EP0924733A2 - Micro fusible - Google Patents

Micro fusible Download PDF

Info

Publication number
EP0924733A2
EP0924733A2 EP98121442A EP98121442A EP0924733A2 EP 0924733 A2 EP0924733 A2 EP 0924733A2 EP 98121442 A EP98121442 A EP 98121442A EP 98121442 A EP98121442 A EP 98121442A EP 0924733 A2 EP0924733 A2 EP 0924733A2
Authority
EP
European Patent Office
Prior art keywords
transition piece
switching contact
linear actuators
actuators
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP98121442A
Other languages
German (de)
English (en)
Other versions
EP0924733A3 (fr
Inventor
Manfred Dr. Kohl
Klaus Skrobanek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karlsruher Institut fuer Technologie KIT
Original Assignee
Forschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Karlsruhe GmbH filed Critical Forschungszentrum Karlsruhe GmbH
Publication of EP0924733A2 publication Critical patent/EP0924733A2/fr
Publication of EP0924733A3 publication Critical patent/EP0924733A3/fr
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H71/00—Details of the protective switches or relays covered by groups H01H73/00 - H01H83/00
    • H01H71/10—Operating or release mechanisms
    • H01H71/12—Automatic release mechanisms with or without manual release
    • H01H71/14—Electrothermal mechanisms
    • H01H71/145—Electrothermal mechanisms using shape memory materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/01—Details
    • H01H61/0107—Details making use of shape memory materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H01H1/52—Contacts adapted to act as latches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H01H2001/0047—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet operable only by mechanical latching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/01—Details
    • H01H61/0107—Details making use of shape memory materials
    • H01H2061/0122—Two SMA actuators, e.g. one for closing or resetting contacts and one for opening them
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H83/00—Protective switches, e.g. circuit-breaking switches, or protective relays operated by abnormal electrical conditions otherwise than solely by excess current
    • H01H83/20—Protective switches, e.g. circuit-breaking switches, or protective relays operated by abnormal electrical conditions otherwise than solely by excess current operated by excess current as well as by some other abnormal electrical condition
    • H01H2083/206—Protective switches, e.g. circuit-breaking switches, or protective relays operated by abnormal electrical conditions otherwise than solely by excess current operated by excess current as well as by some other abnormal electrical condition with thermal shunt trip

