EP1010987A2 - Capteur à effet Hall - Google Patents

Capteur à effet Hall Download PDF

Info

Publication number: EP1010987A2
Authority: EP; European Patent Office
Prior art keywords: hall; hall sensor; voltage; current; measurement
Prior art date: 1998-12-19
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP99124718A

Other languages

German (de)

English (en)

Other versions

EP1010987B1 (fr

EP1010987A3 (fr

Inventor

Mario Motz

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

TDK Micronas GmbH

Original Assignee

TDK Micronas GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1998-12-19

Filing date

1999-12-11

Publication date

2000-06-21

1999-12-11 Application filed by TDK Micronas GmbH filed Critical TDK Micronas GmbH

2000-06-21 Publication of EP1010987A2 publication Critical patent/EP1010987A2/fr

2001-02-14 Publication of EP1010987A3 publication Critical patent/EP1010987A3/fr

2007-08-29 Application granted granted Critical

2007-08-29 Publication of EP1010987B1 publication Critical patent/EP1010987B1/fr

2019-12-11 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

238000005259 measurement Methods 0.000 claims abstract description 48
238000009529 body temperature measurement Methods 0.000 claims abstract description 26
238000012545 processing Methods 0.000 claims description 7
238000010586 diagram Methods 0.000 description 11
238000011161 development Methods 0.000 description 6
230000018109 developmental process Effects 0.000 description 6
239000003990 capacitor Substances 0.000 description 5
230000001419 dependent effect Effects 0.000 description 5
230000000694 effects Effects 0.000 description 5
238000012360 testing method Methods 0.000 description 4
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
238000005516 engineering process Methods 0.000 description 2
238000004519 manufacturing process Methods 0.000 description 2
229910052710 silicon Inorganic materials 0.000 description 2
239000010703 silicon Substances 0.000 description 2
239000013078 crystal Substances 0.000 description 1
230000007423 decrease Effects 0.000 description 1
238000009826 distribution Methods 0.000 description 1
230000005611 electricity Effects 0.000 description 1
238000011156 evaluation Methods 0.000 description 1
230000010354 integration Effects 0.000 description 1
239000000463 material Substances 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
238000003825 pressing Methods 0.000 description 1
238000010079 rubber tapping Methods 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
230000035945 sensitivity Effects 0.000 description 1
238000012549 training Methods 0.000 description 1

Images

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/07—Hall effect devices

Definitions

the invention relates to a Hall sensor according to the preambles of claims 1 and 3.
a well-known disadvantage of silicon as a Hall detector material is the great influence of mechanical ones Loads (the so-called stress), namely the piezo effect and / or piezoresistive Effects (permanent change in resistance when deformed).
they are offset compensated Hall sensors, in particular Hall sensors with orthogonal switching are known (compare for example EP 0 548 391).
the basic idea is one rotationally symmetrical, for example square Hall plate electrically 90 ° back and forth switch here and add or subtract the measured values obtained.
the Hall plate can approximately as a bridge circuit to be viewed as.
the characteristic features of claim 1 are proposed as a technical solution for measuring the stress.
the digital temperature measurement with simultaneous switching off of the Magnetic field measurement uses one or two existing currents of the Hall sensor circuit arrangement and evaluates them in terms of their behavior with given different ones Temperature coefficient.
a Electricity with a predetermined temperature coefficient can be used. This one A second current with a different temperature coefficient can be connected to the current.
the Hall plate also serves as a resistor is used for temperature measurement.
another separate resistor can be used.
a preferred implementation for measuring the Hall voltage proposes the features of claim 13, further developments for the technical implementation being provided by the features of claims 14 to 16.
FIGS. 2a and b The stress measurement of FIGS. 2a and b is based on the same basic principle as the magnetic field measurement 1a and b, but with the difference that the feed of the Hall sensor supply current in the second half phase PH2 directed opposite for feeding the magnetic field measurement.
the consequence is that the Summation of the two orthogonal Hall voltages to compensate for the magnetic field, while the stress-related offset errors do not compensate and therefore as Signal measured and processed. This can reduce the stress caused by stress measured and for examinations and tests of the entire system as well as for compensation be used by errors.
Fig. 5 shows the union of the individual circuit diagrams of Fig. 1a and b, Fig. 2a and b and 3a and b in a basic overall circuit.
switch 2 With an appropriate control of switch 2 the three different measurements (magnetic field, stress, temperature) be carried out with the orthogonal switches.
the DAC current via the internal resistance of the Hall plate 1, the negative feedback signal in converted a negative feedback voltage, whereby the Hall voltage measuring system on Input of the first amplifier 3 is pulled to 0 V on average over time.
This compensates the negative feedback voltage, the Hall voltage, and the digital ADC output signal is a measure of the Hall voltage (delta-sigma converter principle).
FIGS. 7a and b The stress measurement of FIGS. 7a and b and the temperature measurement of FIGS. 8a and b take place analogous.

