EP1138948A2 - Kühlvorrichtung für eine Vakuumpumpe - Google Patents

Kühlvorrichtung für eine Vakuumpumpe Download PDF

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Publication number
EP1138948A2
EP1138948A2 EP01106165A EP01106165A EP1138948A2 EP 1138948 A2 EP1138948 A2 EP 1138948A2 EP 01106165 A EP01106165 A EP 01106165A EP 01106165 A EP01106165 A EP 01106165A EP 1138948 A2 EP1138948 A2 EP 1138948A2
Authority
EP
European Patent Office
Prior art keywords
cooling
coolant
supply path
supply
subsidiary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01106165A
Other languages
English (en)
French (fr)
Other versions
EP1138948A3 (de
Inventor
Hiroyuki c/o K.K. Toyoda Jidoshokki Ishigure
Yuji c/o K.K. Toyoda Jidoshokki Hashimoto
Masahiro c/o K.K. Toyoda Jidoshokki Ida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyoda Jidoshokki Seisakusho KK
Toyoda Automatic Loom Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Jidoshokki Seisakusho KK, Toyoda Automatic Loom Works Ltd filed Critical Toyoda Jidoshokki Seisakusho KK
Publication of EP1138948A2 publication Critical patent/EP1138948A2/de
Publication of EP1138948A3 publication Critical patent/EP1138948A3/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/19—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum

Definitions

  • the present invention relates to a cooling apparatus for cooling a vacuum pump, which performs a sucking operation, by the transfer operation of gas transfer member.
  • the vacuum pump disclosed in Japanese Unexamined Patent Publication No. 5-118290 is rotated with a pair of rotors in mesh with each other.
  • the rotation of a plurality of rotors in mesh with each other moves an exhaust gas.
  • Such a vacuum pump includes a cooling apparatus for removing the heat generated during the process for compressing the exhaust gas.
  • the cooling apparatus generally cools the surface of the housing into which the rotors are built.
  • the object of the present invention is to provide a cooling apparatus for properly cooling a plurality of cooling areas of a vacuum pump with a single coolant supply system.
  • a cooling apparatus for a vacuum pump comprising a main coolant supply path arranged to cool at least one of a plurality of cooling areas of a vacuum pump, a subsidiary coolant supply path arranged to cool at least one of a plurality of the cooling areas by supplying the coolant from the main coolant supply path, and supply switching means for switching between the supply permit mode in which the coolant can be supplied to the subsidiary coolant supply path and the supply prohibit mode in which the coolant cannot be supplied to the subsidiary supply path.
  • the supply switching means is in the supply permit mode
  • the coolant in the main supply path is supplied to the subsidiary supply path.
  • the supply switching means is in the supply prohibit mode, on the other hand, the coolant in the main supply path is not supplied to the subsidiary supply path.
  • the configuration in which the supply switching means is switched between the supply permit mode and the supply prohibit mode is effective for properly cooling, with a single coolant supply system, the cooling areas cooled by supplying the coolant to the subsidiary supply path.
  • a cooling apparatus for a vacuum pump further comprising switching control means for electrically switching the supply switching means between the supply permit mode and the supply prohibit mode, and temperature detection means for detecting the temperature of the subsidiary supply path or the cooling areas cooled by the coolant supplied to the subsidiary supply path, wherein the switching control means controls the supply switching means in such a manner that the temperature of the cooling areas cooled by the coolant supplied to the subsidiary supply path is converged to a predetermined temperature, based on the temperature detection information from the temperature detection means.
  • the switching control means turns the supply switching means to the supply permit mode. Once the supply switching means is turned to the supply permit mode, the coolant is supplied to the subsidiary supply path, thereby decreasing the temperature of the cooling areas cooled by the coolant supplied to the subsidiary supply path. In the case where the temperature detected by the temperature detection means fails to reach a predetermined level, on the other hand, the switching control means turns the supply switching means to the supply prohibit mode. Once the supply switching means turns to the supply prohibit mode, the temperature of the cooling areas increases.
  • a cooling apparatus for a vacuum pump wherein the switching control means is cooled by the coolant on the main supply path, and the switching control means is arranged upstream of the supply switching means in the main supply path.
  • An increase in the temperature of the switching control means for electrically controlling the supply switching means leads to a control failure.
  • the configuration in which the switching control means is cooled upstream of the supply switching means is effective for positively avoiding the control failure which otherwise might be caused by an increased temperature of the switching control means.
  • a cooling apparatus for a vacuum pump in which gas transfer members are driven by an electric motor which in turn is cooled by the coolant on the main supply path, and the electric motor is arranged upstream of the supply switching means in the main supply path.
  • An increased temperature of the electric motor shortens the service life of the electric motor.
  • the configuration in which the electric motor is cooled upstream of the supply switching means is effective for avoiding the shortening of the service life of the electric motor which otherwise might be caused by an increased temperature of the electric motor.
  • a first embodiment of the present invention implemented with a multistage Roots pump will be explained below with reference to Figs. 1 to 5.
  • a front housing 13 is coupled to the front end of a rotor housing 12 of a multistage Roots pump 11.
  • a seal member 10 is coupled to the front housing 13.
  • a rear housing 14 is coupled to the rear end of the rotor housing 12.
  • the rotor housing 12 includes a cylinder block 15 and a plurality of partitioning walls 16.
  • the cylinder block 15 includes a pair of block pieces 17, 18.
  • each partitioning wall 16 includes a pair of wall pieces 161, 162.
  • the space between the front housing 13 and one of the partitioning walls 16, the spaces between the adjoining partitioning walls 16, and the space between the rear housing 14 and the remaining partitioning wall 16 constitute pump chambers 39, 40, 41, 42, 43, respectively.
  • a pair rotary shafts 19, 20 are supported rotatably on the front housing 13 and the rear housing 14 through radial bearings 21, 21A, 22, 22A.
  • the rotary shafts 19, 20 are arranged in parallel to each other through the partitioning walls 16.
  • the rotary shaft 19 is integrally formed with a plurality of rotors 23, 24, 25, 26, 27.
  • the rotary shaft 20 is integrally formed with as many rotors 28, 29, 30, 31, 32.
  • the rotors 23 to 32 have the same shape and the same size as viewed along the axes 191, 201 of the rotary shafts 19, 20.
  • the rotors 23, 24, 25, 26, 27 have progressively smaller thicknesses in that order, and so do the rotors 28, 29, 30, 31, 32.
  • the rotors 23, 28 are in mesh with each other and are encased in the pump chamber 39.
  • the rotors 24, 29 are in mesh with each other and are encased in the pump chamber 40.
  • the rotors 25, 30 are in mesh with each other and are encased in the pump chamber 41.
  • the rotors 26, 31 are in mesh with each other and are encased in the pump chamber 42.
  • the rotors 27, 32 are in mesh with each other and are encased in the pump chamber 43.
  • a drive unit 33 is assembled on the rear housing 14.
  • the rotary shafts 19, 20 are projected into the drive unit 33 through the rear housing 14.