Definitions

  • the present invention relates to a micro fuse (MEMS) for interrupting and closing an electrical Circuit.
  • MEMS micro fuse
  • the present invention is an automatic fuse with millimeter dimensions using linear actuators made of a shape memory alloy.
  • Such fuses form a ikro- M E M lektro- echanisches- S ystem (MEMS) for interrupting and closing an electrical circuit.
  • Linear actuators as such are, for example, from: ACTUATOR 96 , 5th International Conference on New Actuators, 26-28 June 1996, Bremen, p.367-369 ". It is especially known to arrange two linear actuators, which consist of a shape memory alloy, biased against one another in order to carry out switching operations. Each of the actuators has a meandering structure, as well as a fixed and a movable end Finally, the actuator is arranged on a ceramic substrate.
  • the invention proposes the features before, cited in its entirety in claim 1 are. Further advantageous embodiments of the invention are to be seen in the features of the subclaims.
  • the micro-fuse according to the invention enables automatic Interruption of an electrical load circuit above a critical current.
  • a load circuit can be a first control circuit be closed again.
  • the interruption of the load circuit additionally interrupted as required become.
  • the micro fuse can be a very small size of a few mm. It is for its realization only a single SMA micro component required.
  • the security function is due to the intrinsic SMA effect very reliable. The movement is smooth, high forces in the contact area with sufficient Travel paths for galvanic contact interruption be achieved.
  • Materials made of shape memory alloys FGL show at Transition from a martensitic phase below the Phase transition temperature of the material to an austenitic Parent phase by heating above the phase transition temperature a thermoelastic phase transformation. Is below the phase transformation temperature the shape memory material is plastic by several percent deformable. The material remains in the deformed state, until it is above the phase transformation temperature is heated, taking considerable force back to its original shape (memory shape) assumes. In the martensitic state, Slightly deflect resilient SMA components when heated on the other hand, they take on the phase transformation temperature a much stiffer condition. This effect is also called a one-way effect because it only changes when the temperature changes occurs in one direction (warming).
  • the Memory shape can be determined by certain thermomechanical Procedure can be set.
  • a technically interesting shape memory material is e.g. B. NiTi, which allows reversible elongation changes up to 8%.
  • the new micro fuse is for interrupting and closing of an electrical circuit in microtechnology intended.
  • As an actuator it has at least two levels, counteracting linear actuators (actuator), one first 1 and a second 2, each made of two meandering Structures 3, 4 and 5, 6 as control elements.
  • the control elements consist of two folded ones, for example Planar springs, which are connected to one another via a transition piece 9 are coupled and are mechanically biased Condition. Both planar springs from FGL are conditioned in such a way that they are austenitic High temperature phase either an undeflected or assume fully deflected shape of memory.
  • the Use embodiments shown in Figures 1 to 4 an undeflected shape of memory.
  • Both actuators 1, 2 each have a stationary 7 and a movable one End of work 8, the two movable through Transition piece 9 are interconnected.
  • the transition piece 9 forms simultaneously as a common part both actuators 1, 2 the connection between the structures 3, 4 and 5, 6. All of these elements as well as the calotte 10 consist as part of a structured film electrically conductive SMA, in the phase transformation in the actuators 1, 2 forces in each other opposite direction are generated. These powers are released by ohmic heating because of the structure is partly part of circuits and therefore partially heated above the phase transformation temperature can be. To do this, play in the to 3 shown execution of the micro fuse two Circuits matter. The first is the one to be switched Load or circuit.
  • the second circuit is a control circuit for closing the load circuit by the first actuator 1, the transition piece 9 and the connections 14, 15 is formed.
  • the switch contact 10, 11 is designed as a releasable clamping device in the load circuit, which is the reversible opening and closing of the electrical and mechanical connection in the load circuit.
  • the clamping device 10, 11 is dimensioned so that that the contact at low currents in Load circuit can be maintained and the contact resistance is sufficiently lowered.
  • the actuators 1, 2 of the two circuits are designed that when current is applied to the actuator 1 and open Switching contact 10.11 in the control circuit the force in Actuating direction of the actuator 1 with respect to the restoring force the actuator 2 and the holding force of the switching contact 10, 11 predominates. It also predominates at currents above the limiting current in the load circuit is the restoring force of the actuator 2 relative to the force of the actuator 1 in the direction of adjustment and the clamping force.
  • the limit current in Load circuit is determined by the dimensions of the actuator 2.
  • the transition piece 9 between the two actuators 1, 2 is dimensioned so that both actuators 1, 2 thermally are sufficiently decoupled from one another so that at Current applied to the actuator 1 in the control circuit, the temperature of the actuator 2 below its phase transformation temperature remains.
  • the Switching contact from parts 10, 11 switched into the load circuit by changing the shape of one of the two Actuators 1, 2 opened and by changing the shape of each other is closed again.
  • the first of the actuators 1 consists of the two side by side Structures 3, 4 at their working ends 8 with each other by means of the transition piece 9 are connected.
  • the switching contact 10, 11 arranged, one half 10 of the switch contact 10, 11 on the transition piece 9 between the workers 8 electrically conductive, the other half 11 between the Structures 3, 4 of the first actuator 1, but electrical attached separately from this and the rest of the structure is.
  • FIG. 1 shows the exemplary embodiment shown, built on a non-conductive substrate plate 16.
  • Both actuators 1, 2 with the transition piece 9 and the spherical cap 10 attached to it form a freely movable one SMA actuator between the fixed contact elements 17, 18, 19, in which the connections 12, 14, 15 sit tight. In this way the ends mentioned of the actuators 1, 2 relative to the substrate plate 16 fixed in place.
  • the distance between the contact elements 17, 18, 19 is selected so that the actuators 1, 2 to a certain extent are biased against each other.
  • FIG. 4 shows a second embodiment of the micro fuse shown according to the invention. This is with the in Figures 1 to 3 shown execution in all position digits identical to 19, but with an additional one third actuator 20 extended.
  • This actuator 20 out two meandering structures 21, 22 is on the transition piece 9 parallel to the second actuator 2 next to this attached with his working end 23 so that he with the Transition piece 9 together as a separate circuit forms the second control circuit.
  • This second control circuit enables the separate loosening of the switching contact 10, 11 without heating or influencing the actuator 2 in the load circuit.
  • the structures 21, 22 of the additional actuator 20 also have connections 24, 25 which, like that of other actuators 1, 2 in contact elements 26, 27 on the Sit substrate plate 16.
  • foils or rolled sheets of SMA As a starting material for the production of the entire structure thin films, foils or rolled sheets of SMA with typical thicknesses D in the area from 20 to 200 ⁇ m. Thin films made of SMA can be sputtered and subsequent thermomechanical treatment getting produced. Foils made of SMA in the thickness range of 50 ⁇ m z. B. with the "melt spinning" process will be realized. Films can now be rolled SME sheets produced by melt metallurgy in all Thickness ranges can be realized. Within certain limits the thickness can also be determined by chemical etching desired value can be set.
  • the microstructuring of the starting material into the desired one Shape of the structure of the micro fuse can be by Laser cutting, eroding or by a lithographic Procedures are carried out.
  • a lithographic process especially the electrolytic photoetching process prefers.
  • a suitable photoresist is applied the material applied, which is then optically cast by shadows or exposed to direct laser writing and is subsequently developed.
  • the microstructured so generated Photoresist serves as a protective mask for the following one electrolytic etching process in which the unprotected Parts in an electrolytic bath in the presence of a electrical field can be selectively removed. Because of the high chemical resistance of SMA materials The electrolytic etching processes are particularly suitable here Well.