Landscapes

Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
General Physics & Mathematics (AREA)
Measuring Magnetic Variables (AREA)
Hall/Mr Elements (AREA)
Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)

EP99124718A 1998-12-19 1999-12-11 Capteur à effet Hall Expired - Lifetime EP1010987B1 (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE19858868A DE19858868C2 (de)	1998-12-19	1998-12-19	Hallsensor
DE19858868		1998-12-19

Publications (3)

Publication Number	Publication Date
EP1010987A2 true EP1010987A2 (fr)	2000-06-21
EP1010987A3 EP1010987A3 (fr)	2001-02-14
EP1010987B1 EP1010987B1 (fr)	2007-08-29

Family

ID=7891844

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP99124718A Expired - Lifetime EP1010987B1 (fr)	1998-12-19	1999-12-11	Capteur à effet Hall

Country Status (3)

Country	Link
US (1)	US6362618B1 (fr)
EP (1)	EP1010987B1 (fr)
DE (2)	DE19858868C2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2003040852A3 (fr) *	2001-11-07	2003-07-31	Infineon Technologies Ag	Concept permettant de compenser les effets de variables de perturbation externes sur des parametres fonctionnels physiques de circuits integres
US7345476B2 (en)	2003-08-15	2008-03-18	Systematic Design Holding B.V.	Method and apparatus for measuring an entity of a magnetic field by using a hall plate, an excitation signal and a detection signal

