EP1058065A2 - Ecluse pour une salle blanche - Google Patents

Ecluse pour une salle blanche Download PDF

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Publication number
EP1058065A2
EP1058065A2 EP00110416A EP00110416A EP1058065A2 EP 1058065 A2 EP1058065 A2 EP 1058065A2 EP 00110416 A EP00110416 A EP 00110416A EP 00110416 A EP00110416 A EP 00110416A EP 1058065 A2 EP1058065 A2 EP 1058065A2
Authority
EP
European Patent Office
Prior art keywords
lock
air
chamber
overflow
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00110416A
Other languages
German (de)
English (en)
Other versions
EP1058065B1 (fr
EP1058065A3 (fr
Inventor
Rüdiger Prof. Dr.-Ing. Detzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Imtech Deutschland GmbH and Co KG
Original Assignee
Rud Otto Meyer GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rud Otto Meyer GmbH and Co KG filed Critical Rud Otto Meyer GmbH and Co KG
Publication of EP1058065A2 publication Critical patent/EP1058065A2/fr
Publication of EP1058065A3 publication Critical patent/EP1058065A3/fr
Application granted granted Critical
Publication of EP1058065B1 publication Critical patent/EP1058065B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F9/00—Use of air currents for screening, e.g. air curtains
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Definitions

