EP1020908A1 - Harzvergossene elektronische bauelemente vom oberflächenmontierungstyp - Google Patents

Harzvergossene elektronische bauelemente vom oberflächenmontierungstyp Download PDF

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Publication number
EP1020908A1
EP1020908A1 EP98935341A EP98935341A EP1020908A1 EP 1020908 A1 EP1020908 A1 EP 1020908A1 EP 98935341 A EP98935341 A EP 98935341A EP 98935341 A EP98935341 A EP 98935341A EP 1020908 A1 EP1020908 A1 EP 1020908A1
Authority
EP
European Patent Office
Prior art keywords
electronic part
wiring substrate
hole
cover
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98935341A
Other languages
English (en)
French (fr)
Other versions
EP1020908A4 (de
EP1020908B1 (de
Inventor
Masashi TDK Corporation GOTOH
Jitsuo TDK Corporation KANAZAWA
Shuichiro TDK Corporation YAMAMOTO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Publication of EP1020908A1 publication Critical patent/EP1020908A1/de
Publication of EP1020908A4 publication Critical patent/EP1020908A4/de
Application granted granted Critical
Publication of EP1020908B1 publication Critical patent/EP1020908B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/403—Edge contacts; Windows or holes in the substrate having plural connections on the walls thereof
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
    • H03H9/1071—Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the SAW device
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/63—Vias, e.g. via plugs
    • H10W70/635—Through-vias
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65—Shapes or dispositions of interconnections
    • H10W70/657—Shapes or dispositions of interconnections on sidewalls or bottom surfaces of the package substrates, interposers or redistribution layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/60—Seals
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09145—Edge details
    • H05K2201/09181—Notches in edge pads
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621—Components characterised by their electrical contacts
    • H05K2201/10727—Leadless chip carrier [LCC], e.g. chip-modules for cards
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703—Plating
    • H05K2203/0723—Electroplating, e.g. finish plating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
    • H05K3/0052—Depaneling, i.e. dividing a panel into circuit boards; Working of the edges of circuit boards
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing of the conductive pattern
    • H05K3/244—Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/284—Applying non-metallic protective coatings for encapsulating mounted components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341—Surface mounted components
    • H05K3/3431—Leadless components
    • H05K3/3442—Leadless components having edge contacts, e.g. leadless chip capacitors, chip carriers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/072—Connecting or disconnecting of bump connectors
    • H10W72/07251—Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps

Definitions

  • the present invention relates to an improvement in the air-tightness of an electronic part in which an electronic part element is air-tightly encapsulated with a resin wiring substrate and a resin material, particularly to an encapsulation structure of an encapsulated surface-mounting electronic part, suitable for hermetically encapsulating a piezoelectric element such as a surface acoustic wave device in a cavity. That is, the encapsulated surface-mounting electronic part of the present invention has an encapsulated cavity region (vacuum or gas region) and comes under a technical field different from that of resin molding or resin casting for simply shielding an electronic part element from atmosphere.
  • a so-called cavity encapsulation in which a space (vacuum or gas) is formed around the part is required instead of an encapsulation called molding, resin encapsulation or resin casting.
  • the cavity encapsulation is mainly carried out by means of hermetical sealing with a ceramic case, and recently, from the viewpoint of economic performances, the method of hermetical sealing with a resin material is also proposed in JP-A-9-148477, and the like.
  • Figs. 4 and 5 show the outline of the structure of hermetical sealing with a conventional resin material, carried out by the present inventor.
  • 1 indicates a resin wiring substrate, and an electronic part element 5 is spliced and fixed onto the resin wiring substrate 1 through a junction member (e.g., gold) 6.
  • the electronic part element 5 is connected to an outside with a conductor on the wiring substrate 1 and via a through hole 4 formed in the wiring substrate 1 as an electrically conductive through hole.
  • 2 indicates a resin frame substrate, a space necessary for housing the electronic part element 5 is made, a resin cover substrate 3 is placed thereon, and the wiring substrate 1 and the frame substrate 2, and the frame substrate 2 and the cover substrate 3, are hermetically bonded to each other with an adhesive.
  • the resultant set is cut in cutting positions Z to obtain individual electronic parts as shown in Fig. 5.
  • the through hole 4 is connected to the electronic part element 5 housed in a cavity 7 surrounded by the wiring substrate 1, the frame substrate 2 and the cover substrate 3, whereby a surface-mounting electronic part using a semi-cylindrically cut through hole surface 4a as a side electrode for external connection can be constituted, and the function of the electronic part element 5 housed inside can be worked by connecting the through hole surface 4a to an external circuit.
  • Figs. 6 and 7 show enlarged views of a through hole portion of the hermetical sealing structure formed of a resin material shown in Figs. 4 and 5.
  • a Cu plating layer 12 is coated on an inner circumferential surface by Cu plating, and an Au plating layer 13 as an uppermost layer is coated thereon through an Ni plating layer (not shown) by Au plating, for the purpose of electrically connecting conductors 10 and 11 (e.g., Cu copper foil patterns attached to the substrate) on upper and lower surfaces of the resin wiring substrate 1.
  • the purpose in the Au plating is to form a chemically stable surface so that the soldering performance is not degraded when the above surface mounting electronic part is exposed to atmosphere for a long period of time, since the inner surface of the through hole 4 and the external connection surface (lower side in Figure) of the wiring substrate 1 constitute soldering surfaces when the part is used.
  • land pads 10a and 11a are provided on both sides of the through hole 4 for easy plating on the interior of the through hole and securing the reliability of connection to the patterns on the wiring substrate 1.
  • These land pads 10a and 11a are constituted as annular portions integrally formed on end portions of the conductors 10 and 11 on the upper and lower surfaces of the resin wiring substrate 1 so as to surround the entire circumferences of peripheries of the above through hole 4. Further, the above Cu plating layer 12 to the above Au plating layer 13 as an uppermost layer are laminate-formed by the above plating procedures.
  • each bonding surface is roughened by chemical treatment for improving adhesion.
  • the Au land pad surface P which is a bonding surface on the upper surface side of the wiring substrate 1 (A surface formed by coating the Au plating layer 13 on the uppermost layer of the land pad 10a) is chemically stable and is not roughened so that it is a surface having decreased bonding reliability.
  • the minimum bonding surface distance having air-tightness reliability in shielding the cavity 7 from atmosphere is L1 which is considerably smaller than the entire width L0 of the bonding surface.
  • a land-less through hole as shown in Figs. 8 and 9 for narrowing a through hole pitch. Since, however, the contact area of a wiring pattern (conductor) 15 on each surface of the substrate and a conductor 16a on the inner circumference of the through hole 16 is small, the reliability of connection decreases to that degree. For example, the difference thereof is confirmed by a thermal shock test between -40°C and 85°C.
  • the through hole 16 is cut in a semi-cylindrical form and used as a side electrode of the above electronic part, there is caused a problem that the intra-through-hole conductor 16a may peel off due to a mechanical stress caused during the cutting, or that the terminal strength at the time of soldering to an external circuit decreases, and particularly when the through hole is cut in a semi-cylindrical form to be used as a side electrode for connecting the above part to an outside, the above method is improper.
  • the present invention has characteristic features in that a plating layer on the interior surface of the above electrically conductive through hole or groove is constituted of at least two metal layers including an Au layer as an uppermost layer and a Cu layer and has conductors connected to circumferential peripheries of the above electrically conductive hole or groove on the upper and lower surfaces of the above wiring substrate, that the above Cu layer is formed on the conductors, and that the other plating layers including the above Au plating layer are not present on the conductor layer on the above upper surface in the above cover-member-bonding surface but
