EP1051601A1 - Detecteur de mesure sans contact de moments de couples - Google Patents

Detecteur de mesure sans contact de moments de couples

Info

Publication number
EP1051601A1
EP1051601A1 EP99961022A EP99961022A EP1051601A1 EP 1051601 A1 EP1051601 A1 EP 1051601A1 EP 99961022 A EP99961022 A EP 99961022A EP 99961022 A EP99961022 A EP 99961022A EP 1051601 A1 EP1051601 A1 EP 1051601A1
Authority
EP
European Patent Office
Prior art keywords
electrode
stator
sensor according
rotor
strips
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99961022A
Other languages
German (de)
English (en)
Inventor
Heinrich Acker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mercedes Benz Group AG
Original Assignee
DaimlerChrysler AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DaimlerChrysler AG filed Critical DaimlerChrysler AG
Publication of EP1051601A1 publication Critical patent/EP1051601A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating

Definitions

  • the invention relates to a sensor for the contactless measurement of torques.
  • a sensor is particularly suitable for the contactless measurement of torques on rotating shafts or disks.
  • a disk is also understood to mean, for example, a flange which is arranged on a shaft.
  • the contactless measurement of the torque is one of the most important sensory problems in automation technology.
  • Applications include the monitoring and control of drives and gearboxes, for example to determine the instantaneous power, the operating resistance and / or damage, for example bearing damage, the monitoring of work processes that are driven by rotating machine parts, e.g. tool monitoring on machine tools, transport of media such as foils, sheets or paper, dynamic consumption optimization in motor vehicles and in robotics.
  • rotor and “rotor -" are used for the rotating element, for example a shaft or a disk or a flange and all rotating components of the devices under consideration, for all other non-rotating components the terms “stator” "and” Stator -... "used.
  • a torque measurement based on strain gauges is generally known. For example, glued to a shaft and usually connected to a bridge.
  • Non-contact measurement is only possible if, instead of a slip ring transmitter, a telemetry device is used that transmits energy to the rotating measuring device on a shaft by means of electromagnetic coupling, just as the measuring signals do in the opposite direction.
  • Methods with slip rings as well as with telemetry have been used for a long time.
  • Capacitive torque sensors are also known, in which capacitances are arranged on a shaft, which basically work as position or strain sensors. Such arrangements are known for example from EP 0 354 386 AI, US 4,866,993. The capacities are placed in such a way that a torsion of the shaft is converted into a change in capacity. The electrical signals resulting from the change in capacitance are transmitted electromagnetically to the stationary part with a separate device or with a slip ring.
  • Telemetry devices are now very expensive and are therefore ruled out for large-scale applications, for example in automotive engineering.
  • the electronics arranged on a shaft unacceptably change the mechanical properties in some applications, e.g. by forming an imbalance. If the rotating electronics are not potted, failures can occur due to the strong acceleration that acts on the electronic circuit. In addition, with such arrangements, repairs and changes are difficult or impossible.
  • AI sensors according to the magnetostriction principle are also known, in which the torque from the magnetic flux is determined by a film glued to a shaft, the permeability of which is dependent on the mechanical tension on the shaft surface. depends on.
  • the problem here is that the magnetostriction principle, due to the irregularity of the foils used, causes an error which is referred to as circulation modulation.
  • such foils require heat treatment, which in many applications is incompatible with the manufacture of the shaft. If a film is completely dispensed with and the magnetostrictive effect of the shaft material is used, the measurement signals become too small. In order to eliminate these disadvantages, special steels are used that are not suitable for many applications due to their high price.
  • the punctiform measurement of an individual sensor of the magnetostrictive type is also susceptible to errors due to bending loads, for example of a shaft. If the sensor is to enclose the shaft in order to avoid this problem, the construction volume and complexity increase considerably.
  • torsional phase shifts between two sample carriers are determined by means of various, for example optical or inductive, methods.
  • the problem here is that the principle of the phase shift requires long waves.
  • Many sensors of this type have a large construction volume, since the space between the fastening points of the sample carriers is also occupied by the sensor.
  • Sensor forms are known in which the space between the fastening points of the sample carriers remains free. But you also need a long, basically free shaft piece to measure on. Such shaft pieces only occur in machines in which the driving force has to be transported. All other shafts are compact with elements for torque absorption and output.
  • the field of application is further restricted by the fact that free shaft pieces are often harsh environments, eg aggressive working media. In principle, a static measurement, ie a measurement with a standing wave, is not possible with this method. This also makes calibration difficult.
  • the torque can also be achieved by converting the tension or expansion into a relative change in position of one rotor part relative to another, which can be measured from the stator without contact using distance sensors.
  • the installation space that they take up - sometimes in the axial, sometimes in the radial direction - speaks against mechanical converters of this type.
  • the object of the invention is to measure the torque, in particular on a rotating shaft or disk, and to combine the following properties in one measuring device:
  • Non-contact measurements no sensor-related imbalance, no rotating electronics, negligible rotation modulation, negligible cross sensitivity for shaft bending when measuring on shafts, smallest size, when measuring on shafts: simple shaft production (straight circular cylinder), for measurements on discs: simple disc production (simple circular disc) , no complicated machine parts, no additional bearings, static measurement and calibration possible, dynamic measurement possible regardless of speed,