  • the invention relates to a lock for clean room systems with a limited by two side walls and two door inserts, with a floor and a ceiling with locked lock room essentially cylindrical cross-section of air in the manner of a swirl flow is flowed through, one of the side walls outflow opening / gene has and in the ceiling and / or in the floor area in each case Overflow openings are provided for the air flowing through the lock space are, as well as with an inflow and a return air chamber.
  • Locks for clean room systems allow entry or exit from the associated premises, in which special, for special manufacturing necessary environmental conditions (in particular with regard to the required absence of particles in the air).
  • Such locks are for example from DE 36 04 422 known.
  • the air is increased with adjustable slit nozzles Injected velocity, aimed at surfaces of To be able to blow off adhering particles or materials.
  • This Locks therefore require considerable pressure differences to operate on the blower, so that during their operation due to the high pressure loss on the one hand, high energy consumption can be expected must, and on the other hand due to this high pressure loss and the resulting fan parameters a high noise level given is.
  • this construction is also a complex one Construction connected, which is not an economical design allows.
  • the lock itself consists of two double-walled side walls and two door inserts, the inner walls of which together with one Ceiling and a floor border delimit the lock room.
  • the one of the side walls is designed as an inflow chamber, the inner wall is the wall of the lock room; the outer wall of this inflow chamber has at least one air-permeable area that is designed as a filter wall. Air can enter through this filter wall flow into the lock system, which is cleaned in the filter and so on is fed to the lock with the required purity.
  • the other the side walls form an overflow channel for the air, which in the Aspirated floor area and to the return air chamber above the ceiling which is a blower with an intake pipe led into the return air chamber is placed, flows, the inner wall of the lock room also limited.
  • the overflow channel forms the essentially cylindrical basic shape of the lock room.
  • the inner wall of the inflow chamber has at least one at least over a part of their height, essentially axially parallel Outflow opening.
  • several are slit-shaped Ausströmöffnugen provided, which are then parallel to the axis of the Interior of the lock are aligned.
  • These are advantageous Outflow opening (s) off-center on the inner wall to one of the Door inserts offset. It is advantageous if the outflow opening / genes are shifted towards the door insert that opposite the door insert assigned to the clean room or at an angle to it is arranged horizontally. By this shift to close to the Backflow vortexes are avoided, right into the passage and post-flows in the area of the cylindrical interior suppressed.
  • the outer wall of the inflow chamber is provided with an air permeable area, which as Filter wall is formed.
  • the air flow through the airlock is set so that that the exit velocity of the air from the outlet opening (s) is in the range from 5 m / s to 25 m / s.
  • outflow openings can have a number of arranged in an axially parallel alignment
  • Individual openings can be provided, for example rounded or can be rectangular; alternatively it is Outflow opening of at least one essentially slit-shaped Opening formed, the total area is dimensioned such that the desired exit speed is obtained.
  • the Outflow opening advantageously arranged so that its height at most 75% of the height of the cylindrical interior of the lock is.
  • the air is extracted from the airlock through both Ceiling and near the floor through overflow openings.
  • another of the air chambers has an overflow channel, one under the floor Backflow chamber formed or provided near the ground with a return air chamber connects above the ceiling.
  • the one of the overflow openings preferably the one in the ceiling, is formed by an inlet nozzle, while the other overflow opening, preferably near the ground, forms an annular gap.
  • the surfaces of these are advantageous Overflow openings approximately equal to the area of the outflow opening / gene.
  • a bottom backflow chamber for suction near the floor a bottom backflow chamber is arranged in the bottom and one in the bottom Annular gap provided, which - apart from support struts - a full circle forms. The air extracted in this way flows through this annular gap into the bottom backflow chamber and further through the overflow channel into the return air chamber above the ceiling.
  • a second embodiment is for suction close to the floor in the inner wall of the Overflow chamber forming side wall arranged annular gap is provided. This annular gap forms a horizontal, just over circle segment lying on the floor and directs the circle segment emerging from the lock Air in a backflow chamber close to the ground.
  • the air is advantageously sucked out of the lock space so that the one of the overflow openings with a significantly larger volume flow is acted upon; divisions have proven to be advantageous in the range of 60%: 40% to 90%: 10%.
  • the Areas of the respective overflow openings are essentially the same Relationship to each other.
  • the air flow in the lock is blocked a fan, which is placed on the lock, causes air sucked out of the lock through the overflow openings.
  • the outflow opening is in the inner wall of the inflow chamber off-center to one of the Door inserts offset towards each other, so that the outflowing air is not directed towards the center of the lock room.
  • the whole The area of the outflow opening / genes is chosen such that this desired exit speed is achieved.
  • the height of the area of the outflow opening / gene is highest 75% of the height of the essentially cylindrical lock room having.
  • the outflow opening is preferably to the side that of the overflow openings arranged offset over the the larger volume flow is discharged.
  • Equivalent to the transfer is also an enlargement provided in the direction of displacement the area of the outflow opening, which at a slit-shaped Outflow opening by wedge shape or, in the case of individual openings, by an increase reached their area or by decreasing the distances between them becomes.
  • the surfaces of the overflow openings are thus in relation to one another in the ratio as it is the ratio of the two volume flows corresponds.
  • each of the overflow openings is formed each a sink flow, which overlap in the lock room and so for the air flowing in through the outflow opening stimulate swirl flow forming in the lock space.
  • Double suction is formed at both ends of the lock room a swirl flow at which the component of tangential velocity increases towards the center.
  • the blower for suction is on the Return air chamber attached, which results in a space-saving arrangement: it goes without saying that other blower arrangements possible are.
  • the blow-out of the fan opens into a transfer duct, which with a covering the filter wall Air chamber is connected and through which the suctioned out of the lock Air is blown out as recirculating air in this air chamber and in the filter wall is cleaned, and the lock is closed again.
  • the circulating air duct is advantageously provided with outflow means, inflow openings are also provided to supplement the outflow Air. This allows for partial air exchange, while it according to experience, it is sufficient if - depending on the load on the lock - 5% up to 20% of the circulated air, especially to dissipate the heat loss of the blower, removed and replaced by as much supply air becomes.
  • the outflow means can be adjusted to match this ratio, preferably designed to be adjustable: as a controlled variable For example, the air temperature can be selected.
  • Figures 1, 2 and 3 show those designed for use in clean rooms Lock 1, which is designed here as a straight through lock is.
  • the side walls of the lock 1 are from a supply air chamber 10, an overflow chamber 20 and two door inserts 5 'and 5 '', of which one door insert 5 '(not shown in detail) Clean room is assigned while the other door insert 5 '' arranged opposite or at an angle to the access forms.
  • the door inserts 5 'and 5' ' are with each other (possibly locked) doors 5.1 provided (Fig. 1, 2).
  • the so conceived Lock 1 can also be set up as a corner lock (Fig.
  • the ceiling of the lock 1 is formed by a return air chamber 4, the wall 4.1 lying towards the lock with an inlet nozzle 28 formed overflow opening is provided, and on which a blower attachment 6 is placed, the impeller 6.1 - here one without drive drawn freewheeler - sucks air; this is the intake 7 in the Return air chamber 4 out.
  • a second suction is under the floor the lock 1 provided; the floor is covered by a floor backflow chamber 25 formed, the cover 25.1 the bottom of the interior 2 the lock forms.
  • the one provided in this cover 25.1 of the floor Overflow opening 26.1 is formed here as an annular gap, which - apart from radial support struts - forms a full circle.
  • the overflow channel 23 has both to the bottom backflow chamber 25 and also to the return air chamber 4 openings 24 through which the air enters or leaves can flow out.
  • the air extracted by the blower 6 is released into the environment blown out.
  • blow 8 of the blower 6 are at least here one of the sides of the blower attachment 6 arranged grid.
  • the negative pressure that forms in the interior 2 of the lock 1 lets air out of the inflow chamber 10 through outflow openings 18 get into the interior 2; in this they overlap near the ceiling and the near-bottom sink currents of the overflow openings 28 in the ceiling 26.1 or 26.2 in the floor area, and force the air flowing into the swirl flow.
  • the inflow chamber 10 has a space that delimits the interior of the lock 2 Inner wall 11 with circular segments 11.1 so that the cross section of the interior 2 is essentially cylindrical represents.
  • the outer wall 12 has an air-permeable area 14, in which a filter 15 of sufficient filter quality is arranged is that ensures that the inflowing air the required Purity level.
  • the inflow takes place via the Outflow openings 17 (Fig. 2, 3: drawn in as a double line; details s. Fig. 6).
  • the overflow opening 26.1 - here only in the area the bottom cover 25.1 shown - is designed as an annular gap, which runs close to the circular segment-like formations 21.1.
  • the overflow opening 28 provided in the ceiling area - not closer shown - is designed as a central overflow opening: it is advantageous by means of an inlet nozzle known from fans educated. It goes without saying that the annular gap Overflow opening in the ceiling area and / or the central Overflow opening can be provided in the bottom area.
  • FIGS. 4 and 5 show a lock 1 designed as a recirculation unit, whose structure corresponds to the exhaust air lock according to FIGS. 1-3.
  • the circulating air chamber 30 is assumed to cover the air-permeable area 14 of the outer wall 12 covered with the filter 15 used.
  • the through the exhaust opening 34 outflowing air enters the interior of the air circulation chamber 30 and flows from there through those provided in the air-permeable area 14 Filter 15 in the inflow chamber 10 and from there also in the above Way through the lock 1.
  • an inclined air distributor 33 can be provided. To prevent the fan from heating up, for example, part of the circulated air is discharged.
  • an im Pressure area of the blower 6 arranged discharge opening 34 which here is shown as an attached nozzle.
  • a throttle 36 allows that Setting the exhaust air flowing out of the pressure range.
  • the so discharged air is supplemented via a post-flow opening 37 which is provided in the area of the air circulation chamber 30 and thus in one area reduced pressure.
  • This inflow opening can also provided with means for adjusting the flow of the inflowing air be (e.g. with pressure-dependent, automatic adjusting devices).
  • the outer wall 32 is provided with doors (not specified); these are used to maintain the filters through these doors as well can be changed if clogged.
  • FIGS. 6a-6c show different designs of the outflow openings 17, the illustration here also showing the eccentric arrangement of the outflow opening 17 reveals:
  • the alignment of the outflow opening - indicated by dash-dotted lines - is distant from the center line - Long / short dashed lines - the inner wall 11 of the Side wall 10.
  • An outflow opening 11 can be approximately from the bottom area Continuous slot provided to the ceiling area (Fig. 6a) his.
  • This outflow opening 17 can also be of a number of vertical Single openings aligned are formed (Fig. 6b).
  • the continuous slot can also be in the form of two (or more) slits arranged side by side can be formed (Fig. 6c).