  • the semi-cylindrical electrically conductive through groove which has a form obtained by nearly dividing a circular electrically conductive through hole into two and is formed in the cover-member-bonding surface on the above wiring substrate is used as a side electrode for external connection.
  • the above electronic part element is preferably a piezoelectric element.
  • the above cover member preferably has a constitution in which a frame body and a cover plate are integrated by bonding them to each other.
  • Fig. 1 is a front cross-sectional view showing the mode of practice of an encapsulated surface-mounting electronic part in which an intermediate portion is omitted.
  • Figs. 2 and 3 are a front cross-sectional view and a plan view of a through hole portion at a stage prior to cutting into individual electronic parts.
  • a through hole 20 is formed by coating and forming a Cu plating layer 12 on an inner circumferential surface by Cu plating, coating and forming an Ni plating layer, etc. (not shown) thereon and then coating and forming an Au plating layer 13 thereon by Au plating, for electrically connecting a conductor 10 (e.g., a Cu foil pattern attached to a substrate) on the upper surface of a resin wiring substrate 1 and a conductor 11 on the lower surface of a resin wiring substrate 1.
  • a conductor 10 e.g., a Cu foil pattern attached to a substrate
  • the land pad 10a which is on the upper surface side of the resin wiring substrate 1 and the conductor 10 which is integrally connected thereto have the Cu plating layer 12 alone formed thereon, and a Cu surface is retained in an exposed state without forming the Ni plating layer and the Au plating layer 13. That is, for improving the adhesion of the resin wiring substrate 1 and a resin frame substrate 2, neither the Ni plating layer nor the Au plating layer 13 is formed on the surface to which the frame substrate 2 is to be bonded.
  • the Ni plating layer and the Au plating layer 13 are formed on the entire region of the Cu plating layer 12 like the inner circumferential surface of the through hole.
  • the resin wiring substrate 1 having the above-described structure of vicinities of the through hole and the resin frame substrate 2 are bonded to each other with an adhesive, and the resin frame substrate 2 and a resin cover substrate 3 are bonded to each other with an adhesive, for encapsulation. Then, the resultant set is cut in a cutting position Z, whereby encapsulated surface-mounting electronic parts as an individual product as shown in Fig. 1 can be obtained.
  • the surfaces where the wiring substrate 1 and the frame substrate 2 are bonded to each other are constituted of a resin and Cu alone, and a bonding surface having highly reliable air-tightness can be obtained by a bonding technique (roughening technique) of a resin substrate. Therefore, the minimum bonding surface distance having air-tightness reliability for shielding a cavity 7, which air-tightly houses an electronic part element 5, from atmosphere is L2 in Fig. 3 and can be brought close into a total width L0, and it can be considerably larger than L1 in a conventional example in Fig. 7.
  • the resin frame substrate 2 (frame body) and the resin cover substrate 3 (frame plate) which are air-tightly bonded to each other constitute a cover member
  • the electronic part element 5 such as a surface acoustic wave device as a piezoelectric element is housed and fixed in the cavity 7 inside the above cover member which is bonded so as to air-tightly cover the resin wiring substrate 1
  • a semi-cylindrical electrically conductive through groove having a form formed by nearly dividing the through hole 20 in Figs. 2 and 3 into two constitutes a side electrode 21 for external connection and functions as a connection conduction path to a bottom surface electrode 22 for external connection which electrode is constituted of an external circuit connection pattern on the lower surface of the wiring substrate 1.
  • the material for the resin wiring substrate 1, the resin frame substrate 2 and the resin cover substrate 3 is, for example, a BT resin (bismaleimide triazine resin), and these can be bonded to each other with a BT resin-containing prepreg.
  • a BT resin bismaleimide triazine resin
  • the other constitution is like the conventional example of the structure of hermetical sealing with a resin material in Figs. 4 to 7, and while the same numbers are assigned to the same or corresponding portions, the explanation thereof is omitted.
  • Each plating layer can be patterned by photolithography according to a conventional method ???.
  • the through hole 20 in Figs. 2 and 3 are cut and nearly divided into two in the cutting position Z to form external connection side electrodes 21 formed of a semi-cylindrical electrically conductive through groove each.
  • the through hole 20 can be retained as it is, to be used as a connection conduction path to the bottom surface electrode 22 for external connection which electrode is constituted of an external circuit connection pattern on the lower surface of the wiring substrate 1.
  • the cover member may be a cap-shaped resin member which is formed so as to have a concave portion inside in the beginning, instead of constituting it by bonding the resin frame substrate 2 and the resin cover substrate 3 to each other.
  • the following test was carried out to compare the structure according to the mode of practice in Figs. 2 and 3 and the conventional structure for reliability of air-tightness.
  • the distance used for shielding the cavity in which an electronic part element is air-tightly sealed from atmosphere can be increased by improving the bonding properties of the cover-member-bonding surface of the resin wiring substrate, so that the reliability of air-tightness can be improved. Further, since a pattern of a Cu layer (land pad) connected to the peripheral vicinities of the electrically conductive through hole or groove is provided on each of the upper surface and the lower surface of the above wiring substrate, the bonding strength of the plated conductor on the inner surface of the above electrically conductive through hole or groove can be fully secured.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
EP98935341A 1997-08-05 1998-08-04 Harzvergossene elektronische bauelemente vom oberflächenmontierungstyp Expired - Lifetime EP1020908B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP22302997 1997-08-05
JP22302997A JP3669463B2 (ja) 1997-08-05 1997-08-05 樹脂封止表面実装型電子部品
PCT/JP1998/003457 WO1999008320A1 (en) 1997-08-05 1998-08-04 Resin-sealed surface mounting type electronic parts

