EP0924737A1 - Matrice d'électrodes contenant de diamant et d'hydrogène - Google Patents

Matrice d'électrodes contenant de diamant et d'hydrogène Download PDF

Info

Publication number
EP0924737A1
EP0924737A1 EP98204254A EP98204254A EP0924737A1 EP 0924737 A1 EP0924737 A1 EP 0924737A1 EP 98204254 A EP98204254 A EP 98204254A EP 98204254 A EP98204254 A EP 98204254A EP 0924737 A1 EP0924737 A1 EP 0924737A1
Authority
EP
European Patent Office
Prior art keywords
diamond
hydrogen
electron
coating
containing material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP98204254A
Other languages
German (de)
English (en)
Inventor
Peter Klaus Dr. Bachmann
Hartmut Lade
Detlef Uwe Wiechert
Howard Wilson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Koninklijke Philips NV
Original Assignee
Philips Corporate Intellectual Property GmbH
Philips Patentverwaltung GmbH
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Corporate Intellectual Property GmbH, Philips Patentverwaltung GmbH, Koninklijke Philips Electronics NV filed Critical Philips Corporate Intellectual Property GmbH
Publication of EP0924737A1 publication Critical patent/EP0924737A1/fr
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/308—Semiconductor cathodes, e.g. cathodes with PN junction layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond

Definitions

  • the invention relates to an electron-emitting component with an arrangement (Array) of one or more electron-emitting electrodes that form a Have substrate and a coating with a diamond-containing material.
  • a such component is for use in screens, for light generation, in Electron microscopes and for other areas of application in which electron emitting Electrodes are used.
  • Diamond-containing material are used as electron-emitting cover layers of electrodes very suitable because diamond has a negative electron affinity and therefore emits electrons even at low field strengths.
  • Diamond is chemically inert, hard and changes under the manufacturing conditions not for screens. Despite these advantages of diamond as an electron emitter
  • electrode material As such, diamond is electrical non-conductive. To be able to use it as a material for pixel electrodes, you can increase its conductivity by doping or you can use it in a Use material combination with another electrically conductive material.
  • a field emission cathode which consists of a layer contains a conductive material and a layer of an amorphous diamond film, which is deposited over the conductive material to cover emission areas form, and in which the amorphous diamond as a material with lower effective Work function works.
  • Each emission area contains at least two sub-regions with different electron affinity.
  • the object of the present invention is to use an electron-emitting component an array of one or more field-emitting electrodes that have a substrate and a coating with a diamond-containing material, to provide its electron emission evenly over the entire Electrode area is distributed and the work function of the electrons is low and is constant.
  • the object is achieved by an electron-emitting component with an arrangement (array) of one or more electron-emitting Electrodes that have a substrate and a coating containing a diamond Have material, the coating with a diamond-containing material has hydrogen-saturated top layer.
  • Such a component emits electrons at lower voltages than components with coatings made of diamond not saturated with hydrogen. At a voltage of less than 10V / ⁇ m, emission currents of 1 nA / 0.25 cm 2 or 4 nA / cm 2 are obtained .
  • the component according to the invention is therefore suitable, for example, for flat screens which require a current density of 0.1A / mm 2 at a voltage below 25 V.
  • the coating on the substrate is printed.
  • the coating can be done by standard printing processes, e.g. Inkjet printing, cliché printing etc. are produced and distinguished by a very good liability.
  • the diamond-containing material contains diamond particles contains a diameter of 5 to 100 nm. These layers are thin and even. They are resistant to wear from ion bombardment by residual gas ions, because the coating has no emitter tips or similar exhibits by ion bombardment could be removed.
  • the invention also relates to a method for producing an arrangement of one or more electron-emitting electrodes, in which a substrate with a coating is provided with a diamond-containing material and their Surface with a hydrogen or carbon / hydrogen plasma up to Saturation with hydrogen to form a hydrogen-saturated top layer is treated.
  • the coating is preferably coated with a diamond Material printed on a substrate. This process makes it inexpensive Large-area electrode arrays with a large number of electrodes are obtained show homogeneous behavior, i.e. where the properties of an electrode on the other hand shows no deviations.
  • the method is also particularly suitable for coating temperature-sensitive substrates.
  • Fig. 1 Electron-emitting component with an electrode array.
  • An electron-emitting device contains a single or an array of electrodes, i.e. a variety of similar electrodes that are different from each other divided or separated, arranged in a line or a plane and thereby form a linear or planar electron source.
  • a Such an array can be, for example, ⁇ 1,000 or even several hundred thousand include individual electrodes.
  • the coating 1 made of a diamond-containing material with a hydrogen-saturated cover layer is arranged on the substrate.
  • the component further comprises means for making electrical contact or for applying an extraction field.
  • the coating with a diamond-containing material and a hydrogen-saturated one usually has a nominal one, measured by means of ellipsometry Layer thickness from 5 nm to 700 nm. The by differential light scattering or mechanical scanning of the layers measured average roughness (rms) 5 nm to 500 nm.
  • the diamond-containing material has a negative electron affinity using UV photoelectron spectroscopy can be measured. It can humiliate the electrical resistance with one or more of the elements boron, nitrogen, Phosphorus, lithium, sodium or arsenic can be doped. Boron is preferred as the dopant.
  • the diamond-containing material contains not only sp 3 -bonded carbon but also sp 2 -bonded carbon, which also contributes to the reduction in resistance.
  • the coating is made from a fine crystalline diamond Starting material, which is produced by the known methods.
  • the starting material containing diamond can e.g. using microwave plasma CVD a gas mixture of a carbon-containing gas that contains hydrogen, oxygen, Contains halogens and / or an inert gas.
  • a gas mixture of a carbon-containing gas that contains hydrogen, oxygen, Contains halogens and / or an inert gas For the separation of doped nanocrystalline diamond layers becomes the gas phase for on-board doping Boron chloride or diborane, for nitrogen doping nitrogen or ammonia, for the phosphorus doping phosphorus chloride or an organophosphorus compound, for the doping with lithium and sodium the corresponding metal vapors or organic lithium or sodium compounds and arsenic chloride for arsenic doping or added an arsenic organic compound.
  • a diamond one Material created by laser ablation of graphite or by explosion synthesis is obtained is suitable. It can contain diamond-containing particles with a particle size from 5 to 100 nm can be used. The use of is preferred Particles with a size of ⁇ 60 nm.
  • a printing paste is made from the fine-crystalline, diamond-containing starting material manufactured.
  • the diamond-containing starting powder is in an aqueous or suspended organic solvents and with binders, dispersants, Suspension stabilizers, liquefiers, pressure oils, etc. processed into a printing paste.
  • the printing paste is made using a conventional printing technique, e.g. Screen printing process, flexographic process or an inkjet printing process printed on the substrate in a structured electrode pattern.
  • a structured electrode pattern can consist, for example, of individual strips, a grid pattern or from individual round, rectangular or square Points on a lower electrode.
  • the printed layer is dried and burned in if necessary.
  • the coating prepared in this way is then subjected to a hydrogen treatment subjected until the surface of the layer is hydrogen saturated.
  • This treatment can be a plasma-activated CVD method, for example and carried out in a PECVD apparatus.
  • Another possibility is to carry out the hydrogen treatment in a thermal CVD process, e.g. in a hot wire CVD reactor.
  • a first process step fine diamond-containing particles were combined in one organic solvents with a high vacuum resistant resin as a binder stirred a suspension.
  • the suspension is on a Printed metal surface and then dried at 80 ° C. Subsequently there is a hydrogen plasma treatment in a microwave reactor at 4 kW Power, 200 mbar pressure and a temperature of 600 ° C.
  • the current-voltage curve can be measured and the emission can be observed with the aid of a luminescent layer.
  • the current-voltage curve of this arrangement was measured. At a voltage of 6V / ⁇ m an emission current of 4 nA / cm 2 was achieved.