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DE19943128A1 (de) *	1999-09-09	2001-04-12	Fraunhofer Ges Forschung	Hall-Sensoranordnung zur Offset-kompensierten Magnetfeldmessung
AT5315U1 (de) *	2000-05-03	2002-05-27	Austria Mikrosysteme Int	Verfahren zum kompensieren von mechanischen spannungen für die messung der magnetischen feldstärke mittels hallsonden
DE10204427B4 (de) *	2002-02-04	2007-02-22	Infineon Technologies Ag	Verfahren und Vorrichtung zur Kompensation dynamischer Fehlersignale eines Chopped-Hall-Sensors
US6759843B2 (en) *	2002-11-15	2004-07-06	Honeywell International Inc.	Sensing methods and systems for hall and/or MR sensors
NL1025089C2 (nl) *	2003-12-19	2005-06-21	Xensor Integration B V	Magneetveldsensor, drager van een dergelijke magneetveldsensor en een kompas, voorzien van een dergelijke magneetveldsensor.
DE102005028461A1 (de) *	2005-06-17	2006-12-28	Micronas Gmbh	Verfahren zum Testen eines Wafers, insbesondere Hall-Magnetfeld-Sensors und Wafer bzw. Hallsensor
US7239543B2 (en) *	2005-10-28	2007-07-03	Freescale Semiconductor, Inc.	Magnetic tunnel junction current sensors
US7271011B2 (en) *	2005-10-28	2007-09-18	Freescale Semiconductor, Inc.	Methods of implementing magnetic tunnel junction current sensors
US7825845B1 (en)	2007-02-07	2010-11-02	Cirrus Logic, Inc.	Digital output semiconductor magnetic field sensor integrated circuit
US7358880B1 (en)	2007-02-07	2008-04-15	Cirrus Logic, Inc.	Magnetic field feedback delta-sigma modulator sensor circuit
DE102007012214A1 (de) *	2007-03-12	2008-09-18	Micronas Gmbh	Halbleiterbauelement und Verfahren zum Testen eines solchen
US7750628B2 (en) *	2007-06-30	2010-07-06	Cirrus Logic, Inc.	Magnetic field sensor circuit with common-mode voltage nulling
US7750724B2 (en) *	2007-12-20	2010-07-06	Cirrus Logic, Inc.	Temperature and process-stable magnetic field sensor bias current source
US8093890B2 (en) *	2008-10-30	2012-01-10	GM Global Technology Operations LLC	Hall-effect switch circuit allowing low voltage operation
US8215177B2 (en) *	2009-11-16	2012-07-10	Freescale Semiconductor, Inc.	Apparatus and methods for applying stress-induced offset compensation in sensor devices
KR101046029B1 (ko) *	2010-04-23	2011-07-01	삼성전기주식회사	홀 소자 및 자기 센서 회로
US8682937B2 (en) *	2010-05-08	2014-03-25	Lester F. Ludwig	Energy and internal environment management information systems and methods for buildings and campuses
EP2728369B1 (fr) *	2012-01-25	2016-06-15	Asahi Kasei Microdevices Corporation	Circuit de détection de signal de force électromotrice à effet hall et capteur de courant de celui-ci
EP2662675A1 (fr) *	2012-05-07	2013-11-13	Melexis Technologies NV	Procédé destiné à déterminer une valeur de stress pour le stress isotrope, procédé destiné à déterminer un champ magnétique, capteur de stress et capteur Hall
EP2871488B1 (fr) *	2012-06-29	2017-08-16	Asahi Kasei Microdevices Corporation	Dispositif de compensation de force électromotrice de hall et méthode de compensation de force électromotrice de hall
US9164155B2 (en) *	2013-01-29	2015-10-20	Infineon Technologies Ag	Systems and methods for offset reduction in sensor devices and systems
CN103513195B (zh) *	2013-10-21	2016-01-13	深圳市柯雷科技开发有限公司	霍尔传感器测量系统及温度补偿方法
GB201319627D0 (en) *	2013-11-06	2013-12-18	Melexis Technologies Nv	Hall sensor readout system with offset determination using the hall element itself
US9605983B2 (en)	2014-06-09	2017-03-28	Infineon Technologies Ag	Sensor device and sensor arrangement
US9823168B2 (en)	2014-06-27	2017-11-21	Infineon Technologies Ag	Auto tire localization systems and methods utilizing a TPMS angular position index
CN105607018B (zh) *	2016-01-27	2019-05-21	南京邮电大学	一种集成霍尔磁传感器封装应力补偿电路和方法
US10107873B2 (en)	2016-03-10	2018-10-23	Allegro Microsystems, Llc	Electronic circuit for compensating a sensitivity drift of a hall effect element due to stress
US10162017B2 (en)	2016-07-12	2018-12-25	Allegro Microsystems, Llc	Systems and methods for reducing high order hall plate sensitivity temperature coefficients
WO2018092336A1 (fr) *	2016-11-17	2018-05-24	株式会社村田製作所	Capteur de courant
EP3415902B1 (fr) *	2017-06-14	2023-12-27	Rolls-Royce Corporation	Système de profilage de contrainte résiduelle non destructif utilisant une détection inductive
US10520559B2 (en)	2017-08-14	2019-12-31	Allegro Microsystems, Llc	Arrangements for Hall effect elements and vertical epi resistors upon a substrate
CN108377146B (zh) *	2018-04-16	2024-04-02	歌尔科技有限公司	一种霍尔检测电路和智能穿戴设备
PL236388B1 (pl) *	2019-01-31	2021-01-11	Inst Fizyki Jadrowej Im Henryka Niewodniczanskiego Polskiej Akademii Nauk	Sposób pomiaru wartości natężenia pola magnetycznego, wartości i kierunku odkształcenia oraz czujnik do pomiaru natężenia pola magnetycznego, wartości i kierunku odkształcenia
DE102020206571B4 (de)	2020-05-26	2024-10-17	Infineon Technologies Ag	Vorrichtung und verfahren zum ermitteln einer mechanischen spannungskomponente mittels einer hallsensorschaltung
CN113740415B (zh) *	2021-08-05	2024-02-20	沈阳工业大学	一种基于漏磁信号特征的表面缺陷应力检测系统及方法
US12259285B2 (en)	2021-08-13	2025-03-25	Analog Devices, Inc.	Package stress sensor
US12523551B2 (en) *	2021-08-13	2026-01-13	Analog Devices, Inc.	Package stress sensor with hall cancellation
CN113640713B (zh)	2021-10-13	2022-01-07	苏州纳芯微电子股份有限公司	磁场感测元件补偿电路及补偿方法
US12153101B2 (en)	2022-01-27	2024-11-26	Nxp Usa, Inc.	Sensor calibration circuit

