EP1106826A3 - Durchflussregelung mittels einer Flüssigkeitsverdrängerpumpe - Google Patents

Durchflussregelung mittels einer Flüssigkeitsverdrängerpumpe Download PDF

Info

Publication number: EP1106826A3
Authority: EP; European Patent Office
Prior art keywords: positive displacement; flow rate; rate control; diaphragm; liquid pump
Prior art date: 1999-02-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP00126636A

Other languages

English (en)

French (fr)

Other versions

EP1106826B1 (de

EP1106826A2 (de

EP1106826B9 (de

Inventor

Kuniaki Horie

Kiwamu Tsukamoto

Kenji Kamoda

Hirotake Yamagishi

Shinya Uemura

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ebara Corp

Original Assignee

Ebara Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1999-02-12

Filing date

2000-12-04

Publication date

2003-05-02

1999-02-12 Priority claimed from JP11034399A external-priority patent/JP2000230910A/ja

2000-12-04 Application filed by Ebara Corp filed Critical Ebara Corp

2001-06-13 Publication of EP1106826A2 publication Critical patent/EP1106826A2/de

2003-05-02 Publication of EP1106826A3 publication Critical patent/EP1106826A3/de

2008-05-07 Publication of EP1106826B1 publication Critical patent/EP1106826B1/de

2008-12-24 Application granted granted Critical

2008-12-24 Publication of EP1106826B9 publication Critical patent/EP1106826B9/de

2020-12-04 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

238000006073 displacement reaction Methods 0.000 title abstract 4
239000007788 liquid Substances 0.000 title 1
239000012530 fluid Substances 0.000 abstract 1
238000000034 method Methods 0.000 abstract 1
238000005086 pumping Methods 0.000 abstract 1

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/07—Pressure difference over the pump

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Reciprocating Pumps (AREA)
Control Of Positive-Displacement Pumps (AREA)
Formation Of Insulating Films (AREA)

EP00126636A 1999-02-12 2000-12-04 Durchflussregelung mittels einer Flüssigkeitsverdrängerpumpe Expired - Lifetime EP1106826B9 (de)

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
JP11034399A JP2000230910A (ja)	1999-02-12	1999-02-12	基板の付着異物検査装置および付着異物除去装置および付着異物除去方法
JP343399		1999-12-02
JP2000217926A JP3844418B2 (ja)	1999-02-12	2000-07-18	容積式送液装置
JP2000217926		2000-07-18

Publications (4)

Publication Number	Publication Date
EP1106826A2 EP1106826A2 (de)	2001-06-13
EP1106826A3 true EP1106826A3 (de)	2003-05-02
EP1106826B1 EP1106826B1 (de)	2008-05-07
EP1106826B9 EP1106826B9 (de)	2008-12-24

Family

ID=82943391

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP00126636A Expired - Lifetime EP1106826B9 (de)	1999-02-12	2000-12-04	Durchflussregelung mittels einer Flüssigkeitsverdrängerpumpe

Country Status (5)

