EP0963140A2 - Procédé et dispositif pour la génération de plasma - Google Patents

Procédé et dispositif pour la génération de plasma Download PDF

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Publication number
EP0963140A2
EP0963140A2 EP99890141A EP99890141A EP0963140A2 EP 0963140 A2 EP0963140 A2 EP 0963140A2 EP 99890141 A EP99890141 A EP 99890141A EP 99890141 A EP99890141 A EP 99890141A EP 0963140 A2 EP0963140 A2 EP 0963140A2
Authority
EP
European Patent Office
Prior art keywords
anode
arc
voltage
cathode
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99890141A
Other languages
German (de)
English (en)
Other versions
EP0963140B1 (fr
EP0963140A3 (fr
Inventor
Gerhard Dipl.-Ing. Schwankhart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inocon Technologie GmbH
Original Assignee
Inocon Technologie GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inocon Technologie GmbH filed Critical Inocon Technologie GmbH
Publication of EP0963140A2 publication Critical patent/EP0963140A2/fr
Publication of EP0963140A3 publication Critical patent/EP0963140A3/fr
Application granted granted Critical
Publication of EP0963140B1 publication Critical patent/EP0963140B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements

Definitions

  • the invention relates to a method according to the Preamble of claim 1.
  • the power supply is usually by a Transformer with downstream rectifier formed.
  • the known anode-cathode path with one corresponding to the arc arc voltage Voltage applied, whereby to ignite the arc separate ignition pulse is provided.
  • a plasma emits UV radiation to a considerable extent, which e.g. be used for the sterilization of objects could. However, the one that takes place at the same time Radiation of a significant amount of heat is a problem.
  • the aim of the invention is to avoid these disadvantages and a To propose procedures of the type mentioned at the beginning that it enables plasma to be generated so that it can be used for a wide variety of applications can be used.
  • the proposed measures have the advantage that plasma pulses of very short duration are generated can.
  • plasma pulses which are very high Temperature are also relatively sensitive Materials without damage due to their short duration tolerate to be done, because the over a long time in the material to be treated introduced energy under a harmful limit can be kept.
  • the Plasma generated according to the invention in a charged Keep the workpiece energy at a low level, see above that even sensitive workpieces with such a plasma, whose individual impulses have a high energy density can be.
  • Another object of the invention is a device according to propose the preamble of claim 5, which is for the implementation of the method according to the invention is suitable and is characterized by a simple structure.
  • the proposed measures result in a very simple structure, the pulse times by appropriate Dimensioning of the capacitors and the resistance of the Circle containing anode-cathode path, but also the Charging circuit to determine the corresponding time constant can be set very easily.
  • the features of claim 6 allow a very accurate Define the ignition of the arc, being sure is that the end of the voltage pulse or burning time of the arc due to the discharge of the capacitor bank to a voltage below the arc arc voltage Voltage is determined. This is also in the case of the ignition of the Arc by means of a separate ignition voltage source, that between the individual pulses of the arc goes out and no quiescent current over the anode-cathode path flows.
  • the measures according to claim 6 also allow the Ignition of the arc before reaching the Trigger overturning voltage of the anode-cathode section, whereby the burning time of the arc and thus the Burning time of the plasma pulses can be kept extremely short without a particularly high effort to a particularly low impedance Formation of the discharge circuit of the capacitor bank driven must become.
  • the capacitor bank also as a power supply for the plasma torch technical AC network or a high-frequency AC supplying voltage source in connection with a phase control to use. It must be different Materials manufactured electrodes ensured be that only partially equally polarized half-waves be switched through, so that the different Electrodes always have voltage pulses with the same polarity be created and essentially the same relationships like supplying the plasma torch with DC voltage pulses, e.g. from a capacitor bank.
  • each of the two electrodes has different pulses Polarity.
  • Electrodes are always applied with the same polarity, is generally described in the description and claims of anode and cathode spoken.
  • an is also manufactured plasma for sterilizing objects, especially the interior of hollow objects or pipes intended.
  • very short plasma pulses can also be read for surgical purposes and dental purposes, e.g. instead of laser scalpels, use.
  • Plasma torches come with a relatively smaller size Performance, e.g. Outputs from 0.5kW to 10kW exhibit.
  • the plasma generated according to the invention can also be used very well good for spot welding or making out Use seams produced by welding spots.
  • the plasma torches required to generate the plasma pulse must have an appropriate output, for example 20 kW to 150 kW or more, depending on the parts to be welded. Spot welding of thin sheets can be produced with only one plasma pulse of only a short duration, for example 10 -3 to 10 -5 sec.
  • FIGS. 1 and 2 is one of a electrically insulating material, e.g. Ceramics made provided essentially hollow cylindrical holder 1, in one end area also made of an insulating material manufactured insert 2 is pressed.
  • a electrically insulating material e.g. Ceramics made provided essentially hollow cylindrical holder 1, in one end area also made of an insulating material manufactured insert 2 is pressed.
