EP0934545A1 - Dispositif optique de symetrisation du faisceau de diodes laser - Google Patents

Dispositif optique de symetrisation du faisceau de diodes laser

Info

Publication number
EP0934545A1
EP0934545A1 EP97945797A EP97945797A EP0934545A1 EP 0934545 A1 EP0934545 A1 EP 0934545A1 EP 97945797 A EP97945797 A EP 97945797A EP 97945797 A EP97945797 A EP 97945797A EP 0934545 A1 EP0934545 A1 EP 0934545A1
Authority
EP
European Patent Office
Prior art keywords
arrangement according
lens
laser diodes
deflection
deflecting element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97945797A
Other languages
German (de)
English (en)
Other versions
EP0934545B1 (fr
Inventor
Rolf GÖRING
Peter Schreiber
Torsten Possner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Publication of EP0934545A1 publication Critical patent/EP0934545A1/fr
Application granted granted Critical
Publication of EP0934545B1 publication Critical patent/EP0934545B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping

Definitions

  • the invention relates to an optical arrangement for
  • a large number of laser diodes are used in solid state for the production of high-power laser diode arrangements
  • Such laser diode bars with optical output powers in the range up to approximately 30 usually consist of a plurality of laser diodes arranged in a row as individual emitters with a geometrical dimension of the radiating area between approximately 50 ⁇ 1 ⁇ m and approximately 200 ⁇ 1 ⁇ m, the linear arrangement of these emitters always in the direction their greatest extent takes place.
  • the output radiation from these laser diode bars is extremely asymmetrical.
  • laser diode bars for example for pumping solid-state lasers, for purposes of material processing and medical purposes, a symmetrical bundle of high radiation density is required.
  • the most compact possible optical systems for beam balancing are required.
  • Arrangements for symmetrizing the radiation from high-power laser diodes which use, for example, special beam rotating elements in the form of prisms, as a result of which the beam bundles emitted by the individual emitters are typically spatially rotated by 90 ° (US Pat. No. 5,168,401, EP 0 484 276).
  • the output radiation from the laser diodes passes through a system of two weakly inclined, highly reflecting surfaces such that a suitable reconfiguration of the laser diode bundle results at the output of this system (WO 95/15510). In all cases, a largely symmetrical output bundle is created, which is easy to focus.
  • a disadvantage of these known systems is, in particular, the complexity of the micro-optical elements used, this being particularly true for the beam rotation, in which implementation for larger numbers of emitters in the laser diode bar appears to be extremely difficult, the high adjustment effort of the overall system and the lack of the possibility of inexpensive production of such systems.
  • the object of the invention is to create an optical arrangement for symmetrizing the radiation of a plurality of To create a fixed assignment of laser diodes arranged next to one another, which transforms the output radiation using comparatively simple micro-optical components without loss of radiance with improved optical efficiency and at the same time reducing the dimensions of the arrangement.
  • This object is achieved by the characterizing features of the main claim in conjunction with the features of the preamble.
  • the output beams of the individual emitters each have different radiation angles and are thus at a sufficiently large distance behind the Lens separated in the desired direction perpendicular to the direction of the linear arrangement of the individual emitters.
  • the output radiation of the individual laser diodes or emitters is deflected in the direction of the linear arrangement of the individual laser diodes by a downstream optical deflection element, hereinafter referred to as the directional element, in such a way that at a predetermined distance behind the directional element
  • redirection element a second deflection element, hereinafter referred to as redirection element, is arranged behind the directional element, which deflects the output beam bundles of the individual laser diodes in such a way that the deflection angles generated by the directional element are compensated for again, a simple and inexpensive arrangement for beam shaping provided the opposite the prior art has improved optical efficiency.
  • the symmetry of the radiation is achieved by the multiple deflection.
  • the segmentation of the optical image is brought about by the lateral spacings of the individual emitters and the redirection element matched thereto, the spacings being able to be kept small, so that a high occupancy density of the laser diode bar is made possible.
  • Fig. 3 shows the beam paths at the edge of the
  • Laser diode bar arranged laser diode.
  • 1 denotes a high-power laser diode bar.
  • the laser diode bar 1 has a plurality of individual laser diodes or individual emitters 2 which are arranged next to one another in the y direction and have a fixed spacing from one another.
  • a typical laser diode bar 1 has a dimension of 10 mm in the direction of the juxtaposition (y direction), the individual emitters, for example 16, being arranged in a line.
  • the dimension of the emitters in the y direction varies between approximately 50 ⁇ m and 200 ⁇ m and depends on the specific type of laser diode.
  • each individual laser diode is relatively small in the yz plane shown at the top in FIG. 1, the half opening angle is approximately 6 °. In the direction perpendicular to the y direction (x direction), the dimensions of the individual laser diodes are approximately 1 ⁇ m, the size being predetermined by the epitaxy. The divergence of the output radiation in the in
  • Fig. 1 shown below the x-z plane is significantly larger and the half opening angle is about 30 °. There are areas between the individual laser diodes or emitters in which no radiation is emitted.
  • Laser diodes such that they are linearly arranged in the originally strongly divergent direction (x direction).
  • a collimator microcylinder lens 3 which, as indicated in FIG. 1 below, is tilted about the z-axis, which represents the optical axis.
  • the microcylinder lens 3 is designed so that it has a sufficiently large isoplanasia.
  • the respective output beam bundles 7 of the individual laser diodes 2 are collimated individually, obtained by the inclination of the microcylinder lens 3 different beam angles with respect to the original optical axis (z-axis in FIG. 1) and are thus seen in the x-direction, offset or separated in height.