Publications (3)

Publication Number Publication Date
EP1020908A1 true EP1020908A1 (de) 2000-07-19
EP1020908A4 EP1020908A4 (de) 2003-08-20
EP1020908B1 EP1020908B1 (de) 2006-03-22

Family

ID=16791736

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98935341A Expired - Lifetime EP1020908B1 (de) 1997-08-05 1998-08-04 Harzvergossene elektronische bauelemente vom oberflächenmontierungstyp

Country Status (5)

Country Link
US (1) US6281436B1 (de)
EP (1) EP1020908B1 (de)
JP (1) JP3669463B2 (de)
DE (1) DE69833943D1 (de)
WO (1) WO1999008320A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1096566A3 (de) * 1999-10-26 2004-01-14 NRS Technologies Inc. Elektronikelement und sein Zusammenbau
EP1458094A4 (de) * 2002-07-31 2005-04-06 Murata Manufacturing Co Piezoelektrische komponente und herstellungsverfahren dafür

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL133453A0 (en) 1999-12-10 2001-04-30 Shellcase Ltd Methods for producing packaged integrated circuit devices and packaged integrated circuit devices produced thereby
JP3376994B2 (ja) * 2000-06-27 2003-02-17 株式会社村田製作所 弾性表面波装置及びその製造方法
DE10133151B4 (de) * 2001-07-07 2004-07-29 Robert Bosch Gmbh Bauteil mit einem Gehäuse umgebenen Bauelement und Vorrichtung und Verfahren, die bei seiner Herstellung einsetzbar sind
JP3748849B2 (ja) * 2002-12-06 2006-02-22 三菱電機株式会社 樹脂封止型半導体装置
JP3913700B2 (ja) * 2003-04-08 2007-05-09 富士通メディアデバイス株式会社 弾性表面波デバイス及びその製造方法
JP2005033390A (ja) * 2003-07-10 2005-02-03 Citizen Watch Co Ltd 圧電デバイスとその製造方法
US7385463B2 (en) 2003-12-24 2008-06-10 Kyocera Corporation Surface acoustic wave device and electronic circuit device
JP2005286300A (ja) * 2004-03-03 2005-10-13 Mitsubishi Paper Mills Ltd 回路基板
US7679004B2 (en) * 2004-03-03 2010-03-16 Shinko Electric Industries Co., Ltd. Circuit board manufacturing method and circuit board
JP2006067530A (ja) * 2004-08-30 2006-03-09 Fujitsu Media Device Kk 弾性表面波デバイス及びその製造方法
JP2007042993A (ja) * 2005-08-05 2007-02-15 Daisho Denshi:Kk 多層基板の製造方法
JP4582352B2 (ja) * 2007-10-26 2010-11-17 Ｔｄｋ株式会社 表面弾性波素子を含む高周波モジュール部品及びその集合体
KR101099501B1 (ko) * 2008-06-20 2011-12-27 주식회사 아이에스시테크놀러지 테스트 소켓, 전기적 연결장치 및 그 테스트 소켓의제조방법