Landscapes

  • Cold Cathode And The Manufacture (AREA)
EP98204254A 1997-12-20 1998-12-15 Matrice d'électrodes contenant de diamant et d'hydrogène Withdrawn EP0924737A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1997157141 DE19757141A1 (de) 1997-12-20 1997-12-20 Array aus Diamant/wasserstoffhaltigen Elektroden
DE19757141 1997-12-20

Publications (1)

Publication Number Publication Date
EP0924737A1 true EP0924737A1 (fr) 1999-06-23

Family

ID=7852922

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98204254A Withdrawn EP0924737A1 (fr) 1997-12-20 1998-12-15 Matrice d'électrodes contenant de diamant et d'hydrogène

Country Status (3)

Country Link
EP (1) EP0924737A1 (fr)
JP (1) JPH11265654A (fr)
DE (1) DE19757141A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2793603A1 (fr) * 1999-03-06 2000-11-17 Smiths Industries Plc Dispositif emetteur d'electrons et procede de fabrication d'un tel dispositif
WO2005022579A1 (fr) * 2003-08-29 2005-03-10 University Of Bristol Dispositif a emission de champ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT513190B9 (de) * 2012-08-08 2014-05-15 Berndorf Hueck Band Und Pressblechtechnik Gmbh Vorrichtung und Verfahren zur Plasmabeschichtung eines Substrats, insbesondere eines Pressblechs

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0609532A1 (fr) * 1993-02-01 1994-08-10 Motorola, Inc. Emetteur d'électrons
EP0709870A1 (fr) * 1994-10-31 1996-05-01 AT&T Corp. Procédé et appareil pour la fabrication d'émetteurs à effet de champ améliorés formés de particules, et produits ainsi obtenus
EP0718864A1 (fr) * 1994-12-22 1996-06-26 AT&T Corp. Dispositif à émission de champ avec particules émitteurs de diamant ultra-fin
EP0725415A2 (fr) * 1995-01-31 1996-08-07 AT&T Corp. Dispositifs à émission de champ utilisant des particules de diamant activées émettrices et procédés de fabrication
WO1996033507A1 (fr) * 1995-04-21 1996-10-24 The Regents Of The University Of California Emetteur d'electrons en film diamant mince
US5619093A (en) * 1995-03-31 1997-04-08 The United States Of America As Represented By The Secretary Of The Navy Electron field emission
EP0836217A1 (fr) * 1996-10-14 1998-04-15 Hamamatsu Photonics K.K. Tube électronique
US5744195A (en) * 1994-10-31 1998-04-28 Lucent Technologies Inc. Field emission devices employing enhanced diamond field emitters
WO1998027568A1 (fr) * 1996-12-18 1998-06-25 Smiths Industries Public Limited Company Surfaces en diamant
WO1998044526A1 (fr) * 1997-03-27 1998-10-08 Candescent Technologies Corporation Fabrication et structure d'emetteurs d'electrons recouverts de materiaux tels que le carbone

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0609532A1 (fr) * 1993-02-01 1994-08-10 Motorola, Inc. Emetteur d'électrons
EP0709870A1 (fr) * 1994-10-31 1996-05-01 AT&T Corp. Procédé et appareil pour la fabrication d'émetteurs à effet de champ améliorés formés de particules, et produits ainsi obtenus
US5744195A (en) * 1994-10-31 1998-04-28 Lucent Technologies Inc. Field emission devices employing enhanced diamond field emitters
EP0718864A1 (fr) * 1994-12-22 1996-06-26 AT&T Corp. Dispositif à émission de champ avec particules émitteurs de diamant ultra-fin
EP0725415A2 (fr) * 1995-01-31 1996-08-07 AT&T Corp. Dispositifs à émission de champ utilisant des particules de diamant activées émettrices et procédés de fabrication
US5619093A (en) * 1995-03-31 1997-04-08 The United States Of America As Represented By The Secretary Of The Navy Electron field emission
WO1996033507A1 (fr) * 1995-04-21 1996-10-24 The Regents Of The University Of California Emetteur d'electrons en film diamant mince
EP0836217A1 (fr) * 1996-10-14 1998-04-15 Hamamatsu Photonics K.K. Tube électronique
WO1998027568A1 (fr) * 1996-12-18 1998-06-25 Smiths Industries Public Limited Company Surfaces en diamant
WO1998044526A1 (fr) * 1997-03-27 1998-10-08 Candescent Technologies Corporation Fabrication et structure d'emetteurs d'electrons recouverts de materiaux tels que le carbone