  • the radiation in the yz direction of the individual laser diodes 2 passes unchanged through the cylindrical lens.
  • a gradient-optical microcylinder lens with a one-dimensional or two-dimensional refractive index profile can be used as the collimator microcylinder lens.
  • Aspherical micro-cylindrical lenses can also be used, but here, with an off-axis arrangement, collimation deteriorates.
  • the use of a Fresnel cylindrical lens, a plano-convex or bioconvex lens including a fiber lens (round cross-section) and a multi-component cylinder optics consisting of two or more of the individual lenses described above is conceivable.
  • An optical directional element 4 which can be designed, for example, as an achromatic lens, is arranged behind the microcylinder lens 3. Instead of
  • Achromatic lenses can also be used, for example a biconvex or plano-convex lens with spherical or aspherical surfaces or a biconvex or plano-convex cylindrical lens.
  • an optical redirection element 5 is arranged, which deflects the beams of the individual laser diodes so that the through
  • Directional element 4 in the y-z plane generated different angles of incidence are corrected, i.e. the inclination angles to the z-axis or optical axis generated by the directional element are compensated again.
  • the redirection element 5 must have linearly arranged different deflection areas in order to achieve the different deflection angles and can for example consist of narrow prismatic bodies. However, the implementation of such a redirection element 5 is quite complex. A simpler embodiment consists of a grating array with deflecting grids. The redirection element 5 can also be designed as a mirror field.
  • the beam bundles of the individual laser diodes 2 run in the same direction with respect to the yz plane, that is to say the radiation from the individual laser diodes 2 lies behind the redirection element in accordance with FIG. at the.
  • the individual bundles 7 continue to maintain their mutually divergent directions.
  • the redirection element 5 is followed by a focusing optics 6, which can consist, for example, of achromats, and the beam bundles 7 of the individual laser diodes 2 can now be reduced very well into a largely symmetrical beam spot both in the yz plane and in the xz plane Concentrate dimension, as can be seen from Fig. 1. In the exemplary embodiment shown, this radiation can then be coupled into an optical fiber 8 with high efficiency.
  • a focusing optics 6 can consist, for example, of achromats
  • GRIN gradient-optical
  • the individual laser diodes 2 are displaced to different extents with respect to the optical axis of the microcylinder lens 3, specifically in such a way that the center ter or the middle laser diodes practically not, the edge emitters, ie the laser diodes 2 lying on the edge of the laser diode bar 1, are most strongly collimated off-axis. This leads to a deflection of the collimated bundles with respect to the z-axis after the microcylinder lens 3. As shown in FIGS.
  • FIGS. 2 and 3 show the different deflections by the achromatic lens 4 for a center emitter and an edge emitter, the radiation for the center emitter being shown in FIG. 2 and the radiation for the edge emitter in FIG. 3.
  • the additional lens effect (divergence reduction) of the achromatic 4 is only of secondary effect.
  • the yz plane (upper representations in FIGS. 2 and 3)
  • all the beam bundles 7 of the individual emitters or individual laser diodes 2 are centered.
  • the angles of incidence with respect to the z axis lie between 0 ° for the center emitter and + approximately 6 ° for the two edge emitters corresponding to the width of the laser diode bar 1 of 10 mm, ie the edge emitters are 5 mm off-axis.
  • the central position of the individual beam bundles 7 is naturally present when the redirection plane lies behind the achromatic lens 4 at a distance of the focal length.
  • the beam width in the y direction in the redirection plane is approximately 10 mm.
  • the width of the beam bundles of the individual emitters or laser diodes 2 of approximately 0.5 to 0.6 results on the redirection element 5 for the dimensions and distances specified above mm, depending on the actual emitter divergence in this plane. For example, in order to be able to separate and separately deflect the associated individual beam bundles for a laser diode bar 1 with 16 emitters, a distance of the bundle 1 focal points in the x direction of 0.6 mm is necessary.
  • the result is an almost symmetrical overall bundle with a bundle cross section of 10 mm x 10 mm in the redirection level, consisting of a series of individual bundles arranged one above the other in the x direction, which in turn are assigned to the individual emitters 2 of the laser diode bar 1 arranged in the y direction are, ie the total radiation in the x-y plane consists of 16 superimposed beams with dimensions in the x direction of 0.6 mm and in the y direction of 10 mm.
  • the symmetry required for the efficient focusing provided below is thus achieved.
  • the redirection element 5 still has to correct the different angles of incidence of the beam bundles of the individual laser diodes 2 shown in FIG. 1 in the yz plane.
  • the correction in the redirection level can in principle be implemented, a different deflection being necessary for each individual beam bundle.
  • these deflection angles are between 0 ° for the beam of the center emitter and 6 ° for the beam of the edge emitter.
  • the individual deflecting regions must have a width of 0.6 mm in the x direction and at least 10 mm in the y direction.
  • a grating array using the possibilities of microstructuring from 16 differently deflecting narrow regions is used, the realization of the grating array with the required maximum deflection angles of only 6 ° grating periods being technically relatively simple is possible.
  • the focusing optics 6 can also be formed from two lenses, between which the redirection element 5 is arranged.
  • a field of cylindrical lenses effective in the xz plane can be connected upstream or downstream of the redirection element 5 in such a way that each area of the redirection element 5 is assigned a cylindrical lens, the width of which in the x or y direction corresponds to the width of the deflection areas of the deflection grating field or the prisms of the prism field or the mirror of the mirror field.