Landscapes

  • Thermally Actuated Switches (AREA)
  • Fuses (AREA)
EP98121442A 1997-12-20 1998-11-11 Micro fusible Withdrawn EP0924733A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1997157024 DE19757024C1 (de) 1997-12-20 1997-12-20 Mikrosicherung
DE19757024 1997-12-20

Publications (2)

Publication Number Publication Date
EP0924733A2 true EP0924733A2 (fr) 1999-06-23
EP0924733A3 EP0924733A3 (fr) 2000-05-24

Family

ID=7852837

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98121442A Withdrawn EP0924733A3 (fr) 1997-12-20 1998-11-11 Micro fusible

Country Status (2)

Country Link
EP (1) EP0924733A3 (fr)
DE (1) DE19757024C1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003088292A1 (fr) * 2002-04-09 2003-10-23 Microsaic Systems Limited Micro-interrupteur a declenchement automatique

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6917276B1 (en) 2000-06-19 2005-07-12 Simpler Networks Bistable switch with shape memory metal
DE10062704A1 (de) * 2000-12-15 2002-07-04 Siemens Ag Elektromechanisches Bauelement
DE102017124885B4 (de) 2017-10-24 2021-10-28 Memetis Gmbh Fernsteuerbare Kupplung insbesondere Modellbahnkupplungen
DE102019204846A1 (de) * 2019-04-04 2020-10-08 Memetis Gmbh Aktuator-Vorrichtung
DE102020213648A1 (de) * 2020-10-29 2022-05-05 Memetis Gmbh Aktor und Optikbaugruppe mit Aktor
DE102024111548B4 (de) * 2024-04-24 2026-04-16 Lear Corporation Serpentinenförmige Formgedächtnislegierungs-Aktuatorbaugruppe

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2182747B (en) * 1985-11-07 1989-10-04 Gen Electric Plc Actuator
US4811564A (en) * 1988-01-11 1989-03-14 Palmer Mark D Double action spring actuator
DE19525475B4 (de) * 1995-02-06 2005-10-13 Bayerische Motoren Werke Ag Sicherungsvorrichtung für eine Stromleitung in Fahrzeugen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003088292A1 (fr) * 2002-04-09 2003-10-23 Microsaic Systems Limited Micro-interrupteur a declenchement automatique

Also Published As

Publication number Publication date
DE19757024C1 (de) 1999-06-02
EP0924733A3 (fr) 2000-05-24

Similar Documents

Publication Publication Date Title
DE3531710C2 (de) Durch Zusammenbau von Modulelementen realisierbare Schaltvorrichtung mit veränderlicher Zusammensetzung
DE2106732C3 (de) Elektrische Membran-Tastatur
DE102019204846A1 (de) Aktuator-Vorrichtung
DE2515185B2 (de) Elektrischer Schnappschalter
EP0924733A2 (fr) Micro fusible
EP3915153B1 (fr) Actionneur pourvu de ressorts de rappel
EP1130615B1 (fr) Mécanisme de verrouillage pour un disjoncteur basse tension
DE1765920B2 (de) Kontaktanordnung fur elektrische Schaltgerate
WO1999028094A1 (fr) Micropince
DE102010036215A1 (de) Elektrischer Leistungsschalter
DE202020104004U1 (de) Elektrisches Verbindungsschaltglied
DE69714408T2 (de) Magnetischer Mikroschalter und Herstellungsverfahren
DE10015598A1 (de) Mikroaktoranordnung
DE2934837A1 (de) Thermischer ausschalter und verfahren zum montieren einer anzahl dieser ausschalter
WO2002049059A1 (fr) Composant electromecanique
DE60217802T2 (de) Durch niedrige Spannung gesteuertes Mikroschaltbauelement
DE2732723C2 (de) Elektrische Schaltvorrichtung
EP1292961B1 (fr) Dispositif de commutation possedant un element actionneur constitue d'un alliage a memoire de forme
EP2071293B1 (fr) Capteur de position
DE2528502A1 (de) Schalter mit zwei schaltstellungen
EP0975058A2 (fr) Dispositif de contact
DE102020118270A1 (de) Elektrisches Verbindungsschaltglied
DE19629482C1 (de) Schaltkontaktanordnung mit einer Gelenkanordnung für einen Kontakthebel
DE102006051424B4 (de) Schlossmechanismus für elektrisches Gerät
DE2450742C2 (de) Elektrischer Schalter

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH DE FR GB LI LU NL

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

17P Request for examination filed

Effective date: 20000420

AKX Designation fees paid

Free format text: AT BE CH DE FR GB LI LU NL

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20041113