Country	Link
EP (1)	EP1106826B9 (de)
JP (1)	JP3844418B2 (de)
KR (1)	KR100710914B1 (de)
DE (1)	DE60038775D1 (de)
TW (1)	TW500822B (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
RU2208180C2 (ru) *	2001-04-20	2003-07-10	Российский Федеральный Ядерный Центр - Всероссийский Научно-Исследовательский Институт Экспериментальной Физики	Дозировочный насос (варианты)
WO2005077489A1 (ja) *	2004-02-18	2005-08-25	Koganei Corporation	フィルタおよび薬液吐出装置
JP2007291857A (ja) *	2006-04-20	2007-11-08	Nidec Sankyo Corp	定量ポンプ装置
WO2010004721A1 (ja)	2008-07-08	2010-01-14	パナソニック株式会社	導電性高分子を用いた流体搬送装置
AU2010213344B2 (en) *	2009-02-13	2014-07-24	Davey Water Products Pty Ltd	Controller for a liquid supply pump
EP2845043A4 (de)	2012-05-02	2015-12-16	Fujikura Ltd	Runde optische kabel mit kleinem durchmesser und einer bandartigen faseroptischen struktur
WO2014174957A1 (ja)	2013-04-24	2014-10-30	株式会社村田製作所	カフ圧制御装置
KR101879033B1 (ko) *	2016-03-31	2018-08-20	주식회사 포스코	유체량 조절장치
RU2636948C1 (ru) *	2016-11-30	2017-11-29	Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева-КАИ" (КНИТУ-КАИ)	Устройство подачи, измерения, регулирования количества и расхода жидкости
GB2575638A (en)	2018-07-16	2020-01-22	Weir Minerals Netherlands Bv	Pumping system
JP2023020185A (ja) *	2021-07-30	2023-02-09	株式会社コガネイ	液体供給装置
KR102774533B1 (ko) *	2022-11-24	2025-03-04	세메스 주식회사	액 공급 장치 및 이를 포함하는 기판 처리 장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0529334A2 (de) *	1991-08-28	1993-03-03	Mks Instruments, Inc.	Flüssigkeitsabgabe und Verdampfungssystem
WO1996004409A1 (en) *	1994-08-01	1996-02-15	Franz Hehmann	Selected processing for non-equilibrium light alloys and products
EP0860608A2 (de) *	1997-02-24	1998-08-26	Ebara Corporation	Als Membranpumpe ausgebildete Vorrichtung zum Befördern von Flüssigkeit
WO1999023494A1 (de) *	1997-11-03	1999-05-14	Lang Apparatebau Gmbh	Vorrichtung zur dosierüberwachung einer membranpumpe

2000
- 2000-07-18 JP JP2000217926A patent/JP3844418B2/ja not_active Expired - Fee Related
- 2000-11-29 TW TW089125285A patent/TW500822B/zh not_active IP Right Cessation
- 2000-12-01 KR KR1020000072337A patent/KR100710914B1/ko not_active Expired - Fee Related
- 2000-12-04 EP EP00126636A patent/EP1106826B9/de not_active Expired - Lifetime
- 2000-12-04 DE DE60038775T patent/DE60038775D1/de not_active Expired - Fee Related

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0529334A2 (de) *	1991-08-28	1993-03-03	Mks Instruments, Inc.	Flüssigkeitsabgabe und Verdampfungssystem
WO1996004409A1 (en) *	1994-08-01	1996-02-15	Franz Hehmann	Selected processing for non-equilibrium light alloys and products
EP0860608A2 (de) *	1997-02-24	1998-08-26	Ebara Corporation	Als Membranpumpe ausgebildete Vorrichtung zum Befördern von Flüssigkeit
WO1999023494A1 (de) *	1997-11-03	1999-05-14	Lang Apparatebau Gmbh	Vorrichtung zur dosierüberwachung einer membranpumpe

Also Published As

Publication number	Publication date
TW500822B (en)	2002-09-01
KR20010062048A (ko)	2001-07-07
DE60038775D1 (de)	2008-06-19
EP1106826B1 (de)	2008-05-07
JP3844418B2 (ja)	2006-11-15
EP1106826A2 (de)	2001-06-13
EP1106826B9 (de)	2008-12-24
JP2001221163A (ja)	2001-08-17
KR100710914B1 (ko)	2007-04-27

Legal Events

Date	Code	Title	Description
2001-04-27	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2001-06-13	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
2001-06-13	AX	Request for extension of the european patent	Free format text: AL;LT;LV;MK;RO;SI
2003-03-14	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
2003-05-02	AK	Designated contracting states	Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
2003-05-02	AX	Request for extension of the european patent	Extension state: AL LT LV MK RO SI
2004-01-02	17P	Request for examination filed	Effective date: 20031021
2004-01-21	AKX	Designation fees paid	Designated state(s): DE FR GB
2005-05-25	17Q	First examination report despatched	Effective date: 20050412
2007-11-06	GRAP	Despatch of communication of intention to grant a patent	Free format text: ORIGINAL CODE: EPIDOSNIGR1
2008-03-28	GRAS	Grant fee paid	Free format text: ORIGINAL CODE: EPIDOSNIGR3
2008-04-04	GRAA	(expected) grant	Free format text: ORIGINAL CODE: 0009210
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