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Semiconductor Lasers (AREA)

Abstract

L'invention concerne un dispositif optique destiné à la symétrisation des rayons d'une pluralité de diodes laser juxtaposées de façon stationnaire, dont le faisceau de sortie respectif est asymétrique par rapport à une première et à une deuxième direction, perpendiculaires l'une par rapport à l'autre. Une lentille cylindrique (3) avec une isoplanasie suffisamment grande est inclinée sur l'axe optique (axe z), lequel est perpendiculaire au plan prédéfini par les deux autres directions (x, y). Cette lentille cylindrique collimate et oriente les faisceaux de sortie des différentes diodes laser dans la première direction (x). Un élément directionnel (4), implanté en aval de la lentille cylindrique (3), dévie les faisceaux des différentes diodes laser (2) dans la seconde direction (y) avec un angle de déviation propre à chaque faisceau de telle manière que les différents faisceaux se recoupent en leur centre de gravité à une distance donnée. Un élément de redéviation (5), situé dans la section postérieure de l'élément directionnel (4), compense à nouveau les différents angles de déviation des faisceaux pour orienter ces derniers dans le sens de l'axe optique (axe z).
EP97945797A 1996-10-28 1997-10-27 Dispositif optique de symetrisation du faisceau de diodes laser Expired - Lifetime EP0934545B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19645150A DE19645150C2 (de) 1996-10-28 1996-10-28 Optische Anordnung zur Symmetrierung der Strahlung von Laserdioden
DE19645150 1996-10-28
PCT/DE1997/002573 WO1998019202A1 (fr) 1996-10-28 1997-10-27 Dispositif optique de symetrisation du faisceau de diodes laser

Publications (2)

Publication Number Publication Date
EP0934545A1 true EP0934545A1 (fr) 1999-08-11
EP0934545B1 EP0934545B1 (fr) 2002-01-23

Family

ID=7810434

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97945797A Expired - Lifetime EP0934545B1 (fr) 1996-10-28 1997-10-27 Dispositif optique de symetrisation du faisceau de diodes laser

Country Status (5)

Country Link
US (1) US6151168A (fr)
EP (1) EP0934545B1 (fr)
JP (1) JP2001502818A (fr)
DE (2) DE19645150C2 (fr)
WO (1) WO1998019202A1 (fr)

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Also Published As

Publication number Publication date
WO1998019202A1 (fr) 1998-05-07
DE19645150A1 (de) 1998-05-14
DE19645150C2 (de) 2002-10-24
JP2001502818A (ja) 2001-02-27
EP0934545B1 (fr) 2002-01-23
DE59706197D1 (de) 2002-03-14
US6151168A (en) 2000-11-21

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