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US5055768A (en) *	1990-04-05	1991-10-08	Honeywell Inc.	Temperature compensator for hall effect circuit
DE59109002D1 (de) *	1991-07-31	1998-07-09	Micronas Intermetall Gmbh	Hallsensor mit Selbstkompensation
EP0548391B1 (fr) *	1991-12-21	1997-07-23	Deutsche ITT Industries GmbH	Capteur de Hall avec décalage compensé
DE4302342A1 (en) *	1992-01-28	1993-07-29	El Mos Elektronik In Mos Techn	Offset compensated measurement of magnetic field with Hall element - involves chip-internal electronic compensation with two measurement phases between which measurement and supply connections are interchanged
DE4431703C2 (de) *	1994-09-06	1997-01-30	Itt Ind Gmbh Deutsche	Magnetfeldsensor mit Hallelement
DE19536661A1 (de) *	1995-09-30	1997-04-03	Heidenhain Gmbh Dr Johannes	Magnetische Positionsmeßeinrichtung

1998
- 1998-12-19 DE DE19858868A patent/DE19858868C2/de not_active Expired - Fee Related
1999
- 1999-12-11 DE DE59914478T patent/DE59914478D1/de not_active Expired - Lifetime
- 1999-12-11 EP EP99124718A patent/EP1010987B1/fr not_active Expired - Lifetime
- 1999-12-20 US US09/467,150 patent/US6362618B1/en not_active Expired - Lifetime

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2003040852A3 (fr) *	2001-11-07	2003-07-31	Infineon Technologies Ag	Concept permettant de compenser les effets de variables de perturbation externes sur des parametres fonctionnels physiques de circuits integres
US6906514B2 (en)	2001-11-07	2005-06-14	Infineon Technologies Ag	Concept for compensating the influences of external disturbing quantities on physical functional parameters of integrated circuits
DE10154495B4 (de)	2001-11-07	2012-04-26	Infineon Technologies Ag	Konzept zur Kompensation der Einflüsse externer Störgrößen auf physikalische Funktionsparameter von integrierten Schaltungen
DE10154495C5 (de) *	2001-11-07	2018-01-11	Infineon Technologies Ag	Konzept zur Kompensation der Einflüsse externer Störgrößen auf physikalische Funktionsparameter von integrierten Schaltungen
US7345476B2 (en)	2003-08-15	2008-03-18	Systematic Design Holding B.V.	Method and apparatus for measuring an entity of a magnetic field by using a hall plate, an excitation signal and a detection signal

Also Published As

Publication number	Publication date
DE19858868C2 (de)	2003-06-18
DE19858868A1 (de)	2000-08-10
US6362618B1 (en)	2002-03-26
EP1010987B1 (fr)	2007-08-29
DE59914478D1 (de)	2007-10-11
EP1010987A3 (fr)	2001-02-14

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Publication	Publication Date	Title
EP1010987A2 (fr)	2000-06-21	Capteur à effet Hall
DE102014107504B4 (de)	2021-09-16	Eingangsstufe für temperaturmesssystem
EP3589961B1 (fr)	2021-01-06	Procédé et dispositif de mesure de courant
DE69014927T2 (de)	1995-07-27	Speiseschaltung und Brücken-Messanordnung mit einer Ausgangssignalausgleichsschaltung.
EP0701141A2 (fr)	1996-03-13	Capteur de champs magnétique muni d'un élément de Hall
DE19849910A1 (de)	2000-05-04	Offsetkompensiertes Winkelmeßsystem
EP0528784A1 (fr)	1993-02-24	Procédé pour la détermination d'une grandeur mesurable
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