  • This insert 2 is from a central, a gas supply line 3 forming tube that penetrates the front of the projecting insert 2 ends over the end face of the holder 1.
  • the insert 2 also has two in a diametrical plane lying holes 4 in which serve as abutments Press-fit parts 7 are held, which in turn are held by the souls 5 of leads 6 are interspersed with play.
  • connecting lines 6 are connected to one in FIG. 3 shown power supply connected in a predetermined Frequency delivers voltage pulses.
  • compression springs 8 are supported Contact pins 9, which are soldered to the souls 5, to the outside push.
  • the contact pins 9 are at their free end provided with an end face approach 10 with a Contact surface of a plasma generator 11 cooperates, which in a fastening device arranged on the end face of the holder 1 12 is held as one from an electrical Insulated material manufactured bracket in which the plasma generator 11 is inserted from above.
  • This plasma generator 11 has a connecting part 13 an electrically insulating material, e.g. Ceramics on the tapered in its lower region and an opening 14 on its lower end face having.
  • an electrically insulating material e.g. Ceramics on the tapered in its lower region and an opening 14 on its lower end face having.
  • This opening 14 is from an annular anode 15 enforced in the usual way from an electrically conductive and thermally highly resilient material is manufactured and has a nozzle opening 16 in its mouth region.
  • the anode 15 has a conically widening upwards Area that abuts the inside of the connecting part 13 and which merges into a cylindrical area.
  • An intermediate part 17 is located on the upper end face of the anode 15 at the ring-shaped and made of an electric insulating material, e.g. Ceramics.
  • an electrically good conductive material e.g. Copper
  • an electrically good conductive material e.g. Copper
  • an electrically conductive and thermally highly resilient Material such as Tungsten cerium oxide alloy manufactured is and in the nozzle opening 16 of the anode 15 near End region is conical.
  • the anode 15, as well as the holding part 18 are for fixing the mutual position of the cathode 10 and the nozzle opening 16 of the Anode suitably fitted into the connecting part 13.
  • the anode 15, the intermediate part 17 and the holding part 18 with the pressed cathode 19 form together with the connecting part 13 a module of the device that easily in the holder installed and removed from it.
  • This pressure part 20 acts together with a cover 22 on the a near in the upper end of the connecting part 13 Area arranged external thread 23 is screwed on.
  • the connecting part 13 is with three along a generatrix arranged radial bores 24, 25 provided, of which the Bores 24 the passage of the lugs 10 of the contact pins 9th enable and in the region of the holding part 18 or Anode 15 lie.
  • the bore 25 is in the range of Intermediate part 17 arranged and aligned with a radially extending Inlet 26 of the intermediate part to one through the Inner wall of the intermediate part 17 limited chamber 27 leads to is penetrated by the cathode 19.
  • the bore 25 is aligned when inserted in the holder 1 Plasma generator, which is constructed as a module, also with the in Holder 1 provided gas supply line 3.
  • the connecting lines 6, the insulating jackets 28 with play in the holes 4 of the insert 2 of the holder 1 are guided, withdraw and the plasma generator 11 from above into the Insert bracket 12.
  • the connecting lines 6 be released and the contact pins 9 snap into the holes 24 of the connecting part 13 and secure the position of the Plasma generator 11 in the holder 1.
  • their end faces by means of the springs 8 on the holding part 8, or pressed the anode 15 and so a good electrical contact manufactured.
  • a gas for example helium, CO 2 etc.
  • a gas for example helium, CO 2 etc.
  • FIG. 3 A power supply for a plasma generator according to the Fig. 1 and 2 is shown in FIG. 3.
  • a capacitor bank 30 has a charging resistor 31 with the connections X1 of a controllable DC voltage source 32 connected.
  • the capacitor bank 30 has one permanently connected capacitor 1C1 and one over one Switch 1S1 to this parallel connectable capacitor 1C2 on, both of which are also groups of capacitors can act.
  • This capacitor bank 30 is via connecting lines 33 34th with the plasma generator 11, or not in FIG. 3 shown cathode and anode connected.
  • An R / C element is connected in parallel with the capacitor bank 30, that through a capacitor 1C3 and a resistor 1R1 is formed.
  • This R / C link forms in connection with the choke 1L1 connected in the connecting line 34 an RF blocking circuit which is used to protect the capacitor bank 30 is provided before RF signals.
  • an igniter 35 is connected on the input side to an AC voltage source X2 and provided with a trigger switch 1S2, by its actuation an ignition pulse can be triggered.
  • the capacitor battery 30 is charged during operation according to the set voltage of the DC voltage source 32, e.g. adjustable between 50V and 300V is, and that by the line resistance and the charging resistance with a certain time constant.
  • the capacitor bank 30 discharges accordingly by their capacity and line resistance and the time constant given by the resistance of the arc.
  • the voltage of the capacitor bank drops 30 below the arc arc voltage, so goes out this and the capacitor bank 30 recharges, whereby the process described is repeated and one Frequency results, which is determined by charging and discharging time constants is.
  • the operation of the ignitor is not required.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Ignition Installations For Internal Combustion Engines (AREA)
EP99890141A 1998-05-04 1999-04-30 Procédé et dispositif pour la génération de plasma Expired - Lifetime EP0963140B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT28598U 1998-05-04
AT0028598U AT3549U1 (de) 1998-05-04 1998-05-04 Verfahren und einrichtung zum erzeugen von plasma