  • Torque changes one or more capacitances, the capacitance measurement being carried out either directly or by measuring a bridge voltage. Any method for measuring capacitance can be provided.
  • FIG. 1 shows an embodiment of a sensor according to the invention with rotor and stator electrodes
  • Fig. 2 is a partial sectional view of the shaft shown in Fig. 1;
  • Fig. 3 shows the arrangement of the capacitances of the embodiment shown in Fig. 1;
  • FIG. 4 shows the core and stray field using a strip of the rotor electrode shown in FIG. 1;
  • FIG. 6 shows further embodiments of rotor and stator electrodes of a sensor according to the invention.
  • FIG. 7 shows yet another exemplary embodiment of a sensor according to the invention.
  • FIG. 8 shows a further exemplary embodiment of a sensor according to the invention.
  • FIG. 9 shows a circuit example of a sensor according to the invention with a full bridge
  • FIG. 13 shows the equivalent circuit diagram of a further exemplary embodiment of a sensor according to the invention.
  • FIG. 15 schematically shows a sectional view of a rotor of a further exemplary embodiment of a sensor according to the invention.
  • An embodiment of a sensor shown in FIG. 1, has a shaft W on which very narrow strips are arranged obliquely to the shaft axis, preferably at an angle of 45 °, which form a rotor electrode R.
  • the strips of the rotor electrode R form a periodic pattern which extends over the shaft circumference.
  • a web is arranged in the middle between the strips, which connects all strips in a conductive manner.
  • the structure of the rotor electrode R shown in black in FIG. 1 is made in this exemplary embodiment from a thin, approximately lum thick metal film which is arranged on an insulator film and can be produced, for example, by vapor deposition. The film is attached to the shaft, usually by gluing, as is known, for example, from strain gauges.
  • Stator electrodes SI, S2, S3 are arranged in the immediate vicinity of the shaft and the rotor electrode R.
  • the stator electrodes SI and S3 are capacitively coupled to the strips of the rotor electrode R, the stator electrode S2 forms a capacitive coupling to the central web.
  • the capacitance at the stator electrode S2 is considerably higher than that at the stator electrodes SI or S3, since the entire area of the stator electrode S2 faces the central web of the rotor electrode R.
  • All three stator electrodes SI, S2, S3 follow the shape of an imaginary cylinder jacket, which is located at a short distance, for example 100 ⁇ m. carries to the shaft is arranged.
  • the angle at the circumference of the shaft which is taken up by the stator electrodes SI, S2, S3, is an integer multiple of the angular period of the stripe pattern of the rotor electrode R. This ensures that the capacitance between the rotor and the stator with free, unloaded rotation of the shaft does not change. The sensor thus detects the torque regardless of the speed of the shaft.
  • FIG. 2 shows a partial sectional view through the shaft W and the electrodes stacked one above the other.
  • the insulator D a dielectric, which has a thickness of 100 ⁇ m, for example, is arranged on the shaft W.
  • the rotor electrode R is arranged on the dielectric D.
  • the rotor electrode R is not shown in FIG. 2 any further.
  • the extremely thin layer of the electrode material can be viewed as a two-dimensional structure.
  • An air gap L separates the rotor electrode R from the stator electrode S.
  • the thickness of the air gap can be 100 ⁇ m, for example.
  • the stator electrodes are arranged one behind the other in FIG. 2.
  • FIG. 3 the arrangement of the capacitances of the embodiment described in Figs. 1 and 2 is shown schematically in the form of an equivalent circuit diagram.
  • C2R denotes the coupling capacitance between the center land of the rotor electrode R and the stator electrode S2.
  • the capacitances between the strips of the rotor electrode R and the stator electrodes SI and S3 are designated by CIR and C3R.
  • the stator electrodes S1, S3 and the rotor electrode R each have a capacitance to the shaft itself, which is denoted by C1W, C3W and CRW.
  • CIR, C2R and C3R are mainly important for the measurements to be described below.
  • stator electrodes S1, S2 and S3 are led to the outside as three connections of a differential capacitance to a capacitance measuring device (not shown).
  • a capacitance measuring device (not shown).
  • Each electrode edge in the example that of the rotor electrode R opposite the stator electrode S1, shows a so-called stray field, which is denoted by SF, which is usually neglected in addition to the actual core field designated as KF.
  • SF stray field
  • the area and circumference of the strips of the rotor electrode is chosen to be so small (for example a length of the strips of 10 mm width, a width of 5 ⁇ m) that the capacity of such an arrangement (rotor electrode R - stator electrode S) is due to the fact that it forms on the edge of the electrode Stray field SF is dominated. Since the stray field SF is formed along the circumference of the electrode, the associated proportion of capacitance is not proportional to the area, but to the length. The electrode thus acts as a kind of strain gauge. The strips must not be too close together, because otherwise their fields overlap to form a single one, whereby the stray field SF disappears. Therefore there is an optimum for the strip spacing, because ⁇ C is also proportional to the number of strips.
  • FIGS. 6 to 10 show further exemplary embodiments and possible variations of components of the sensor.
  • FIG. 5 shows a section analogous to FIG. 2.
  • the structure of the rotor electrode R is produced in the form of narrow webs that stand out from the surrounding shaft surface.
  • the black triangles shown in Fig. 5 are the cut surfaces of these webs.
  • the electric field concentrates on these elevations, although the wave W is not isolated from R.
  • the measurement effect is the same as in the example described above, but the field must be recalculated in order to obtain a value ⁇ C ( ⁇ ma ⁇ ) as a measure of the sensitivity.
  • the webs can be produced, for example, by machining processes such as milling, by forming processes or by etching.
  • FIG. 6 schematically shows two simplified exemplary embodiments which can be arranged on the shaft in a particularly space-saving manner.
  • a shape reduced to a sensor capacitance which is only about half the length of the sensor shown above in connection with FIG. 1, because the stator electrode S2 can be made much narrower than in FIG. 1 without significant impairment of the measurement the schematic diagrams as long as C2R is much larger than CIR.