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3772101A (en) * 1972-05-01 1973-11-13 Ibm Landless plated-through hole photoresist making process
JPS5629389A (en) 1979-08-17 1981-03-24 Nippon Electric Co Printed board
EP0117211B1 (de) * 1983-02-18 1991-04-17 Fairchild Semiconductor Corporation Verfahren zur Herstellung eines Gehäuses für integrierte Schaltungen
JPS59158588A (ja) 1983-02-28 1984-09-08 イビデン株式会社 プリント配線基板
US4560826A (en) * 1983-12-29 1985-12-24 Amp Incorporated Hermetically sealed chip carrier
JPS631383A (ja) 1986-06-18 1988-01-06 Omron Tateisi Electronics Co 圧電アクチユエ−タ
JPH0699473B2 (ja) 1986-08-21 1994-12-07 味の素株式会社 グリシル―グルタミンの製造方法
JP2636537B2 (ja) * 1991-04-08 1997-07-30 日本電気株式会社 プリント配線板の製造方法
US5592025A (en) * 1992-08-06 1997-01-07 Motorola, Inc. Pad array semiconductor device
JPH07106485A (ja) * 1993-09-29 1995-04-21 Citizen Watch Co Ltd 樹脂封止型ピングリッドアレイ
US5467252A (en) * 1993-10-18 1995-11-14 Motorola, Inc. Method for plating using nested plating buses and semiconductor device having the same
JP3365052B2 (ja) 1994-06-21 2003-01-08 日産自動車株式会社 半導体装置
US5467253A (en) * 1994-06-30 1995-11-14 Motorola, Inc. Semiconductor chip package and method of forming
JPH08250827A (ja) * 1995-03-08 1996-09-27 Shinko Electric Ind Co Ltd 半導体装置用パッケージ及びその製造方法並びに半導体装置
JP3105437B2 (ja) * 1995-11-21 2000-10-30 沖電気工業株式会社 半導体素子パッケージ及びその製造方法
US5796589A (en) * 1995-12-20 1998-08-18 Intel Corporation Ball grid array integrated circuit package that has vias located within the solder pads of a package
JP3149352B2 (ja) * 1996-02-29 2001-03-26 インターナショナル・ビジネス・マシーンズ・コーポレ−ション 基板の導体層の形成方法
JPH10125817A (ja) * 1996-10-15 1998-05-15 Hitachi Cable Ltd ２層配線基板
JPH10150260A (ja) * 1996-11-20 1998-06-02 Sumitomo Wiring Syst Ltd プリント配線基板

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1096566A3 (de) * 1999-10-26 2004-01-14 NRS Technologies Inc. Elektronikelement und sein Zusammenbau
EP1458094A4 (de) * 2002-07-31 2005-04-06 Murata Manufacturing Co Piezoelektrische komponente und herstellungsverfahren dafür

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DE69833943D1 (de) 2006-05-11
JP3669463B2 (ja) 2005-07-06
WO1999008320A1 (en) 1999-02-18
EP1020908A4 (de) 2003-08-20
JPH1155069A (ja) 1999-02-26
EP1020908B1 (de) 2006-03-22
US6281436B1 (en) 2001-08-28

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