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
EP00110416A 1999-06-04 2000-05-16 Ecluse pour une salle blanche Expired - Lifetime EP1058065B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29909803U 1999-06-04
DE29909803U DE29909803U1 (de) 1999-06-04 1999-06-04 Schleuse für Reinraum-Anlagen

Publications (3)

Publication Number Publication Date
EP1058065A2 true EP1058065A2 (fr) 2000-12-06
EP1058065A3 EP1058065A3 (fr) 2002-12-18
EP1058065B1 EP1058065B1 (fr) 2005-04-27

Family

ID=8074389

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00110416A Expired - Lifetime EP1058065B1 (fr) 1999-06-04 2000-05-16 Ecluse pour une salle blanche

Country Status (3)

Country Link
EP (1) EP1058065B1 (fr)
AT (1) ATE294362T1 (fr)
DE (2) DE29909803U1 (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3604422A1 (de) 1986-02-13 1987-08-20 Kessler & Luch Gmbh Vorrichtung zum saeubern kontaminierter oberflaechen mittels stroemender luft

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3285693A (en) * 1966-11-15 Apparatus for decontaminating personnel
JPS6071837A (ja) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd エアシヤワ−装置
JPS62106247A (ja) * 1985-11-05 1987-05-16 Hitachi Ltd エアジエツトノズルおよびそれを用いたエアシヤワ−装置
JPS62225838A (ja) * 1986-03-26 1987-10-03 Nippon Air Curtain Kk エア−シヤワ−装置
JP3246182B2 (ja) * 1994-04-28 2002-01-15 日立プラント建設株式会社 エアシャワー装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3604422A1 (de) 1986-02-13 1987-08-20 Kessler & Luch Gmbh Vorrichtung zum saeubern kontaminierter oberflaechen mittels stroemender luft

Also Published As

Publication number Publication date
EP1058065B1 (fr) 2005-04-27
EP1058065A3 (fr) 2002-12-18
ATE294362T1 (de) 2005-05-15
DE50010142D1 (de) 2005-06-02
DE29909803U1 (de) 2000-08-17

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