Publications (3)

Publication Number Publication Date
EP0963140A2 true EP0963140A2 (fr) 1999-12-08
EP0963140A3 EP0963140A3 (fr) 2002-05-15
EP0963140B1 EP0963140B1 (fr) 2004-09-08

Family

ID=3486492

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99890141A Expired - Lifetime EP0963140B1 (fr) 1998-05-04 1999-04-30 Procédé et dispositif pour la génération de plasma

Country Status (7)

Country Link
US (1) US6225743B1 (fr)
EP (1) EP0963140B1 (fr)
AT (1) AT3549U1 (fr)
CA (1) CA2270072C (fr)
CZ (1) CZ295951B6 (fr)
DE (1) DE59910426D1 (fr)
HU (1) HUP9900992A3 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2807912B1 (fr) * 2000-04-17 2003-06-27 Lasers Et Tech Avancees Bureau Procede et torche a plasma pour traiter une surface dans une cavite, et installation de remplissage bouchage s'y rapportant
DE102010003351A1 (de) 2009-03-26 2010-12-30 Inocon Technologie Gmbh Kolbenmotor mit Plasmainjektionsantrieb
DE102009015510B4 (de) * 2009-04-02 2012-09-27 Reinhausen Plasma Gmbh Verfahren und Strahlgenerator zur Erzeugung eines gebündelten Plasmastrahls

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3447322A (en) * 1966-10-25 1969-06-03 Trw Inc Pulsed ablating thruster apparatus
DE1928757C3 (de) * 1969-06-06 1978-11-23 Messer Griesheim Gmbh, 6000 Frankfurt Schaltungsanordnung zum Stabilisieren und Zünden von Schweißlichtbögen
US4974487A (en) * 1984-10-05 1990-12-04 Gt-Devices Plasma propulsion apparatus and method
FR2611132B1 (fr) * 1987-02-19 1994-06-17 Descartes Universite Rene Bistouri a plasma
DE4008405C1 (fr) * 1990-03-16 1991-07-11 Schott Glaswerke, 6500 Mainz, De
JPH06502468A (ja) * 1990-11-03 1994-03-17 ドーソン　ロイヤルティーズ　リミテッド 電気回路
US5170030A (en) * 1991-04-08 1992-12-08 Thermal Dynamics Corporation Plasma torch electronic pulsing circuit
WO1992019166A1 (fr) * 1991-04-15 1992-11-12 Nauchno-Issledovatelsky Institut Energeticheskogo Mashinostroenia Moskovskogo Gosudarstvennogo Tekhnicheskogo Universiteta Imeni N.E.Baumana Dispositif de traitement chirurgical au plasma de tissus biologiques
US5296665A (en) * 1992-05-19 1994-03-22 Hypertherm, Inc. Method of restarting a plasma arc torch using a periodic high frequency-high voltage signal
JPH06197930A (ja) * 1993-01-06 1994-07-19 Nippon Steel Weld Prod & Eng Co Ltd 使用済み注射針の処理方法およびその装置
US5901551A (en) * 1994-10-24 1999-05-11 Primex Technologies, Inc. Converging constrictor for an electrothermal arcjet thruster
US5924278A (en) * 1997-04-03 1999-07-20 The Board Of Trustees Of The University Of Illinois Pulsed plasma thruster having an electrically insulating nozzle and utilizing propellant bars
DE19806519A1 (de) * 1998-02-17 1999-08-19 Ruediger Haaga Gmbh Vorrichtung zum Sterilisieren von Behältern mittels eines Niederdruckplasmas

Also Published As

Publication number Publication date
HUP9900992A2 (hu) 2000-11-28
DE59910426D1 (de) 2004-10-14
US6225743B1 (en) 2001-05-01
CA2270072A1 (fr) 1999-11-04
EP0963140B1 (fr) 2004-09-08
CZ159799A3 (cs) 2000-05-17
AT3549U1 (de) 2000-04-25
HUP9900992A3 (en) 2002-12-28
CZ295951B6 (cs) 2005-12-14
HU9900992D0 (en) 1999-06-28
EP0963140A3 (fr) 2002-05-15
CA2270072C (fr) 2007-11-13

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