  • the electrode S2 can also be dispensed with.
  • the one on the right Side electrode R0 shown, which is part of the rotor electrode R, then directly establishes the connection to the shaft.
  • the easiest way to implement this shape is in the manner shown in connection with FIG. 5.
  • the problem with this embodiment is the lack of a difference measurement.
  • the coupling electrode S2 has been divided in half onto the edges. Better shielding of the sensor is advantageous here, especially if the film shape is selected. Except for the narrow air gap, the sensor can then be assembled in a shielded housing. There is therefore no capacity available.
  • two sensors are arranged on the same surface in order to make better use of them. If measuring circuits are operated on the stator electrode S2 and the stator electrodes S4a / S4b, which operate at different frequencies with rotor electrodes R1 or R2a / R2b, the corresponding electric fields overlap without the measurements influencing one another. A completely separate working spectrum of the measuring circuits is a prerequisite. The density of the strips can then be doubled overall, but remains the same for each sensor. With this arrangement, a higher accuracy can be achieved because the mean value can be formed from two individual measurements.
  • FIG. 9 schematically shows the equivalent circuit diagram of a sensor which is formed from two arrangements according to FIG. 1 or 7. The designations of the one half correspond to that in FIG. 1, the other half with deleted reference numerals is contributed by an identical second sensor which is arranged next to the first on the same shaft.
  • Ü denotes the supply voltage of the bridge, Um represents the measuring voltage.
  • stator electrodes S1 and S3 should have the largest possible area. It is ideal to make both electrodes cylindrical, i.e. to completely enclose the shaft. In FIGS. 1, 2 and 5-8, a smaller - also possible - electrode shape was only chosen in order to be able to better represent the electrodes.
  • the main advantage is the elimination of further disturbances. If the electrodes are only arranged on one side, a wave impact modulates the measurement signal, even if the difference measurement counteracts this. However, the problem of the wave impact is further reduced by the annular stator electrode. Furthermore, the influence of a bending stress on the shaft can be eliminated because bending deformations from opposite shaft sides are canceled out.
  • stator S can lig performed and assembled or folded around the shaft.
  • the aim should be to come as close as possible to the full circle as the stator electrode S.
  • the 180 ° shape represents the maximum in this case, but is not optimal from the point of view of eliminating the bending stress.
  • stator according to the exemplary embodiment shown on the right in FIG. 10 is made of a highly elastic material which does not undergo any relevant plastic deformation when the sensor is slid on in position S ', the stator S can encompass an enclosing angle of significantly more than 180 °. If the stator electrodes are only arranged at the two opposite ends of the stator, a complete elimination of the shaft bending is possible despite the open, easy-to-install stator.
  • the sensor for torque measurement described above requires structuring the rotor electrode R using methods that have high accuracy and resolution. This is in series production, which is suitable for a film sensor e.g. based on photolithographic processes, no significant problem within the necessary structure sizes.
  • the rotor electrode it should be pointed out that it is not necessary to design the rotor electrode strictly as a comb-like structure as shown in FIG. 1 and in FIGS. 6-8.
  • a meandering structure is also possible if narrow, long stripes are present and can be connected to one another and with a larger area.
  • the meandering shape as a connection between the strips and the coupling surface, ie to the central web of the rotor electrode R, has no significant disadvantages compared to the comb shape if the layer of the rotor electrode has a high conductivity.
  • the meander shape has the advantage, however, that it is already available fully etched in the form of a variety of strain gauge shapes (foil strain gauges). You can on In this way, there is no need to generate the structure and, with commercial strain gauges, the manufacture of sensors is simplified.
  • the measurement of the torque on a shaft has been described above.
  • the invention is not limited to this; it can also be used for contactless torque measurement on a flange or on a disk.
  • One of the most interesting applications for torque measurement is in the drive train of motor vehicles, between the engine and the transmission. There, the installation space is very limited, particularly in the axial direction.
  • the torque-transmitting components in this area which also includes, for example, the clutch or the torque converter in automatic transmissions, are predominantly designed as flanges. In particular, there are hardly any free areas on the shaft pieces. In this case, the free flange surfaces must be used for torque measurement.
  • the torque measurement on a disk or on a flange is described below.
  • the advantage here is the better adaptation to the existing installation space.
  • FIG. 11a shows the basic shape of an embodiment corresponding to FIG. 1, transferred to a flange / disk shape.
  • the rotor electrode R is arranged on the flange, on the inside of which the torque is introduced, for example by a shaft, and on the outside of which the torque is taken off or vice versa.
  • the rotor electrode R has a ring which is concentric with the axis of rotation and which acts on the coupling electrode S2 on the stator, and strips on both sides of the concentric ring which, as in the case of the waveform of the torque sensor shown in connection with FIG. to effect changes in capacity with different signs.
  • the measuring capacities are determined by the strips and the stator electrodes S1, S2 formed, so that the equivalent circuit diagram of FIG. 3 results, in which case W stands for the flange. In this case the capacities for the flange W are C1W, CRW, C3W.
  • FIG. 11b (the lower half of FIG. 11) shows a variant which corresponds to that explained in FIG. 6 on the left-hand side and in connection with the shaft.
  • the result is, as an advantage, a smaller measurement area without a difference measurement.
  • stator electrodes S1, S2 in both cases shown in connection with FIG. 11, it is advantageous to design the stator electrodes S1, S2 in a ring shape in order to maximize the measuring capacity.