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
GEIS M W ET AL: "DIAMOND EMITTERS FABRICATION AND THEORY", May 1996, JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, VOL. 14, NR. 3, PAGE(S) 2060 - 2067, XP000621834 *
HUANG Z -H ET AL: "MONTE CARLO SIMULATION OF HOT ELECTRON CHARGE TRANSPORT IN DIAMOND UNDER AN INTERNAL ELECTRIC FIELD", 28 August 1995, APPLIED PHYSICS LETTERS, VOL. 67, NR. 9, PAGE(S) 1235 - 1237, XP002036963 *
OKANO K ET AL: "FABRICATION OF A MINIATURE-SIZE PYRAMIDAL-SHAPE DIAMOND FIELD EMITTER ARRAY", 1 June 1995, IEEE ELECTRON DEVICE LETTERS, VOL. 16, NR. 6, PAGE(S) 239 - 241, XP000514716 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2793603A1 (fr) * 1999-03-06 2000-11-17 Smiths Industries Plc Dispositif emetteur d'electrons et procede de fabrication d'un tel dispositif
FR2797712A1 (fr) * 1999-03-06 2001-02-23 Smiths Industries Plc Dispositif emetteur d'electrons et procede de fabrication d'un tel dispositif
US6538368B1 (en) 1999-03-06 2003-03-25 Smiths Group Plc Electron-emitting devices
WO2005022579A1 (fr) * 2003-08-29 2005-03-10 University Of Bristol Dispositif a emission de champ

Also Published As

Publication number Publication date
JPH11265654A (ja) 1999-09-28
DE19757141A1 (de) 1999-06-24

Similar Documents

Publication Publication Date Title
DE69605459T2 (de) Herstellungsverfahrung einer Elektronenfeldemissionsvorrichtung
DE60021778T2 (de) Kohlenstofftinte, elektronenemittierendes Element, Verfahren zur Herstellung eines elektronenemittierenden Elements und Bildanzeigevorrichtung
DE69724376T2 (de) Elektronenemittierende Beschichtung und Verfahren
DE69510522T2 (de) Feldeffekt-Elektronenquelle und Verfahren zur Herstellung; Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz
DE69510521T2 (de) Feldeffekt-Elektronenquelle und Herstellungsverfahren dazu, Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz
DE69607356T2 (de) Feldelektronenemitterende materialen und vorrichtungen
US6057637A (en) Field emission electron source
DE69816479T2 (de) Feldemissionselektronenmaterialen und herstellungsverfahren
DE69719214T2 (de) Diamantfilmdepositionsmethode
DE60037027T2 (de) Elektronememittierende- und isolierende teilchen enthaltende feldemissions kathoden
DE69612734T2 (de) Verfahren zur herstellung diamantähnlicher kohlenstoff-filme (dlc)
DE69814664T2 (de) Feldemissionsvorrichtungen
DE19983211B4 (de) System und Verfahren der Substratverarbeitung sowie deren Verwendung zur Hartscheibenherstellung
DE10122602A1 (de) Emitterstruktur für Feldemissionsanzeige
EP1916223A1 (fr) Procédé de préparation d'un matériau carboné pour émetteur dans un dispositif d'émission d'électrons
DE10009846A1 (de) Elektronen emittierende Vorrichtung und Verfahren zu ihrer Herstellung
DE69610902T2 (de) Feldemissionskathode und herstellungsverfahren derselben
EP1224678B1 (fr) Procede de production d'un ecran a emission de champ
DE19727606A1 (de) Elektronenemitter mit nanokristallinem Diamant
DE19922759A1 (de) Verfahren zur Herstellung einer leitenden Struktur
DE1629814A1 (de) AEtzen von Para-Xylylen-Polymeren vermittels elektrischer Gas-Glimmentladung
EP0924737A1 (fr) Matrice d'électrodes contenant de diamant et d'hydrogène
DE69608284T2 (de) Anzeigetafel unter verwendung von faserartigen feldeffektemittern
DE69805333T2 (de) Elektronenemitter aus ionenbeschossenem graphit
DE69829502T2 (de) Ionenbeschussteter graphit-beschichteter draht-elektronenemitter

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE FR GB

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

RAP3 Party data changed (applicant data changed or rights of an application transferred)

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V.

Owner name: PHILIPS CORPORATE INTELLECTUAL PROPERTY GMBH

17P Request for examination filed

Effective date: 19991223

AKX Designation fees paid

Free format text: DE FR GB

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Withdrawal date: 20000713