with regard to the representation from the top down from a silicon plate 21, (a second cover plate) one Media inlet 1 and a media outlet 2, a silicon wafer 14, (a second plate) to form the overflow channels 6,7 two Window 19.20 and regarding the media inlet and outlet has two other smaller openings, one elastic deformable membrane 13 in the form of a polymer film, a Silicon plate 18, (a first plate) which has openings 10, 11, 12 in which the membrane 13 may extend to between the Silicon plate 14 and the membrane 13, the chambers 3,4,5 to form, and an element 22, (a first cover plate) the actuators 15, 16, 17, each the volume of the chambers determine.
  • the volume adjustment devices in the form of positive and / or negative pressure generating devices 15,16,17 formed in the recesses 10,11,12 can create a negative pressure, whereby the corresponding sections of the membrane 13 in these recesses 10,11,12 extend and thus between the silicon wafer 14 and the membrane 13 form the chambers 3,4,5.
  • overflow channels 6,7 are through the arranged in the silicon wafer 14 Window 19.20 formed, of which each two adjacent breakthroughs 10,11,12 and thus overlaps two adjacent chambers 3, 4, 5.
  • the medium to be funded can supplied or discharged via flow diodes and / or flow restrictors to prevent undesired backflow of the medium prevent, in particular flow diodes preferably only be used in the event that any reversibility the conveying direction R is not desired or required.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Claims (6)

  1. Pompe à chambres multiples pour l'acheminement dosé de faibles quantités de fluide, pour laquelle :
    les chambres (3, 4, 5) montées l'une derrière l'autre dans le sens de l'acheminement (R) par des canaux de trop-plein (6, 7) sont partiellement limitées par une membrane (13) souple et
    la membrane (13) est déformée pour la modification du volume des chambres (3, 4, 5) à l'aide de dispositifs de réglages (15, 16, 17) par l'intermédiaire d'une surpression et/ou sous-pression pour remplir périodiquement les chambres (3, 4, 5) et les vider vers la chambre suivante par les canaux de trop-plein (6, 7),
       caractérisée par les caractéristiques suivantes :
    des passages ou découpes (10, 11, 12) sont aménagés dans une première plaquette (18), lesquels sont recouverts par la membrane (13) d'un côté ;
    les chambres (3, 4, 5) sont formées dans les passages (10, 11, 12) de la première plaquette (18) lorsque la membrane (13) est déployée dans ces passages par l'intermédiaire des dispositifs de réglage (15, 16, 17) ;
    dans une deuxième plaquette (14) située sur la membrane (13) sont formées des fenêtres (19, 20) qui recouvrent chacune deux chambres (3, 4, 5) dans la première plaquette (18) et forment les canaux de trop-plein (6, 7) ;
    sous la première plaquette (18) est disposée une première plaquette de recouvrement (22) reliée dans la zone des passages (10, 11, 12) situés au-dessus d'elle avec les dispositifs de réglage (15, 16, 17) ;
    une deuxième plaquette de recouvrement (21) est disposée au-dessus de la deuxième plaquette (14) ;
    la deuxième plaquette (14) présente au-dessus de la première chambre (3), respectivement au-dessus de la dernière chambre (5) des ouvertures d'entrée (1), respectivement des ouvertures de sortie (2), lesquelles s'alignent avec des ouvertures dans la deuxième plaquette de recouvrement (21).
  2. Pompe à chambres multiples selon la revendication 1, caractérisée en ce que les plaquettes (14, 18, 21, 22) sont des plaquettes en silicium.
  3. Pompe à chambres multiples selon la revendication 1, caractérisée en ce que l'entrée du fluide (1) et/ou la sortie du fluide (2) est reliée aux chambres (3 et/ou 5) par des anti-retour d'écoulement et/ou des étrangleurs d'écoulement.
  4. Pompe à chambres multiples selon l'une quelconque des revendications précédentes, caractérisée en ce que l'entrée du fluide (1) et la sortie du fluide (2) présentent la même résistance à l'écoulement.
  5. Pompe à chambres multiples selon la revendication 4, caractérisée en ce que l'entrée du fluide (1) et la sortie du fluide (2) présentent le même profil.
  6. Pompe à chambres multiples selon la revendication 1, caractérisée en ce que le volume des chambres (3, 4, 5) est essentiellement réduit à zéro lorsque la membrane (13) se trouve dans sa position de repos.
EP98110233A 1997-06-09 1998-06-04 Pompe a chambres multiples Expired - Lifetime EP0884475B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19724240 1997-06-09
DE19724240A DE19724240C2 (de) 1997-06-09 1997-06-09 Förderpumpe, insbesondere Mikroförderpumpe

Publications (3)

Publication Number Publication Date
EP0884475A2 EP0884475A2 (fr) 1998-12-16
EP0884475A3 EP0884475A3 (fr) 2000-10-25
EP0884475B1 true EP0884475B1 (fr) 2003-10-15

Family

ID=7831912

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98110233A Expired - Lifetime EP0884475B1 (fr) 1997-06-09 1998-06-04 Pompe a chambres multiples

Country Status (2)

Country Link
EP (1) EP0884475B1 (fr)
DE (2) DE19724240C2 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6368079B2 (en) * 1998-12-23 2002-04-09 Battelle Pulmonary Therapeutics, Inc. Piezoelectric micropump
DE19912606A1 (de) * 1999-03-22 2000-12-14 Johannes Trabert Pumpeneinrichtung unter Anwendung eines elektrisch gesteuerten chemomechanischen Antriebs
DE102006003744B3 (de) * 2006-01-26 2007-09-13 Albert-Ludwigs-Universität Freiburg Vorrichtung zur Bewegung von Flüssigkeiten und/oder Gasen
CN101749219B (zh) * 2008-12-11 2012-06-20 清华大学 微型蠕动泵
JP5668582B2 (ja) * 2011-04-11 2015-02-12 株式会社村田製作所 流体制御装置
DE102011056273B4 (de) * 2011-12-12 2013-11-21 sense2care GmbH Fluidreservoir für eine Vorrichtung zur Analyse von Patientenproben
US11598331B2 (en) * 2021-02-24 2023-03-07 Toyota Motor Engineering & Manufacturing North America, Inc. Electroactive polymer actuator for multi-stage pump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4265601A (en) * 1978-09-05 1981-05-05 Harold Mandroian Three valve precision pump apparatus with head pressure flowthrough protection
NL8302860A (nl) * 1983-08-15 1985-03-01 Stichting Ct Voor Micro Elektr Piezo-elektrische micropomp.
DE3618107A1 (de) * 1986-05-30 1987-12-03 Siemens Ag Tintenschreibkopf mit piezoelektrisch anregbarer membran
US5096388A (en) * 1990-03-22 1992-03-17 The Charles Stark Draper Laboratory, Inc. Microfabricated pump
JP3328300B2 (ja) * 1991-07-18 2002-09-24 アイシン精機株式会社 流体制御装置
US5499909A (en) * 1993-11-17 1996-03-19 Aisin Seiki Kabushiki Kaisha Of Kariya Pneumatically driven micro-pump
US5593290A (en) * 1994-12-22 1997-01-14 Eastman Kodak Company Micro dispensing positive displacement pump

Also Published As

Publication number Publication date
DE19724240A1 (de) 1998-12-10
EP0884475A3 (fr) 2000-10-25
DE19724240C2 (de) 2003-06-05
DE59809902D1 (de) 2003-11-20
EP0884475A2 (fr) 1998-12-16

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