  • FIG. 12 Another exemplary embodiment for measuring the torque in connection with a disk-shaped flange is shown in FIG. 12.
  • the embodiment shown in FIG. 12 corresponds with respect to the electrode arrangement to the embodiment shown in FIG. 7 in connection with the shaft and explained above.
  • the stator electrode is divided between the two halves S2a and S2b. This has the following advantages:
  • the electrodes S2a and S2b are at the same potential and can enclose the measuring space as a shield if they are designed in a ring (not shown). Only the air gap between the stator and the rotor can then act as an opening through which interference can be electromagnetically coupled into the measuring space.
  • the capacitances at the stator electrodes S1 and S3 are thus closer together, which can reduce cross-sensitivity to temperature influences, insufficient flatness of the flange and unbalance. The ratio of inner and outer radius in the area of the strips is reduced.
  • the exemplary embodiments shown in connection with FIG. 11 have the advantage that the measuring surface and the coupling surface are flat, which on the one hand facilitates the assembly, for example the adhesive, of the measuring foil, which no longer has to be guided around the shaft. On the other hand, the manufacture of the stator, which also has a flat surface, is facilitated.
  • the measuring surface is therefore advantageously designed as strips in which the outside and inside radius differ by more than 10-20%, the distance between the strips being measured according to the inside radius.
  • a measuring surface with a greater difference between the outer and inner radius should be divided into several independent measuring surfaces that can be connected in parallel.
  • the prerequisite for a difference measurement is two capacities of the same size, which change with the same amount and different sign. To do this, another condition must be met, namely the area of the rotor and stator electrodes, both capacities form. After that, the internal capacity is given a larger radial expansion.
  • the measurement of the torque is not limited to flat washers or flanges. Rather, curved discs or flanges can also be used, in which case the strips can be attached to the curved surface, for example by gluing a very flexible film.
  • the measuring room of the sensors described above i.e. the space in which the variable electric field, which is schematically described in Fig. 4, is arranged, is the air gap between the stator electrode S and the rotor electrode R.
  • the capacitance is inversely proportional to the distance, i.e. to the air gap width.
  • the air gap L should be as narrow as possible.
  • the stator and rotor are separate parts which are connected by bearings and moved against one another and which can also produce vibrations, an air gap of the order of 100 ⁇ m is to be regarded as the lower limit. Not only must it be avoided that the stator electrode S and the rotor electrode R touch temporarily, but also that the distance changes so much that even a difference measurement can no longer eliminate the cross sensitivity.
  • the measuring effect per unit area can only be increased by reducing the distance or filling the measuring room with a dielectric. Liquid dielectrics, especially water, significantly increase the measuring effect, but are only suitable for a few applications.
  • the measurement effect can also advantageously be increased by measurement with the aid of a multilayer film or generally a multilayer electrode arrangement on the rotor, as exemplified in FIGS. 14 and 15 is shown. In this case, the coupling between the rotor and the stator takes place with the aid of several flat electrodes on the rotor and stator side.
  • the sensors with multi-layer electrode arrangements are characterized by at least two pairs of stator electrode / rotor electrode.
  • the measuring space lies firmly on the rotor, for example between layers of a film.
  • the space can be made very narrow, with laminated films up to a size of 10 ⁇ m, when applying an insulating layer by CVD processes, printing processes, vapor deposition, sputtering or other coating processes up to a size of 1 ⁇ m .
  • Distances of the order of 6 ⁇ m are of particular interest because the width and the distance between the measuring strips have to be scaled with the insulation layer thickness and the demands on the structuring technology for the strips up to 1 ⁇ m layer thickness are very high.
  • the equivalent circuit diagram of a sensor with a multilayer electrode arrangement is shown schematically in FIG.
  • the rotor electrode now includes the electrodes R and Rl ', R2', R3 '.
  • the electrode R has the stripe structure as in the exemplary embodiments described above, the electrodes R1 ', R2', R3 'assume the function of the stator electrodes S1, S2, S3 described above in this arrangement, i.e. Rl 'and R3' completely cover the area of the measuring strips.
  • the measuring field shown schematically in FIG. 4 thus forms within the rotor.
  • the air gap L now lies between the electrodes R1 and S1 and between R3 and S3 (not shown in FIGS. 14 and 15). In this way, the following two advantages can essentially be achieved with the same measuring surface:
  • the measuring effect or the sensitivity are increased by the factor resulting from the quotient Air gap width and insulation layer thickness multiplied by the dielectric number of the insulator gives, the coupling capacity between the electrodes Rl 'and Sl and between R3' and S3 was also increased because flat electrodes face each other and not just the striped electrodes on one side.
  • FIG. 14 An exemplary embodiment of an electrode arrangement is shown in section in FIG. 14.
  • FIG. 15 A further exemplary embodiment is shown in FIG. 15, in which case a connection at the edge of the film or through plated-through holes is used to further improve the sensor.
  • the electrodes R1 'and R3' have additional areas under the electrode R, so that the sensitivity is doubled.
  • this sensor meets the highest requirements for immunity to interference because the electrical measuring field is completely shielded.
  • This exemplary embodiment can be realized by using three insulator layers in the film or by using an adhesive which ensures reliable insulation against the mostly metallic shaft.
  • additional stator electrodes S can be provided in the area of the strips of the rotor electrodes R for additional measurement of the speed and / or direction of rotation.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