  • the ends of the projected portions of the rotary shafts 19, 20 are fixedly secured with gears 34, 35 in mesh with each other.
  • the rotary shaft 19 is rotated in the direction of arrow R1 in Figs. 3A, 3B, 3C by an electric motor M shown in Figs. 1 and 4.
  • the turning effort of the rotary shaft 19 is transmitted through gears 34, 35 to the rotary shaft 20, which in turn is rotated in the direction reverse to that of the rotary shaft 19, as indicated by arrow R2 in Figs. 3A, 3B, 3C.
  • the partitioning walls 16 are each formed with a path 163 therein. As shown in Fig. 3B, the partitioning walls 16 are each formed with an inlet 164 and an outlet 165 of the path 163.
  • the adjoining pump chambers 39, 40, 41, 42, 43 communicate with each other through the paths 163.
  • the block piece 18 is formed with a gas intake port 181 in such a manner as to communicate with the pump chamber 39.
  • the block piece 17 is formed with a gas exhaust port 171 in such a manner as to communicate with the pump chamber 43.
  • the gas that has been introduced from the gas intake port 181 into the pump chamber 39 is transferred to the adjoining pump chamber 40 from the inlet 164 of the partitioning wall 16 by way of the outlet 165 through the path 163 by the rotation of the rotors 23, 28.
  • the gas is transferred to the pump chambers 40, 41, 42, 43 which have progressively smaller volumes in that order.
  • the gas that has been transferred to the pump chamber 43 is discharged outside from a gas exhaust port 171.
  • the rotors 23 to 32 are gas transfer members for transferring the gas.
  • the multistage Roots pump 11 is accommodated in the case 36.
  • the case 36 has mounted therein a controller 37 and an inverter 38 for controlling the electric motor M.
  • a cooler 44 is mounted on the upper surface of the rotor housing 12, and another cooler 45 is mounted on the upper surface of the rear housing 14 and the drive unit 33.
  • Still another cooler 46 is mounted on the upper surface of the controller 37.
  • Yet another cooler 47 is mounted on the inverter 38, and a further cooler 48 is mounted on the peripheral surface of the electric motor M.
  • the cooler 46 for cooling the controller 37, the cooler 47 for cooling the inverter 38 and the cooler 48 for cooling the electric motor M are arranged midway of a main supply pipe 49 for supplying the coolant.
  • the cooler 45 for cooling the rear housing 14 and the drive unit 33 and the cooler 44 for cooling the rotor housing 12 are arranged midway of a subsidiary supply pipe 50 for supplying the coolant.
  • the electromagnetic three-way valve 51 is arranged at the diverging point of the main supply pipe 49 and the subsidiary supply pipe 50.
  • a convergence pipe 52 having the function of blocking the reverse flow is arranged at the converging point of the main supply pipe 49 and the subsidiary supply pipe 50.
  • the electromagnetic three-way valve 51 can be switched between the deenergized state (supply prohibit mode) in which the supply of the coolant to the subsidiary supply pipe 50 is prohibited, as shown in Fig. 5A, and the energized state (supply permit mode) in which the supply of the coolant to the subsidiary supply pipe 50 is permitted, as shown in Fig. 5B.
  • the main supply pipe 49 is supplied with the coolant from a coolant source not shown.
  • the coolant source sends the coolant at a predetermined temperature and at a predetermined rate (the amount supplied per unit time) to the main supply pipe 49.
  • the coolant sent to the main supply pipe 49 passes through the cooler 46, the cooler 47 and the cooler 48 in that order.
  • the electromagnetic three-way valve 51 As long as the electromagnetic three-way valve 51 is in supply prohibit mode (deenergized state), the coolant that has passed through the cooler 48 flows to the convergence pipe 52 through the main supply pipe 49. As long as the electromagnetic three-way valve 51 is in supply permit mode (energized state), on the other hand, the coolant that has passed through the cooler 48 flows to the coolers 45, 44 through the subsidiary supply pipe 50.
  • a temperature detector 53 is mounted on the surface of the rotor housing 12.
  • the temperature detector 53 detects the surface temperature of the rotor housing 12.
  • the temperature detection information obtained from the temperature detector 53 making up temperature detection means is sent to the controller 37.
  • the controller 37 controls the energization and deenergization of the electromagnetic three-way valve 51 based on the temperature detection information obtained from the temperature detector 53.
  • the controller 37 gives an instruction to energize the electromagnetic three-way valve 51.
  • the electromagnetic three-way valve 51 is energized.
  • the electromagnetic three-way valve 51 thus energized allows the coolant to flow to the subsidiary supply pipe 50 from the main supply pipe 49 while at the same time blocking the flow of the coolant to the convergence pipe 52 through the main supply pipe 49.
  • the temperature in the coolers 45, 44 decreases thereby to enhance the cooling operation of the coolers 45, 44.
  • the controller 37 gives an instruction to deenergize the electromagnetic three-way valve 51.
  • the electromagnetic three-way valve 51 is deenergized in response to the deenergizing instruction from the controller 37.
  • the deenergized electromagnetic three-way valve 51 prohibits the flow of the coolant from the main supply pipe 49 to the subsidiary supply pipe 50, while at the same time allowing the coolant to flow to the convergence pipe 52 through the main supply pipe 49.
  • the coolers 45, 44 increase in temperature, so that the cooling effect of the coolers 45, 44 decreases.
  • the surface temperature of the rotor housing 12 is converged to the target temperature T1.
  • the controller 37 constitutes switching control means for electrically switching the electromagnetic three-way valve 51 between the supply permit mode and the supply prohibit mode.
  • the electromagnetic three-way valve 51 in turn constitutes supply switching means arranged at the diverging point of the main supply pipe 49 and the subsidiary supply pipe 50.
  • the main supply pipe 49 and the coolers 46, 47, 48 make up a main supply path.
  • the subsidiary supply pipe 50 and the coolers 44, 45 make up a subsidiary supply path.
  • the first embodiment has the following effects.
  • an electromagnetic valve 54 is arranged on the subsidiary supply pipe 50.
  • the energization and deenergization of the electromagnetic valve 54 is controlled by a controller 37A.
  • the controller 37A gives an instruction to energize the electromagnetic valve 54.