L'invention concerne un détecteur de mesure sans contact de moments de couples, notamment d'éléments rotatifs. Ce détecteur est caractérisé en ce qu'au moins une électrode rotor, placée sur l'élément, tourne avec ce dernier. Cette électrode rotor présente des bandes parallèles électroconductrices reliées entre elles de façon conductrice et inclinées par rapport à un élément de symétrie de l'élément rotatif. Ces bandes, disposées uniformément sur l'élément rotatif, forment un motif périodique. Leur distance perpendiculaire à la direction longitudinale est choisie de telle façon que les champs de dispersion électriques se formant sur leur bord ne se chevauchent quasiment pas. Ce détecteur présente également au moins une électrode stator qui est espacée de l'électrode rotor par une fente et qui recouvre au moins partiellement l'électrode rotor ainsi qu'un dispositif qui permet de mesurer la capacité d'un couplage capacitif par paires, lequel couplage relie une électrode rotor et la ou les électrode(s) stator(s), et est déterminé principalement par des champs de dispersion électriques.
EP99961022A 1998-11-28 1999-11-29 Detecteur de mesure sans contact de moments de couples Withdrawn EP1051601A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19854959 1998-11-28
DE19854959A DE19854959A1 (de) 1998-11-28 1998-11-28 Sensor zur berührungslosen Messung von Drehmomenten, insbesondere an rotierenden Wellen
PCT/EP1999/009257 WO2000033043A1 (fr) 1998-11-28 1999-11-29 Detecteur de mesure sans contact de moments de couples

Publications (1)

Publication Number Publication Date
EP1051601A1 true EP1051601A1 (fr) 2000-11-15

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EP99961022A Withdrawn EP1051601A1 (fr) 1998-11-28 1999-11-29 Detecteur de mesure sans contact de moments de couples

Country Status (3)

Country Link
EP (1) EP1051601A1 (fr)
DE (1) DE19854959A1 (fr)
WO (1) WO2000033043A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12392743B2 (en) 2020-11-12 2025-08-19 Gea Process Engineering A/S Sensor system for monitoring a powder handling device, and a powder handling device comprising such a sensor system

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Publication number Priority date Publication date Assignee Title
DE20120461U1 (de) 2001-12-18 2002-04-11 Max Streicher GmbH & Co. KG aA, 94469 Deggendorf Vorrichtung zur Messung innerer Kräfte und/oder Momente im Bohrgestänge von Erdbohrmaschinen
DE102004034260B3 (de) * 2004-07-14 2005-12-01 Hirt, Jürgen, Dipl.-Ing. Messanordnung zur Ermittlung von Drehmomenten an Wellen
WO2010000861A1 (fr) * 2008-07-04 2010-01-07 Ident Technology Ag Dispositif capteur capacitif
DE102010036822A1 (de) * 2010-08-03 2012-02-09 Jaudt Dosiertechnik Maschinenfabrik Gmbh Fördervorrichtung und Verfahren zu deren Überwachung
US11598280B2 (en) 2020-04-22 2023-03-07 Dana Heavy Vehicle Systems Group, Llc System and method for measuring torque and speed of an axle

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Publication number Priority date Publication date Assignee Title
US5046371A (en) * 1990-01-08 1991-09-10 Kronberg James W In-line rotating capacitive torque sensor
DE9304629U1 (de) * 1993-03-24 1993-08-19 Killat, Dirk, Dipl.-Ing., 64289 Darmstadt Berührungsloser magnetischer Drehmomentsensor

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Title
See references of WO0033043A1 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12392743B2 (en) 2020-11-12 2025-08-19 Gea Process Engineering A/S Sensor system for monitoring a powder handling device, and a powder handling device comprising such a sensor system

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WO2000033043A1 (fr) 2000-06-08
DE19854959A1 (de) 2000-05-31

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