  • the electromagnetic valve 54 is thus energized in response to the energizing instruction from the controller 37A.
  • the electromagnetic valve 54 thus energized allows the coolant to flow from the main supply pipe 49 to the subsidiary supply pipe 50.
  • the temperature in the coolers 45, 44 is decreased thereby to enhance the cooling operation of the coolers 45, 44.
  • the controller 37A gives an instruction to deenergize the electromagnetic valve 54.
  • the electromagnetic valve 54 is thus deenergized in response to the deenergizing instruction from the controller 37A.
  • the electromagnetic valve 54 thus deenergized prohibits the coolant from flowing from the main supply pipe 49 to the subsidiary supply pipe 50.
  • the temperature in the coolers 45, 44 increases, so that the cooling effect of the coolers 45, 44 is decreased.
  • the surface temperature of the rotor housing 12 is converged to the target temperature T1.
  • the controller 37A constitutes switching control means for electrically controlling the switching of the electromagnetic valve 54 between supply permit mode and supply prohibit mode.
  • the electromagnetic valve 54 constitutes supply switching means arranged midway of the subsidiary supply pipe 50.
  • the second embodiment also produces the same effect as the effects of the first embodiment described in (1-1) to (1-5). Also, the electromagnetic valve 54 is preferable as supply switching means.
  • a first electromagnetic valve 54 is arranged on the subsidiary supply pipe 50, and a second electromagnetic valve 55 is arranged on the main supply pipe 49 downstream of the diverging point of the main supply pipe 49 and the subsidiary supply pipe 50.
  • the energization and deenergization of the first electromagnetic valve 54 and the second electromagnetic valve 55 is controlled by a controller 37B.
  • a temperature detector 56 is mounted on the electric motor M. The temperature detector 56 detects the temperature of the electric motor M.
  • the controller 37B controls the energization and deenergization of the electromagnetic valves 54, 55 based on the temperature detection information obtained from the temperature detectors 53, 56.
  • the controller 37B gives an instruction to energize the first electromagnetic valve 54 and the second electromagnetic valve 55.
  • the first electromagnetic valve 54 and the second electromagnetic valve 55 are energized in response to the energize instruction from the controller 37B.
  • the first electromagnetic valve 54 thus energized allows the coolant to flow from the main supply pipe 49 to the subsidiary supply pipe 50, while the second electromagnetic valve 55 energized blocks the flow of the coolant to the convergence pipe 52 through the main supply pipe 49.
  • the temperature in the coolers 45, 44 decreases, thereby enhancing the cooling effect of the coolers 45, 44.
  • the controller 37B gives an instruction to deenergize the first electromagnetic valve 54 and the second electromagnetic valve 55.
  • the first electromagnetic valve 54 and the second electromagnetic valve 55 are deenergized in response to the deenergizing instruction from the controller 37B.
  • the first electromagnetic valve 54 thus deenergized prohibits the coolant from flowing from the main supply pipe 49 to the subsidiary supply pipe 50
  • the second electromagnetic valve 55 deenergized allows the coolant to flow to the convergence pipe 52 through the main supply pipe 49.
  • the temperature in the coolers 45, 44 increases, thereby reducing the cooling effect of the coolers 45, 44.
  • the controller 37B gives an instruction to energize the first electromagnetic valve 54 and to deenergize the second electromagnetic valve 55 at the same time.
  • the first electromagnetic valve 54 is energized in response to the energizing instruction from the controller 37B, while the second electromagnetic valve 55 is deenergized in response to the deenergizing instruction from the controller 37B.
  • the first electromagnetic valve 54 thus energized allows the coolant to flow from the main supply pipe 49 to the subsidiary supply pipe 50, while the second electromagnetic valve 55 thus deenergized allows the coolant to flow to the convergence pipe 52 through the main supply pipe 54.
  • the temperature in the coolers 45, 44 is decreased and the cooling effect of the coolers 45, 44 is enhanced.
  • both the electromagnetic valves 54, 55 are deenergized.
  • the surface temperature of the rotor housing 12 is converged to the target temperature T1.
  • the controller 37B constitutes switching control means for electrically controlling the switching operation of the electromagnetic valve 54 between supply permit mode and supply prohibit mode.
  • the first electromagnetic valve 54 and the second electromagnetic valve 55 constitute supply switching means.
  • the coolant supplied to the subsidiary supply pipe 50 is the one that has been passed through the electric motor M.
  • the temperature of the coolant that been passed through the electric motor M affects the cooling operation of the coolers 44, 45 for the cooling areas (the rotor housing 12 and the drive unit 33) cooled by the coolant supplied to the subsidiary supply pipe 50.
  • the control operation in which the amount of the coolant supplied to the subsidiary supply pipe 50 is divided into two stages in accordance with the temperature of the electric motor M located upstream of the subsidiary supply pipe 50 in the main supply pipe 49 improves the appropriateness of the cooling operation of the rotor housing 12 and the drive unit 33 cooled by the coolant supplied to the subsidiary supply pipe 50.
  • the present invention can also be embodied in the following manner:
  • the cooling apparatus is configured with a main supply path arranged to supply a coolant for cooling at least one of a plurality of cooling areas, a subsidiary supply path arranged to supply the coolant from the main supply path for cooling at least one of a plurality of the cooling areas, and supply switching means capable of switching between the supply permit mode in which the coolant is supplied to the subsidiary supply path and the supply prohibit mode in which the coolant is not supplied to the subsidiary supply path. Therefore, the invention exhibits the superior effect of being capable of properly cooling a plurality of cooling areas of a vacuum pump with a single coolant supply system.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressor (AREA)
EP01106165A 2000-03-27 2001-03-13 Kühlvorrichtung für eine Vakuumpumpe Withdrawn EP1138948A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000085889 2000-03-27
JP2000085889A JP2001271777A (ja) 2000-03-27 2000-03-27 真空ポンプにおける冷却装置

Publications (2)

Publication Number Publication Date
EP1138948A2 true EP1138948A2 (de) 2001-10-04
EP1138948A3 EP1138948A3 (de) 2002-07-03

Family

ID=18602144

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01106165A Withdrawn EP1138948A3 (de) 2000-03-27 2001-03-13 Kühlvorrichtung für eine Vakuumpumpe

Country Status (4)

Country Link
US (1) US20010024617A1 (de)
EP (1) EP1138948A3 (de)
JP (1) JP2001271777A (de)
KR (1) KR20010090710A (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7988435B2 (en) 2007-01-05 2011-08-02 Hitachi Industrial Equipment Systems Co., Ltd. Oilless screw compressor and compressed air cooling unit
CN102220980A (zh) * 2010-04-19 2011-10-19 株式会社荏原制作所 干式真空泵设备及冷却干式真空泵设备的方法
EP2071186A3 (de) * 2007-12-12 2014-09-03 Pfeiffer Vacuum GmbH Vakuumpumpe und Verfahren zum Betrieb
WO2018054868A1 (de) * 2016-09-21 2018-03-29 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH System für ein nutzfahrzeug umfassend einen schraubenkompressor sowie einen elektromotor mit gemeinsamer kühlung
BE1024644B1 (nl) * 2017-03-07 2018-05-14 Atlas Copco Airpower Naamloze Vennootschap Compressormodule voor het comprimeren van gas en compressor daarmee uitgerust
EP3372835A1 (de) * 2017-03-07 2018-09-12 ATLAS COPCO AIRPOWER, naamloze vennootschap Kompressormodul für gaskompression und damit ausgestatteter kompressor

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7155916B2 (en) * 2003-09-30 2007-01-02 General Motors Corporation Supply unit cooling
DE102009024336A1 (de) * 2009-06-09 2010-12-23 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
CN101922441B (zh) * 2010-08-26 2015-01-07 常州亿晶光电科技有限公司 分流式真空泵机组水冷却装置
CN102155409B (zh) * 2011-05-27 2013-05-22 南通金坤机械设备有限公司 一种带有油温控制系统的风冷式旋片真空泵及其油温控制方法
GB201701833D0 (en) * 2017-02-03 2017-03-22 Edwards Ltd Pump cooling systems

Citations (1)

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Publication number Priority date Publication date Assignee Title
JPH05118290A (ja) 1991-09-05 1993-05-14 Ebara Corp 多段真空ポンプの冷却装置

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Publication number Priority date Publication date Assignee Title
JPH0419385A (ja) * 1990-05-14 1992-01-23 Anlet Co Ltd 圧縮ガス流配管内蔵型まゆ型２軸多段式真空ポンプの冷却装置
US5366352A (en) * 1993-12-13 1994-11-22 Deblois Raymond L Thermostatic compressor suction inlet duct valve
ES2134580T3 (es) * 1995-02-06 1999-10-01 Carrier Corp Control logico-indefinido de la inyeccion de liquido para refrigerar el motor.
JP3831113B2 (ja) * 1998-03-31 2006-10-11 大晃機械工業株式会社 真空ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05118290A (ja) 1991-09-05 1993-05-14 Ebara Corp 多段真空ポンプの冷却装置

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7988435B2 (en) 2007-01-05 2011-08-02 Hitachi Industrial Equipment Systems Co., Ltd. Oilless screw compressor and compressed air cooling unit
BE1018905A5 (fr) * 2007-01-05 2011-11-08 Hitachi Ind Equipment Sys Compresseur a vis sans huile.
US9057374B2 (en) 2007-01-05 2015-06-16 Hitachi Industrial Equipment Systems Co., Ltd. Oilless screw compressor and compressed air cooling unit
EP2071186A3 (de) * 2007-12-12 2014-09-03 Pfeiffer Vacuum GmbH Vakuumpumpe und Verfahren zum Betrieb
CN102220980A (zh) * 2010-04-19 2011-10-19 株式会社荏原制作所 干式真空泵设备及冷却干式真空泵设备的方法
EP2378122A3 (de) * 2010-04-19 2014-02-19 Ebara Corporation Trockenvakuumpumpenvorrichtung und Kühlverfahren dafür
CN102220980B (zh) * 2010-04-19 2015-08-26 株式会社荏原制作所 干式真空泵设备及冷却干式真空泵设备的方法
WO2018054868A1 (de) * 2016-09-21 2018-03-29 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH System für ein nutzfahrzeug umfassend einen schraubenkompressor sowie einen elektromotor mit gemeinsamer kühlung
BE1024644B1 (nl) * 2017-03-07 2018-05-14 Atlas Copco Airpower Naamloze Vennootschap Compressormodule voor het comprimeren van gas en compressor daarmee uitgerust
EP3372835A1 (de) * 2017-03-07 2018-09-12 ATLAS COPCO AIRPOWER, naamloze vennootschap Kompressormodul für gaskompression und damit ausgestatteter kompressor
EP3628868A1 (de) * 2017-03-07 2020-04-01 ATLAS COPCO AIRPOWER, naamloze vennootschap Kompressormodul zum verdichten von gas und damit ausgestatteter verdichter
US10704567B2 (en) 2017-03-07 2020-07-07 Atlas Copco Airpower, Naamloze Vennootschap Compressor module for compressing gas and compressor equipped therewith

Also Published As

Publication number Publication date
KR20010090710A (ko) 2001-10-19
EP1138948A3 (de) 2002-07-03
JP2001271777A (ja) 2001-10-05
US20010024617A1 (en) 2001-09-27

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